Vacuum pump assembly and zinc selenide chemical vapor deposition system

Abstract

The utility model provides a vacuum pump assembly and a zinc selenide chemical vapor deposition system. The vacuum pump assembly comprises a vacuum pump, an oil pipe connecting system and an oil filter. The vacuum pump is used for pumping and exhausting air through pump oil and comprises a vacuum pump oil tank, an oil return pipe and an oil discharge port, the vacuum pump oil tank is used for containing initial pump oil and filtered pump oil, and the oil return pipe and the oil discharge port are communicated with the vacuum pump oil tank; the oil pipe connecting system comprises an oil inlet connecting pipe and an oil return connecting pipe; the oil filter comprises an oil filter oil tank, a filter element, an oil inlet pipe, an oil outlet pipe and a booster pump, the oil inlet pipe is connected with the oil discharge port and the oil filter oil tank through an oil inlet connecting pipe, the filter element is placed in the oil filter oil tank, the booster pump is used for pumping pump oil in the vacuum pump oil tank into the filter element for filtering, and the oil outlet pipe is used for discharging the pump oil filtered by the filter element; and the oil return connecting pipe and the oil return pipe are used for enabling filtered pump oil discharged from the oil outlet pipe to flow back into the vacuum pump oil tank. The zinc selenide chemical vapor deposition system comprises a deposition chamber and the vacuum pump assembly.

Description

Technical Field

[0001] This disclosure relates to the field of preparing zinc selenide by chemical vapor deposition, and more particularly to a vacuum pump assembly and a zinc selenide chemical vapor deposition system. Background Art

[0002] In recent years, with the rapid development of infrared instruments, the market demands for infrared optical lenses, infrared laser devices, infrared-level imaging complete machines, etc. have been increasing year by year. The demand for infrared materials has increased sharply. The chemical vapor deposition method (abbreviated as CVD) is generally used to produce high-quality zinc selenide, which has various excellent characteristics such as a wide light transmission range, a low absorption coefficient, good thermal conductivity, high mechanical strength, and good optical performance, and thus is widely used.

[0003] Figure 1 It is a schematic diagram of an example of a known zinc selenide chemical vapor deposition system.

[0004] As Figure 1 shown, the known zinc selenide chemical vapor deposition system 1000' includes a deposition chamber 200', a vacuum pump 1', an exhaust gas treatment device 300', and a blower 400'.

[0005] The deposition chamber 200' is used for chemical vapor deposition to form zinc selenide crystals with zinc and hydrogen selenide as raw materials and an inert gas as a carrier gas. The vacuum pump 1' is connected to the exhaust port 200a' of the deposition chamber 200' to evacuate the deposition chamber 200' and thus maintain a flowing vacuum inside the deposition chamber 200'. The exhaust gas treatment device 300' is used to receive the exhaust gas from the vacuum pump 1' for exhaust gas treatment. The blower 400' is connected to the exhaust gas treatment device 300' to extract and discharge the exhaust gas treated by the exhaust gas treatment device 300'.

[0006] Specifically, the vacuum pump 1' includes a vacuum pump oil tank 10', a motor 15', a pump chamber 16', a variable volume motion mechanism 17', a first pipeline C1', and a second pipeline C2'. The vacuum pump oil tank 10' is used to hold pump oil. One end of the first pipeline C1' is connected to a position below the liquid level of the pump oil in the vacuum pump oil tank 10', and the other end of the first pipeline C1' is connected to the pump oil inlet position Pi' of the pump chamber 16'. One end of the second pipeline C2' is connected to the vacuum pump oil tank 10', and the other end of the second pipeline C2' is connected to the pump oil outlet position Po' of the pump chamber 16'. The motor 15' is arranged on the top of the vacuum pump oil tank 10'. The pump chamber 16' is connected to the exhaust port 200a' of the deposition chamber 200'. The variable volume motion mechanism 17' is arranged in the pump chamber 16' and connected to the motor 15'. For example, the variable volume motion mechanism 17' is a component composed of a rotor of a rotary vane pump type or a slide valve of a slide valve pump type, an eccentric wheel, a guide rail body, etc.

