Semiconductor high-vacuum ball valve

Abstract

The utility model discloses a semiconductor high vacuum ball valve which comprises a valve body, the valve body is fixedly connected with a valve cover through a bolt, a ball body is attached to the interior of the valve body, a valve rod is connected to the top of the ball body in an inserted mode, the valve rod extends into the valve body, and a connecting base is fixedly connected to the surface of the valve body. A replacing mechanism is arranged in the valve body and comprises an inserting groove. The utility model relates to the technical field of semiconductors, in particular to a semiconductor high-vacuum ball valve, which realizes convenient replacement of a sealing ring on a valve rod through matching of a connecting button, a threaded rod, a threaded hole, an inserting plate, an inserting groove and the sealing ring, and solves the problem that the sealing ring on a valve rod of an existing high-vacuum ball valve is inconvenient to replace when being used. And due to mutual friction between the sealing ring and the valve rod, the sealing ring is troublesome to replace, so that the sealing ring on the valve rod is inconvenient to replace.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a semiconductor high-vacuum ball valve. Background Technique

[0002] A semiconductor refers to a material whose electrical conductivity at room temperature is between that of a conductor and an insulator. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. When producing semiconductor raw materials, a high-vacuum ball valve is used to control the semiconductor raw materials.

[0003] When the existing high-vacuum ball valve is in use, a sealing ring is sleeved on the valve stem to increase the sealing performance of the valve stem and improve the use effect of the high-vacuum ball valve;

[0004] However, when the sealing ring on the valve stem of the existing high-vacuum ball valve is in use, due to the mutual friction between the sealing ring and the valve stem, after long-term use, the sealing ring on the valve stem needs to be replaced, resulting in trouble and time waste when replacing the sealing ring, thus making it inconvenient to replace the sealing ring on the valve stem. Content of the Utility Model

[0005] Aiming at the deficiencies of the prior art, the utility model provides a semiconductor high-vacuum ball valve, which solves the problem that when the sealing ring on the valve stem of the existing high-vacuum ball valve is in use, due to the mutual friction between the sealing ring and the valve stem, it is more troublesome to replace the sealing ring, thus making it inconvenient to replace the sealing ring on the valve stem.

[0006] To achieve the above object, the utility model is realized through the following technical solutions: A semiconductor high-vacuum ball valve, including a valve body, the valve body is fixedly connected with a valve cover through bolts, a sphere is fitted inside the valve body, a valve stem is inserted into the top of the sphere, the valve stem extends into the valve body, a connection seat is fixedly connected to the surface of the valve body, and a replacement mechanism is arranged inside the valve body. The replacement mechanism includes: slots respectively opened on the inner walls of the valve body and the valve cover; a plug board fixedly connected to the outer wall of the connection seat and penetrating the inner wall of the slot; a threaded hole opened on the inner wall of the plug board; threaded rods respectively threadedly connected to the inner walls of the valve body and the valve cover and threadedly connected to the inner wall of the threaded hole; connection buttons respectively fitted on the outer walls of the valve body and the valve cover and fixedly connected to the ends of the threaded rods; sealing rings respectively fitted on the inner wall and the outer wall of the valve body; an extrusion assembly arranged inside the connection seat; wherein, when the threaded rod is driven by the connection button, it leaves the threaded hole, releases the fixation of the plug board, removes the connection seat, replaces the sealing ring, and squeezes the sealing ring through the extrusion assembly.

[0007] Preferably, the extrusion assembly includes: a cavity formed inside the connecting seat; a spring fixedly connected to the inner wall of the cavity; a vertical column fixedly connected to the end of the spring, passing through the connecting seat and movably connected to the connecting seat; a pressing block fixedly connected to the end of the vertical column and fitting against the outer wall of the sealing ring; wherein, the elastic force of the spring is used to extrude the sealing ring by the pressing block, so that the sealing ring is closely attached to the outer wall of the valve stem.

[0008] Preferably, a handle is fixedly connected to the outer wall of the valve stem.

[0009] Preferably, sealing gaskets are respectively fixedly connected to the inner walls of the valve body and the valve cover, and the outer walls of the two sealing gaskets are both attached to the outer wall of the sphere.

[0010] Preferably, mounting holes are respectively formed in the inner walls of the valve body and the valve cover.

[0011] Beneficial effects

[0012] The present utility model provides a semiconductor high-vacuum ball valve, which has the following beneficial effects: for this semiconductor high-vacuum ball valve, through the cooperation among the connecting button, the threaded rod, the threaded hole, the insertion plate, the insertion slot and the sealing ring, it is convenient to replace the sealing ring on the valve stem, and solves the problem that when the sealing ring on the valve stem of the existing high-vacuum ball valve is in use, due to the mutual friction between the sealing ring and the valve stem, it is rather troublesome to replace the sealing ring, thus making it inconvenient to replace the sealing ring on the valve stem.

