Plate-type PECVD (plasma enhanced chemical vapor deposition) gas distribution plate

Abstract

The utility model provides a plate-type PECVD (Plasma Enhanced Chemical Vapor Deposition) gas distribution plate which is applied to the field of photovoltaic technology, and particularly relates to a plate-type PECVD gas distribution plate which comprises a gas distribution plate body, the air inlet is formed in the upper surface of the air distribution plate body; the air outlet holes are uniformly distributed in the lower surface of the air distribution plate body; an air flow channel is formed between each air outlet hole and the air inlet, and the lengths of the air flow channels between the air outlet holes and the air inlet are equal. According to the plate-type PECVD gas distribution plate, one gas flow channel is arranged between each gas outlet hole and the gas inlet of the gas distribution plate body, and the lengths of the gas flow channels are equal, so that uniform gas distribution through the plurality of gas outlet holes is ensured, and the uniformity of a coating film is further ensured.

Description

Technical Field

[0001] This application relates to the field of photovoltaic technology, and particularly to a plate-type PECVD gas distribution plate. Background Art

[0002] With the continuous consumption of global non-renewable energy and the new requirements for carbon emissions at home and abroad, the demand and utilization rate of renewable energy such as solar energy and wind energy by humans have increased sharply. As a major renewable energy, photovoltaic power generation has developed rapidly in recent years. Flat-plate PECVD is one of the important devices for manufacturing solar cells, and its main structure includes a cavity, a vacuum system, a transmission device, a water and gas path system, an electric control system, etc. The PECVD equipment technology has become one of the mainstream methods for coating photovoltaic solar cell wafers due to its characteristics such as low temperature, high efficiency, and low cost. At present, the uniformity of gas distribution in HJT-PECVD equipment mainly relies on the gas distribution plate, but there are the following problems with the current gas distribution plate: the air holes distributed in the inner and outer flow channels are some very close to the air inlet hole and some very far from the air inlet hole, and uniform gas distribution cannot be achieved. The large gas volume at the proximal end and the small gas volume at the distal end result in uneven gas distribution, which will lead to non-uniform coating. Utility Model Content

[0003] In view of this, this application provides a plate-type PECVD gas distribution plate. By setting an air flow channel with equal length between each air outlet hole and the air inlet on the gas distribution plate body, uniform gas distribution from multiple air outlet holes is ensured, and thus the uniformity of coating is ensured.

[0004] To achieve the above object, this application provides the following technical solutions:

[0005] A plate-type PECVD gas distribution plate, comprising:

[0006] A gas distribution plate body;

[0007] An air inlet, arranged on the upper surface of the gas distribution plate body;

[0008] Air outlet holes, evenly distributed on the lower surface of the gas distribution plate body;

[0009] There is an air flow channel between each air outlet hole and the air inlet, and the path lengths of the air flow channels between each air outlet hole and the air inlet are equal.

[0010] Optionally, each air flow channel is composed of N levels of air flow branches, where N≥2; the air inlet is connected to M first-level air flow branches, each i-level air flow branch is further connected to M (i + 1)-level air flow branches, and M air outlet holes are arranged at the end of each N-level air flow branch, where 1≤i≤N - 1 and M≥2.

[0011] Optionally, the cross-sectional area of the i-th stage air flow branch is greater than or equal to the cross-sectional area of the (i + 1)-th stage air flow branch.

[0012] Optionally, the path lengths of each i-th stage air flow branch are equal and the cross-sectional areas are equal.

[0013] Optionally, the air distribution plate body is rectangular, and the air outlet holes are arranged in a rectangular array on the air distribution plate body and the spacing between adjacent air outlet holes is equal.

[0014] Optionally, the air inlet is connected to 4 first-stage air flow branches, each i-th stage air flow branch is further connected to 4 (i + 1)-th stage air flow branches, and 4 air outlet holes are provided at the end of each N-th stage air flow branch.

