Dust collecting device of chemical vapor deposition furnace

Abstract

The utility model discloses a dust collecting device of a chemical vapor deposition furnace, which relates to the technical field of purification devices and comprises a mounting frame, a dust falling unit and a dust collecting unit. The lower end of the mounting frame is fixedly connected with four supporting legs; the dust falling unit comprises a dust collection box, air inlet fans, protection nets, a shower head frame, atomizing nozzles, a cross-shaped mounting frame and a circular truncated cone flow guide plate, the dust collection box is fixedly connected to the inner side of the mounting frame, the multiple air inlet fans are fixedly connected to the upper end of the dust collection box, and the protection nets are fixedly connected to the upper ends of the air inlet fans; the dust collecting device comprises a dust collecting box, a shower head frame is fixedly connected to the upper end of the inner side of the dust collecting box, a plurality of atomizing nozzles are fixedly connected to a water outlet of the shower head frame, and a cross-shaped mounting frame is fixedly connected to the middle of the inner side of the dust collecting box. And dust can be quickly evaporated and collected after being quickly settled.

Description

Technical Field

[0001] The utility model relates to the technical field of purification devices, in particular to a dust collection device for a chemical vapor deposition furnace. Background Technique

[0002] Chemical vapor deposition is a chemical process technology. This technology mainly uses one or several gaseous compounds or simple substances containing thin film elements to generate a thin film on the surface of a substrate through a chemical reaction. Chemical vapor deposition is a new technology for preparing inorganic materials developed in recent decades. The chemical vapor deposition method has been widely used for purifying substances, developing new crystals, depositing various single crystals, polycrystals or glassy inorganic thin film materials;

[0003] Among them, in the prior art, a dust collection device for a chemical vapor deposition furnace with the authorization announcement number of CN215539372U is proposed, which includes a dust collection head and a dust treatment box. An air inlet is fixedly opened on the side circumferential surface of the dust treatment box, and the air inlet is fixedly connected to the dust collection head. A funnel-shaped dust collection box is fixedly installed on the lower end surface of the dust treatment box. A waste discharge pipe is fixedly installed on the lower end surface of the funnel-shaped dust collection box, and a rotating motor is fixedly installed on the lower end surface of the waste discharge pipe. The rotating motor is fixedly connected to a dust outlet screw rod, and an air extraction device is fixedly connected to the upper end of the dust treatment box;

[0004] In the prior art, the existing device cannot suck and quickly collect dust over a large area, and cannot collect dust after dust reduction treatment. Therefore, we propose a dust collection device for a chemical vapor deposition furnace. Content of the Utility Model

[0005] The technical problem to be solved by the utility model is to overcome the existing defects and provide a dust collection device for a chemical vapor deposition furnace, which can suck and collect dust over a large area, can quickly reduce the dust and then quickly evaporate and collect it, and can effectively solve the problems in the background technology.

[0006] To achieve the above purpose, the utility model provides the following technical scheme: A dust collection device for a chemical vapor deposition furnace, including a mounting frame, a dust reduction unit and a dust collection unit;

[0007] Mounting frame: Four support legs are fixedly connected to the lower end;

[0008] Dust-removing unit: It includes a dust collection box, intake fans, protective nets, shower racks, atomizing nozzles, cross mounting brackets, conical deflectors, air hoods and one-way valves. The dust collection box is fixedly connected to the inner side of the mounting bracket. Multiple intake fans are fixedly connected to the upper end of the dust collection box, and a protective net is fixedly connected to the upper end of each intake fan. The shower rack is fixedly connected to the upper inner side of the dust collection box, and multiple atomizing nozzles are fixedly connected to the water outlets of the shower rack. The cross mounting bracket is fixedly connected to the middle part inside the dust collection box, and multiple conical deflectors are fixedly connected to the upper end of the cross mounting bracket. The air hood is fixedly connected to the middle part of the upper end of the dust collection box, and a one-way valve is fixedly connected to each air inlet of the air hood;

[0009] Dust collection unit: It is installed on the dust-removing unit.