[0013] Through the cooperation among the spring, the vertical column, the pressing block and the cavity, the extrusion of the sealing ring is realized, improving the sealing performance of the sealing ring, and solving the problem that when the sealing ring is in use, the sealing ring is only attached to the valve stem, and there may be gaps when the valve stem rotates. Description of the drawings

[0014] Figure 1 is a structural schematic diagram of the present utility model;

[0015] Figure 2 is Figure 1 the external appearance schematic diagram of

[0016] Figure 3 is Figure 1 the structural schematic diagram of the threaded rod, the insertion plate and the connecting seat in

[0017] Figure 4 is Figure 3 the structural schematic diagram of the vertical column, the pressing block and the sealing ring in

[0018] In the figure: 1, valve body; 11, mounting hole; 2, ball; 21, gasket; 3, valve cover; 4, bolt; 5, replacement mechanism; 51, connecting knob; 52, threaded rod; 53, threaded hole; 54, insertion plate; 55, slot; 56, sealing ring; 57, extrusion assembly; 571, spring; 572, vertical column; 573, pressing block; 574, cavity; 6, valve stem; 61, handle; 7, connecting seat. Detailed implementation mode

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] When the sealing ring on the valve stem of the existing high-vacuum ball valve is in use, due to the mutual friction between the sealing ring and the valve stem, it is rather troublesome to replace the sealing ring, thus making it inconvenient to replace the sealing ring on the valve stem.

[0021] In view of this, the present invention provides a semiconductor high-vacuum ball valve. Through the cooperation among the connecting knob, the threaded rod, the threaded hole, the insertion plate, the slot and the sealing ring, it is convenient to replace the sealing ring on the valve stem, solving the problem that when the sealing ring on the valve stem of the existing high-vacuum ball valve is in use, due to the mutual friction between the sealing ring and the valve stem, it is rather troublesome to replace the sealing ring, thus making it inconvenient to replace the sealing ring on the valve stem.

[0022] Through the personnel in this field, the components in this case are connected in sequence. For the specific connection and operation sequence, reference should be made to the following working principle. The detailed connection means are well-known technologies in this field. The following mainly introduces the working principle and process.

[0023] Embodiment 1, consists of Figures 1-4It can be seen that a semiconductor high-vacuum ball valve in this case includes a valve body 1. The valve body 1 is fixedly connected to a valve cover 3 through bolts 4. The staff fixes the valve body 1 and the valve cover 3 together by rotating the bolts 4. A sphere 2 is fitted inside the valve body 1. The cavity gap between the sphere 2 and the valve body 1 is small. A valve stem 6 is inserted into the top of the sphere 2. By rotating the valve stem 6, the valve stem 6 drives the sphere 2 to rotate, opening the ball valve. By rotating the valve stem 6 in the opposite direction, the ball valve is closed. The valve stem 6 extends into the valve body 1. A connecting seat 7 is fixedly connected to the surface of the valve body 1. A replacement mechanism 5 is arranged inside the valve body 1. The replacement mechanism 5 includes: slots 55 respectively opened on the inner walls of the valve body 1 and the valve cover 3, an insertion plate 54 fixedly connected to the outer wall of the connecting seat 7. The staff moves the connecting seat 7, and the connecting seat 7 drives the insertion plate 54 to leave the slot 55. At this time, the sealing ring 56 is exposed. The sealing ring 56 is taken out, and a new sealing ring 56 is put into the valve body 1. After completion, the staff places the connecting seat 7 on the valve body 1. At this time, the insertion plate 54 is inserted into the slot 55. The staff rotates the connecting knobs 51 on both sides in the opposite direction in turn, thereby driving the threaded rods 52 on both sides to rotate back into the threaded holes 53 and penetrate the inner wall of the slot 55. The threaded holes 53 are opened on the inner wall of the insertion plate 54. The threaded rods 52 are respectively threadedly connected to the inner walls of the valve body 1 and the valve cover 3 and are threadedly connected to the inner wall of the threaded hole 53. When the threaded rods 52 rotate out of the threaded holes 53, the fixation of the insertion plate 54 is released. The connecting knobs 51 are respectively attached to the outer walls of the valve body 1 and the valve cover 3 and are fixedly connected to the ends of the threaded rods 52. The connecting knobs 51 drive the threaded rods 52 to rotate. The sealing rings 56 are respectively attached to the inner wall of the valve body 1 and the outer wall of the valve stem 6. A pressing component 57 is arranged inside the connecting seat 7. Among them, when the threaded rods 52 are driven by the connecting knobs 51, they leave the threaded holes 53, releasing the fixation of the insertion plate 54, removing the connecting seat 7, replacing the sealing ring 56, and pressing the sealing ring 56 through the pressing component 57;

