Laser absorption device and laser processing equipment

Abstract

The utility model discloses a laser absorption device and laser processing equipment, the laser absorption device comprises a shell, a light transmission part and a heat dissipation part, the light transmission part is arranged at an opening in one side of the shell, and a first cooling channel is formed in the shell; the shell is provided with the second cooling channel, the reflected light can be emitted into the shell through the light transmitting piece and is absorbed, and the problem that the reflected light interferes with a working light path is solved. Meanwhile, heat dissipation media are input into the first cooling channel and the second cooling channel, heat dissipation can be conducted on the interior and the exterior of the shell respectively, the heat dissipation piece can increase the heat dissipation area, and heat dissipation is further promoted. The outward side face of the light-transmitting piece is obliquely arranged, so that a larger lighting range can be obtained, and the collection rate of reflected light is improved.

Description

Technical Field

[0001] The present application relates to the field of laser processing equipment, and particularly relates to a laser absorption device and a laser processing equipment. Background Art

[0002] When some workpieces are processed using a line-shaped light spot, taking the processing of an OLED flexible display screen as an example, in the laser lift-off or laser annealing process, the line-shaped light spot needs to scan OLED display screens with different lengths. Then, a spot intercepting structure is required to control the length of the line-shaped light spot. When the linear light irradiates on the upper surface of the spot intercepting mechanism, a certain amount of reflected light will be generated. If the reflected light cannot be quickly absorbed, it will irradiate the internal mechanism of the light outlet to form a thermal burn, and some of the reflected light will re-enter the optical system, which has a certain interference with the original line-shaped light spot. Utility Model Content

[0003] The present application provides a laser absorption device and a laser processing equipment, which can absorb the reflected light of the laser.

[0004] The present application provides a laser absorption device, including:

[0005] A housing, one side of the housing is provided with an opening, the opening is arranged along the length direction of the housing, and a first cooling channel is formed inside the housing; the housing is surrounded by a housing wall, an optical absorption area is provided on the inner surface of the housing wall, and a second cooling channel is provided on the housing wall;

[0006] A light transmissive member, arranged at the opening, and the side surface of the light transmissive member facing outward is inclined downward;

[0007] A heat dissipation member, arranged on the inner wall of the housing away from the opening.

[0008] In some embodiments, the housing wall includes two end caps arranged at intervals, and an upper wall assembly, a side wall assembly and a lower wall assembly which are arranged between the end caps and are sequentially connected. The light transmissive member is respectively connected to the edges of the end caps, the upper wall assembly and the lower wall assembly.

[0009] In some embodiments, the opening is arranged along the length direction of the upper wall assembly, the width of the upper wall assembly is greater than the width of the lower wall assembly, the light transmissive member is connected to the edges of the upper wall assembly and the lower wall assembly, and one side surface of the light transmissive member is inclined downward.

[0010] In some embodiments, the surface of the upper wall assembly facing the lower wall assembly is provided with a slope surface, the slope surface faces the side wall assembly; the slope surface is provided with a reflection area and / or an optical absorption area.

[0011] In some embodiments, at least one of the upper wall assembly, the side wall assembly, and the lower wall assembly is provided with the second cooling channel.

[0012] In some embodiments, the lower wall assembly includes a trough-shaped member and a cover plate disposed at the opening of the trough-shaped member, and the trough-shaped member and the cover plate enclose to form the second cooling channel.

[0013] In some embodiments, the heat dissipating member includes fins or protrusions disposed on the inner wall of the side wall assembly.

[0014] In some embodiments, the laser absorption device further includes rollers disposed at the lower part of the housing, and the rolling of the rollers enables the laser absorption device to move along the length direction.

[0015] In some embodiments, the laser absorption device further includes a gas supply device and a gas drying device communicated with the first cooling channel.

[0016] The present application also provides a laser processing device, which includes the above-mentioned laser absorption device, and the laser processing device further includes a machine table for mounting the laser absorption device.

[0017] The present application provides a laser absorption device and a laser processing device. The laser absorption device includes a housing, a light-transmitting member, and a heat dissipating member. The light-transmitting member is disposed at an opening on one side of the housing, and a first cooling channel is formed inside the housing; a second cooling channel is provided on the housing, and the reflected light can enter the housing through the light-transmitting member and be absorbed, solving the problem of the reflected light interfering with the working optical path. At the same time, by inputting a heat dissipating medium into the first cooling channel and the second cooling channel, the inside and outside of the housing can be respectively cooled, and the heat dissipating member can increase the heat dissipation area, further improving the heat dissipation efficiency. The outer side surface of the light-transmitting member is inclined to obtain a larger daylighting range and improve the collection rate of the reflected light. Description of the Drawings

[0018] Figure 1 It is a schematic structural diagram of a laser absorption device in an embodiment of the present application;

[0019] Figure 2 It is a schematic structural diagram of a laser absorption device in another embodiment of the present application.

