Grabbing device for anti-falling silicon wafer basket

Abstract

The utility model relates to the technical field of silicon wafer flower basket grabbing, in particular to a grabbing device for an anti-falling silicon wafer flower basket, which comprises a grabbing seat, a connecting mechanism is arranged at the top end of the grabbing seat, grabbing mechanisms are arranged at two ends of the grabbing seat, and a flower basket body is grabbed below the grabbing seat. The device has the beneficial effects that the grabbing hanging rod is stably arranged through the clamping plate and the grabbing groove, and the detection hanging rod is tightly propped through the propping groove and the propping plate, so that a flower basket body can be stably grabbed by the grabbing device and is not easy to fall off; and the connecting structure is arranged at the top end of the grabbing seat, so that the grabbing seat can be stably connected with the telescopic rod, the connecting plate and an external structure through lifting driving, stable movement of the grabbing device is kept, and shaking of the grabbed flower basket body is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer carrier grasping, in particular to a grasping device for an anti-dropping wafer carrier. Background Technique

[0002] In the process of automatic continuous production of products such as photovoltaic and semiconductor products, when it is necessary to immerse workpieces in a liquid medicine tank or transfer them centrally, a carrier is often required. The workpieces are centrally transported by the carrier, which is convenient for the robotic arm to grasp and transfer quickly.

[0003] Moreover, during the cleaning process of the wafer carrier, the lifting adjustment of the entire wafer carrier is realized by grasping the card slots on the side plate of the carrier through a grasping device.

[0004] For example, the prior art Chinese patent publication number "CN217641248U" provides a wafer carrier hook and a carrier grasping device, including: a hook body with an integrated structure and provided with a plurality of grasping units, and the plurality of grasping units of the hook body can be used to grasp a plurality of wafer carriers; and at least one connecting member connected to the hook body, and the connecting member is also connected to the bracket of the carrier grasping device.

[0005] This device can improve the strength of the carrier hook, reduce the deformation amount of the carrier hook working in a harsh environment, ensure the accuracy and reliability of the carrier hook during high-intensity and frequent telescopic movements, and avoid serious fault problems such as pressing the carrier, tipping the carrier, and missing grasping.

[0006] For the existing grasping device for an anti-dropping wafer carrier, the grasped carrier is relatively heavy after holding wafers. The grasped carrier is prone to shaking during movement and fails to be firmly clamped, which will cause the carrier to disengage from the grasping device, resulting in the dropping of the carrier and the wafers inside it, and it is not safe enough. Summary of the Utility Model

[0007] The purpose of the utility model is to solve the disadvantages in the prior art that the grasped carrier is relatively heavy after holding wafers, the grasped carrier is prone to shaking during movement, fails to be firmly clamped, which will cause the carrier to disengage from the grasping device, resulting in the dropping of the carrier and the wafers inside it, and to propose a grasping device for an anti-dropping wafer carrier.

[0008] To achieve the above purpose, the utility model provides the following technical solutions:

[0009] Design a grasping device for an anti - shedding silicon wafer flower basket, which includes a grasping base. A connection mechanism is arranged at the top end of the grasping base, and grasping mechanisms are arranged at both ends of the grasping base. A flower basket body is grasped below the grasping base; the connection mechanism is used to install the grasping base on an external structure and drive the silicon wafer flower basket to move; the grasping mechanism includes a cylinder, a grasping plate and a tightening mechanism. Guide grooves are opened at both ends of the grasping base. An installation plate is fixed at the outer end of the cylinder. The grasping plate is installed on the outer layer of the installation plate, and the two are detachably connected by a bolt connector. A guide rod is fixed on the inner side of the grasping plate, and the guide rod is slidably inserted into the guide groove. A grasping groove is opened on the surface of the grasping plate. A first electric push rod is installed at the bottom end inside the grasping groove, and a clamping plate is fixed at the outer end of the first electric push rod; the tightening mechanism includes a second electric push rod and a tightening plate, which are used to tighten the silicon wafer flower basket to keep the grasping of the silicon wafer flower basket stable; Grasping hanging rods are fixed on both sides of the end face of the flower basket body, and a detection hanging rod is fixed in the middle of the bottom end of the end face of the flower basket body.

