Diffusion source bottle, diffusion equipment and diffusion system

Abstract

The utility model provides a diffusion source bottle, diffusion equipment and a diffusion system, the diffusion source bottle comprises a bottle body, the upper end of the bottle body is provided with an air inlet and an air outlet, the bottom wall in the bottle body is provided with a sunken part which is sunken downwards, and the bottle body is used for accommodating source liquid; the gas inlet pipe is at least partially inserted into the bottle body along the gas inlet, is partially located in the sunken part, and is used for introducing process gas into the bottle body, so that the process gas carries the source liquid in the bottle body to be discharged along the gas outlet. When the amount of source liquid in the bottle body is small, the liquid level of the source liquid is close to the bottom wall of the bottle body, but enough source liquid is still contained in the sunken part, so that it can be guaranteed that the process gas exhausted by the gas inlet pipe has enough contact area with the source liquid, and the problem that the source carrying amount of the process gas is insufficient is not prone to occurring. When the source bottle is replaced, unused source liquid in the concave part accounts for a small volume of the total source liquid in the source bottle, so that the amount of the unused source liquid in the diffusion source bottle is relatively reduced, the utilization rate of the source liquid in the diffusion source bottle is improved, and the use cost of the source liquid is reduced.

Description

Technical Field

[0001] This application belongs to the technical field of photovoltaic cells, and particularly relates to a diffusion source bottle, a diffusion device, and a diffusion system. Background Art

[0002] In the diffusion process of photovoltaic cells, the source can be carried into the diffusion furnace by the process gas to carry out the diffusion process.

[0003] However, when the amount of source liquid in the existing diffusion source bottle is small, there will be a problem that the contact surface between the gas and the source liquid is insufficient, resulting in insufficient carrying capacity of the process gas to carry the source, which in turn affects the diffusion effect of the battery wafers. The existing solution is to replace the new diffusion source bottle in advance before the carrying capacity of the process gas is insufficient, but this will result in a low utilization rate of the source liquid in a single diffusion source bottle and a high cost. Summary of the Utility Model

[0004] Embodiments of this application provide a diffusion source bottle, a diffusion device, and a diffusion system to solve or alleviate one or more technical problems in the prior art.

[0005] As an aspect of the embodiments of this application, embodiments of this application provide a diffusion source bottle, including:

[0006] A bottle body, with an air inlet and an air outlet provided at the upper end. A concave portion is provided on the bottom wall inside the bottle body, and the bottle body is used to accommodate the source liquid;

[0007] An inlet pipe, at least partially inserted into the bottle body along the air inlet, and a part of the inlet pipe is located inside the concave portion;

[0008] Wherein, the inlet pipe is used to introduce the process gas into the bottle body, so as to carry the source liquid in the bottle body along the air outlet and discharge it.

[0009] Optionally, the source liquid in the concave portion is 3% - 8% of the source liquid in the bottle body.

[0010] Optionally, the diffusion source bottle further includes buffer particles;

[0011] A plurality of the buffer particles are stacked on the bottom wall inside the bottle body, and a part of the buffer particles is located inside the concave portion.

[0012] Optionally, the diameter of the buffer particles is 0.5 cm - 1 cm.

[0013] Optionally, the stacking height of the buffer particles on the bottom wall of the bottle body is 1 cm - 2 cm.

[0014] Optionally, the shape of the concave portion is a frustum of a cone, and the diameter of the concave portion gradually decreases along the side away from the bottom wall.

[0015] Optionally, the concave portion is provided with:

[0016] a first circular surface opening, which is on the same horizontal plane as the bottom wall of the bottle body;

[0017] a second circular surface, which is located on the side of the first circular surface opening away from the upper end of the bottle body and is arranged opposite to the first circular surface opening;

[0018] wherein, the distance between the first circular surface opening and the second circular surface is 1.5 cm to 2.5 cm.