[0020] Reference Numeral Description:

[0021] 10. Housing; 11. First cooling channel; 12. Second cooling channel; 13. Light-transmitting member; 14. End cover; 20. Upper wall assembly; 30. Side wall assembly; 40. Lower wall assembly; 41. Trough-shaped member; 42. Cover plate; 50. Heat dissipating member; 61. Roller; 70. Guide rail;

[0022] The realization of the purpose, functional characteristics and advantages of this application will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners

[0023] Next, the solutions in the embodiments of this application will be clearly and completely described with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of this application.

[0024] It should be noted that all directional indications such as up, down, left, right, front, back... in the embodiments of this application are only used to explain the relative positional relationship and movement conditions between components in a specific posture as shown in the accompanying drawings. If this specific posture changes, the directional indications will also change accordingly.

[0025] It should also be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may be a middle element at the same time. When an element is referred to as "connected to" another element, it can be directly connected to the other element or there may be a middle element at the same time.

[0026] In addition, the descriptions involving "first", "second", etc. in this application are only for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions appears to be contradictory or unable to be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by this application.

[0027] This application proposes a laser absorption device, referring to Figure 1 and Figure 2, the laser absorption device includes: a housing 10, one side of the housing 10 is provided with an opening, the opening is arranged along the length direction of the housing 10, and a first cooling channel 11 is formed inside the housing 10; the housing 10 is surrounded by a housing wall, the inner surface of the housing wall is provided with a light absorption area, and a second cooling channel 12 is arranged on the housing wall; a light transmissive member 13, arranged at the opening, and the side of the light transmissive member 13 facing outward is inclined downward; a heat dissipation member 50, arranged on the inner wall of the housing 10 away from the opening. In this embodiment, the direction pointed by the straight arrow is the incident direction of the reflected light. By arranging the laser absorption device, it can be used to absorb the reflected light. The reflected light can enter the inside of the housing 10 through the light transmissive member 13 and the opening and be absorbed, avoiding interference with the working optical path. At the same time, heat dissipation media can be input into the first cooling channel 11 and the second cooling channel 12 to dissipate heat from the inside and outside of the housing 10 respectively. The arrangement of the heat dissipation member 50 can accelerate the diffusion of the heat inside the housing 10 to the outside, and at the same time increase the contact area between the heat dissipation medium and the cooling medium inside the first cooling channel 11, further improving the heat dissipation efficiency. The light transmissive member 13 can be selected as quartz glass, and the inclined setting of its outer side can obtain a larger daylighting range and improve the collection rate of the reflected light.

[0028] In some embodiments, referring to Figure 1 and Figure 2 , the housing wall includes two end caps 14 arranged at intervals, and an upper wall assembly 20, a side wall assembly 30 and a lower wall assembly 40 which are arranged between the end caps 14 and are connected in sequence. The light transmissive member 13 is respectively connected to the edges of the end caps 14, the upper wall assembly 20 and the lower wall assembly 40. In this embodiment, the housing 10 can be a strip-shaped structure. The upper wall assembly 20, the side wall assembly 30, the lower wall assembly 40 and the light transmissive member 13 are connected end to end in sequence to form a tubular structure, wherein the upper wall assembly 20 and the lower wall assembly 40 are spaced apart, and the side wall assembly 30 and the light transmissive member 13 are spaced apart. The upper wall assembly 20, the side wall assembly 30, the lower wall assembly 40 and the light transmissive member 13 can be locked by screws, and sealant or sealing rings can also be arranged at the connection parts to achieve sealed connection. The internal cavity of the tubular structure constitutes the above-mentioned first cooling channel 11. The end caps 14 are arranged at both ends of the tubular structure to close both ends of the tubular structure and prevent leakage of the cooling medium. The above-mentioned cooling medium can be air or inert gas. After the reflected light enters the housing 10 through the light transmissive member 13 and irradiates on the inner surface, after a series of absorption and reflection processes, the inner surface of the housing wall can absorb the incident reflected light and generate heat, and the heat is dissipated by the inert gas input in a cycle.