[0010] The dust is inhaled into the dust collection box through the intake fans, and the dust is collected by connecting each air inlet of the air hood to the chemical vapor deposition furnace. The one-way valve prevents gas from flowing back. The shower rack fixes the atomizing nozzles, and the atomizing nozzles perform dust-removing treatment on the inhaled dust. The cross mounting bracket fixes the conical deflectors, and the conical deflectors conduct diversion treatment on the water flow after dust removal, so as to achieve the purpose of initially collecting dust.

[0011] Further, the dust collection unit includes a water storage tank, a filter plate, a diversion cylinder and an inlet and outlet pipe. The water storage tank is fixedly connected to the middle part inside the dust collection box. The filter plate is fixedly connected to the upper inner side of the water storage tank, the diversion cylinder is fixedly connected to the lower end of the filter plate, and the inlet and outlet pipe is communicated with the water storage tank. The water flow is diverted to the upper end of the filter plate through the conical deflector. The filter plate filters the dust in the water. The water flows into the water storage tank through the filter. When there is too much water in the water storage tank, it can be discharged through the inlet and outlet pipe. When there is too little water in the water storage tank, it can be injected through the inlet and outlet pipe. The filter plate achieves the purpose of filtering and collecting dust.

[0012] Further, the dust collection unit also includes a motor, a first collection plate, a spiral blade and a rotating shaft. The motor is fixedly connected to the lower end of the cross mounting bracket, the rotating shaft is fixedly connected to the lower end of the motor, the first collection plate is fixedly connected to the upper outer side of the spiral blade, and the spiral blade is fixedly connected to the middle part of the outer side of the rotating shaft. The motor drives the rotating shaft to rotate, the rotating shaft drives the first collection plate to rotate, and the first collection plate collects the dust on the filter plate. The spiral blade conveys the dust, so as to achieve the purpose of collecting dust.

[0013] Furthermore, the dust collection unit further includes a water pump, a first water pipe, and a second water pipe. A water pump is fixedly connected to the upper end of the dust collection box. One end of the water inlet of the water pump is fixedly connected to one end of the second water pipe, and the other end of the second water pipe is fixedly connected to a water storage tank. The water outlet of the water pump is fixedly connected to the first water pipe, and the other end of the first water pipe is fixedly connected to the water inlet of the diversion cylinder. The water inside the water storage tank is pumped out through the second water pipe and the water pump and is conveyed to the shower head through the first water pipe, thereby achieving the purpose of water circulation.

[0014] Furthermore, it further includes a heating table and a ventilation pipe. A heating table is fixedly connected to the upper end of the dust collection box. The surface of the heating table is frustum-shaped. A ventilation pipe is fixedly connected to the outside of the dust collection box, and the ventilation pipe is located below the water storage tank. The moist dust with moisture is heated by the heating table to evaporate the moisture in the dust, thereby facilitating the collection of moisture, and the air circulation is ensured through the ventilation pipe.

[0015] Furthermore, it further includes a second collection plate and a dust collection port. A second collection plate is fixedly connected to the lower end of the outer side of the rotating shaft. The second collection plate slides on the surface of the heating table. A dust collection port is fixedly connected to the lower end of the dust collection box. The rotating shaft drives the second collection plate to rotate, and the dust on the surface of the heating table is collected by the second collection plate, and the dust flows out through the dust collection port.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows: The dust collection device of this chemical vapor deposition furnace has the following advantages:

[0017] 1. For the dust collection device of this chemical vapor deposition furnace, multiple fans are used to suck in the dust. At the same time, the dust is quickly dust-settled over a large area through the dust-settling device, and the dust is quickly filtered and collected through the filtering device.

[0018] 2. For the dust collection device of this chemical vapor deposition furnace, while quickly dust-settling the inhaled dust, the dust is collected. The excess moisture is evaporated to quickly evaporate and collect the dust. At the same time, the collection plate is used to prevent the dust from adhering to the filter net or the evaporation wall. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic structural diagram of the present utility model;

[0020] Figure 2 is a schematic cross-sectional structural diagram of the present utility model;

[0021] Figure 3 is the present utility model Figure 2 partial enlarged structural schematic diagram at A in the figure.

