Filter wafer cutting die fixing tool

By combining the design of motor, worm gear and cylinder, the precise movement and rapid fixation of wafer molds are achieved, which solves the versatility and stability of traditional tools, and improves cutting accuracy and equipment adaptability.

CN223085125UActive Publication Date: 2025-07-11SUZHOU ASEN SEMICON CO LTD
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Patent Information

Application Number
CN202421994514.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-16
Publication Date
2025-07-11
Estimated Expiration
2034-08-16

AI Technical Summary

Technical Problem

Traditional wafer cutting mold fixing tools have poor versatility, unstable fixing, and inconvenient adjustment of position, resulting in insufficient cutting accuracy and efficiency.

Method used

The combined design including a first motor, a second motor, a worm gear mechanism and a cylinder is adopted to achieve precise movement and rapid fixation of the wafer mold in the transverse and longitudinal directions, and ensure stability through bolts and nuts.

Benefits of technology

Improves the accuracy of wafer cutting and equipment versatility, reduces cutting errors, and ensures product quality and performance.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of cutting die fixing tools, and discloses a filter wafer cutting die fixing tool which comprises a bottom plate, a first motor is fixedly connected to the bottom plate, the output end of the first motor is fixedly connected with a first threaded lead screw, and the first threaded lead screw is rotationally connected to the bottom plate. A first threaded screw rod is arranged on the base plate, a box body is in threaded connection with the first threaded screw rod, a sliding rod is connected to the box body in a sliding mode, the sliding rod is fixedly connected to the base plate, and a second motor is fixedly connected to the base plate. According to the technical scheme, accurate movement of the wafer mold in the transverse direction and the longitudinal direction is achieved, the mold can be accurately aligned to the preset position of cutting equipment, cutting errors caused by position deviation can be reduced, the cutting accuracy is ensured, and then the overall quality and performance of a final product are improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of cutting die fixing tools, in particular to a fixing tool for a filter wafer cutting die. Background Technique

[0002] In the field of semiconductor manufacturing, wafer cutting is a crucial link in the chip production process. With the continuous development of semiconductor technology, the sizes and shapes of wafers are becoming increasingly diverse, posing higher requirements for the precision and efficiency of wafer cutting. Traditional wafer cutting die fixing tools often have problems such as poor versatility, insecure fixation, and inconvenient position adjustment, making it difficult to meet the cutting requirements of high precision and high efficiency.

[0003] When the fixing tool for the filter wafer cutting die is in use, the following defects still exist: during cutting, the cutting die of the wafer is prone to vibration or displacement during the cutting process, resulting in cutting deviation, and it is not convenient for the staff to adjust according to the cutting position of the wafer cutting. Content of the Utility Model

[0004] The purpose of the utility model is to solve the defects existing in the prior art, and a fixing tool for a filter wafer cutting die is proposed.

[0005] To achieve the above purpose, the utility model adopts the following technical scheme: a fixing tool for a filter wafer cutting die, including a bottom plate, a first motor is fixedly connected to the bottom plate, the output end of the first motor is fixedly connected to a first threaded screw rod, the first threaded screw rod is rotatably connected to the bottom plate, a box body is threadedly connected to the first threaded screw rod, a sliding rod is slidably connected to the box body, the sliding rod is fixedly connected to the bottom plate, a second motor is fixedly connected to the bottom plate, the output end of the second motor is fixedly connected to a rotating shaft, the rotating shaft is fixedly connected to the bottom plate, a worm is meshed with the rotating shaft, the worm is rotatably connected to the box body, a worm gear is meshed with the worm, a second threaded screw rod is fixedly connected to the worm gear, the second threaded screw rod is rotatably connected to the box body, a first sliding groove is provided on the box body, a fixing block is slidably connected to the first sliding groove, the fixing block is threadedly connected to the second threaded screw rod, and a fixing plate is fixedly connected to the fixing block.