[0007] During operation, the pump oil in the vacuum pump oil tank 10' is supplied to the pump chamber 16' via the first pipeline C1'. The motor 15' drives the variable volume motion mechanism 17' in the pump chamber 16' to move. The movement of the variable volume motion mechanism 17' in the pump chamber 16' causes the volume of the pump oil in the pump chamber 16' to change, so as to pump air from the exhaust port 200a' of the deposition chamber 200' and exhaust air to the tail gas treatment device 300'. The pump oil discharged from the pump chamber 16' during the pumping and exhaust processes circulates back to the vacuum pump oil tank 10' via the second pipeline C2'.

[0008] During the chemical vapor deposition process of the deposition chamber 200', a large amount of zinc selenide dust is generated. The hydrogen selenide gas has poor stability and is easily decomposed into elemental selenium and hydrogen. A large amount of zinc selenide dust and elemental selenium will enter the pump chamber 16' of the vacuum pump 1' via the exhaust port 200a' along with the tail gas, thus contaminating the pump oil in the pump chamber 16'. Although the pump oil in the pump chamber 16' circulates between the pump chamber 16' and the vacuum pump oil tank 10' through the first pipeline C1' and the second pipeline C2', as the chemical vapor deposition process of the deposition chamber 200' continues, the pump oil will become more and more viscous. The increasingly viscous pump oil flowing in a cycle causes the operating load of the motor 15' of the vacuum pump 1' driving the variable volume motion mechanism 17' to increase, which may cause the motor 15' to suddenly stop, and then cause the deposition chamber 200' to be under pressure, the tail gas to flow back into the deposition chamber 200', and the chemical vapor deposition reaction growth to terminate, resulting in great cost losses. Further, when preparing a super-large-size (thickness > 30 mm, diameter greater than 300 mm) zinc selenide material, the vacuum pump 1' needs to operate continuously for more than 1 - 3 months or even longer, and there will be more zinc selenide dust and elemental selenium in the pump oil, and the possibility of the vacuum pump 1' suddenly stopping will be higher. Summary of the Utility Model

[0009] In view of the problems existing in the background technology, an object of the present disclosure is to provide a vacuum pump assembly and a zinc selenide chemical vapor deposition system, which can avoid sudden stop due to the pollution of pump oil by dust when the vacuum pump that pumps air and exhausts air through pump oil works continuously online.

[0010] Accordingly, a vacuum pump assembly is provided. The vacuum pump assembly includes a vacuum pump, an oil pipe connection system, and an oil filter. The vacuum pump is used for pumping air and exhausting air through pump oil. The vacuum pump includes a vacuum pump oil tank, a return oil pipe, and an oil drain port. The vacuum pump oil tank is used for storing the initial pump oil and the filtered pump oil for pumping air and exhausting air through the pump oil. The return oil pipe and the oil drain port are communicated with the vacuum pump oil tank. The oil pipe connection system includes an oil inlet connection pipe and an oil return connection pipe. The oil filter includes an oil filter oil tank, a filter element, an oil inlet pipe, an oil outlet pipe, and a booster pump. The oil inlet pipe is connected to the oil drain port and the oil filter oil tank via the oil inlet connection pipe. The filter element is placed in the oil filter oil tank. The booster pump is arranged on the oil inlet pipe and is used for pumping the pump oil in the vacuum pump oil tank into the filter element in the oil filter oil tank for filtration. The oil outlet pipe is communicated with the oil filter oil tank and is used for discharging the pump oil filtered by the filter element. The oil return connection pipe connects the oil outlet pipe and the return oil pipe. The oil return connection pipe and the return oil pipe are used for the filtered pump oil discharged from the oil outlet pipe to flow back into the vacuum pump oil tank.

[0011] A zinc selenide chemical vapor deposition system includes a deposition chamber. The deposition chamber is used for chemical vapor deposition to form zinc selenide crystals with zinc and hydrogen selenide as raw materials and an inert gas as a carrier gas. The zinc selenide chemical vapor deposition system further includes the aforementioned vacuum pump assembly communicated with the exhaust port of the deposition chamber.

[0012] The beneficial effects of the present disclosure are as follows.

