Clamp

Abstract

The embodiment of the utility model provides a clamp. The clamp is used for clamping a workpiece in semiconductor processing equipment. The clamp comprises a main body structure; the clamping structure comprises a first clamping part and a second clamping part; wherein two opposite ends of the main body structure are respectively connected with a first end of the first clamping part and a first end of the second clamping part; the second end of the first clamping part is used for clamping the first side of the workpiece, the second end of the second clamping part is used for clamping the second side of the workpiece, and the second side of the workpiece and the first side of the workpiece are opposite in the radial direction of the workpiece; one end of the pressing handle is connected to the joint of the first end of the first clamping part and the main body structure; the telescopic spring is located between the main body structure and the pressing handle and connected with the pressing handle and the main body structure; and under the condition that the pressing handle is pressed, the pressing handle drives the first clamping part and the workpiece to move upwards.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to the technical field of semiconductor processing equipment, and particularly to a fixture. Background Art

[0002] Semiconductor processing equipment usually has a workpiece for cooperating with a semiconductor device (e.g., a wafer) for processing. And after the semiconductor processing equipment finishes processing the semiconductor device, the workpiece can be taken out of the semiconductor processing equipment for cleaning. Usually, an operator can manually take out the workpiece from the semiconductor processing equipment after the semiconductor device is processed. However, during the process of taking out the workpiece, the workpiece may be knocked and broken. Summary of the Utility Model

[0003] In view of this, embodiments of the present disclosure provide a fixture.

[0004] To achieve the above object, the technical solution of the present disclosure is realized as follows:

[0005] Embodiments of the present disclosure provide a fixture, which is used to clamp a workpiece in a semiconductor processing equipment; the fixture includes:

[0006] A main body structure;

[0007] A clamping structure, the clamping structure is located on a first side of the main body structure, and the clamping structure includes a first clamping portion and a second clamping portion; wherein, opposite ends of the main body structure are respectively connected to a first end of the first clamping portion and a first end of the second clamping portion; a second end of the first clamping portion is used to clamp a first side of the workpiece, and a second end of the second clamping portion is used to clamp a second side of the workpiece, and the second side of the workpiece and the first side of the workpiece are opposite along the radial direction of the workpiece;

[0008] A pressing handle, the pressing handle is located on a second side of the main body structure; wherein, one end of the pressing handle is connected to a connection position between the first end of the first clamping portion and the main body structure; the second side of the main body structure and the first side of the main body structure are opposite;

[0009] A telescopic spring, the telescopic spring is located between the main body structure and the pressing handle and is respectively connected to the pressing handle and the main body structure; wherein, when the pressing handle is pressed, the pressing handle drives the first clamping portion and the workpiece to move upward.

[0010] In some embodiments, the length of the main body structure is adjustable.

[0011] In some embodiments, the main body structure includes a first track and a second track. The first track is respectively connected to the first clamping portion and the second track, and the second track is respectively connected to the first track and the second clamping portion. Among them,

[0012] The first track is a hollow structure. A part of the second track close to the first track has a slider, and the slider is nested inside the first track so that the second track slides relative to the first track.

[0013] Or,

[0014] The second track is a hollow structure. A part of the first track close to the second track has a slider, and the slider is nested inside the second track so that the first track slides relative to the second track.

[0015] In some embodiments, the fixture further includes:

[0016] A first screw for fixing the pressing handle to the first clamping portion and the main body structure.

[0017] A second screw for fixing the slider.

[0018] In some embodiments, the pressing handle and the first clamping portion are integrally formed.

[0019] In some embodiments, the first clamping portion includes a first connecting rod and a first clamp. Among them, opposite ends of the first connecting rod are respectively connected to the main body structure and the first clamp, and the first clamp is used to clamp the first side of the workpiece. The second clamping portion includes a second connecting rod and a second clamp. Among them, opposite ends of the second connecting rod are respectively connected to the main body structure and the second clamp, and the second clamp is used to clamp the second side of the workpiece.

[0020] In some embodiments, the first clamp includes a first gasket located on a surface of the first clamp relatively close to the first side of the workpiece. And / or, the second clamp includes a second gasket located on a surface of the second clamp relatively close to the second side of the workpiece.

[0021] In some embodiments, the first gasket is elastic and the second gasket is elastic.

[0022] In some embodiments, the first connecting rod and the first clamp are integrally formed, and the second connecting rod and the second clamp are integrally formed.