[0019] Optionally, the diameter of the first circular surface opening is 2 cm to 3 cm;

[0020] the diameter of the second circular surface is 1 cm to 2 cm;

[0021] wherein, the diameter of the first circular surface opening is greater than the diameter of the second circular surface.

[0022] Optionally, the distance between the exhaust end of the intake pipe and the second circular surface is 1 mm to 2 mm.

[0023] As another aspect of the embodiments of the present application, the embodiments of the present application further provide a diffusion device, including the diffusion source bottle described in any one of the above.

[0024] As yet another aspect of the embodiments of the present application, the embodiments of the present application further provide a diffusion system, including the diffusion device described above.

[0025] In the embodiments of the present application, the above technical solutions are adopted. A concave portion is provided on the bottom wall inside the bottle body, and the concave portion is communicated with the bottle body to accommodate the source liquid. The intake pipe is partially located in the concave portion. When the amount of source liquid in the bottle body is small and the liquid level of the source liquid is close to the bottom wall of the bottle body, there is still enough source liquid in the concave portion, so that it can be ensured that the process gas discharged from the intake pipe has enough contact area with the source liquid, and thus the problem of insufficient source liquid carried by the process gas is not likely to occur. When the amount of source liquid in the bottle body is further reduced until there is only source liquid in the concave portion, the source bottle can be replaced at this time. The unused source liquid in the concave portion accounts for a small proportion of the total source liquid volume in the source bottle, relatively reducing the amount of unused source liquid in a single diffusion source bottle, improving the source liquid utilization rate of a single diffusion source bottle, and reducing the source liquid usage cost.

[0026] The above summary is only for the purpose of the specification and is not intended to be limiting in any way. In addition to the above-described illustrative aspects, embodiments, and features, further aspects, embodiments, and features of the present application will be readily apparent by reference to the drawings and the following detailed description. Brief Description of the Drawings

[0027] In the drawings, unless otherwise specified, the same reference numerals throughout the several views refer to the same or similar components or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0028] Figure 1 FIG. is a schematic structural diagram of a diffusion source bottle according to an embodiment of the present application;

[0029] Figure 2 FIG. is another schematic structural diagram of a diffusion source bottle according to an embodiment of the present application.

[0030] Description of the Reference Numerals:

[0031] Bottle body 10; inlet pipe 20; buffer particles 30; recess 11; source liquid 12; air inlet 14; air outlet 15; bottom wall 101; first circular surface opening 111; second circular surface 112. Detailed Description of the Embodiments

[0032] The embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the drawings. In the drawings, for clarity, the dimensions of layers, regions, elements, and their relative dimensions may be exaggerated. Wherever the same or similar reference numerals are used throughout, they refer to the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the drawings are exemplary only for explaining the present application and should not be construed as limiting the present application.

[0033] It should be understood that when an element or layer is referred to as being "on", "adjacent to", "connected to", or "coupled to" another element or layer, it can be directly on, adjacent to, connected, or coupled to the other element or layer, or there may be intervening elements or layers. In contrast, when an element is referred to as being "directly on", "directly adjacent to", "directly connected to", or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, or part from another element, component, region, layer, or part. Thus, without departing from the teachings of the present disclosure, the first element, component, region, layer, or part discussed below may be referred to as the second element, component, region, layer, or part. And when discussing the second element, component, region, layer, or part, it does not imply that the present disclosure necessarily has a first element, component, region, layer, or part.