[0013] In the vacuum pump assembly according to the present disclosure, through the setting of the oil pipe connection system and the oil filter, it is possible to filter and clean the pump oil when the vacuum pump, which is used for pumping air for the upstream equipment (for example, the deposition chamber for zinc selenide chemical vapor deposition that needs to maintain a flowing vacuum) and exhausting air for the downstream equipment (for example, the tail gas treatment device) through the pump oil, operates continuously online (even for a long time). In this way, dust that contaminates the pump oil during pumping (such as zinc selenide and selenium elemental dust mentioned in the background art) can be removed. The pump oil for pumping air and exhausting air will not become viscous due to the contamination of the dust carried during pumping. The operating load of the vacuum pump when continuously and even for a long time pumping air and exhausting air using the pump oil will not increase, avoiding sudden stops of the vacuum pump, and further avoiding overpressure in the upstream equipment, thereby ensuring the normal progress of the entire operation process of the upstream equipment.

[0014] In the zinc selenide chemical vapor deposition system according to the present disclosure, the vacuum pump of the vacuum pump assembly pumps air using pump oil for the deposition chamber of the zinc selenide chemical vapor deposition that needs to maintain a flowing vacuum and exhausts it downstream. The oil pipe connection system and the oil filter make the pump oil filtered and cleaned when the vacuum pump works continuously online (even for a long time). Not only the zinc selenide and selenium elemental dust that contaminate the pump oil during air pumping are removed, but the pump oil for air pumping and exhaust does not become viscous due to the contamination of the dust carried during air pumping. The operating load of the vacuum pump when pumping air and exhausting with pump oil continuously online or even for a long time will not increase, avoiding sudden stoppage of the vacuum pump, and further avoiding overpressure in the deposition chamber, thus ensuring the normal progress of the entire operation process of the deposition chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic diagram of an example of a known zinc selenide chemical vapor deposition system.

[0016] Figure 2 is a schematic structural diagram of a first embodiment of the vacuum pump assembly according to the present disclosure.

[0017] Figure 3 is a schematic structural diagram of a second embodiment of the vacuum pump assembly according to the present disclosure.

[0018] Figure 4 is a schematic structural diagram of the zinc selenide chemical vapor deposition system according to the present disclosure.

[0019] Among them, the reference numerals are explained as follows.

[0020] 1000' Zinc selenide chemical vapor deposition system Vh4 Fourth manual ball valve 1' Vacuum pump C1 First pipeline

[0021] 10' Vacuum pump oil tank C2 Second pipeline

[0022] 15' Motor S Partition

[0023] 16' Pump chamber P1 First part

[0024] Pi' Pump oil inlet position P2 Second part

[0025] Po' Pump oil outlet position 2 Oil pipe connection system

[0026] 17' Variable volume motion mechanism 21 Oil inlet connecting pipe

[0027] C1' First pipeline 22 Oil return connecting pipe

[0028] C2' Second pipeline Vd Check valve

[0029] 200' Deposition chamber Vh3 Third manual ball valve 200a' Exhaust port 3 Oil filter

[0030] 300' Tail gas treatment device 31 Oil filter oil tank

[0031] 400' Exhaust fan 32 Filter element 1000 Zinc selenide chemical vapor deposition system 33 Inlet oil pipe

[0032] 100 Vacuum pump assembly 34 Outlet oil pipe

[0033] 1 Vacuum pump 35 Booster pump

[0034] 10 Vacuum pump oil tank 36 Heater

[0035] 11 Return oil pipe 37 Thermocouple

[0036] 12 Oil drain port 38 Control panel

[0037] 13 Oil temperature gauge Vh1 First manual ball valve 14 Oil tank eyepiece Vh2 Second manual ball valve 15 Motor Vem1 First solenoid valve 16 Pump chamber Vem2 Second solenoid valve Pi Inlet pump oil position Va Regulating valve

[0038] Po Outlet pump oil position P Digital pressure gauge

[0039] 17 Variable volume motion mechanism F Flange

[0040] 18 Water cooling mechanism 200 Deposition chamber

[0041] 181 Water cooling sandwich 200a Exhaust port

[0042] 182 Cooling water inlet 300 Tail gas treatment device

[0043] 183 Cooling water return port 400 Exhaust fan

[0044] 19 Vibration damping spring seat Detailed implementation manners

[0045] The accompanying drawings illustrate embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but only as a basis for the claims and as a representative basis for teaching those of ordinary skill in the art to implement the present disclosure in various ways.

[0046] In the description of the present disclosure, unless otherwise specified, the terms "first", "second", "third", "fourth", etc. are only used for the purpose of description and component identification, and cannot be understood as relative importance and mutual relationship.

