Furnace cover top cavity angle rotating structure machining device

Abstract

The utility model relates to a furnace cover top cavity angle rotating structure machining device which comprises a base, a supporting platform is arranged on the base, one end of the supporting platform is rotationally connected with one end of the base, a supporting piece is further arranged between the base and the supporting platform, one end of the supporting piece is rotationally connected with the other end of the supporting platform, and the other end of the supporting piece is rotationally connected with the other end of the supporting platform. The other end of the supporting piece is movably connected with the base; a stop block is arranged on the side, close to the base, of the supporting platform, and a profiling face is arranged on the side, away from the base, of the stop block. One side of the supporting platform is rotationally connected with the base, an inclined machining face can be provided for the furnace cover in the machining and manufacturing process through the rotationally-arranged supporting platform, an operator can conduct machining on the furnace cover conveniently, the obliquely-arranged furnace cover enables the operator to operate tools conveniently, the upper half portion of the furnace cover is machined from the upper portion of the furnace cover, and therefore the machining efficiency of the furnace cover is improved. And the lower half part of the furnace cover is processed from the lower part of the furnace cover.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum equipment processing and manufacturing, in particular to a processing device for the angle rotation structure of the top cavity of a furnace cover. Background Technique

[0002] For PLED coating, plasma is generated by the interaction of laser and target. The laser beam is focused on the surface of the target. Under a sufficiently high energy density and a short pulse time, the target absorbs the laser energy and the temperature at the light spot rises rapidly above the evaporation temperature of the target, resulting in high temperature and ablation. The target vaporizes and evaporates, and atoms, molecules, electrons, ions, molecular clusters, micron-scale droplets, solid particles, etc. escape from the surface of the target. These evaporated substances in turn continue to interact with the laser, and their temperature further increases, forming a regional high-temperature and high-density plasma. The plasma nucleates and grows on the substrate to form a thin film. The high-energy particles in the laser plasma bombard the surface of the substrate, causing different degrees of rough-shot damage, one of which is atomic sputtering. A thermalization zone is formed between the incident particle stream and the sputtered atoms. Once the condensation rate of the particles is greater than the sputtering rate of the sputtered atoms, the thermalization zone will dissipate, and the particles grow a thin film on the substrate. This process is generally completed in a single crystal furnace.

[0003] The structure of the single crystal furnace body includes an upper furnace chamber and a lower furnace chamber; a crystal lifting and rotating mechanism is arranged at the top of the upper furnace chamber, a furnace cover is arranged at the upper end of the lower furnace chamber, and a crucible lifting and rotating mechanism is arranged at the bottom of the lower furnace chamber; an isolation valve chamber is arranged between the upper furnace chamber and the furnace cover; a water isolation strip is arranged between the inner cylinder and the outer cylinder of the upper furnace chamber and the lower furnace chamber. One side of the water isolation strip is attached to the inner cylinder, and the other side is attached to the outer cylinder; several groups of guiding grooves are arranged on the surface of the inner cylinder. The guiding grooves are arranged in a spiral shape and are fixedly arranged on the surface of the inner cylinder by welding. During the processing of the furnace cover, it needs to be inclined, which is convenient for the operator to process. For this reason, we provide a processing device for the angle rotation structure of the top cavity of the furnace cover to solve this problem. Summary of the Utility Model

[0004] The purpose of the utility model is to solve the above technical problems, and provide a processing device for the angle rotation structure of the top cavity of a furnace cover.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme: a processing device for the angle rotation structure of the top cavity of a furnace cover, including a base, a support platform is arranged on the base, one end of the support platform is rotationally connected to one end of the base, a support member is further arranged between the base and the support platform, one end of the support member is rotationally connected to the other end of the support platform, and the other end of the support member is movably connected to the base;

[0006] On one side of the support platform close to the base, there is a stop block, and on the side of the stop block away from the base, there is a profiling surface.

[0007] Further preferably, on the side of the stop block away from the base, there is an arc-shaped positioning surface.

[0008] Further preferably, at one end where the support platform is connected to the base, there is a rotating shaft. The rotating shaft is fixedly installed at the end of the support platform through two brackets. At both ends of the base corresponding to the rotating shaft, there are supports, and on the supports, there are bearing seats. The two ends of the rotating shaft are rotatably installed on the bearing seats.

[0009] Further preferably, the support member includes two parallel support rods. At one end corresponding to the two support rods, there is a connecting shaft respectively, and one of the connecting shafts is rotatably connected to the support platform.

[0010] Further preferably, at both ends of the connecting shaft on the side of the support member close to the base, there is a slider respectively. The slider is movably connected to the connecting shaft.

[0011] Further preferably, the slider is an inverted T-shaped slider. At the position where the slider cooperates with the connecting shaft, there is a half structure. On the slider, there is a locking block, and on the locking block, there is also a half structure. The slider and the locking block are locked on the connecting shaft through the half structure.