[0034] In this application, unless otherwise clearly defined and limited, terms such as "installed", "connected", "linked", "fixed", etc. shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] It should be noted that the terms "first", "second", etc. in the description, claims and the above drawings of this application are used to distinguish similar objects and do not necessarily describe a specific order or sequence. It should be understood that these terms can be interchanged under appropriate circumstances so that the embodiments of this application described here can be implemented in an order other than those illustrated or described here. In addition, the terms "comprising", "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily limit to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0036] In this application, when it comes to numerical intervals (i.e., numerical ranges), unless otherwise specified, the distribution of optional values within the numerical interval is considered continuous and includes the two numerical endpoints of the numerical interval (i.e., the minimum value and the maximum value), as well as each value between these two numerical endpoints. Unless otherwise specified, when the numerical interval only refers to integers within the numerical interval, it includes the two endpoint integers of the numerical range and each integer between the two endpoints, which is equivalent to directly listing each integer. When multiple numerical ranges are provided to describe features or characteristics, these numerical ranges can be combined. In other words, unless otherwise specified, the numerical ranges disclosed in this application should be understood to include any and all sub-ranges subsumed therein. The "numerical value" in the numerical interval can be any quantitative value, such as a number, a percentage, a ratio, etc. The "numerical interval" allows a broad inclusion of quantitative intervals such as percentage intervals, ratio intervals, and ratio value intervals.

[0037] The embodiments of this application provide technical solutions for a diffusion source bottle, a diffusion device, and a diffusion system. Based on this, it alleviates the problem that when the amount of source liquid in the diffusion source bottle is small, there will be insufficient contact area between the gas and the source liquid, resulting in insufficient source carrying capacity of the process gas. At the same time, it improves the utilization rate of the source liquid in a single diffusion source bottle and reduces the process cost. See the following for details.

[0038] Next, exemplary embodiments according to the present application will be described in more detail with reference to the accompanying drawings. It should be noted that these exemplary embodiments can be implemented in many different forms and should not be construed as being limited only to the embodiments set forth herein.

[0039] Please refer to Figure 1 and Figure 2 , an embodiment of the present application provides a diffusion source bottle, which includes a bottle body 10 and an intake pipe 20. The following is a detailed description:

[0040] An air inlet 14 and an air outlet 15 are provided at the upper end of the bottle body 10. A concave portion 11 is provided on the bottom wall 101 inside the bottle body 10, and the bottle body 10 is used to accommodate the source liquid 12. The concave portion 11 communicates with the space inside the bottle body 10 to accommodate the source liquid 12.

[0041] The intake pipe 20 is at least partially inserted into the bottle body 10 along the air inlet 14, and a part of the intake pipe 20 is located inside the concave portion 11. The intake pipe 20 is used to introduce process gas into the bottle body 10, so as to discharge the source liquid 12 inside the bottle body 10 along the air outlet 15 through the process gas carrying.

[0042] Exemplarily, in an ordinary source bottle, when the amount of the source liquid is relatively small, such as 10%, the liquid level of the source liquid will drop to a relatively low position (about 1.5 cm). At this time, the contact area between the process gas discharged from the intake pipe inserted into the source bottle and the source liquid is small, and it is easy to have a problem that the amount of the source carried by the process gas is insufficient, resulting in a poor diffusion process effect of the battery chip, and further affecting the yield and photoelectric conversion efficiency of the battery chip. If the source bottle is replaced at this time, 10% of the source liquid in the source bottle has not been used, resulting in waste of the source liquid.

[0043] In this embodiment, since the bottom wall 101 inside the bottle body 10 is provided with a downward concave portion 11, and the concave portion 11 communicates with the bottle body 10 to accommodate the source liquid 12, and a part of the intake pipe 20 is located inside the concave portion 11. When the amount of the source liquid 12 in the bottle body 10 is relatively small, such as 10%, the liquid level of the source liquid 12 is relatively close to the bottom wall 101 of the bottle body 10, but there is still enough source liquid 12 inside the concave portion 11, so that it can be ensured that the process gas discharged from the intake pipe 20 has a sufficient contact area with the source liquid 12, thus not easily having a problem that the amount of the source carried by the process gas is insufficient. When the amount of the source liquid 12 in the bottle body 10 is further reduced until there is only source liquid 12 in the concave portion 11, the source bottle can be replaced at this time. The unused source liquid 12 in the concave portion 11 accounts for a relatively small volume of the total source liquid 12 in the source bottle, relatively reducing the amount of the unused source liquid 12 in a single diffusion source bottle, improving the utilization rate of the source liquid 12 in a single diffusion source bottle, and reducing the usage cost of the source liquid 12.