[0047] [Vacuum pump assembly]

[0048] Referring to Figure 2 and Figure 3 , the vacuum pump assembly 100 includes a vacuum pump 1, an oil pipe connection system 2, and an oil filter 3.

[0049] The vacuum pump 1 is used for pumping air and exhausting air through pump oil. The vacuum pump 1 includes a vacuum pump oil tank 10, a return oil pipe 11, and an oil drain port 12. The vacuum pump oil tank 10 is used for storing the initial pump oil and the filtered pump oil for pumping air and exhausting air through pump oil. The return oil pipe 11 and the oil drain port 12 communicate with the vacuum pump oil tank 10. The oil pipe connection system 2 includes an oil inlet connection pipe 21 and an oil return connection pipe 22. The oil filter 3 includes an oil filter oil tank 31, a filter element 32, an oil inlet pipe 33, an oil outlet pipe 34, and a booster pump 35. The oil inlet pipe 33 is connected to the oil drain port 12 and the oil filter oil tank 31 via the oil inlet connection pipe 21. The filter element 32 is placed in the oil filter oil tank 31. The booster pump 35 is arranged on the oil inlet pipe 33 and is used for pumping the pump oil in the vacuum pump oil tank 10 into the filter element 32 in the oil filter oil tank 31 for filtering. The oil outlet pipe 34 communicates with the oil filter oil tank 31 and is used for discharging the pump oil filtered by the filter element 32. The oil return connection pipe 22 connects the oil outlet pipe 34 and the return oil pipe 11. The oil return connection pipe 22 and the return oil pipe 11 are used for the filtered pump oil discharged from the oil outlet pipe 34 to flow back into the vacuum pump oil tank 10.

[0050] In the vacuum pump assembly 100 according to the present disclosure, through the arrangement of the oil pipe connection system 2 and the oil filter 3, it is possible to filter and clean the pump oil when the vacuum pump 1 for pumping air for the upstream equipment (for example, the deposition chamber 200 for zinc selenide chemical vapor deposition that needs to maintain a flowing vacuum described later) and exhausting air for the downstream equipment (for example, the tail gas treatment device described later) operates continuously online (even for a long time), so as to remove the dust that contaminates the pump oil during pumping (such as zinc selenide and selenium elemental dust mentioned in the background art). The pump oil for pumping air and exhausting air will not become viscous due to the contamination of the dust carried during pumping. The operating load of the vacuum pump 1 when pumping air and exhausting air continuously online or even for a long time will not increase, avoiding sudden stoppage of the vacuum pump 1, and further avoiding overpressure of the upstream equipment, thereby ensuring the normal operation of the entire operation process of the upstream equipment.

[0051] As Figure 2 and Figure 3As shown, in one example, the vacuum pump 1 further includes an oil temperature gauge 13 for measuring the temperature of the pump oil in the vacuum pump oil tank 10. For example, the temperature of the pump oil in the vacuum pump oil tank 10 is controlled at 35 - 70 °C.

[0052] As Figure 2 and Figure 3 shown, in one example, the vacuum pump 1 further includes an oil tank eyepiece 14 provided on the vacuum pump oil tank 10 for an operator to visually observe the liquid level of the pump oil in the vacuum pump oil tank 10. For example, the liquid level is maintained at no less than 50% of the height of the inner cavity of the vacuum pump oil tank 10.

[0053] As Figure 2 and Figure 3 shown, in one example, the vacuum pump 1 further includes an electric motor 15, a pump chamber 16, and a variable volume motion mechanism 17. The pump oil in the vacuum pump oil tank 10 is used to be cyclically supplied into the pump chamber 16. The variable volume motion mechanism 17 is disposed in the pump chamber 16 and connected to the electric motor 15 for the variable volume motion mechanism 17 to move in the pump chamber 16 under the drive of the electric motor 15 to perform air extraction and exhaust by using the volume change of the pump chamber 16 through the pump oil in the pump chamber 16. For example, the electric motor 15 is installed on the top of the vacuum pump oil tank 10, and the pump chamber 16 is located below the vacuum pump oil tank 10 and spaced apart from the vacuum pump oil tank 10. Similarly, for example, the variable volume motion mechanism 17 is a component composed of a rotary vane of a rotary vane pump type or a slide valve of a slide valve pump type, an eccentric wheel, a guide rail body, etc.