[0010] Furthermore, the connection mechanism includes a telescopic rod and a lifting drive. The bottom end of the lifting drive is fixed in the middle of the top end of the grasping base. The telescopic rods are fixed at the top ends of the four corners of the grasping base and are vertically arranged, and a connecting plate is fixed at their top ends.

[0011] Furthermore, the second electric push rod is vertically fixed at the bottom end of the outer end of the grasping plate, and the tightening plate is fixed at the bottom end of the second electric push rod. An abutting groove is opened in the middle of its bottom end, and a flower basket detection sensor is installed at the top end inside the abutting groove. Before the grasping mechanism grasps the flower basket body, the detection hanging rod is detected by the flower basket detection sensor, so that the grasping mechanism moves to directly above the flower basket body.

[0012] Furthermore, the grasping base is of a rectangular structure and is horizontally arranged. The cylinders are horizontally arranged at both ends of the grasping base. The installation plate is of a rectangular plate structure and is vertically arranged.

[0013] Furthermore, the grasping plate is vertically arranged, the guide rod is horizontally arranged, and the grasping groove is vertically arranged.

[0014] Furthermore, the first electric push rod is horizontally arranged, the clamping plate is of a rectangular plate structure and is vertically arranged. When the grasping mechanism grasps the flower basket body, the grasping hanging rod is inserted into the outer corner inside the grasping groove and is clamped by the clamping plate.

[0015] Furthermore, both the grasping hanging rod and the detection hanging rod are of a cylindrical structure and are horizontally arranged. The end face of the flower basket body is of a U - shaped structure.

[0016] Further, the pressing plate is of a rectangular plate structure and is horizontally arranged. The abutting groove is of a trapezoidal structure with a larger upper part and a smaller lower part, and its bottom end is open. When the grasping mechanism grasps the flower basket body, the pressing plate presses against the top end of the detection hanging rod, and the top end of the detection hanging rod abuts against the bottom end of the abutting groove.

[0017] A grasping device for an anti-dropping silicon wafer flower basket proposed by the present utility model has the beneficial effects that:

[0018] 1. In the grasping device of the present utility model, a grasping mechanism and a pressing mechanism are provided. In the grasping mechanism, the grasping plate is guidingly installed and connected with the grasping seat through a guiding rod, and in the grasping groove, a clamping plate is arranged through a first electric push rod. In the pressing mechanism, the pressing plate is driven by a second electric push rod. Therefore, before the grasping device grasps the flower basket body, the connecting mechanism drives the grasping seat and the grasping mechanism to move. After detecting the detection hanging rod through the flower basket detection sensor, the movement of the grasping seat and the grasping mechanism is stopped. At this time, the grasping seat is located directly above the flower basket body, and the cylinder contracts to drive the grasping plate to approach both ends of the flower basket body until it clamps both ends of the flower basket body. At the same time, the grasping hanging rod is inserted into the outer corner inside the grasping groove, and the first electric push rod drives the clamping plate to press against the grasping hanging rod. At the same time, the second electric push rod drives the pressing plate downward, and the bottom end of the abutting groove abuts against the top end of the detection hanging rod. Therefore, the grasping hanging rod is stably set by the clamping plate and the grasping groove, and the detection hanging rod is tightly set by the abutting groove and the pressing plate. In this way, the grasping device can stably grasp the flower basket body and is not easy to fall off.

[0019] 2. The present utility model sets a connecting structure at the top end of the grasping seat. Therefore, the grasping seat can be stably connected with the external structure through the lifting drive, the telescopic rod and the connecting plate, keeping the grasping device moving stably and reducing the shaking of the grasped flower basket body. Description of the Drawings

[0020] Figure 1 is the overall structural schematic diagram of the present utility model;

[0021] Figure 2 is the present utility model Figure 1 's overall structural schematic diagram;

[0022] Figure 3 is the present utility model Figure 1 's partial structural schematic diagram of the grasping mechanism;

[0023] Figure 4 is the present utility model Figure 1 's partial structural schematic diagram of the connecting mechanism;

[0024] Figure 5 is the present utility model Figure 1Schematic diagram of the partial structure of the grasping mechanism;

[0025] Figure 6 This utility model Figure 1 Schematic diagram of the partial structure of the pressing mechanism.