[0044] Specifically, in this embodiment, before the diffusion source bottle is used, a predetermined amount of source liquid 12 is preset therein. Among them, the source liquid 12 in the recessed portion 11 is 3% to 8% of the source liquid 12 in the bottle body 10. When the source liquid 12 inside the diffusion source bottle gradually decreases during use until there is only source liquid 12 in the recessed portion 11, at this time, replacing the source bottle can achieve a relatively high utilization rate of the source liquid 12 (92% to 97%).

[0045] Exemplarily, the source liquid 12 can be boron trichloride solution or phosphorus oxychloride solution, and the process gas can be nitrogen, which can be specifically selected according to the diffusion process requirements of the battery chips.

[0046] In some embodiments, a support portion can also be provided at the bottom of the bottle body 10, and the height of the support portion is the same as the height of the recessed portion 11, so as to provide stable support for the bottle body 10 and prevent the bottle body 10 from tilting.

[0047] In order to further improve the source-carrying effect of the process gas and the utilization rate of the source liquid 12, in this embodiment, the diffusion source bottle further includes buffer particles 30, and a plurality of buffer particles 30 are stacked on the bottom wall 101 inside the bottle body 10, and some of the buffer particles 30 are located in the recessed portion 11.

[0048] On the one hand, the buffer particles 30 can buffer the airflow of the process gas and enhance the contact between the process gas and the source liquid 12. On the other hand, they can act as fillers inside the bottle body 10, so that the source liquid 12 can have a relatively high liquid level, thereby further increasing the contact between the process gas and the source liquid 12.

[0049] Exemplarily, the diffusion source bottle provided with buffer particles 30 and the diffusion source bottle without buffer particles 30 contain the same amount of source liquid 12 before use. When the liquid level inside the diffusion source bottle gradually drops to the recessed portion 11 during use, the amount of source liquid 12 in the diffusion source bottle provided with buffer particles 30 is less than that in the diffusion source bottle without buffer particles 30, thereby relatively improving the overall utilization rate of the source liquid 12.

[0050] If the diameter of the buffer particles 30 is too small, it may cause blockage of the process gas channel, and if the diameter is too large, it may affect the uniformity of the distribution of the process gas. Preferably, the diameter of the buffer particles 30 is 0.5 cm to 1 cm. Buffer particles 30 of appropriate size can increase the gas flow path inside the bottle body 10, enable the process gas to be evenly distributed when passing through, and thus carry the source liquid 12 more effectively. Buffer particles 30 with a diameter of 0.5 cm to 1 cm can provide sufficient surface area and gaps, so that the gas flow is not too blocked or too smooth, ensuring sufficient contact between the process gas and the source liquid 12.

[0051] Specifically, the material of the buffer particles 30 can be quartz or glass. Both quartz and glass have strong chemical corrosion resistance, can remain stable when immersed in the source liquid 12, and are not prone to chemical reactions. This ensures that the buffer particles 30 are not easily corroded during use, extending their service life. In other embodiments, the buffer particles 30 can also be made of other materials, as long as they do not react with the source liquid 12 and do not affect the diffusion process of the battery wafers.

[0052] In one embodiment, the stacking height of the buffer particles 30 on the bottom wall 101 of the bottle body 10 is 1 cm to 2 cm. Stacking the buffer particles 30 to an appropriate height can prevent blockage of the gas channels caused by excessive stacking, and at the same time, it will not lose the buffering effect due to too shallow stacking.

[0053] In one embodiment, as Figure 1 and Figure 2 shown, the shape of the recessed portion 11 is a frustum of a cone, and the diameter of the recessed portion 11 gradually decreases along the side away from the bottom wall 101. The frustum shape allows the process gas to rise along the frustum with a gradually widening diameter after being discharged from the exhaust end (not labeled in the figure) of the exhaust pipe. The speed of the process gas will decrease during the rising process, facilitating the uniform distribution of the process gas, enhancing the contact between the process gas and the source liquid 12, and improving the source-carrying effect. The gradually increasing diameter can form a buffer zone to reduce the occurrence of gas turbulence or reverse flow.