[0023] In some embodiments, surfaces of the first clamp and the second clamp in contact with the workpiece are both arc surfaces.

[0024] An embodiment of the present disclosure provides a fixture, which is used to clamp a workpiece in a semiconductor processing device; the fixture includes: a main body structure; a clamping structure located on a first side of the main body structure, the clamping structure including a first clamping portion and a second clamping portion; wherein, opposite ends of the main body structure are respectively connected to a first end of the first clamping portion and a first end of the second clamping portion; a second end of the first clamping portion is used to clamp a first side of the workpiece, and a second end of the second clamping portion is used to clamp a second side of the workpiece, and the second side of the workpiece and the first side of the workpiece are opposite along the radial direction of the workpiece; a pressing handle located on a second side of the main body structure; wherein, one end of the pressing handle is connected to a connection point between the first end of the first clamping portion and the main body structure; the second side of the main body structure and the first side of the main body structure are opposite; a telescopic spring located between the main body structure and the pressing handle and connected to the pressing handle and the main body structure respectively; wherein, when the pressing handle is pressed, the pressing handle drives the first clamping portion and the workpiece to move upward. In the first aspect, the fixture can pick and place the workpiece stably and efficiently, avoiding the workpiece from being bumped, thereby providing a more stable process environment in the cavity of the semiconductor processing device and reducing the cost waste caused by the workpiece breaking. In the second aspect, using the fixture to clamp the workpiece can avoid the debris generated when the workpiece breaks from scratching the human hand and endangering personal health. In the third aspect, using the fixture can reduce the generation of debris of the workpiece during the clamping process, and thus can effectively avoid the debris from falling on the surface of the semiconductor device. During the subsequent deposition process, the reaction gas can better contact the surface of the semiconductor device, reducing the defects of the semiconductor device. Description of the Drawings

[0025] Figure 1 Schematic diagram of the structure of a semiconductor processing device in an example Figure 1 。

[0026] Figure 2 Schematic diagram of the structure of a semiconductor processing device in an example Figure 2 。

[0027] Figure 3 Schematic diagram of the structure of the fixture provided by the embodiment of the present disclosure.

[0028] Figure 4 Partial enlarged schematic diagram of the structure of the fixture provided by the embodiment of the present disclosure. Detailed Embodiments

[0029] Next, in combination with the embodiments of the present disclosure and the accompanying drawings, the technical solutions in the embodiments of the present disclosure will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present disclosure without creative efforts belong to the scope of protection of the present disclosure.

[0030] In the following description, numerous specific details are given to provide a more thorough understanding of the present disclosure. However, it is obvious to those skilled in the art that the present disclosure may be implemented without one or more of these details. In other examples, in order to avoid confusion with the present disclosure, some well-known technical features are not described; that is, not all features of the actual embodiments are described here, and the well-known functions and structures are not described in detail.

[0031] In the drawings, for clarity, the dimensions of layers, regions, elements, and their relative dimensions may be exaggerated. The same reference numerals denote the same elements throughout.

[0032] It should be understood that when an element or layer is referred to as "on", "adjacent to", "connected to", or "coupled to" another element or layer, it can be directly on, adjacent to, connected to, or coupled to the other element or layer, or there may be intervening elements or layers. In contrast, when an element is referred to as "directly on", "directly adjacent to", "directly connected to", or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, or part from another element, component, region, layer, or part. Therefore, without departing from the teachings of the present disclosure, the first element, component, region, layer, or part discussed below may be referred to as the second element, component, region, layer, or part. And when discussing the second element, component, region, layer, or part, it does not indicate that the present disclosure necessarily has a first element, component, region, layer, or part.

[0033] Spatial relationship terms such as "under", "below", "lower", "beneath", "above", "upper", etc. may be used herein for convenience of description to describe the relationship of one element or feature shown in the figures with other elements or features. It should be understood that, in addition to the orientations shown in the figures, spatial relationship terms are also intended to include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is flipped, then an element or feature described as "under other elements" or "beneath them" or "under it" will be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "beneath" can include both the upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or other orientations) and the spatial descriptors used herein are to be interpreted accordingly.

[0034] The purpose of the terms used herein is only to describe specific embodiments and is not a limitation of the present disclosure. As used herein, the singular forms "a", "an" and "the" are also intended to include the plural forms unless the context clearly dictates otherwise. It should also be understood that the terms "comprising" and / or "including", when used in this specification, specify the presence of the stated features, integers, steps, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups. As used herein, the term "and / or" includes any and all combinations of the related listed items.