[0006] As a further description of the above technical solution: A support column is fixedly connected to the fixed plate, a disc is fixedly connected to the support column, a second chute is provided on the disc, a first slider is slidably connected to the second chute, a first clamping plate is fixedly connected to the first slider, a cylinder is rotatably connected to the first slider, the output end of the cylinder is rotatably connected to the disc, a first connecting rod is rotatably connected to the first slider, one end of the first connecting rod is rotatably connected to a second connecting rod, the second connecting rod is rotatably connected to the disc, a third connecting rod is rotatably connected to the second connecting rod, one end of the third connecting rod is rotatably connected to a second slider, the second slider is slidably connected to the second chute, and a second clamping plate is fixedly connected to the second slider.

[0007] As a further description of the above technical solution: A bolt is slidably connected to the bottom plate, and a nut is threadedly connected to one end of the bolt.

[0008] As a further description of the above technical solution: The third connecting rod and the first connecting rod are symmetrically arranged, the first slider and the second slider are symmetrically arranged, and the first clamping plate and the second clamping plate are symmetrically arranged.

[0009] As a further description of the above technical solution: The rotating shaft penetrates through the worm and the rotating shaft penetrates through the box body.

[0010] As a further description of the above technical solution: The second chute penetrates through the disc, and the sliding rod penetrates through the box body.

[0011] As a further description of the above technical solution: There are four groups of bolts and four groups of nuts.

[0012] The utility model has the following beneficial effects:

[0013] 1. In the utility model, when using the fixing tool for the filter wafer cutting die, through the combination of the first motor and the second motor, the precise movement of the wafer die in the horizontal and vertical directions is realized, so that the die can be accurately aligned to the predetermined position of the cutting equipment, which helps to reduce the cutting error caused by the position deviation, ensures the cutting accuracy, and further improves the overall quality and performance of the final product.

[0014] 2. In the utility model, when using the fixing tool for the filter wafer cutting die, by opening the cylinder, the rapid fixing and releasing of the wafer cutting die are realized, which can adapt to dies of different sizes and shapes, improves the versatility of the equipment, and at the same time, the bottom plate is fixed by bolts and nuts to ensure its stability on the cutting table. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The structural schematic diagram of a fixing tool for a filter wafer cutting die proposed by the present utility modelFigure 1 ;

[0016] Figure 2 Structural schematic of a fixing tool for a filter wafer cutting die proposed by the present utility model Figure 2 ;

[0017] Figure 3 Structural schematic of a fixing tool for a filter wafer cutting die proposed by the present utility model Figure 3 ;

[0018] Figure 4 Cross-sectional view of a fixing tool for a filter wafer cutting die proposed by the present utility model.

[0019] Legend description:

[0020] 1. Base plate; 2. First motor; 3. First threaded lead screw; 4. Box body; 5. Slide bar; 6. Second motor; 7. Rotating shaft; 8. Worm; 9. Worm gear; 10. Second threaded lead screw; 11. First chute; 12. Fixed block; 13. Fixed plate; 14. Support column; 15. Disc; 16. Second chute; 17. First slider; 18. First clamping plate; 19. Cylinder; 20. First connecting rod; 21. Second connecting rod; 22. Third connecting rod; 23. Second slider; 24. Second clamping plate; 25. Bolt; 26. Nut. Specific implementation manner

[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0022] Refer to Figures 1-4, an embodiment provided by the present utility model: a fixing tool for a filter wafer cutting die, comprising a bottom plate 1, a first motor 2 is fixedly connected to the bottom plate 1, an output end of the first motor 2 is fixedly connected to a first threaded lead screw 3, the first threaded lead screw 3 is rotatably connected to the bottom plate 1, a box body 4 is threadedly connected to the first threaded lead screw 3, a slide bar 5 is slidably connected to the box body 4, the slide bar 5 is fixedly connected to the bottom plate 1, a second motor 6 is fixedly connected to the bottom plate 1, an output end of the second motor 6 is fixedly connected to a rotating shaft 7, the rotating shaft 7 is fixedly connected to the bottom plate 1, a worm 8 is meshed with the rotating shaft 7, the worm 8 is rotatably connected to the box body 4, a worm gear 9 is meshed with the worm 8, a second threaded lead screw 10 is fixedly connected to the worm gear 9, the second threaded lead screw 10 is rotatably connected to the box body 4, a first chute 11 is provided on the box body 4, a fixing block 12 is slidably connected to the first chute 11, the fixing block 12 is threadedly connected to the second threaded lead screw 10, a fixing plate 13 is fixedly connected to the fixing block 12. When using the fixing tool for the filter wafer cutting die, through the combination of the first motor 2 and the second motor 6, the precise movement of the wafer die in the horizontal and vertical directions is realized, so that the die can be precisely aligned to the predetermined position of the cutting equipment, which helps to reduce the cutting error caused by the position deviation, ensures the cutting precision, and further improves the overall quality and performance of the final product.