[0015] Optionally, each air flow channel is composed of 5-stage air flow branches, and the number of air outlet holes is 1024.

[0016] Optionally, 4 first-stage air flow branches form an H-shaped structure; 4 (i + 1)-th stage air flow branches extending from the same i-th stage air flow branch also form an H-shaped structure, where 1 ≤ i ≤ 4.

[0017] Optionally, fixing components are provided on the air distribution plate body, and the air flow channels are redirected at the fixing components, or the air outlet holes are missing at the fixing components, and the missing air outlet holes are supplemented and provided at the edge of the air distribution plate body.

[0018] Optionally, an S-shaped bend is provided at the symmetry center of the H-shaped structure of the first-stage air flow branch, a compensation air flow branch extends from the S-shaped bend, the compensation air flow branch extends to the edge of the air distribution plate body and an air outlet hole is provided at the end of the compensation air flow branch, and the number of air outlet holes at the end of the compensation air flow branch is equal to the number of air outlet holes missing at the fixing components.

[0019] The plate-type PECVD air distribution plate provided by the present application solves the problem that the air holes in the inner and outer flow channels of the existing air distribution plate are some very close to the air inlet hole and some very far from the air inlet hole. By providing an air flow channel between each air outlet hole and the air inlet on the air distribution plate body and the lengths of each air flow channel being equal, it can ensure uniform air distribution from multiple air outlet holes of the air distribution plate, and the gas distribution is uniform, which can further ensure the uniformity of film coating. Description of the Drawings

[0020] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the provided drawings.

[0021] Figure 1 Schematic of the plate-type PECVD gas distribution plate of the present application Figure 1 ;

[0022] Figure 2 Schematic of the plate-type PECVD gas distribution plate of the present application Figure 2 ;

[0023] Figure 3 is Figure 2 The enlarged view of the part in the box.

[0024] In Figures 1 - 3 :

[0025] 1. Gas distribution plate body; 11. Intake point; 21. First-stage gas flow branch; 22. Second-stage gas flow branch; 23. Third-stage gas flow branch; 24. Fourth-stage gas flow branch; 25. Fifth-stage gas flow branch; 26. Compensation gas flow branch; 3. Air outlet hole; 4. Fixing component. Detailed implementation manners

[0026] The present application provides a plate-type PECVD gas distribution plate. By arranging an air flow channel with equal length between each air outlet hole and the air inlet of the gas distribution plate body, the uniform distribution of gas by multiple air outlet holes is ensured, and thus the uniformity of film coating is ensured.

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0028] As Figures 1 - 2 shown, the embodiments of the present application provide a plate-type PECVD gas distribution plate, including:

[0029] Gas distribution plate body 1, generally processed from aluminum plate;

[0030] Air inlet, arranged on the upper surface of the gas distribution plate body 1 and communicated with the gas supply device;

[0031] A plurality of air outlet holes 3 are evenly distributed on the lower surface of the air distribution plate body 1 and are communicated with the spray chamber below the air distribution plate body 1;

[0032] There is an air flow channel between each air outlet hole 3 and the above-mentioned air inlet, and the lengths of the air flow channels between each air outlet hole 3 and the air inlet are equal.

[0033] The plate-type PECVD air distribution plate of the present application solves the problem that the air holes in the inner and outer flow channels of the existing air distribution plate are some very close to the air inlet and some very far from the air inlet. By setting an air flow channel with equal length between each air outlet hole 3 of the air distribution plate body 1 and the air inlet, it can ensure uniform air distribution from the multiple air outlet holes 3 of the air distribution plate, and the gas distribution is uniform, which can further ensure the uniformity of film coating.

[0034] Using the plate-type PECVD air distribution plate of the present application, a high-uniformity air distribution method can be realized, and the film-forming uniformity can be effectively improved by about 20%; the manufacturing cost of the plate-type PECVD air distribution plate of the present application is also relatively low. Only by machining the air flow channels on an aluminum plate can multi-layer air distribution be realized, and the gas can be distributed evenly at one time.