[0026] In the figure: 1, grasping seat; 2, cylinder; 3, telescopic rod; 4, connecting plate; 5, lifting drive; 6, grasping plate; 7, flower basket body; 8, guide rod; 9, grasping hanging rod; 10, detection hanging rod; 11, second electric push rod; 12, pressing plate; 13, first electric push rod; 14, abutting groove; 15, flower basket detection sensor; 16, grasping groove; 17, clamping plate; 18, mounting plate; 19, guide groove. Specific embodiments

[0027] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments.

[0028] Embodiment 1

[0029] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 , a grasping device for an anti-dropping silicon wafer flower basket shown in the figure, including a grasping seat 1. The grasping seat 1 is of a rectangular structure and is horizontally arranged. A connecting mechanism is arranged at the top end of the grasping seat 1, and grasping mechanisms are arranged at both ends of the grasping seat 1. A flower basket body 7 is grasped below the grasping seat 1.

[0030] The connecting mechanism is used to install the grasping seat 1 on an external structure and drive the silicon wafer flower basket to move. The grasping mechanism includes a cylinder 2, a grasping plate 6 and a pressing mechanism. Guide grooves 19 are opened at both ends of the grasping seat 1. The outer end of the cylinder 2 is fixed with a mounting plate 18. The cylinder 2 is horizontally arranged at both ends of the grasping seat 1. The mounting plate 18 is of a rectangular plate structure and is vertically arranged.

[0031] The grasping plate 6 is installed on the outer layer of the mounting plate 18, and the two are detachably connected by bolt connectors. A guide rod 8 is fixed inside the grasping plate 6. The guide rod 8 is slidably inserted into the guide groove 19. A grasping groove 16 is opened on the surface of the grasping plate 6. The grasping plate 6 is vertically arranged, the guide rod 8 is horizontally arranged, and the grasping groove 16 is vertically arranged. A first electric push rod 13 is installed at the inner bottom end of the grasping groove 16, and a clamping plate 17 is fixed at the outer end of the first electric push rod 13.

[0032] The tightening mechanism includes a second electric push rod 11 and a tightening plate 12, which are used to tighten the wafer flower basket to keep the wafer flower basket stably grasped. Grabbing hanging rods 9 are fixed on both sides of the end face of the flower basket body 7, and a detection hanging rod 10 is fixed in the middle of the bottom end of the end face of the flower basket body 7.

[0033] Before the flower basket body 7 is grabbed by the grabbing device, the grabbing seat 1 and the grabbing mechanism are driven to move by the connecting mechanism. After the detection hanging rod 10 is detected by the flower basket detection sensor 15, the movement of the grabbing seat 1 and the grabbing mechanism is stopped. At this time, the grabbing seat 1 is located directly above the flower basket body 7, and the cylinder 2 contracts to drive the grabbing plate 6 to approach both ends of the flower basket body 7 until it is clamped at both ends of the flower basket body 7. At the same time, the grabbing hanging rod 9 is inserted into the outer corner inside the grabbing slot 16, and the first electric push rod 13 drives the clamping plate 17 to tighten the grabbing hanging rod 9. At the same time, the second electric push rod 11 drives the tightening plate 12 downward, and the bottom end of the abutting groove 14 abuts against the top end of the detection hanging rod 10.

[0034] The second electric push rod 11 is vertically fixed at the bottom end of the outer side of the grabbing plate 6, the tightening plate 12 is fixed at the bottom end of the second electric push rod 11, and an abutting groove 14 is opened in the middle of its bottom end. A flower basket detection sensor 15 is installed at the top end inside the abutting groove 14. Before the grabbing mechanism grabs the flower basket body 7, the detection hanging rod 10 is detected by the flower basket detection sensor 15, so that the grabbing mechanism moves to directly above the flower basket body 7.

[0035] Therefore, the grabbing hanging rod 9 is stably set through the clamping plate 17 and the grabbing slot 16, and the detection hanging rod 10 is tightly set through the abutting groove 14 and the tightening plate 12. In this way, the grabbing device can stably grab the flower basket body 7 and is not easy to fall off.

[0036] The first electric push rod 13 is horizontally arranged, the clamping plate 17 is a rectangular plate structure and is vertically arranged. When the grabbing mechanism grabs the flower basket body 7, the grabbing hanging rod 9 is inserted into the outer corner inside the grabbing slot 16 and is clamped by the clamping plate 17.