[0035] To thoroughly understand the present disclosure, detailed steps and detailed structures will be presented in the following description to illustrate the technical solutions of the present disclosure. The preferred embodiments of the present disclosure are described in detail below. However, in addition to these detailed descriptions, the present disclosure may have other embodiments.

[0036] Reference Figures 1 to 2 , Figure 1 is a schematic structural diagram of a semiconductor processing device in an example Figure 1 . Figure 2 is a schematic structural diagram of a semiconductor processing device in an example Figure 2 .

[0037] As Figure 1 and Figure 2 shown, the semiconductor processing device includes a Chemical Vapor Deposition (CVD) device. The CVD device can provide reaction gases for deposition and act the gases on the surface of the semiconductor device, so as to form a thin film coating of metal or compound on the surface of the semiconductor device, thereby enabling the semiconductor device to meet the special performance requirements such as wear resistance, oxidation resistance, corrosion resistance, and specific electrical, optical and tribological properties.

[0038] The CVD equipment includes a workpiece for cooperating with semiconductor devices for processing. Exemplarily, the workpiece can be a shielding member 101 made of ceramic material. Here, the CVD equipment may include multiple shielding members, for example, 3 shielding members. Specifically, the 3 shielding members include a first shielding member 101a, a second shielding member 101b, and a third shielding member 101c arranged from top to bottom, as Figure 2 shown. The shielding member 101 can be located in the deposition chamber of the CVD equipment and surround the semiconductor device 102. Moreover, the shielding member 101 can cover the edge position of the semiconductor device 102. In this way, the shielding member 101 can be used to prevent the reaction gas from depositing on the edge and side of the semiconductor device 102, and at the same time enable the cavity of the semiconductor processing equipment to resist high-temperature corrosion, thereby achieving the protection of the cavity. After the CVD process is completed, the shielding member 101 can be taken out (i.e., taken out in the direction of the arrow in Figure 1 ) and cleaned to remove the metal or compound film deposited on the surface of the shielding member 101. Here, since the CVD equipment needs to provide a high-temperature environment for the semiconductor device 102 during the process of using the CVD equipment to process the semiconductor device 102. Therefore, after the processing is completed, it is also necessary to wait for the temperature in the CVD equipment to drop to a certain temperature before the shielding member 101 can be taken out with high-temperature gloves or bare hands to perform operations on the cavity.

[0039] However, each time an operation is performed on the cavity, due to thermal expansion and contraction of the shielding member 101 and the influence of the reaction gas flow in the cavity, a slight displacement will occur, which will cause the shielding member 101 to get stuck when taken out from the semiconductor processing equipment. And since most of the shielding members 101 have large size specifications, it is also easy to have problems such as slipping off by hand and accidental bumping during the taking-out process. In addition, since the shielding member 101 is a fragile device and relatively vulnerable, it is easy to break when being bumped. When the shielding member 101 breaks and generates fragments, if the shielding member is directly taken out by hand, it is very easy to be cut by the fragments remaining on the edge of the shielding member 101, thus causing harm to the human body and having a relatively large potential hazard. And the dropped debris of the shielding member 101 may adhere to the surface of the semiconductor device 102, resulting in that during the subsequent CVD process, it is difficult for the reaction gas to come into good contact with the surface of the semiconductor device 102, causing defects in the semiconductor device 102. In addition, since the shielding member 101 is expensive, if it is damaged due to improper operation when clamping the shielding member 101, it will also cause waste of cost.

[0040] Based on this, the embodiments of the present disclosure provide a fixture for clamping a workpiece in a semiconductor processing equipment.

[0041] An embodiment of the present disclosure provides a fixture for clamping a workpiece in a semiconductor processing apparatus. The fixture includes: a main structure; a clamping structure located on a first side of the main structure, the clamping structure including a first clamping portion and a second clamping portion; wherein opposite ends of the main structure are respectively connected to a first end of the first clamping portion and a first end of the second clamping portion; a second end of the first clamping portion is configured to clamp a first side of the workpiece, and a second end of the second clamping portion is configured to clamp a second side of the workpiece, and the second side and the first side of the workpiece are opposite to each other in a radial direction of the workpiece; a pressing handle located on a second side of the main structure; wherein one end of the pressing handle is connected to a connection between the first end of the first clamping portion and the main structure; the second side of the main structure is opposite to the first side of the main structure; a telescopic spring located between the main structure and the pressing handle and connected to the pressing handle and the main structure respectively; wherein, when the pressing handle is pressed, the pressing handle drives the first clamping portion and the workpiece to move upward.