[0054] Further, in Figure 2 it, the vacuum pump oil tank 10 is an oil tank with an empty interior and no partitions; the vacuum pump 1 further includes a first pipeline C1 and a second pipeline C2; one end of the first pipeline C1 is connected to a position of the vacuum pump oil tank 10 that is below the liquid level of the pump oil, close to the liquid level, and far from the oil drain port 12, and the other end of the first pipeline C1 is connected to the pump oil inlet position Pi of the pump chamber 16; one end of the second pipeline C2 is connected to a position at the bottom of the vacuum pump oil tank 10 and close to the oil drain port 12, and the other end of the second pipeline C2 is connected to the pump oil outlet position Po of the pump chamber 16. Through the first pipeline C1 and the second pipeline C2, the circulation of the pump oil between the pump chamber 16 and the vacuum pump oil tank 10 is realized, and most of the pump oil supplied from the vacuum pump oil tank 10 to the pump chamber 16 through the first pipeline C1 is the pump oil filtered by the oil filter 3. The pump oil flowing back to the vacuum pump oil tank 10 through the second pipeline C2 contains the dust that contaminates the pump oil during air extraction of the pump oil. The contaminated pump oil flows back to a position close to the oil drain port 12 at the bottom of the vacuum pump oil tank 10, and the dust contaminating the pump oil will settle down, thereby avoiding affecting the pump oil supplied to the pump chamber 16 through the first pipeline C1.

[0055] With Figure 2In contrast to the situation where there are no partitions inside the vacuum pump oil tank 10, in Figure 3 a partition S is provided inside the vacuum pump oil tank 10. The partition S divides the interior of the vacuum pump oil tank 10 into a first part P1 and a second part P2. One end of the first pipeline C1 is connected to the first part P1 of the vacuum pump oil tank 10, and the other end of the first pipeline C1 is connected to the pump oil inlet position Pi of the pump chamber 16; one end of the second pipeline C2 is connected to the second part P2 of the vacuum pump oil tank 10, and the other end of the second pipeline C2 is connected to the pump oil outlet position Po of the pump chamber 16; the oil return pipe 11 extends into the first part P1, and the oil drain port 12 is connected to the second part P2. In Figure 3 after the pump oil filtered by the oil filter 3 passes through the oil return pipe 11, the first part P1 and the first pipeline C1, a pump oil supply path for the pump chamber 16 is formed, and the second pipeline C2 and the second part P2 form a discharge path for the pump oil contaminated by air extraction in the pump chamber 16. Since the first part P1 and the second part P2 are separated by the partition S, these two paths are completely separated, so there is no problem of secondary pollution caused by the mixing of the pump oil in the first part P1 and the pump oil in the second part P2.

[0056] For cooling, as shown in Figure 2 and Figure 3 , the vacuum pump 1 may further include a water cooling mechanism 18 for cooling the pump chamber 16. Further, the water cooling mechanism 18 includes a water cooling sandwich layer 181, a cooling water inlet 182, and a cooling water return port 183. The water cooling sandwich layer 181 is disposed on the pump chamber 16, and the cooling water inlet 182 and the cooling water return port 183 communicate with the water cooling sandwich layer 181. The cooling water inlet 182, the water cooling sandwich layer 181, and the cooling water return port 183 are used together to allow external cooling water to flow through to cool the pump chamber 16.

[0057] To further improve the stability of the vacuum pump 1, as shown in Figure 2 and Figure 3 , the vacuum pump 1 further includes a plurality of vibration damping spring seats 19 that support the bottom of the pump chamber 16 from below for vibration damping.

[0058] As shown in Figure 2 and Figure 3 , in one example, the vacuum pump 1 further includes a fourth manual ball valve Vh4, and the fourth manual ball valve Vh4 is disposed at the oil drain port 12 for manually controlling the connection or disconnection between the oil drain port 12 and the oil inlet connecting pipe 21.