[0035] In a preferred embodiment, in order to maximize the uniform layout of air flow channels on the air distribution plate body 1 to make the best use of the limited area of the air distribution plate body 1, according to the principle of fractal geometry, each air flow channel is composed of N-level air flow branches, where N≥2; the air inlet is connected to M first-level air flow branches 21, each i-level air flow branch is further connected to M (i + 1)-level air flow branches, and M air outlet holes 3 are provided at the end of each N-level air flow branch, where 1≤i≤N - 1 and M≥2.

[0036] In this way, each air flow channel is composed of N-level air flow branches. The spray gas flows from the gas supply device into the air inlet, then from the air inlet into the first-level air flow branches 21, then from the upper-level air flow branches into the lower-level air flow branches, and finally into the N-level air flow branches, and flows into the spray chamber through the M N air outlet holes 3 provided at the end of the N-level air flow branches. An exponential number of air outlet holes 3 can be realized with a relatively small number of N and M.

[0037] In a preferred embodiment, the cross-sectional area of the i-level air flow branch is greater than or equal to the cross-sectional area of the (i + 1)-level air flow branch.

[0038] Due to the air distribution effect of the multiple air outlet holes 3, the flow rate is larger closer to the air inlet, and relatively smaller closer to the air outlet holes 3. Then according to this characteristic, the flow rates of the air flow branches are set in a gradually decreasing form, and the cross-sectional area of the upper-level air flow branch is greater than or equal to the cross-sectional area of the lower-level air flow branch.

[0039] In a preferred embodiment, the lengths and cross-sectional areas of each i-th stage air flow branch are equal.

[0040] To better make the air flow distribution uniform, each i-th stage air flow branch is set to have equal length and equal cross-sectional area. Taking the first-stage air flow branch 21 as an example, that is, the lengths and cross-sectional areas of the M first-stage shunt branches are all equal. This can ensure that the flow rates through the M first-stage air flow branches 21 are equal within a certain time. That is, after the air flow enters from the air inlet, it can reach the inlets of the M first-stage air flow branches 21 simultaneously, and can also reach the outlets of the M first-stage air flow branches 21 simultaneously. Then the air flow flows through the second, third, and i-th stage air flow branches in sequence, and finally flows to the N-th stage air flow branch, and finally reaches M N air outlets 3 and flows into the spray chamber.

[0041] As Figures 1 - 3 shown, in a preferred embodiment, the air distribution plate body 1 is rectangular, and the air outlets 3 are arranged in a rectangular array on the air distribution plate body 1, and the spacing between adjacent air outlets 3 is equal.

[0042] According to the shape of the air distribution plate body 1, the arrangement of the air outlets 3 is adaptively arranged. If the shape of the air distribution plate body 1 is other shapes such as circular or hexagonal, then the arrangement of the air outlets 3 can also be set to the corresponding circular or hexagonal shape. In this embodiment, the air distribution plate body 1 is rectangular, so the air outlets 3 are arranged in a rectangular array on the air distribution plate body 1.

[0043] Further, as Figures 1 - 3 shown, the air inlet is connected from the upper surface of the air distribution plate body 1 to the air inlet point 11 near the lower surface of the air distribution plate body 1, and then is respectively connected from the air inlet point 11 to 4 first-stage air flow branches 21. Each i-th stage air flow branch is further connected to 4 (i + 1)-th stage air flow branches, and 4 air outlets 3 are provided at the end of each N-th stage air flow branch.

[0044] Since 4 adjacent air outlets 3 form a square, therefore, according to the arrangement of the air outlets 3, preferably, each upper-stage air flow branch is connected to 4 lower-stage air flow branches.

[0045] Further, as Figure 1 and Figure 2 shown, each air flow channel is composed of 5-stage air flow branches, and the number of air outlets 3 is 1024.