[0042] In an embodiment of the present disclosure, the semiconductor processing apparatus may be any apparatus required for performing semiconductor processes. Exemplarily, the semiconductor processing apparatus includes a CVD apparatus, a Physical Vapor Deposition (PVD) apparatus, and an etching apparatus.

[0043] In an embodiment of the present disclosure, the workpiece may be a component that cooperates with a semiconductor device in a semiconductor processing apparatus. In some examples, the workpiece may be a shielding member, which is usually located in a processing chamber (e.g., a deposition chamber or an etching chamber) of the semiconductor processing apparatus, and the shielding member is used to shield the inner wall of the processing chamber to prevent reaction gases from contaminating its inner wall. Of course, the workpiece may also be other workpieces in the semiconductor processing apparatus known in the art, and the present disclosure has no special limitation thereon.

[0044] Reference Figure 3 , Figure 3 FIG. 300 is a schematic structural diagram of a fixture 300 provided by an embodiment of the present disclosure, and the fixture 300 is used to clamp a workpiece 315. It should be emphasized that the workpiece 315 is not included in the fixture 300. Figure 3 The workpiece 315 (shown by a dashed line) in FIG. 300 is only for illustration to facilitate understanding of the positional relationship between the fixture 300 and the workpiece 315 when the fixture 300 clamps the workpiece 315.

[0045] As Figure 3As shown, the fixture 300 includes a main structure 301, a clamping structure 302, a pressing handle 303, and a telescopic spring 304. Among them, the main structure 301 has opposite ends, namely, the first main structure end 305 and the second main structure end 306. The main structure 301 also has opposite sides, namely, the first side 307 and the second side 308. The clamping structure 302 includes a first clamping portion 309 and a second clamping portion 310. Among them, the first clamping portion 309 has opposite first end 311 and second end 312, and the second clamping portion 310 has opposite first end 313 and second end 314. The first clamping portion 309 and the second clamping portion 310 are respectively connected to the opposite ends of the main structure 301. More specifically, the first end 311 of the first clamping portion 309 is connected to the first main structure end 305 of the main structure 301, and the first end 313 of the second clamping portion 310 is connected to the second main structure end 306 of the main structure 301. And, both the first clamping portion 309 and the second clamping portion 310 are located on the first side 307 of the main structure 301. The second end 312 of the first clamping portion 309 can be used to clamp the first side 316 of the workpiece 315, and the second end 314 of the second clamping portion 310 is used to clamp the second side 317 of the workpiece 315. Here, the second side 317 of the workpiece 315 and the first side 316 of the workpiece 315 are two opposite sides in the radial direction of the workpiece 315.

[0046] In some embodiments, the first clamping portion includes a first connecting rod and a first clamp; wherein, opposite ends of the first connecting rod are respectively connected to the main structure and the first clamp, and the first clamp is used to clamp the first side of the workpiece; the second clamping portion includes a second connecting rod and a second clamp; wherein, opposite ends of the second connecting rod are respectively connected to the main structure and the second clamp, and the second clamp is used to clamp the second side of the workpiece.

[0047] Referring Figure 3 , the first clamping portion 309 includes a first connecting rod 318 and a first clamp 319, and the second clamping portion 310 includes a second connecting rod 320 and a second clamp 321. Among them, one end of the first connecting rod 318 is connected to the first clamp 319, and the other end of the first connecting rod 318 is connected to the first main structure end 305 of the main structure 301. One end of the second connecting rod 320 is connected to the second clamp 321, and the other end of the second connecting rod 320 is connected to the second main structure end 306 of the main structure 301. The first clamp 319 is used to clamp the first side 316 of the workpiece 315, and the second clamp 321 is used to clamp the second side 317 of the workpiece 315. Here, the first connecting rod 318 and the second connecting rod 320 can be metal rods, and the first clamp 319 and the second clamp 321 can be metal sheets with a certain thickness.