[0029] In some embodiments, referring to Figure 1 and Figure 2, the opening is arranged along the length direction of the upper wall assembly 20, the width of the upper wall assembly 20 is greater than the width of the lower wall assembly 40, the light-transmitting member 13 is connected to the edges of the upper wall assembly 20 and the lower wall assembly 40, and one side surface of the light-transmitting member 13 is inclined downward. In this embodiment, since the reflected light is emitted obliquely upward, the inclined setting of the light-transmitting member 13 can increase the daylighting range and prevent the reflected light from directly irradiating the lower part of the lower wall assembly 40. The lower wall assembly 40 is narrower than the upper wall assembly 20, and after its inward contraction, it can avoid the emitted light to a certain extent. Relative to the lower wall assembly 40, the edge of the upper wall assembly 20 extends outward to a certain extent, which can also collect more reflected light and prevent the reflected light from emitting outside the edge of the upper wall assembly 20, thus maximizing the collection rate of the emitted light as much as possible.

[0030] In some embodiments, referring to Figure 1 and Figure 2 , the surface of the upper wall assembly 20 facing the lower wall assembly 40 is provided with a slope surface, and the slope surface is arranged facing the side wall assembly 30; the slope surface is provided with a reflection area and / or an absorption area. In this embodiment, in addition to absorbing the emitted light, the above slope surface can also reflect part of the reflected light so that its emission direction is towards the inside of the housing 10, and the heat dissipation effect inside the housing 10 is better, improving the heat dissipation efficiency. The above reflection area can be set as a mirror surface, and the absorption area can be set as a diffuse reflection surface to improve the light absorption efficiency. The section of the slope surface close to the light-transmitting member 13 can be set as a mirror surface. Here, the material is thicker and the heat dissipation effect is slightly worse. The section of the slope surface far from the light-transmitting member 13 can be set as a diffuse reflection surface. Here, the material is thinner and the heat dissipation effect is good, which can be used to absorb the reflected light.

[0031] Of course, the surface of the upper wall assembly 20 facing the lower wall assembly 40 can also be set as a V-shaped surface, including a slope surface on the side close to the light-transmitting member 13 and an inclined surface on the side close to the light absorption member. The slope surface can be completely set as a reflection surface, and the inclined surface can be set as a diffuse reflection surface. The surface of the lower wall assembly 40 close to the upper wall assembly 20 is set as a diffuse reflection surface, which can adjust the emission direction of the reflected light entering the housing 10, ensure that the reflected light irradiates completely towards the depth of the housing 10, and ensure the cooling efficiency deep inside the housing 10, which can match the heat generation efficiency after the reflected light is concentrated, so that the device has a better heat dissipation effect.

[0032] In some embodiments, referring to Figure 1 and Figure 2 , at least one of the upper wall assembly 20, the side wall assembly 30 and the lower wall assembly 40 is provided with a second cooling channel 12. In this embodiment, the above second cooling channel 12 can be arranged in any one or two of the three. Of course, in order to improve the heat dissipation efficiency, all three can be provided with the second cooling channel 12. The second cooling channel 12 is also arranged along the length direction of the housing 10, and the cooling medium can be a liquid medium, such as water, etc.

[0033] Furthermore, the lower wall assembly 40 includes a channel-shaped member 41 and a cover plate 42 disposed at the opening of the channel-shaped member 41. The channel-shaped member 41 and the cover plate 42 enclose to form a second cooling channel 12. The above-mentioned channel-shaped member 41 can be a through-channel structure with openings at both ends, and the two ends are closed by end caps 14. It can also be a channel-shaped structure with closed ends. After the cover plate 42 is disposed on the channel-shaped member 41, a sealed chamber, that is, the second cooling channel 12, can be formed. Such a setting can expand the volume of the second cooling channel 12 as much as possible and improve the heat dissipation effect of the lower wall assembly 40. In addition, since the upper wall assembly 20 directly receives the irradiation of the reflected light, its heat load is relatively large. The volume of the second cooling channel 12 in the upper wall assembly 20 can be made larger than the volume of the second cooling channel 12 in the lower wall assembly 40 to accelerate heat dissipation.

[0034] In some embodiments, referring to Figure 1 and Figure 2 , the heat dissipation member 50 includes fins or protrusions disposed on the inner wall of the side wall assembly 30. The above-mentioned fins can absorb more reflected light relative to the diffuse reflection surface, and can also exchange heat with the cooling medium in the first cooling channel 11, improving the contact area and heat dissipation efficiency. Of course, the heat dissipation member 50 is not limited to the fin structure, and can also be a protrusion array, which can also absorb more reflected light relative to the diffuse reflection surface.

[0035] In some embodiments, referring to Figure 1 and Figure 2 , the laser absorption device further includes a roller 61 disposed at the lower part of the housing 10. The rolling of the roller 61 can enable the laser absorption device to move along the length direction. In this embodiment, the laser absorption device can be disposed on one side of the spot intercepting structure to absorb the reflected light. The two can be disposed on a machine table. When maintenance or disassembly of the laser absorption device is required, it can be pulled out along the above-mentioned length direction. The setting of the roller 61 generates rolling friction between the laser absorption device and the machine table, facilitating removal. It should be noted that a handle for grasping can be further disposed on the end cap 14, and a guide rail 70 adapted to the roller 61 is disposed on the machine table. Two sets of rollers 61 are provided, one of which abuts against the bottom surface of the two shoulders of the guide rail 70, and the other set can abut against the side surface of the two shoulders of the guide rail, playing a role of limiting and guiding.