[0024] In the specific implementation process, it is particularly worth noting that the staff fixes the valve body 1 and the valve cover 3 together by rotating the bolt 4. The cavity gap between the sphere 2 and the valve body 1 is small. When the valve stem 6 is rotated, the valve stem 6 drives the sphere 2 to rotate, opening the ball valve. When the valve stem 6 is rotated in the opposite direction, the ball valve is closed. The sealing ring 56 enables the overall ball valve to have good performance under positive pressure or vacuum conditions. The staff rotates the connecting knobs 51 on both sides in sequence. The connecting knob 51 drives the threaded rod 52 to rotate. The threaded rod 52 rotates out of the threaded hole 53, releasing the fixation of the plug plate 54. The staff moves the connecting seat 7, and the connecting seat 7 drives the plug plate 54 to leave the slot 55. At this time, the sealing ring 56 is exposed. The sealing ring 56 is taken out, and a new sealing ring 56 is placed into the valve body 1. After completion, the staff places the connecting seat 7 on the valve body 1. At this time, the plug plate 54 is inserted into the slot 55. The staff rotates the connecting knobs 51 on both sides in the opposite direction in sequence, thereby driving the threaded rods 52 on both sides to rotate back into the threaded holes 53, realizing convenient replacement of the sealing ring 56 on the valve stem 6;

[0025] Further, the pressing assembly 57 includes: a cavity 574 opened inside the connecting seat 7. The material of the spring 571 is carbon spring steel. The elastic coefficient of the spring 571 is selected according to actual needs to meet the work requirements. The spring 571 is fixedly connected to the inner wall of the cavity 574. The vertical column 572 is fixedly connected to the end of the spring 571. The vertical column 572 compresses the spring 571. Through the elastic force of the spring 571, the pressing block 573 is in close contact with the sealing ring 56, and penetrates through the connecting seat 7 and is movably connected to the connecting seat 7. At this time, the pressing block 573 drives the vertical column 572 to move. The vertical column 572 moves in the connecting seat 7. The pressing block 573 is fixedly connected to the end of the vertical column 572 and fits against the outer wall of the sealing ring 56. The pressing block 573 contacts the sealing ring 56. Among them, through the elastic force of the spring 571, the pressing block 573 squeezes the sealing ring 56, making the sealing ring 56 fit tightly against the outer wall of the valve stem 6;

[0026] In the specific implementation process, it is particularly worth noting that the material of the spring 571 is carbon spring steel. The elastic coefficient of the spring 571 is selected according to actual needs to meet the work requirements. When the staff places the connecting seat 7 back on the valve body 1 again, the pressing block 573 contacts the sealing ring 56. At this time, the pressing block 573 drives the vertical column 572 to move. The vertical column 572 moves in the connecting seat 7. The vertical column 572 compresses the spring 571. Through the elastic force of the spring 571, the pressing block 573 is in close contact with the sealing ring 56, realizing improved sealing performance of the sealing ring 56;

[0027] Further, a handle 61 is fixedly connected to the outer wall of the valve stem 6. When rotating the valve stem 6, the staff rotates the handle 61, and the handle 61 drives the valve stem 6 to rotate, realizing convenient rotation of the valve stem 6 by the staff;

[0028] In the specific implementation process, it is particularly worth noting that when rotating the valve stem 6, the staff rotates the handle 61, and the handle 61 drives the valve stem 6 to rotate, facilitating the staff to rotate the valve stem 6;

[0029] Specifically, the staff fixes the valve body 1 and the valve cover 3 together by rotating the bolt 4. The staff rotates the handle 61, and the handle 61 drives the valve stem 6 to rotate to open the ball valve. Rotating the handle 61 in the opposite direction closes the ball valve. When the sealing ring 56 needs to be replaced, the staff rotates the connecting buttons 51 on both sides in sequence. The connecting button 51 drives the threaded rod 52 to rotate, and the threaded rod 52 rotates out of the threaded hole 53 to release the fixation of the plug board 54. The staff moves the connecting seat 7, and the connecting seat 7 drives the plug board 54 to leave the slot 55. At this time, the sealing ring 56 is exposed. The sealing ring 56 is taken out, and a new sealing ring 56 is put into the valve body 1. After completion, the staff places the connecting seat 7 on the valve body 1. At this time, the plug board 54 is inserted into the slot 55. The staff rotates the connecting buttons 51 on both sides in the opposite direction in sequence, thereby driving the threaded rods 52 on both sides to rotate back into the threaded hole 53 to replace the sealing ring 56. When the staff places the connecting seat 7 back on the valve body 1 again, the pressing block 573 contacts the sealing ring 56. At this time, the pressing block 573 drives the vertical column 572 to move, and the vertical column 572 moves in the connecting seat 7. The vertical column 572 compresses the spring 571. Through the elastic force of the spring 571, the pressing block 573 is tightly attached to the sealing ring 56, improving the sealing performance of the sealing ring 56.