[0048] In the embodiments of the present disclosure, the materials of the first connecting rod 318, the second connecting rod 320, the first clamp 319, and the second clamp 321 include stainless steel. In this way, it can be ensured that the first clamping portion 309 and the second clamping portion 310 have sufficient strength and durability.

[0049] In some embodiments, the first connecting rod 318 and the first clamp 319 are integrally formed, and the second connecting rod 320 and the second clamp 321 are integrally formed.

[0050] In other embodiments, the first connecting rod 318 and the first clamp 319 are connected by welding, and the second connecting rod 320 and the second clamp 321 are connected by welding.

[0051] In some embodiments, the first clamp 319 includes a first gasket 322, and the first gasket 322 is located on one side of the first clamp 319 relatively close to the first side 316 of the workpiece 315; and / or, the second clamp 321 includes a second gasket 323, and the second gasket 323 is located on one side of the second clamp 321 relatively close to the second side 317 of the workpiece 315.

[0052] In one example, the first clamp 319 includes a first gasket 322, and the first gasket 322 is located on one side of the first clamp 319 relatively close to the first side 316 of the workpiece 315. In this way, the first gasket 322 can increase the friction between the first clamp 319 and the workpiece 315, which is beneficial to the first clamp 319 clamping the workpiece 315 and can prevent the fixture 300 from damaging the workpiece 315 when clamping the workpiece 315. In this example, the second clamp 321 may not include a gasket.

[0053] In another example, the second clamp 321 includes a second gasket 323, and the second gasket 323 is located on one side of the second clamp 321 relatively close to the second side 317 of the workpiece 315. In this way, the second gasket 323 can increase the friction between the second clamp 321 and the workpiece 315, which is beneficial to the second clamp 321 clamping the workpiece 315 and can prevent the fixture 300 from damaging the workpiece 315 when clamping the workpiece 315. In this example, the first clamp 319 may not include a gasket.

[0054] In yet another example, the first clamp 319 includes a first gasket 322, and the first gasket 322 is located on one side of the first clamp 319 relatively closer to the first side 316 of the workpiece 315. The second clamp 321 includes a second gasket 323, and the second gasket 323 is located on one side of the second clamp 321 relatively closer to the second side 317 of the workpiece 315. In this way, the first gasket 322 can increase the frictional force between the first clamp 319 and the workpiece 315, thereby facilitating the first clamp 319 to hold the workpiece 315. The second gasket 323 can increase the frictional force between the second clamp 321 and the workpiece 315, thereby facilitating the second clamp 321 to hold the workpiece 315. At the same time, the first gasket 322 and the second gasket 323 can also prevent the fixture 300 from damaging the workpiece 315 when clamping the workpiece 315. In this example, both the first clamp 319 and the second clamp 321 include gaskets.

[0055] In some embodiments, the first gasket 322 is elastic, and the second gasket 323 is elastic. In the embodiments of the present disclosure, the materials of the first gasket 322 and the second gasket 323 include rubber, cork, polytetrafluoroethylene, etc.

[0056] In some embodiments, the surfaces of the first clamp 319 and the second clamp 321 in contact with the workpiece 315 are both arc surfaces. It should be noted that the surfaces of the workpiece 315 in contact with the first clamp 319 and the second clamp 321 are the inner side surfaces of the workpiece 315.

[0057] In some embodiments, the inner side surface of the workpiece 315 is a concave arc surface, and the surfaces of the first clamp 319 and the second clamp 321 in contact with the workpiece 315 are arc surfaces protruding towards the workpiece 315. In this way, it can be ensured that the fit between the surfaces of the first clamp 319 and the second clamp 321 in contact with the workpiece 315 is better, and the workpiece 315 can be prevented from falling off during clamping.

[0058] In some other embodiments, the inner side surface of the workpiece 315 is a convex arc surface, and the surfaces of the first clamp 319 and the second clamp 321 in contact with the workpiece 315 are arc surfaces concave towards the workpiece 315. In this way, it can be ensured that the fit between the surfaces of the first clamp 319 and the second clamp 321 in contact with the workpiece 315 is better, and the workpiece 315 can be prevented from falling off during clamping.

[0059] It can be understood that any solution that satisfies the adaptation between the inner side surface of the workpiece 315 and the surfaces of the clamp (the first clamp 319 and / or the second clamp 321) in contact with the workpiece 315 falls within the protection scope of the present disclosure.