[0054] In other embodiments, the shape of the recessed portion 11 can also be other shapes, such as a cylinder, a cone, or a rectangle, etc.

[0055] Furthermore, in this embodiment, the recessed portion 11 is provided with a first circular surface opening 111 and a second circular surface 112. The first circular surface opening 111 communicates with the bottle body 10. Among them, the first circular surface opening 111 is on the same horizontal plane as the bottom wall 101 of the bottle body 10. The second circular surface 112 is located on the side of the first circular surface opening 111 away from the upper end of the bottle body 10 and is arranged opposite to the first circular surface opening 111.

[0056] Preferably, the distance between the first circular surface opening 111 and the second circular surface 112 is 1.5 cm to 2.5 cm. This distance provides sufficient space for the process gas to diffuse and mix in the recessed portion 11, helps to provide sufficient surface area and path length when the process gas contacts the source liquid 12, thereby improving the effect of carrying the source liquid 12.

[0057] In other embodiments, the distance between the first circular surface opening 111 and the second circular surface 112 can also be other ranges, so as to adjust the overall height of the recessed portion 11, and further adjust the size of the recessed portion 11.

[0058] Preferably, the diameter of the first circular surface opening 111 is 2 cm to 3 cm, and the diameter of the second circular surface 112 is 1 cm to 2 cm. Among them, the diameter of the first circular surface opening 111 is greater than that of the second circular surface 112, so that the overall recessed portion 11 can maintain a frustum shape. By controlling the diameter of the first circular surface opening 111, the diameter of the second circular surface 112, and the distance between the two, the volume of the recessed portion 11 can be relatively small, so that the source liquid 12 contained in the recessed portion 11 is also relatively small. Without affecting the source-carrying effect of the process gas, the smaller the recessed portion 11 is, the less source liquid 12 remains when it is replaced, and the higher the utilization rate of the source liquid 12 is.

[0059] Specifically, in one embodiment, the distance between the exhaust end (not labeled in the figure) of the intake pipe 20 and the second circular surface 112 is 1 mm to 2 mm. Maintaining this distance can cause the process gas to impact the second circular surface 112 and then diffuse around after being discharged from the exhaust end of the intake pipe 20, ensuring sufficient contact between the process gas and the source liquid 12. The closer the exhaust end of the intake pipe 20 is to the second circular surface 112, the more the length of the intake pipe 20 located in the recessed portion 11 is, so that the source liquid 12 basically does not affect the source-carrying effect before descending to the first circular surface opening 111. In addition, a smaller distance between the exhaust end of the intake pipe 20 and the second circular surface 112 can also prevent the buffer particles 30 from being blocked between the exhaust end of the intake pipe 20 and the second circular surface 112, resulting in insufficient exhaust.

[0060] In other embodiments, the distance between the exhaust end of the intake pipe 20 and the second circular surface 112 can also be in other ranges, and can be specifically adjusted according to the buffer particles 30 and the height of the recessed portion 11.

[0061] The embodiment of the present application also provides a diffusion device, including the diffusion source bottle described in any one of the above.

[0062] The diffusion device can be used for the diffusion process of battery wafers. For example, the process gas carries the source liquid in the diffusion source bottle and is introduced into a diffusion furnace. There are battery wafers in the diffusion furnace. In the diffusion furnace, the battery wafers are exposed to a specific temperature and atmosphere for diffusion treatment. During the diffusion process, the diffusion material is released from the source liquid by the gas and reacts with the surface of the battery wafer to change its surface properties and chemical composition.

[0063] The battery wafers after the diffusion process can be further subjected to subsequent processing steps, such as cleaning, detection, encapsulation, etc., to prepare for final product assembly and testing.

[0064] The embodiment of the present application also provides a diffusion system, including the diffusion device described above.