[0023] A support column 14 is fixedly connected to the fixing plate 13, a disc 15 is fixedly connected to the support column 14, a second chute 16 is provided on the disc 15, a first slider 17 is slidably connected to the second chute 16, a first clamping plate 18 is fixedly connected to the first slider 17, a cylinder 19 is rotatably connected to the first slider 17, an output end of the cylinder 19 is rotatably connected to the disc 15, a first connecting rod 20 is rotatably connected to the first slider 17, one end of the first connecting rod 20 is rotatably connected to a second connecting rod 21, the second connecting rod 21 is rotatably connected to the disc 15, a third connecting rod 22 is rotatably connected to the second connecting rod 21, one end of the third connecting rod 22 is rotatably connected to a second slider 23, the second slider 23 is slidably connected to the second chute 16, a second clamping plate 24 is fixedly connected to the second slider 23, a bolt 25 is slidably connected to the bottom plate 1, a nut 26 is threadedly connected to one end of the bolt 25, the third connecting rod 22 and the first connecting rod 20 are symmetrically arranged, the first slider 17 and the second slider 23 are symmetrically arranged, the first clamping plate 18 and the second clamping plate 24 are symmetrically arranged, the rotating shaft 7 passes through the worm 8, the rotating shaft 7 passes through the box body 4, the second chute 16 passes through the disc 15, the slide bar 5 passes through the box body 4, there are four groups of bolts 25, and there are four groups of nuts 26. When using the fixing tool for the filter wafer cutting die, by turning on the cylinder 19, the rapid fixing and releasing of the wafer cutting die are realized, which is suitable for dies of different sizes and shapes, improves the versatility of the equipment, and at the same time, the bottom plate 1 is fixed by the bolts 25 and the nuts 26, ensuring its stability on the cutting table.

[0024] Working principle: When using the fixing tool for the filter wafer cutting die, the staff first fix the bottom plate 1 on the cutting table through four groups of bolts 25 and nuts 26. Then, place the wafer cutting die on the disc 15. Next, turn on the cylinder 19. The cylinder 19 drives the first slider 17 to slide on the second chute 16 by being rotatably connected to one end of the disc 15. At the same time, the first slider 17 drives the first connecting rod 20 to move. The first connecting rod 20 drives the second connecting rod 21 to rotate on the disc 15. The second connecting rod 21 drives the third connecting rod 22 to move. The third connecting rod 22 drives the second slider 23 to slide on the second chute 16, so that the first clamping plate 18 on the first slider 17 and the second clamping plate 24 on the second slider 23 move towards each other. When the first clamping plate 18 and the second clamping plate 24 are attached to the wafer cutting die, the fixing of the die is completed. It is not only applicable to the fixing of wafer dies of different sizes and shapes, improving the versatility and flexibility of the equipment, but also used to keep the wafer in a stable position during the cutting process, reducing the cutting deviation caused by vibration or displacement, thereby improving the overall quality and performance of the product. When it is necessary to move the wafer die to align with the predetermined position of the cutting equipment, the staff turn on the first motor 2. The first motor 2 drives the first threaded rod 3 to rotate on the bottom plate 1. The first threaded rod 3 drives the box body 4 to slide on the slide rod 5 through threaded connection. While the box body 4 slides, it drives the worm 8 to slide on the rotating shaft 7. When it moves horizontally to the required position, turn off the first motor 2. Then, turn on the second motor 6. The second motor 6 drives the rotating shaft 7 to rotate on the bottom plate 1. The rotating shaft 7 drives the worm 8 to rotate on the box body 4 through meshing. The worm 8 drives the worm gear 9 to rotate. The worm gear 9 drives the second threaded rod 10 to rotate on the box body 4. The second threaded rod 10 drives the fixed block 12 to slide on the first chute 11 through threaded connection. The fixed block 12 drives the fixed plate 13 to move. The fixed plate 13 drives the disc 15 to move through the support column 14. The disc 15 drives the wafer cutting die to move. When it moves vertically to the required position, turn off the second motor 6. During the process, the cutting position of the wafer cutting die on the disc 15 can be adjusted by turning on the first motor 2 and the second motor 6 in sequence, so as to more accurately align the wafer die with the predetermined position of the cutting equipment, reducing the cutting error caused by position deviation and ensuring the cutting accuracy.