[0060] In the embodiments of the present disclosure, the pressing handle 303 is located on the second side 308 of the main body structure 301, and one end of the pressing handle 303 is connected to the connection point between the first end 311 of the first clamping portion 309 and the first main body structure end 305 of the main body structure 301. There is an acute angle less than 90 degrees between the pressing handle 303 and the main body structure 301.

[0061] In the embodiments of the present disclosure, the material of the pressing handle 303 includes stainless steel.

[0062] In some embodiments, the pressing handle 303 and the first clamping portion 309 are integrally formed.

[0063] In other embodiments, the pressing handle 303 and the first clamping portion 309 are connected together by welding.

[0064] In other embodiments, the pressing handle 303 and the first clamping portion 309 can be separate components.

[0065] In the embodiments of the present disclosure, the telescopic spring 304 is located between the main body structure 301 and the pressing handle 303, and the telescopic spring 304 can be connected to the pressing handle 303 and the main body structure 301 respectively. And, when pressing the pressing handle 303, the telescopic spring 304 can be compressed, so that the pressing handle 303 can drive the first clamping portion 309 and the workpiece 315 to move upward. Specifically, when pressing the pressing handle 303, using the lever principle, the pressing handle 303 can drive the first clamping portion 309 and the part of the workpiece 315 clamped by the first clamping portion 309 to move upward, so as to lift the first side 316 of the workpiece 315 upward.

[0066] In some embodiments, the fixture 300 further includes: a first screw 324, and the first screw 324 is used to fix the pressing handle 303, the first clamping portion 309 and the main body structure 301.

[0067] In the embodiments of the present disclosure, the first screw 324 can be located at the connection point between the main body structure 301 and the first clamping portion 309, and is used to connect the main body structure 301, the first clamping portion 309 and the pressing handle 303 together.

[0068] In some embodiments, the length of the main body structure 301 is adjustable. Thus, the fixture 300 can be applicable to workpieces with different inner diameter sizes.

[0069] In some embodiments, the main body structure includes a first track and a second track. The first track is respectively connected to the first clamping portion and the second track, and the second track is respectively connected to the first track and the second clamping portion. Wherein, the first track is a hollow structure, and a part of the second track close to the first track has a slider, and the slider is nested inside the first track to enable the second track to slide relative to the first track; alternatively, the second track is a hollow structure, and a part of the first track close to the second track has a slider, and the slider is nested inside the second track to enable the first track to slide relative to the second track.

[0070] As Figure 3 shown, the main body structure 301 includes a first track 326 and a second track 327. Wherein, the first track 326 is respectively connected to the first clamping portion 309 and the second track 327, and the second track 327 is respectively connected to the first track 326 and the second clamping portion 310. The telescopic spring 304 is located between the first track 326 and the pressing handle 303, and the telescopic spring 304 can be respectively connected to the pressing handle 303 and the first track 326.

[0071] In the embodiments of the present disclosure, the second track 327 and the second clamping portion 310 can be connected by welding.

[0072] Reference Figure 4 , Figure 4 is a partially enlarged structural schematic diagram of the fixture provided by the embodiments of the present disclosure.

[0073] As Figure 4 shown, the second track 327 is a hollow structure, and a part of the first track 326 close to the second track 327 has a slider ( Figure 4 not shown in the figure), and the slider is nested inside the second track 327. Here, by providing a slider on the first track 326, the first track 326 can slide relative to the second track 327, so as to realize the adjustment of the length of the main body structure 301. It can be understood that Figure 4 the case where the second track 327 is a hollow structure is taken as an example for illustration. In other embodiments, the first track can be a hollow structure, and a part of the second track close to the first track has a slider, and the slider is nested inside the first track to enable the second track to slide relative to the first track.

[0074] In some embodiments, the fixture 300 further includes: a second screw 325, and the second screw 325 is used to fix the slider.

[0075] In the embodiments of the present disclosure, the position of the second screw 325 on the main body structure 301 can be non-fixed, and the second screw 325 can fasten the first track 326 and the second track 327 together. In Figure 4In the illustrated example, by setting a slider on the first track 326, the first track 326 can slide relative to the second track 327. When the slider slides to a certain predetermined position, the slider can be fixed by tightening the second screw 325. Here, the predetermined position can refer to the specific position of the slider when the length of the main body structure 301 is adjusted to match the inner diameter of the workpiece 315. In practical applications, the predetermined position can be adjusted according to the radial dimension of the workpiece 315.