[0030] Example 2, from Figure 1 and 2 it can be seen that sealing gaskets 21 are respectively fixedly connected to the inner walls of the valve body 1 and the valve cover 3. The outer walls of the two sealing gaskets 21 are both attached to the outer wall of the sphere 2. The two sealing gaskets 21 increase the sealing performance between the sphere 2 and the valve body 1 and the valve cover 3, preventing impurities from entering through the gap between the sphere 2 and the valve body 1;

[0031] In the specific implementation process, it is particularly worth noting that the two sealing gaskets 21 increase the sealing performance between the sphere 2 and the valve body 1 and the valve cover 3, preventing impurities from entering through the gap between the sphere 2 and the valve body 1;

[0032] Furthermore, installation holes 11 are respectively formed in the inner walls of the valve body 1 and the valve cover 3. The staff installs the entire ball valve onto the pipeline through the installation holes 11 on the valve body 1 and the valve cover 3 for use;

[0033] In the specific implementation process, it is particularly worth noting that the staff installs the entire ball valve onto the pipeline through the installation holes 11 on the valve body 1 and the valve cover 3 for use.

[0034] Specifically, the staff installs the overall ball valve onto the pipeline through the installation holes 11 on the valve body 1 and the valve cover 3 for use. The two gaskets 21 increase the sealing performance between the sphere 2 and the valve body 1 and the valve cover 3, preventing impurities from entering the gap between the sphere 2 and the valve body 1.

[0035] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising a..." does not exclude the existence of additional identical elements in the process, method, article or device comprising said element.

[0036] In the present utility model, unless otherwise clearly defined and limited, terms such as "installation", "setting", "connection", "fixation", "rotation connection", etc. shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components. Unless otherwise clearly defined, for those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0037] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A semiconductor high-vacuum ball valve, comprising a valve body (1), characterized in that: The valve body (1) is fixedly connected with a valve cover (3) by bolts (4). A sphere (2) is fitted inside the valve body (1). A valve stem (6) is inserted into the top of the sphere (2). The valve stem (6) extends into the valve body (1). A connecting seat (7) is fixedly connected to the surface of the valve body (1). A replacement mechanism (5) is arranged inside the valve body (1). The replacement mechanism (5) includes: Slots (55) are respectively formed in the inner walls of the valve body (1) and the valve cover (3); A plug board (54) is fixedly connected to the outer wall of the connecting seat (7) and penetrates the inner wall of the slot (55); Threaded holes (53) are formed in the inner wall of the plug board (54); Threaded rods (52) are respectively threadedly connected to the inner walls of the valve body (1) and the valve cover (3) and are threadedly connected to the inner wall of the threaded hole (53); Connection buttons (51) are respectively attached to the outer walls of the valve body (1) and the valve cover (3) and are fixedly connected to the ends of the threaded rods (52); Sealing rings (56) are respectively attached to the inner wall of the valve body (1) and the outer wall of the valve stem (6); An extrusion assembly (57) is arranged inside the connecting seat (7); Among them, when the threaded rod (52) is driven by the connection button (51), it leaves the threaded hole (53), releases the fixation of the plug board (54), removes the connecting seat (7), replaces the sealing ring (56), and squeezes the sealing ring (56) through the extrusion assembly (57).

2. The semiconductor high-vacuum ball valve according to claim 1, characterized in that: The extrusion assembly (57) includes: A cavity (574) is formed inside the connecting seat (7); A spring (571) is fixedly connected to the inner wall of the cavity (574); A vertical column (572) is fixedly connected to the end of the spring (571), penetrates the connecting seat (7), and is movably connected to the connecting seat (7); A pressing block (573) is fixedly connected to the end of the vertical column (572) and is attached to the outer wall of the sealing ring (56); Among them, the pressing block (573) squeezes the sealing ring (56) through the elastic force of the spring (571) so that the sealing ring (56) closely fits on the outer wall of the valve stem (6).

3. A semiconductor high-vacuum ball valve according to claim 1, characterized in that: A handle (61) is fixedly connected to the outer wall of the valve stem (6).

4. A semiconductor high-vacuum ball valve according to claim 1, characterized in that: Sealing gaskets (21) are respectively fixedly connected to the inner walls of the valve body (1) and the valve cover (3). The outer walls of the two sealing gaskets (21) are both attached to the outer wall of the sphere (2).

5. A semiconductor high-vacuum ball valve according to claim 1, characterized in that: Mounting holes (11) are respectively formed in the inner walls of the valve body (1) and the valve cover (3).

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