[0025] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A fixing tool for a filter wafer cutting die, comprising a bottom plate (1), characterized in that: A first motor (2) is fixedly connected to the bottom plate (1). The output end of the first motor (2) is fixedly connected to a first threaded lead screw (3). The first threaded lead screw (3) is rotatably connected to the bottom plate (1). A box body (4) is threadedly connected to the first threaded lead screw (3). A slide bar (5) is slidably connected to the box body (4). The slide bar (5) is fixedly connected to the bottom plate (1). A second motor (6) is fixedly connected to the bottom plate (1). The output end of the second motor (6) is fixedly connected to a rotating shaft (7). The rotating shaft (7) is fixedly connected to the bottom plate (1). A worm (8) is meshed and connected to the rotating shaft (7). The worm (8) is rotatably connected to the box body (4). A worm gear (9) is meshed and connected to the worm (8). A second threaded lead screw (10) is fixedly connected to the worm gear (9). The second threaded lead screw (10) is rotatably connected to the box body (4). A first chute (11) is provided on the box body (4). A fixed block (12) is slidably connected to the first chute (11). The fixed block (12) is threadedly connected to the second threaded lead screw (10). A fixing plate (13) is fixedly connected to the fixed block (12).

2. The fixing tool for a filter wafer cutting die according to claim 1, wherein: A support column (14) is fixedly connected to the fixing plate (13). A disc (15) is fixedly connected to the support column (14). A second chute (16) is provided on the disc (15). A first slider (17) is slidably connected to the second chute (16). A first clamping plate (18) is fixedly connected to the first slider (17). A cylinder (19) is rotatably connected to the first slider (17). The output end of the cylinder (19) is rotatably connected to the disc (15). A first connecting rod (20) is rotatably connected to the first slider (17). One end of the first connecting rod (20) is rotatably connected to a second connecting rod (21). The second connecting rod (21) is rotatably connected to the disc (15). A third connecting rod (22) is rotatably connected to the second connecting rod (21). One end of the third connecting rod (22) is rotatably connected to a second slider (23). The second slider (23) is slidably connected to the second chute (16). A second clamping plate (24) is fixedly connected to the second slider (23).

3. A fixing tool for a filter wafer cutting die according to claim 2, characterized in that: A bolt (25) is slidably connected to the bottom plate (1). One end of the bolt (25) is threadedly connected to a nut (26).

4. A fixing tool for a filter wafer cutting die according to claim 3, characterized in that: The third connecting rod (22) and the first connecting rod (20) are symmetrically arranged. The first slider (17) and the second slider (23) are symmetrically arranged. The first clamping plate (18) and the second clamping plate (24) are symmetrically arranged.

5. A fixing tool for a filter wafer cutting die according to claim 4, characterized in that: The rotating shaft (7) penetrates through the worm (8). The rotating shaft (7) penetrates through the box body (4).

6. The fixing tool for a filter wafer cutting die according to claim 5, characterized in that: The second chute (16) penetrates through the disc (15). The slide bar (5) penetrates through the box body (4).

7. A fixing tool for a filter wafer cutting die according to claim 6, characterized in that: There are four groups of bolts (25). There are four groups of nuts (26).