[0059] As shown in Figure 2 and Figure 3As shown, in one example, the oil pipe connection system 2 further includes a check valve Vd; the check valve Vd is disposed in the oil return connection pipe 22, and the check valve Vd is configured to allow the filtered pump oil flowing back via the oil return connection pipe 22 to flow unidirectionally back to the oil return pipe 11 and then unidirectionally back into the vacuum pump fuel tank 10. Through the check valve Vd, the filtered pump oil is prevented from flowing back reversely into the oil filter fuel tank 31, thereby ensuring the normal operation of the vacuum pump assembly 100 and the normal operation of the subsequent zinc selenide chemical vapor deposition system 1000.

[0060] As Figure 2 and Figure 3 shown, in one example, the oil pipe connection system 2 further includes a third manual ball valve Vh3; the third manual ball valve Vh3 is disposed in the oil return connection pipe 22, and the third manual ball valve Vh3 is used to manually control the unidirectional flow of the filtered pump oil flowing back via the oil return connection pipe 22 back to the oil return pipe 11 and then into the vacuum pump fuel tank 10.

[0061] For ease of disassembly and assembly, as Figure 2 and Figure 3 shown, in one example, the inlet oil connection pipe 21 and the oil drain port 12 are connected by a flange F; the inlet oil connection pipe 21 and the inlet oil pipe 33 are connected by a flange F; the outlet oil pipe 34 and the oil return connection pipe 22 are connected by a flange F; the oil return pipe 11 and the oil return connection pipe 22 are connected by a flange F.

[0062] In the oil filter 3, in one example, the filter element 32 is a filter element with a filtration accuracy of 1 - 20 μm. The filter element 32 can be processed from wear-resistant and impact-resistant materials such as stainless steel wire meshes.

[0063] In the oil filter 3, for example, the booster pump 35 is an electric booster pump.

[0064] As Figure 2 and Figure 3 shown, in one example, the oil filter 3 further includes a first manual ball valve Vh1, a first solenoid valve Vem1, a second manual ball valve Vh2, and a second solenoid valve Vem2. The first manual ball valve Vh1 is disposed in the inlet oil pipe 33, and the first manual ball valve Vh1 is used to manually control the connection or disconnection between the inlet oil pipe 33 and the oil drain port 12; the first solenoid valve Vem1 is disposed in the inlet oil pipe 33, and the first solenoid valve Vem1 is used to automatically control the connection or disconnection between the inlet oil pipe 33 and the oil drain port 12; the second manual ball valve Vh2 is disposed in the outlet oil pipe 34, and the second manual ball valve Vh2 is used to manually control the connection or disconnection between the outlet oil pipe 34 and the oil return pipe 11; the second solenoid valve Vem2 is disposed in the outlet oil pipe 34, and the second solenoid valve Vem2 is used to automatically control the connection or disconnection between the outlet oil pipe 34 and the oil return pipe 11.

[0065] As Figure 2 andFigure 3 As shown, in one example, the oil filter 3 further includes a heater 36 and a thermocouple 37. The heater 36 is used to heat the pumped oil entering the oil tank 31 of the oil filter; the thermocouple 37 is used to detect the temperature of the pumped oil entering the oil tank 31 of the oil filter.

[0066] As Figure 2 and Figure 3 shown, in one example, the oil filter 3 further includes a regulating valve Va and a digital display pressure gauge P. The regulating valve Va is arranged on the inlet pipe 33, and the regulating valve Va is used to control the pressure of the pumped oil flowing through the inlet pipe 33 to the oil tank 31 of the oil filter. The digital display pressure gauge P is arranged on the inlet pipe 33, and the digital display pressure gauge P is used to digitally display the pressure of the pumped oil flowing through the inlet pipe 33 to the oil tank 31 of the oil filter.

[0067] As Figure 2 and Figure 3 shown, in one example, the oil filter 3 further includes a control panel 38; the control panel 38 is communicatively connected to the heater 36, the thermocouple 37, the digital display pressure gauge P, and the motor 15 of the vacuum pump 1. The control panel 38 is used to set the heating of the heater 36, the temperature detected by the thermocouple 37 (for example, controlled at 45 - 80 °C), the pressure displayed by the digital display pressure gauge P (for example, the pressure is controlled at 1 - 5 kg / cm 2 ) and the operating parameters of the motor 15 of the vacuum pump 1 (for example, the current of the motor 15 is controlled at 20 - 50 A). Through the control panel 38, the situation of the pumped oil can be detected online in real time.