[0046] According to the size of the air distribution plate body 1 itself, the cross-sectional area of the air flow branch, and the size of the air outlet 3, in this embodiment, preferably there are 5-stage air flow branches; as Figure 2 and 3As shown, gas flows from the intake point 11 to 4 first-stage air flow branches 21 respectively (1 divided by 4), then from each first-stage air flow branch 21 to 4 second-stage air flow branches 22 (4 divided by 16), then from each second-stage air flow branch 22 to 4 third-stage air flow branches 23 (16 divided by 64), then from each third-stage air flow branch 23 to 4 fourth-stage air flow branches 24 (64 divided by 256), and then from each third-stage air flow branch 23 to 4 fourth-stage air flow branches 24 (256 divided by 1024). In this way, 1024 air outlets 3 are provided at the ends of 1024 fifth-stage air flow branches 25, which can meet the requirement of uniform gas distribution. In this design, the paths from the air inlet to each air outlet 3 are the same and are evenly distributed on the entire gas distribution plate, flowing from the air outlet to above the spray plate.

[0047] As Figures 1 - 3 shown, in a preferred embodiment, the 4 first-stage air flow branches 21 form an H-shaped structure, and the intake point 11 is arranged at the symmetric center of the H-shaped structure; each first-stage air flow branch 21 can also be regarded as an L-shaped structure, and 2 first-stage air flow branches 21 share a part of the flow channel and form a T-shaped structure. The two T-shaped structures formed by the 4 first-stage air flow branches 21 further form an H-shaped structure, and the 4 outlets of the 4 first-stage air flow branches 21 are arranged at the 4 endpoints of the H-shaped structure;

[0048] Similarly, the 4 second-stage air flow branches 22 extended from the same first-stage air flow branch 21 also form an H-shaped structure; the inlets of the second-stage air flow branches 22 are at the symmetric center of the H-shaped structure, and the 4 outlets of the second-stage air flow branches 22 are arranged at the 4 endpoints of the H-shaped structure. By analogy, the air outlets 3 are arranged at the 4 endpoints of the H-shaped structure of the fifth-stage air flow branches 25;

[0049] As Figure 2 shown, the sub-paths included in each stage of air flow branch, that is, the horizontal part or the vertical part of the L-shaped structure, or the sub-paths parallel to the air flow branches of the same stage, the previous stage or the next stage, or the sub-paths perpendicular to the air flow branches of the same stage, the previous stage or the next stage, that is, on the gas distribution plate body 1, there are only horizontal and vertical air flow branches, and no diagonal air flow branches;

[0050] In this way, the air flow branches of each stage can be arranged to the maximum extent to make full use of the limited surface area on the gas distribution plate body 1.

[0051] As Figure 2As shown, in a preferred embodiment, since the fixing component 4 that connects the gas distribution plate body 1 to the PECVD device is provided on the gas distribution plate body 1, the fixing component 4 may overlap with the path of the corresponding gas flow branch of the gas flow channel. Therefore, the corresponding gas flow branch needs to change its path at the fixing component 4, bypass the fixing component 4 and be arranged at the blank area of the gas distribution plate body 1 where no gas flow channel is provided; alternatively, when there is no extra space, the air outlet holes 3 are missing at the fixing component 4, and the missing air outlet holes 3 are supplemented and arranged at the edge of the gas distribution plate body 1.

[0052] Structures such as the fixing component 4 on the gas distribution plate body 1 are arranged on the path of the gas flow channel, which will cause the gas flow channel to change its path or the air outlet holes 3 to be missing. Therefore, air outlet holes 3 are supplemented and arranged at the edge of the gas distribution plate body 1 to ensure that the total number of air outlet holes 3 meets the requirements.