[0037] Both the grabbing hanging rod 9 and the detection hanging rod 10 are cylindrical structures and are both horizontally arranged, and the end face of the flower basket body 7 is a U-shaped structure.

[0038] The tightening plate 12 is a rectangular plate structure and is horizontally arranged. The abutting groove 14 is a trapezoidal structure and is arranged with a larger upper part and a smaller lower part, and its bottom end is open. When the grabbing mechanism grabs the flower basket body 7, the tightening plate 12 tightens against the top end of the detection hanging rod 10, and the top end of the detection hanging rod 10 abuts against the bottom end of the abutting groove 14.

[0039] Embodiment 2

[0040] Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 as shown in the figure, a grasping device for an anti-dropping silicon wafer carrier includes a grasping base 1. A connection mechanism is provided at the top end of the grasping base 1. Grasping mechanisms are provided at both ends of the grasping base 1. A carrier body 7 is grasped below the grasping base 1. The connection mechanism is used to install the grasping base 1 on an external structure and drive the silicon wafer carrier to move. The grasping mechanism includes a cylinder 2, a grasping plate 6 and a pressing mechanism. Guide grooves 19 are formed at both ends of the grasping base 1. An installation plate 18 is fixed to the outer end of the cylinder 2. The grasping plate 6 is installed on the outer layer of the installation plate 18 and the two are detachably connected by a bolt connection member. A guide rod 8 is fixed to the inner side of the grasping plate 6. The guide rod 8 is slidably inserted into the guide groove 19. A grasping groove 16 is formed on the surface of the grasping plate 6. A first electric push rod 13 is installed at the bottom end inside the grasping groove 16. A clamping plate 17 is fixed to the outer end of the first electric push rod 13. The pressing mechanism includes a second electric push rod 11 and a pressing plate 12, which are used to press the silicon wafer carrier to keep the grasping of the silicon wafer carrier stable. Grasping hanging rods 9 are fixed to both sides of the end face of the carrier body 7. A detection hanging rod 10 is fixed to the middle of the bottom end of the end face of the carrier body 7.

[0041] The connection mechanism includes a telescopic rod 3 and a lifting drive 5. The bottom end of the lifting drive 5 is fixed to the middle of the top end of the grasping base 1. The telescopic rod 3 is fixed to the top ends of the four corners of the grasping base 1 and is vertically arranged, and a connection plate 4 is fixed to its top end.

[0042] A connection structure is provided at the top end of the grasping base 1. Therefore, the grasping base 1 can be stably connected to the external structure through the lifting drive 5, the telescopic rod 3 and the connection plate 4, keeping the grasping device moving stably and reducing the shaking of the grasped carrier body 7.

[0043] Working mode; a grasping mechanism and a pressing mechanism are arranged in the grasping device. In the grasping mechanism, the grasping plate 6 is installed and connected to the grasping base 1 through a guide rod 8, and in the grasping groove 16, a clamping plate 17 is arranged through a first electric push rod 13. In the pressing mechanism, the pressing plate 12 is driven by a second electric push rod 11. Therefore, before the grasping device grasps the flower basket body 7, the grasping base 1 and the grasping mechanism are driven to move through the connecting mechanism. After the hanging rod 10 for detection is detected by the flower basket detection sensor 15, the movement of the grasping base 1 and the grasping mechanism is stopped. At this time, the grasping base 1 is located directly above the flower basket body 7, and the cylinder 2 contracts to drive the grasping plate 6 to approach both ends of the flower basket body 7 until it clamps both ends of the flower basket body 7. At the same time, the grasping hanging rod 9 is inserted into the outer corner inside the grasping groove 16, and the first electric push rod 13 drives the clamping plate 17 to press the grasping hanging rod 9. At the same time, the second electric push rod 11 drives the pressing plate 12 downward, and the bottom end of the abutting groove 14 abuts against the top end of the hanging rod 10 for detection. Therefore, the grasping hanging rod 9 is stably arranged through the clamping plate 17 and the grasping groove 16, and the hanging rod 10 for detection is pressed and set through the abutting groove 14 and the pressing plate 12. In this way, the grasping device can stably grasp the flower basket body 7 and is not easy to fall off.

[0044] A connecting structure is arranged at the top end of the grasping base 1. Therefore, the grasping base 1 can be stably connected to the external structure through the lifting drive 5, the telescopic rod 3 and the connecting plate 4, so as to keep the grasping device moving stably and reduce the shaking of the grasped flower basket body 7.