[0036] In some embodiments, referring to Figure 1 and Figure 2 , the laser absorption device further includes a gas supply device and a gas drying device communicated with the first cooling channel 11. The gas supply device can be used to provide carbon dioxide or nitrogen for heat exchange inside the housing 10, playing a cooling effect. The gas drying device is used to dry the inside of the housing 10 to avoid condensation caused by too low temperature, which affects the laser processing equipment.

[0037] It should be noted that two sets of connectors can be provided on the above-mentioned housing 10. One set is provided at both ends of the first cooling channel and is used to communicate with an external gas path. The other set is provided at both ends of the second cooling channel and is used to communicate with an external cooling water path.

[0038] This application also provides a laser processing device. Referring to Figure 1 and Figure 2 , it includes the above-mentioned laser absorption device. The laser processing device further includes a machine table for mounting the laser absorption device. In this embodiment, the laser processing device can be used in the laser peeling or laser annealing process of an OLED flexible display screen, and can also be used in processes such as laser rust removal or laser engraving.

[0039] In the embodiment of this application, the working principles of the laser absorption device and the laser processing device are as follows:

[0040] By providing the laser absorption device, it can be used to absorb the reflected light. The reflected light enters the interior of the housing 10 through the light-transmitting member 13 and the opening and is absorbed, avoiding interference with the working light path. At the same time, heat dissipation media can be input into the first cooling channel 11 and the second cooling channel 12 to dissipate heat from the interior and the exterior of the housing 10 respectively. The setting of the heat dissipation member 50 can accelerate the diffusion of the heat inside the housing 10 to the outside, and at the same time increase the contact area between the heat dissipation medium and the cooling medium inside the first cooling channel 11, further promoting heat dissipation.

[0041] The above are only partial or preferred embodiments of this application. Whether in terms of text or drawings, they cannot limit the scope of protection of this application. Any equivalent structural transformation made using the content of the specification and drawings of this application under the overall concept of this application, or any direct / indirect application in other related technical fields, is included in the scope of protection of this application.

Claims

1. A laser absorption device, characterized in that, Comprising: A housing, on one side of the housing there is an opening which is arranged along the length direction of the housing, and a first cooling channel is formed inside the housing; the housing is surrounded by a housing wall, and a second cooling channel is arranged on the housing wall; A light-transmitting member, arranged at the opening, and the side surface of the light-transmitting member facing outward is inclined downward; A heat dissipating member, arranged on the inner wall of the housing away from the opening.

2. The laser absorption device according to claim 1, wherein, The housing wall includes two end covers arranged at intervals, and an upper wall assembly, a side wall assembly and a lower wall assembly which are arranged between the end covers and are sequentially connected, and the light-transmitting member is respectively connected to the edges of the end covers, the upper wall assembly and the lower wall assembly.

3. The laser absorption device according to claim 2, wherein The opening is arranged along the length direction of the upper wall assembly, the width of the upper wall assembly is greater than the width of the lower wall assembly, and the light-transmitting member is connected to the edges of the upper wall assembly and the lower wall assembly.

4. The laser absorption device according to claim 3, characterized in that, The surface of the upper wall assembly facing the lower wall assembly is provided with a slope surface which faces the side wall assembly; the slope surface is provided with a reflection area and / or a light absorption area.

5. The laser absorption device according to claim 2, characterized in that, At least one of the upper wall assembly, the side wall assembly and the lower wall assembly is provided with the second cooling channel.

6. The laser absorption device according to claim 5, characterized in that, The lower wall assembly includes a trough-shaped member and a cover plate arranged at the opening of the trough-shaped member, and the trough-shaped member and the cover plate surround to form the second cooling channel.

7. The laser absorption device according to claim 2, characterized in that, The heat dissipating member includes fins or protrusions arranged on the inner wall of the side wall assembly.

8. The laser absorption device according to claim 1, wherein The laser absorption device further includes rollers arranged at the lower part of the housing, and the rolling of the rollers can enable the laser absorption device to move along the length direction.

9. The laser absorption device according to claim 1, wherein The laser absorption device further includes a gas supply device and a gas drying device communicated with the first cooling channel.

10. A laser processing device, characterized in that, Comprising the laser absorption device according to any one of claims 1 to 9, the laser processing equipment further includes a machine table for installing the laser absorption device.

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