[0076] As can be seen from the above, the fixture 300 provided by the embodiments of the present disclosure is used to clamp the workpiece 315 in the semiconductor processing equipment. Hereinafter, taking the second track 327 as a hollow structure and the first track 326 being slidable relative to the second track 327 as an example, and in combination with Figure 3 and Figure 4 the specific steps of the fixture 300 for clamping the workpiece 315 will be introduced. The specific steps for the fixture to clamp the workpiece include:

[0077] Step 1: First, place the fixture 300 above the workpiece 315 and adjust the first clamping portion 309 so that the first clamping portion 309 is stuck on the inner surface of the first side 316 of the workpiece 315. Then, adjust the length of the main body structure 301, that is, adjust the relative position of the slider and the second track 327, so that the second clamping portion 310 is adjusted to be able to clamp the inner surface of the second side 317 of the workpiece 315. At this time, both the first clamping portion 309 and the second clamping portion 310 are in appropriate positions, so that the fixture 300 can match the size of the workpiece 315. Then, the second screw 325 can be tightened to fix the slider. It should be noted that the first screw 324 can be tightened before the fixture 300 clamps the workpiece 315.

[0078] Step 2: Check whether the states of the first gasket 322 and the second gasket 323 are good, and check whether the first screw 324 and the second screw 325 are tightened.

[0079] Step 3: If the first gasket 322 and the second gasket 323 are in good states and both the first screw 324 and the second screw 325 are tightened, then push the entire fixture 300 downward. That is, push the first clamping portion 309 and the second clamping portion 310 of the fixture 300 in the direction close to the workpiece 315, so as to increase the area of the contact surface between the first clamping portion 309 and the second clamping portion 310 and the inner surface of the workpiece 315. At this time, the first gasket 322 and the second gasket 323 are fully attached to the workpiece 315, and the first gasket 322 and the second gasket 323 can provide sufficient friction and buffering effects, so that the fixture 300 can tightly clamp the workpiece 315 and provide uniform and appropriate clamping or supporting forces for the workpiece 315.

[0080] Step 4: Hold the pressing handle 303 tightly with one hand and press the pressing handle 303 downward to compress the telescopic spring 304. Using the lever principle, lift the first side 316 of the workpiece 315.

[0081] Step 5: Gently support the bottom of the workpiece 315 with the other hand and horizontally lift and remove the workpiece 315. Here, by using the fixture 300 to remove the workpiece 315, the debris generated due to knocking during the removal of the workpiece 315 can be reduced. Therefore, the situation where the debris scratches the human hand during the removal of the workpiece 315 can be effectively reduced. Moreover, since the fixture 300 can reduce the generation of debris of the workpiece 315 during the clamping process, the debris falling on the surface of the semiconductor device can be effectively avoided. During the subsequent CVD process, the reaction gas can better contact the surface of the semiconductor device, reducing the defects of the semiconductor device.

[0082] Step 6: Release the pressing handle 303 and loosen the second screw 325 to separate the first clamping portion 309 and the second clamping portion 310 from the inner side of the workpiece 315, and then the workpiece 315 can be removed.

[0083] The embodiment of the present disclosure provides a fixture for clamping a workpiece in a semiconductor processing equipment. The fixture includes: a main body structure; a clamping structure located on the first side of the main body structure, and the clamping structure includes a first clamping portion and a second clamping portion; wherein, the opposite ends of the main body structure are respectively connected to the first end of the first clamping portion and the first end of the second clamping portion; the second end of the first clamping portion is used to clamp the first side of the workpiece, and the second end of the second clamping portion is used to clamp the second side of the workpiece, and the second side and the first side of the workpiece are opposite along the radial direction of the workpiece; a pressing handle located on the second side of the main body structure; wherein, one end of the pressing handle is connected to the connection between the first end of the first clamping portion and the main body structure; the second side of the main body structure is opposite to the first side of the main body structure; a telescopic spring located between the main body structure and the pressing handle and connected to the pressing handle and the main body structure respectively; wherein, when pressing the pressing handle, the pressing handle drives the first clamping portion and the workpiece to move upward. In the first aspect, the fixture can stably and efficiently pick and place the workpiece, avoiding knocking of the workpiece, thereby providing a more stable process environment in the cavity of the semiconductor processing equipment and reducing the cost waste caused by workpiece breakage; in the second aspect, using the fixture to clamp the workpiece can avoid the debris generated when the workpiece breaks from scratching the human hand and endangering human health; in the third aspect, using the fixture can reduce the generation of debris of the workpiece during the clamping process, and thus can effectively avoid the debris falling on the surface of the semiconductor device. During the subsequent deposition process, the reaction gas can better contact the surface of the semiconductor device, reducing the defects of the semiconductor device.