[0012] Further preferably, on the base, there are guide rails that cooperate with the sliders. For each slider, there is a corresponding guide rail. On each guide rail, there are two chutes that penetrate the guide rail body. At the bottom of the chute corresponding to each slider, there is a slider bottom plate. The slider and the slider bottom plate are locked on the guide rail through bolts and nuts.

[0013] Compared with the prior art, the beneficial effects of the present utility model are:

[0014] One side of the support platform is rotatably connected to the base. By rotating the support platform, an inclined processing surface can be provided for the furnace cover during the processing and manufacturing process, which is convenient for the operator to process on the furnace cover. The inclined furnace cover enables the operator to easily operate tools. The upper half of the furnace cover is processed from above the furnace cover, and the lower half of the furnace cover is processed from below the furnace cover.

[0015] By adjusting the connection positions of the support member with the base and the support platform, different included angles are formed between the support platform and the base. In this way, different inclination angles can be formed for the support platform, and the furnace cover is inclined and placed on the support platform, which is convenient for the operator to process the furnace cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 One of the isometric views of the present utility model;

[0017] Figure 2 Another isometric view of the present utility model;

[0018] Figure 3 The side view of the present utility model;

[0019] In the figures: 1, rectangular flat plate; 2, guide rail; 3, base; 4, sliding groove; 5, support member; 6, support platform; 7, support flat plate; 8, furnace cover; 9, stopper; 10, rotating shaft; 11, bearing seat; 12, support; 13, connecting shaft; 14, locking block; 15, slider. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments.

[0021] Embodiment

[0022] As Figures 1-3 shown, a processing device for the angle rotation structure of the top cavity of a furnace cover includes a base 3. The base 3 is a frame structure, a rectangular frame formed by welding rectangular steel bars end to end. There are three parallel steel bars between the frames to improve the strength of the base 3. When in use, the base 3 is horizontally placed on the ground. In order to make the frame stably placed on the ground, a rectangular flat plate 1 is respectively provided at the top corners of the base 3, so that the contact surface between the base 3 and the ground is increased, facilitating the stable placement of the base 3 on the ground.

[0023] The base 3 is provided with a support platform 6 for placing a workpiece. The support platform 6 is a frame structure, a rectangular frame formed by welding rectangular steel bars end to end. An inner frame is further provided inside the frame to improve the strength of the support platform 6. The support platform 6 is provided with support flat plates 7 arranged in a circular array for forming a support plane for placing the workpiece. A stopper 9 is provided on one of the support flat plates 7. When the workpiece is inclined, the workpiece can be abutted against the edge of the workpiece through the stopper 9 to prevent the workpiece from falling from the support platform 6 under the action of gravity. In one embodiment, the stopper 9 has an arc-shaped positioning surface to facilitate matching with the outer peripheral surface of the furnace cover 8.

[0024] One side of the support platform 6 is rotatably connected to the base 3. By rotatably arranging the support platform 6, an inclined processing surface can be provided for the furnace cover 8 during the processing and manufacturing process, facilitating the operator to perform processing on the furnace cover 8. The inclined furnace cover 8 enables the operator to easily operate tools. The upper half of the furnace cover 8 is processed from above the furnace cover 8, and the lower half of the furnace cover 8 is processed from below the furnace cover 8.

[0025] One end of the support platform 6 connected to the base 3 has a rotating shaft 10. The rotating shaft 10 is fixedly installed at the end of the support platform 6 through two brackets. The base 3 is provided with supports 12 corresponding to both ends of the rotating shaft 10. The supports 12 are provided with bearing seats 11, and both ends of the rotating shaft 10 are rotatably installed on the bearing seats 11.

[0026] In order to enable the support platform 6 to form a stable state at a certain angle, a support member 5 is provided on the base 3 and connected to the support platform 6. In this way, the base 3, the support platform 6, and the support member 5 can form a triangular structure to maintain stability, enabling the furnace cover 8 to be placed stably on the support platform 6, facilitating the operator to process the furnace cover 8.

[0027] Furthermore, in order to enable this device to adapt to operators of different heights and different inclined positions of the processed furnace cover 8, by adjusting the connection positions of the support member 5 with the base 3 and the support platform 6, different included angles are formed between the support platform 6 and the base 3. In this way, different inclined angles can be formed for the support platform 6, enabling the furnace cover 8 to be placed inclined on the support platform 6, facilitating the operator to process the furnace cover 8.

[0028] The support member 5 includes two parallel support rods. One connecting shaft 13 is respectively provided at the corresponding ends of the two support rods. One of the connecting shafts 13 is rotatably connected to the support platform 6. Specifically, bearing seats are respectively provided at both ends of the support platform 6 corresponding to the connecting shaft 13, and both ends of the connecting shaft 13 are respectively connected to the corresponding bearing seats. In this way, the support member 5 cooperates with the rotating shaft of the support platform 6 to form different angles between the base 3 and the support platform 6.