[0068] [Zinc Selenide Chemical Vapor Deposition System]

[0069] Referring to Figure 4 and combining with Figure 2 and Figure 3 , according to the present disclosure, the zinc selenide chemical vapor deposition system 1000 includes a deposition chamber 200 and the aforementioned vacuum pump assembly 100. The deposition chamber 200 is used for chemical vapor deposition to form zinc selenide crystals with zinc and hydrogen selenide as raw materials and an inert gas as a carrier gas. The vacuum pump assembly 100 is communicated with the exhaust port 200a of the deposition chamber 200.

[0070] The features, operations, and effects of the vacuum pump assembly 100 are as described above, and will not be repeated here.

[0071] In the zinc selenide chemical vapor deposition system 1000 according to the present disclosure, the vacuum pump 1 of the vacuum pump assembly 100 pumps air using pump oil for the deposition chamber 200 of the zinc selenide chemical vapor deposition that needs to maintain a flowing vacuum and exhausts downstream. Through the oil pipe connection system 2 and the oil filter 3, the pump oil can be filtered and cleaned when the vacuum pump 1 operates continuously online (even for a long time). Not only the zinc selenide and selenium elemental dust that contaminate the pump oil during air pumping are removed, but the pump oil for air pumping and exhaust will not become viscous due to the contamination of the dust carried during air pumping. The operating load of the vacuum pump 1 when continuously pumping air and exhausting online even for a long time will not increase, avoiding sudden stoppage of the vacuum pump 1, and further avoiding overpressure in the deposition chamber 200, thus ensuring the normal operation of the entire operation process of the deposition chamber 200.

[0072] Similarly, referring to Figure 4 , in one example, the zinc selenide chemical vapor deposition system 1000 further includes a tail gas treatment device 300 and an exhaust fan 400. The tail gas treatment device 300 is used to receive the exhaust gas of the vacuum pump 1 of the vacuum pump assembly 100 for tail gas treatment of the exhaust gas; the exhaust fan 400 is connected to the tail gas treatment device 300 and is used to extract and discharge the tail gas treated by the tail gas treatment device 300.

[0073] It should be noted that the vacuum pump assembly 100 of the present disclosure can be applied not only to the zinc selenide chemical vapor deposition process that needs to maintain a flowing vacuum, but also to any other chemical vapor deposition process that uses pump oil for air pumping and exhaust and generates solid powder impurities that contaminate the pump oil and needs to maintain a flowing vacuum.

[0074] Multiple exemplary embodiments are described using the detailed description above, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise specified, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of brevity.

Claims

1. A vacuum pump assembly, characterized in that the vacuum pump assembly (100) includes a vacuum pump (1), an oil pipe connection system (2), and an oil filter (3); the vacuum pump (1) is used for pumping air and exhausting air through pump oil. The vacuum pump (1) includes a vacuum pump oil tank (10), a return oil pipe (11), and an oil drain port (12). The vacuum pump oil tank (10) is used for containing the initial pump oil and the filtered pump oil for pumping air and exhausting air through pump oil. The return oil pipe (11) and the oil drain port (12) communicate with the vacuum pump oil tank (10); the oil pipe connection system (2) includes an oil inlet connection pipe (21) and an oil return connection pipe (22); the oil filter (3) includes an oil filter oil tank (31), a filter element (32), an oil inlet pipe (33), an oil outlet pipe (34), and a booster pump (35). The oil inlet pipe (33) is connected to the oil drain port (12) and the oil filter oil tank (31) via the oil inlet connection pipe (21). The filter element (32) is placed in the oil filter oil tank (31). The booster pump (35) is arranged on the oil inlet pipe (33) and is used for pumping the pump oil in the vacuum pump oil tank (10) into the filter element (32) in the oil filter oil tank (31) for filtering. The oil outlet pipe (34) communicates with the oil filter oil tank (31) and is used for discharging the pump oil filtered by the filter element (32); the oil return connection pipe (22) connects the oil outlet pipe (34) and the return oil pipe (11). The oil return connection pipe (22) and the return oil pipe (11) are used for the filtered pump oil discharged from the oil outlet pipe (34) to flow back into the vacuum pump oil tank (10).