[0022] In the figure: 1 mounting frame, 2 support legs, 3 dust reduction unit, 31 dust collection box, 32 intake fan, 33 protective net, 34 shower head rack, 35 atomizing nozzle, 36 cross mounting frame, 37 frustum-shaped deflector, 38 air collection hood, 39 one-way valve, 4 dust collection unit, 41 water storage tank, 42 filter plate, 43 guide cylinder, 44 motor, 45 first collection plate, 46 spiral blade, 47 rotating shaft, 48 inlet and outlet pipe, 49 water pump, 410 first water pipe, 411 second water pipe, 5 heating table, 6 second collection plate, 7 dust collection port, 8 ventilation pipe. Detailed implementation mode

[0023] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0024] Please refer to Figures 1-3 , this embodiment provides a technical solution for a dust collection device of a chemical vapor deposition furnace: A dust collection device of a chemical vapor deposition furnace includes a mounting frame 1, a dust reduction unit 3 and a dust collection unit 4;

[0025] Mounting frame 1: Four support legs 2 are fixedly connected to the lower end;

[0026] Dust reduction unit 3: It includes a dust collection box 31, an intake fan 32, a protective net 33, a shower head rack 34, an atomizing nozzle 35, a cross mounting frame 36, a frustum-shaped deflector 37, an air collection hood 38 and a one-way valve 39. The dust collection box 31 is fixedly connected to the inner side of the mounting frame 1. A plurality of intake fans 32 are fixedly connected to the upper end of the dust collection box 31. A protective net 33 is fixedly connected to the upper end of each intake fan 32. The shower head rack 34 is fixedly connected to the upper inner side of the dust collection box 31. A plurality of atomizing nozzles 35 are fixedly connected to the water outlet of the shower head rack 34. The cross mounting frame 36 is fixedly connected to the middle part of the inner side of the dust collection box 31. A plurality of frustum-shaped deflectors 37 are fixedly connected to the upper end of the cross mounting frame 36. The air collection hood 38 is fixedly connected to the middle part of the upper end of the dust collection box 31. A one-way valve 39 is fixedly connected to each air inlet of the air collection hood 38; The dust is sucked into the dust collection box 31 through the intake fan 32. The air collection hood 38 is connected to the chemical vapor deposition furnace through each air inlet for dust collection. The one-way valve 39 prevents gas from flowing back. The shower head rack 34 fixes the atomizing nozzle 35. The atomizing nozzle 35 performs dust reduction treatment on the inhaled dust. The cross mounting frame 36 fixes the frustum-shaped deflector 37. The frustum-shaped deflector 37 deflects the water flow after dust reduction, so as to achieve the purpose of initially collecting dust.

[0027] Dust collection unit 4: Installed on the dust settling unit 3, the dust collection unit 4 includes a water storage tank 41, a filter plate 42, a draft tube 43 and an inlet / outlet pipe 48. In the middle of the inner side of the dust collection box 31, there is a fixed connection with the water storage tank 41. At the upper end inside the water storage tank 41, there is a fixed connection with the filter plate 42. At the lower end of the filter plate 42, there is a fixed connection with the draft tube 43. The inlet / outlet pipe 48 communicates with the water storage tank 41. The water flow is guided to the upper end of the filter plate 42 through the frustum-shaped deflector 37. The dust in the water is filtered through the filter plate 42, and the water flow enters the water storage tank 41 through the filter. When there is too much water in the water storage tank 41, it can be discharged through the inlet / outlet pipe 48. When there is too little water in the water storage tank 41, it can be injected through the inlet / outlet pipe 48. The purpose of filtering and collecting dust is achieved through the filter plate 42.

[0028] The dust collection unit 4 also includes a motor 44, a first collection plate 45, a spiral blade 46 and a rotating shaft 47. At the lower end of the cross-shaped mounting frame 36, there is a fixed connection with the motor 44. At the lower end of the motor 44, there is a fixed connection with the rotating shaft 47. At the upper end of the outer side of the spiral blade 46, there is a fixed connection with the first collection plate 45. In the middle of the outer side of the rotating shaft 47, there is a fixed connection with the spiral blade 46. The motor 44 drives the rotating shaft 47 to rotate. The first collection plate 45 is driven to rotate through the rotating shaft 47, and the dust on the filter plate 42 is collected through the first collection plate 45. The dust is conveyed through the spiral blade 46, thus achieving the purpose of collecting dust.