[0053] As Figure 2 As shown, in a preferred embodiment, an S-shaped bend is provided at the symmetric center of the H-shaped structure formed by the first-stage gas flow branch 21, and a compensation gas flow branch 26 extends from the S-shaped bend, so as to make more reasonable use of the space around the air inlet point 11; the compensation gas flow branch 26 extends to the edge of the gas distribution plate body 1 and air outlet holes 3 are provided at the ends of the compensation gas flow branch 26, and the number of air outlet holes 3 at the ends of the compensation gas flow branch 26 is equal to the number of air outlet holes 3 missing at the fixing component 4 to ensure that the total number of air outlet holes 3 meets the requirements.

[0054] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0055] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any way. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The word "or" and "and" used here refer to the word "or", and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with each other.

[0056] It should also be noted that in the devices, equipment and methods of the present application, each component or each step can be decomposed or recombined. These decompositions or recombinations shall be regarded as equivalent solutions of the present application.

[0057] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Thus, the present application is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0058] It should be understood that the qualifiers "first", "second", "third", "fourth", "fifth" and "sixth" used in the description of the embodiments of the present application are only for more clearly explaining the technical solutions and cannot be used to limit the protection scope of the present application.

[0059] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and subcombinations thereof.

Claims

1. A plate-type PECVD gas distribution plate, characterized in that, Comprising: The air distribution plate body; An air inlet, arranged on the upper surface of the air distribution plate body; Air outlet holes, evenly distributed on the lower surface of the air distribution plate body; There is an air flow channel between each of the air outlet holes and the air inlet, and the lengths of the air flow channels between each of the air outlet holes and the air inlet are equal.

2. The plate-type PECVD gas distribution plate according to claim 1, wherein, Each air flow channel is composed of N levels of air flow branches, where N≥2; the air inlet is connected to M first-level air flow branches, each i-level air flow branch is further connected to M (i + 1)-level air flow branches, and the ends of each N-level air flow branch are provided with M air outlet holes, where 1≤i≤N - 1 and M≥2.

3. The plate-type PECVD gas distribution plate according to claim 2, wherein The cross-sectional area of the i-level air flow branch is greater than or equal to the cross-sectional area of the (i + 1)-level air flow branch.

4. The plate-type PECVD gas distribution plate according to claim 2, wherein, The lengths of each i-level air flow branch are equal and the cross-sectional areas are equal.

5. The plate-type PECVD gas distribution plate according to claim 2, wherein, The air distribution plate body is rectangular, and the air outlet holes are arranged in a matrix array on the air distribution plate body and the spacing between adjacent air outlet holes is equal.

6. The plate-type PECVD gas distribution plate according to claim 5, characterized in that, The air inlet is connected to 4 first-level air flow branches, each i-level air flow branch is further connected to 4 (i + 1)-level air flow branches, and the ends of each N-level air flow branch are provided with 4 air outlet holes.

7. The plate-type PECVD gas distribution plate according to claim 6, characterized in that, Each air flow channel is composed of 5 levels of air flow branches, and the number of air outlet holes is 1024.

8. The plate-type PECVD gas distribution plate according to claim 6, characterized in that, The 4 first-level air flow branches form an H-shaped structure; the 4 (i + 1)-level air flow branches extending from the same i-level air flow branch also form an H-shaped structure, where 1≤i≤4.

9. The plate-type PECVD gas distribution plate according to claim 8, characterized in that, Fixing components are arranged on the air distribution plate body, and the air flow channels are redirected at the fixing components, or the air outlet holes are missing at the fixing components, and the missing air outlet holes are supplemented and arranged at the edge of the air distribution plate body.

10. The plate-type PECVD gas distribution plate according to claim 9, wherein, An S-shaped bend is arranged at the symmetry center of the H-shaped structure of the first-level air flow branch, a compensation air flow branch extends from the S-shaped bend, the compensation air flow branch extends to the edge of the air distribution plate body and the end of the compensation air flow branch is provided with an air outlet hole, and the number of air outlet holes at the end of the compensation air flow branch is equal to the number of air outlet holes missing at the fixing components.

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