[0084] It should be understood that the "one embodiment" or "an embodiment" mentioned throughout the specification means that the specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present disclosure. Therefore, the "in one embodiment" or "in an embodiment" that appears throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics may be combined in one or more embodiments in any suitable manner. It should be understood that in various embodiments of the present disclosure, the magnitude of the serial numbers of the above processes does not mean the sequence of execution. The execution sequence of each process should be determined by its function and internal logic, and should not constitute any limitation to the implementation process of the embodiments of the present disclosure. The serial numbers of the embodiments of the present disclosure above are only for description and do not represent the advantages or disadvantages of the embodiments.

[0085] The above is only the preferred embodiment of the present disclosure, and does not limit the patent scope of the present disclosure. Any equivalent structural transformation made by using the content of the specification and drawings of the present disclosure under the concept of the present disclosure, or directly / indirectly applied in other related technical fields, is included in the patent protection scope of the present disclosure.

Claims

1. A fixture, characterized in that, The fixture is used to clamp a workpiece in a semiconductor processing device; the fixture includes: A main structure; A clamping structure, the clamping structure is located on a first side of the main structure, the clamping structure includes a first clamping portion and a second clamping portion; wherein, opposite ends of the main structure are respectively connected to a first end of the first clamping portion and a first end of the second clamping portion; a second end of the first clamping portion is used to clamp a first side of the workpiece, a second end of the second clamping portion is used to clamp a second side of the workpiece, and the second side of the workpiece and the first side of the workpiece are opposite along the radial direction of the workpiece; A pressing handle, the pressing handle is located on a second side of the main structure; wherein, one end of the pressing handle is connected to a connection point between the first end of the first clamping portion and the main structure; the second side of the main structure and the first side of the main structure are opposite; A telescopic spring, the telescopic spring is located between the main structure and the pressing handle and is respectively connected to the pressing handle and the main structure; wherein, when the pressing handle is pressed, the pressing handle drives the first clamping portion and the workpiece to move upward.

2. The fixture according to claim 1, characterized in that, The length of the main structure is adjustable.

3. The fixture according to claim 2, wherein The main structure includes a first track and a second track, the first track is respectively connected to the first clamping portion and the second track, and the second track is respectively connected to the first track and the second clamping portion; wherein, The first track is a hollow structure, a portion of the second track close to the first track has a slider, and the slider is nested inside the first track so that the second track slides relative to the first track; Or, The second track is a hollow structure, a portion of the first track close to the second track has a slider, and the slider is nested inside the second track so that the first track slides relative to the second track.

4. The fixture according to claim 3, wherein The fixture further includes: A first screw, the first screw is used to fix the pressing handle to the first clamping portion and the main structure; A second screw, the second screw is used to fix the slider.

5. The jig according to claim 1 or 4, characterized in that, The pressing handle and the first clamping portion are integrally formed.

6. The fixture according to claim 1, wherein The first clamping portion includes a first connecting rod and a first clamp; wherein, opposite ends of the first connecting rod are respectively connected to the main structure and the first clamp, and the first clamp is used to clamp a first side of the workpiece; The second clamping portion includes a second connecting rod and a second clamp; wherein, opposite ends of the second connecting rod are respectively connected to the main structure and the second clamp, and the second clamp is used to clamp a second side of the workpiece.

7. The fixture according to claim 6, wherein The first clamp includes a first gasket, and the first gasket is located on a surface of the first clamp relatively close to the first side of the workpiece; And / or, The second clamp includes a second gasket, and the second gasket is located on a surface of the second clamp relatively close to the second side of the workpiece.

8. The fixture according to claim 7, wherein The first gasket has elasticity, and the second gasket has elasticity.

9. The jig according to claim 6, characterized in that, The first connecting rod and the first clip are integrally formed, and the second connecting rod and the second clip are integrally formed.

10. The fixture according to claim 6, characterized in that, The surfaces of the first clip and the second clip that come into contact with the workpiece are both arc surfaces.

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