[0065] Specifically, the diffusion system can also include various devices or components for the diffusion process of battery wafers, such as:

[0066] A gas supply device for supplying carrier gases (oxygen, nitrogen) to a furnace body and controlling the flow rate and mixing ratio of the gases.

[0067] A boat body for loading solar cells and placing them in the furnace body for processing. The boat body can be made of quartz material to avoid reacting with the solar cells or the gases in the furnace body.

[0068] A temperature control component for adjusting the temperature in the furnace body according to the diffusion process requirements of the solar cells, such as controlling the temperature in the furnace body at 800°C to 1100°C.

[0069] In other embodiments, other devices, components or systems can be added to the diffusion system according to requirements.

[0070] It should be noted that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present application. The orientation terms "inner" and "outer" refer to the inside and outside relative to the contour of each component itself. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "on other devices or structures" will be positioned as "below other devices or structures" or "under other devices or structures" afterwards. Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations are made for the relative spatial descriptions used here.

[0071] It also should be noted that the "one embodiment", "another embodiment", "embodiment", etc. mentioned in the present application refer to the specific features, structures or characteristics described in connection with that embodiment being included in at least one embodiment generally described in the present application. The same expression appearing in multiple places in the specification does not necessarily refer to the same embodiment. Further, when describing a specific feature, structure or characteristic in connection with any embodiment, it is intended that the implementation of such feature, structure or characteristic in connection with other embodiments also falls within the scope of the present application.

[0072] In the above embodiments, the descriptions of the respective embodiments have their own focuses. For the parts not detailed in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0073] It should also be noted that the above are only the preferred embodiments of the present application, and do not limit the patent protection scope of the present application. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present application, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present application.

Claims

1. A diffusion source bottle, characterized in that, Comprising: A bottle body, with an air inlet and an air outlet provided at the upper end. A sunken portion is provided on the bottom wall inside the bottle body, and the bottle body is used to contain the source liquid. An intake pipe, at least partially inserted into the bottle body along the air inlet, and a part of the intake pipe is located inside the sunken portion. Wherein, the intake pipe is used to introduce process gas into the bottle body, so as to carry the source liquid in the bottle body along the air outlet and discharge it.

2. The diffusion source bottle according to claim 1, wherein The source liquid in the sunken portion is 3% - 8% of the source liquid in the bottle body.

3. The diffusion source bottle according to claim 1, characterized in that, The diffusion source bottle further includes buffer particles. A plurality of the buffer particles are stacked on the bottom wall inside the bottle body, and part of the buffer particles are located inside the sunken portion.

4. The diffusion source bottle according to claim 3, characterized in that, The diameter of the buffer particles is 0.5 cm - 1 cm.

5. The diffusion source bottle according to claim 3, characterized in that, The stacking height of the buffer particles on the bottom wall of the bottle body is 1 cm - 2 cm.

6. The diffusion source bottle according to any one of claims 1 to 5, characterized in that The shape of the sunken portion is a frustum of a cone, and the diameter of the sunken portion gradually decreases along the side away from the bottom wall.

7. The diffusion source bottle according to claim 6, characterized in that, The sunken portion is provided with: A first circular surface opening, which is on the same horizontal plane as the bottom wall of the bottle body. A second circular surface, located on the side of the first circular surface opening away from the upper end of the bottle body and opposite to the first circular surface opening. Wherein, the distance between the first circular surface opening and the second circular surface is 1.5 cm - 2.5 cm.

8. The diffusion source bottle according to claim 7, characterized in that, The diameter of the first circular surface opening is 2 cm - 3 cm. The diameter of the second circular surface is 1 cm - 2 cm. Wherein, the diameter of the first circular surface opening is larger than the diameter of the second circular surface.

9. The diffusion source bottle according to claim 7, characterized in that, The distance between the exhaust end of the intake pipe and the second circular surface is 1 mm - 2 mm.

10. A diffusion device, characterized in that, Comprising the diffusion source bottle according to any one of claims 1 - 9.

11. A diffusion system, characterized in that, Comprising the diffusion device according to claim 10.

Images