[0045] The above is only the preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present invention.

Claims

1. A grasping device for an anti-detachment silicon wafer flower basket, comprising a grasping base (1), characterized in that: A connecting mechanism is provided at the top of the gripping seat (1). Gripping mechanisms are provided at both ends of the gripping seat (1). A flower basket body (7) is gripped below the gripping seat (1). The connecting mechanism is used to install the gripping seat (1) on an external structure and drive the movement of the silicon wafer flower basket. The gripping mechanism includes a cylinder (2), a gripping plate (6), and a pressing mechanism. Guide grooves (19) are formed at both ends of the gripping seat (1). An installation plate (18) is fixed to the outer end of the cylinder (2). The gripping plate (6) is installed on the outer layer of the installation plate (18), and the two are detachably connected by bolt connectors. A guide rod (8) is fixed to the inner side of the gripping plate (6). The guide rod (8) is slidably inserted into the guide groove (19). A gripping groove (16) is formed on the surface of the gripping plate (6). A first electric push rod (13) is installed at the inner bottom end of the gripping groove (16). A clamping plate (17) is fixed to the outer end of the first electric push rod (13). The pressing mechanism includes a second electric push rod (11) and a pressing plate (12), which are used to press the silicon wafer flower basket to keep the gripping of the silicon wafer flower basket stable. Gripping hanging rods (9) are fixed to both sides of the end face of the flower basket body (7), and a detection hanging rod (10) is fixed to the middle of the bottom end of the end face of the flower basket body (7).

2. The gripping device for an anti-detachment silicon wafer flower basket according to claim 1, characterized in that: The connecting mechanism includes a telescopic rod (3) and a lifting drive (5). The bottom end of the lifting drive (5) is fixed to the middle of the top end of the gripping seat (1). The telescopic rod (3) is fixed to the top ends of the four corners of the gripping seat (1) and is vertically arranged, and its top end is fixed with a connecting plate (4).

3. The grasping device for an anti-detachment silicon wafer flower basket according to claim 1, characterized in that: The second electric push rod (11) is vertically fixed to the bottom end of the outer end of the gripping plate (6). The pressing plate (12) is fixed to the bottom end of the second electric push rod (11). A butt joint groove (14) is formed in the middle of its bottom end. A flower basket detection sensor (15) is installed at the inner top end of the butt joint groove (14). Before the gripping mechanism grips the flower basket body (7), the detection hanging rod (10) is detected by the flower basket detection sensor (15), so that the gripping mechanism moves to directly above the flower basket body (7).

4. The grasping device for an anti - shedding silicon wafer flower basket according to claim 1, wherein: The gripping seat (1) is of a rectangular structure and is horizontally arranged. The cylinders (2) are horizontally arranged at both ends of the gripping seat (1). The installation plate (18) is of a rectangular plate structure and is vertically arranged.

5. The gripping device for an anti-detachment silicon wafer flower basket according to claim 1, characterized in that: The gripping plate (6) is vertically arranged. The guide rod (8) is horizontally arranged. The gripping groove (16) is vertically arranged.

6. The gripping device for an anti-detachment silicon wafer flower basket according to claim 1, wherein: The first electric push rod (13) is horizontally arranged. The clamping plate (17) is of a rectangular plate structure and is vertically arranged. When the gripping mechanism grips the flower basket body (7), the gripping hanging rod (9) is inserted into the outer corner of the inside of the gripping groove (16) and is clamped by the clamping plate (17).

7. The grasping device for an anti-detachment silicon wafer flower basket according to claim 1, wherein: Both the gripping hanging rod (9) and the detection hanging rod (10) are of a cylindrical structure and are horizontally arranged. The end face of the flower basket body (7) is of a U-shaped structure.

8. The gripping device for an anti-detachment silicon wafer flower basket according to claim 3, characterized in that: The top pressing plate (12) is of a rectangular plate structure and is horizontally arranged. The abutting groove (14) is of a trapezoidal structure and is arranged with a larger upper part and a smaller lower part, and its bottom end is open. When the grasping mechanism grasps the flower basket body (7), the top pressing plate (12) presses tightly against the top end of the detection hanging rod (10), and the top end of the detection hanging rod (10) abuts against the bottom end of the abutting groove (14).

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