[0029] On both ends of the connecting shaft 13 on the side of the support member 5 close to the base 3, a slider 15 is respectively provided. The slider 15 is movably connected to the connecting shaft 13. Specifically, the slider 15 is an inverted T-shaped slider. A half structure is provided at the position where the slider 15 cooperates with the connecting shaft 13. A locking block 14 is provided on the slider 15, and a half structure is also provided on the locking block 14. The slider 15 and the locking block 14 are locked on the connecting shaft 13 through the half structure. At the same time, the position of the slider 15 can be adjusted by the movably connected slider 15 and locking block 14 to adapt to different angles between the support platform 6 and the base 3.

[0030] In order to keep the base 3 and the support platform 5 in a stable structure, the slider 15 is movably installed on the base 3. Specifically, a guide rail 2 is provided on the base 3 to cooperate with the slider 15. A corresponding guide rail 2 is provided for each slider 15. Two through grooves 4 are provided on each guide rail 2 through the body of the guide rail 2. A slider bottom plate is provided at the bottom of the through groove 4 corresponding to each slider 15. The slider 15 and the slider bottom plate are locked on the guide rail 2 through bolts and nuts. The slider 15 can move linearly along the guide rail 2. When the support platform 5 reaches an appropriate inclination angle, bolts sequentially pass through the slider 15, the through groove 4, and the slider bottom plate and are then locked by nuts, so that the base 3, the support platform 6, and the support member 5 form a stable support structure.

[0031] During use, loosen the connecting bolts and nuts between the slider 15 and the slider bottom plate. At the same time, loosen the connecting bolts and nuts between the slider 15 and the locking block 14. At this time, the slider 15 can move linearly along the through groove 4 of the guide rail 2. When the support platform 6 and the base 3 form a suitable angle and the support platform 6 has an appropriate inclination angle, lock the slider 15 and the locking block 14 and lock the slider 15 and the slider bottom plate in sequence, so that the base 3, the support platform 6, and the support member 5 form a stable support structure. Then place the furnace cover 8 on the support platform 6. The lower part of the furnace cover 8 is matched with the arc-shaped positioning surface of the stop block 9 on the support platform 6, so that the furnace cover 8 can be placed on the support platform 6 in an inclined and stable manner. Then the operator can process the furnace cover 8 through tools.

[0032] The above is only the preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and the inventive concept of the present invention, makes equivalent replacements or changes, and should be covered by the protection scope of the present invention.

Claims

1. A processing device for the angle rotation structure of the top cavity of a furnace lid, characterized in that, It includes a base, a support platform is provided on the base, one end of the support platform is rotatably connected to one end of the base, a support member is further provided between the base and the support platform, one end of the support member is rotatably connected to the other end of the support platform, and the other end of the support member is movably connected to the base; A stopper is provided on one side of the support platform close to the base, and a profiling surface is provided on the side of the stopper away from the base.

2. The processing device for the angle rotation structure of the top cavity of the furnace lid according to claim 1, characterized in that, The side of the stopper away from the base has an arc-shaped positioning surface.

3. The processing device for the angle rotation structure of the top cavity of the furnace lid according to claim 1, characterized in that, One end of the support platform connected to the base has a rotating shaft, the rotating shaft is fixedly installed at the end of the support platform through two brackets, supports are provided on the base corresponding to both ends of the rotating shaft, bearing seats are provided on the supports, and both ends of the rotating shaft are rotatably installed on the bearing seats.

4. A processing device for the angle rotation structure of the top cavity of a furnace lid according to claim 1, characterized in that, The support member includes two parallel support rods, and a connecting shaft is provided at one end corresponding to each of the two support rods, and one of the connecting shafts is rotatably connected to the support platform.

5. A processing device for the angle-rotating structure of the top cavity of a furnace lid according to claim 1, characterized in that, Sliders are respectively provided at both ends of the connecting shaft on the side of the support member close to the base, and the sliders are movably connected to the connecting shaft.

6. The processing device for the angular rotation structure of the top cavity of the furnace lid according to claim 5, characterized in that, The slider is an inverted T-shaped slider, a half structure is provided at the position where the slider is matched with the connecting shaft, a locking block is provided on the slider, and a half structure is also provided on the locking block. The slider and the locking block are locked on the connecting shaft through the half structure.

7. A processing device for the angle rotation structure of the top cavity of a furnace cover according to claim 5 or 6, characterized in that, Guide rails are provided on the base and are matched with the sliders. A corresponding guide rail is provided for each slider. Two chutes penetrating through the guide rail body are provided on each guide rail. A slider bottom plate is provided at the bottom of the chute corresponding to each slider. The slider and the slider bottom plate are locked on the guide rail through bolts and nuts.

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