2. The vacuum pump assembly according to claim 1, characterized in that the vacuum pump (1) further includes a motor (15), a pump chamber (16), and a variable volume motion mechanism (17); the pump oil in the vacuum pump oil tank (10) is used for circularly supplying to the pump chamber (16). The variable volume motion mechanism (17) is arranged in the pump chamber (16) and is connected to the motor (15) for the variable volume motion mechanism (17) to move in the pump chamber (16) under the drive of the motor (15) to pump air and exhaust air by using the volume change of the pump chamber (16) through the pump oil in the pump chamber (16).

3. The vacuum pump assembly according to claim 2, characterized in that the vacuum pump oil tank (10) is an oil tank with an empty interior and no partitions; the vacuum pump (1) further includes a first pipeline (C1) and a second pipeline (C2); one end of the first pipeline (C1) is connected to a position of the vacuum pump oil tank (10) below the liquid level of the pump oil, close to the liquid level and far from the oil drain port (12). The other end of the first pipeline (C1) is connected to the pump oil inlet position (Pi) of the pump chamber (16); one end of the second pipeline (C2) is connected to the bottom of the vacuum pump oil tank (10) and close to the oil drain port (12). The other end of the second pipeline (C2) is connected to the pump oil outlet position (Po) of the pump chamber (16).

4. The vacuum pump assembly according to claim 2, characterized in that a partition (S) is provided in the vacuum pump oil tank (10). The partition (S) divides the interior of the vacuum pump oil tank (10) into a first part (P1) and a second part (P2); The vacuum pump (1) further includes a first pipeline (C1) and a second pipeline (C2); One end of the first pipeline (C1) is connected to the first part (P1) of the vacuum pump oil tank (10), and the other end of the first pipeline (C1) is connected to the oil inlet position (Pi) of the pump chamber (16); One end of the second pipeline (C2) is connected to the second part (P2) of the vacuum pump oil tank (10), and the other end of the second pipeline (C2) is connected to the oil outlet position (Po) of the pump chamber (16); The oil return pipe (11) extends into the first part (P1), and the oil drain port (12) is connected to the second part (P2).

5. The vacuum pump assembly according to claim 2, wherein The oil filter (3) further includes a heater (36) and a thermocouple (37); The heater (36) is used to heat the pump oil entering the oil filter oil tank (31); The thermocouple (37) is used to detect the temperature of the pump oil entering the oil filter oil tank (31).

6. The vacuum pump assembly according to claim 5, wherein The oil filter (3) further includes a regulating valve (Va) and a digital display pressure gauge (P); The regulating valve (Va) is arranged on the inlet pipe (33), and the regulating valve (Va) is used to control the pressure of the pump oil flowing through the inlet pipe (33) to the oil filter oil tank (31); The digital display pressure gauge (P) is arranged on the inlet pipe (33), and the digital display pressure gauge (P) is used to digitally display the pressure of the pump oil flowing through the inlet pipe (33) to the oil filter oil tank (31).

7. The vacuum pump assembly according to claim 6, wherein The oil filter (3) further includes a control panel (38); The control panel (38) is communicatively connected to the heater (36), the thermocouple (37), the digital display pressure gauge (P), and the motor (15) of the vacuum pump (1). The control panel (38) is used to set the heating of the heater (36), the temperature detected by the thermocouple (37), the pressure displayed by the digital display pressure gauge (P), and the operating parameters of the motor (15) of the vacuum pump (1).

8. The vacuum pump assembly according to claim 1, wherein The filter element (32) is a filter element with a filtration accuracy of 1 - 20 μm.

9. The vacuum pump assembly according to claim 1, wherein The oil pipe connection system (2) further includes a check valve (Vd); The check valve (Vd) is arranged on the oil return connection pipe (22), and the check valve (Vd) is used to make the filtered pump oil flowing back through the oil return connection pipe (22) flow unidirectionally back to the oil return pipe (11), and then unidirectionally flow back into the vacuum pump oil tank (10).

10. A zinc selenide chemical vapor deposition system, including a deposition chamber (200), and the deposition chamber (200) is used for chemical vapor deposition to form zinc selenide crystals with zinc and hydrogen selenide as raw materials and an inert gas as a carrier gas, characterized in that The zinc selenide chemical vapor deposition system (1000) further includes the vacuum pump assembly according to any one of claims 1 - 9, and the vacuum pump assembly (100) is communicated with the exhaust port (200a) of the deposition chamber (200).

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