[0029] The dust collection unit 4 also includes a water pump 49, a first water pipe 410 and a second water pipe 411. At the upper end of the dust collection box 31, there is a fixed connection with the water pump 49. The water inlet of the water pump 49 is fixedly connected to one end of the second water pipe 411. The other end of the second water pipe 411 is fixedly connected to the water storage tank 41. The water outlet of the water pump 49 is fixedly connected to the first water pipe 410. The other end of the first water pipe 410 is fixedly connected to the water inlet of the draft tube 43. The water inside the water storage tank 41 is pumped out through the second water pipe 411 and the water pump 49, and is conveyed to the shower head bracket 34 through the first water pipe 410, thus achieving the purpose of water circulation.

[0030] It also includes a heating table 5 and a ventilation pipe 8. At the upper end of the dust collection box 31, there is a fixed connection with the heating table 5. The surface of the heating table 5 is frustum-shaped. On the outside of the dust collection box 31, there is a fixed connection with the ventilation pipe 8. The ventilation pipe 8 is on the lower side of the water storage tank 41. The moist dust with water is heated through the heating table 5, and the water in the dust is evaporated to facilitate the collection of water. The air circulation is ensured through the ventilation pipe 8.

[0031] It also includes a second collection plate 6 and a dust collection port 7. At the lower end of the outer side of the rotating shaft 47, there is a fixed connection with the second collection plate 6. The second collection plate 6 slides on the surface of the heating table 5. At the lower end of the dust collection box 31, there is a fixed connection with the dust collection port 7. The second collection plate 6 is driven to rotate through the rotating shaft 47, and the dust on the surface of the heating table 5 is collected through the second collection plate 6. The dust flows out through the dust collection port 7.

[0032] The working principle of a dust collection device for a chemical vapor deposition furnace provided by the present utility model is as follows: Dust is inhaled into the interior of the dust collection box 31 through the intake fan 32. Dust collection is carried out by connecting each intake port of the air collection hood 38 to the periphery inside the chemical vapor deposition furnace. The one-way valve 39 is used to prevent gas backflow. The atomizing nozzle 35 is fixed by the shower head holder 34. The inhaled dust is subjected to dust reduction treatment through the atomizing nozzle 35. The frustum-shaped deflector 37 is fixed by the cross mounting frame 36. The water flow after dust reduction is deflected through the frustum-shaped deflector 37, thereby achieving the purpose of initially collecting dust. The water flow is deflected by the frustum-shaped deflector 37 to the upper end of the filter plate 42. The dust in the water is filtered by the filter plate 42. The water flow enters the water storage tank 41 through filtration. When there is too much water in the water storage tank 41, it can be discharged through the inlet and outlet pipe 48. When there is too little water in the water storage tank 41, it can be injected through the inlet and outlet pipe 48. The purpose of filtering and collecting dust is achieved through the filter plate 42. The motor 44 drives the rotating shaft 47 to rotate. The rotating shaft 47 drives the first collecting plate 45 to rotate. The dust on the filter plate 42 is collected by the first collecting plate 45. The dust is conveyed by the spiral blade 46, thereby achieving the purpose of collecting dust. The water inside the water storage tank 41 is pumped out through the second water pipe 411 and the water pump 49 and conveyed to the shower head holder 34 through the first water pipe 410, thereby achieving the purpose of water circulation. The wet dust with moisture is heated by the heating table 5 to evaporate the moisture in the dust, thus facilitating the collection of moisture. The air circulation is ensured through the ventilation pipe 8. The second collecting plate 6 is driven to rotate by the rotating shaft 47. The dust on the surface of the heating table 5 is collected by the second collecting plate 6. The dust flows out through the dust collection port 7.

[0033] It should be noted that in the above embodiments, the input end of the motor 44 is electrically connected to the output end of the external power supply through an external PLC controller. The motor 44 is a servo motor, and the external PLC controller controls the operation of the motor 44 using a method commonly used in the prior art.

[0034] The above are only embodiments of the present utility model, and do not limit the patent scope of the present utility model accordingly. Any equivalent structural or equivalent process transformation made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present utility model.

Claims

1. A dust collection device for a chemical vapor deposition furnace, characterized in that: It includes a mounting frame (1), a dust reduction unit (3) and a dust collection unit (4); Mounting frame (1): Four support legs (2) are fixedly connected to the lower end; Dust reduction unit (3): It includes a dust collection box (31), an intake fan (32), a protective net (33), a shower head holder (34), atomizing nozzles (35), a cross mounting frame (36), a frustum-shaped deflector (37), an air collection hood (38) and a check valve (39). The dust collection box (31) is fixedly connected to the inner side of the mounting frame (1). A plurality of intake fans (32) are fixedly connected to the upper end of the dust collection box (31). A protective net (33) is fixedly connected to the upper end of each intake fan (32). The shower head holder (34) is fixedly connected to the upper inner side of the dust collection box (31). A plurality of atomizing nozzles (35) are fixedly connected to the water outlet of the shower head holder (34). The cross mounting frame (36) is fixedly connected to the middle part of the inner side of the dust collection box (31). A plurality of frustum-shaped deflectors (37) are fixedly connected to the upper end of the cross mounting frame (36). The air collection hood (38) is fixedly connected to the middle part of the upper end of the dust collection box (31). A check valve (39) is fixedly connected to each air inlet of the air collection hood (38); Dust collection unit (4): It is installed on the dust reduction unit (3).

2. The dust collection device of a chemical vapor deposition furnace according to claim 1, wherein: The dust collection unit (4) includes a water storage tank (41), a filter plate (42), a guide cylinder (43) and an inlet and outlet pipe (48). The water storage tank (41) is fixedly connected to the middle part of the inner side of the dust collection box (31). The filter plate (42) is fixedly connected to the upper inner side of the water storage tank (41). The guide cylinder (43) is fixedly connected to the lower end of the filter plate (42). The inlet and outlet pipe (48) communicates with the water storage tank (41).

3. The dust collection device of a chemical vapor deposition furnace according to claim 2, characterized in that: The dust collection unit (4) further includes a motor (44), a first collection plate (45), a spiral blade (46) and a rotating shaft (47). The motor (44) is fixedly connected to the lower end of the cross mounting frame (36). The rotating shaft (47) is fixedly connected to the lower end of the motor (44). The first collection plate (45) is fixedly connected to the upper outer side of the spiral blade (46). The spiral blade (46) is fixedly connected to the middle part of the outer side of the rotating shaft (47).

4. The dust collection device of a chemical vapor deposition furnace according to claim 1, characterized in that: The dust collection unit (4) further includes a water pump (49), a first water pipe (410) and a second water pipe (411). The water pump (49) is fixedly connected to the upper end of the dust collection box (31). One end of the second water pipe (411) is fixedly connected to the water inlet of the water pump (49). The other end of the second water pipe (411) is fixedly connected to the water storage tank (41). The water outlet of the water pump (49) is fixedly connected to the first water pipe (410). The other end of the first water pipe (410) is fixedly connected to the water inlet of the guide cylinder (43).

5. The dust collection device of a chemical vapor deposition furnace according to claim 4, characterized in that: It further includes a heating table (5) and a ventilation pipe (8). The heating table (5) is fixedly connected to the upper end of the dust collection box (31). The surface of the heating table (5) is frustum-shaped. The ventilation pipe (8) is fixedly connected to the outer side of the dust collection box (31). The ventilation pipe (8) is located on the lower side of the water storage tank (41).

6. The dust collection device of a chemical vapor deposition furnace according to claim 1, characterized in that: It also includes a second collection plate (6) and a dust collection port (7). The lower end of the outer side of the rotating shaft (47) is fixedly connected to the second collection plate (6). The second collection plate (6) slides on the surface of the heating table (5). The lower end of the dust collection box (31) is fixedly connected to the dust collection port (7).

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