Cold conduction device of low-temperature magnetic field probe station

Abstract

The utility model relates to a cold conduction device of a low-temperature magnetic field probe station, which comprises a bearing surface and a suction assembly, the bearing surface is provided with a pore area for bearing a workpiece, and the suction assembly acts on the back of the pore area; the air outlet is located above the pore area and faces the pore area; and the refrigerating mechanism communicates with the suction assembly and the air outlet, and airflow sequentially passes through the suction assembly, the refrigerating mechanism and the air outlet. According to the utility model, through the arrangement of the air outlet above the pore area, when cold air is blown to the workpiece to be tested, the workpiece to be tested is stressed downwards, so that the workpiece to be tested can abut against the pore area, and through the cooperation of the self suction force of the pore area, the stability effect of the workpiece placed on the bearing surface can be further improved; therefore, the displacement phenomenon in the testing process is reduced or avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of probe stations, and particularly relates to a cooling device for a low-temperature magnetic field probe station. Background Art

[0002] A magnetic field probe station is a device that adds a magnetic measurement environment on the basis of an ordinary probe station and is widely used in product testing in multiple fields such as semiconductors, optoelectronics, and integrated circuits. When the probe station performs long-term test operations, heat and thermal noise will be generated, which will interfere with the accuracy of the test. In the prior art, when cooling the probe station, liquid nitrogen cooling or some corresponding cooling devices such as refrigerators are used to directly cool the stage. This cooling method has a relatively complex structure. In addition, there is an air-cooling method in which an air-cooling mechanism is provided on the stage, but the general problem with this method is that the cooling speed is slow. If the blowing force of the air flow is increased, it is easy to cause the workpiece under test to shift on the stage. Summary of the Utility Model

[0003] The purpose of this part is to outline some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Simplifications or omissions may be made in this part, as well as in the abstract and title of the application, to avoid obscuring the purpose of this part, the abstract, and the title, and such simplifications or omissions shall not be used to limit the scope of the utility model.

[0004] In view of the following technical problems in the prior art: In the current technology, the cooling device applied to the probe station is prone to the problem that it is difficult to balance the light weight and the cooling effect at the same time. To solve this technical problem, the utility model provides the following technical solutions:

[0005] A cooling device for a low-temperature magnetic field probe station, comprising a bearing surface, and:

[0006] A suction component, a pore area for carrying a workpiece is provided on the bearing surface, and the suction component acts on the back of the pore area;

[0007] An air outlet, which is located above the pore area and faces the pore area;

[0008] A refrigeration mechanism, which is connected to the suction component and the air outlet, and the air flow passes through the suction component, the refrigeration mechanism, and the air outlet in sequence.

[0009] As a preferred technical solution of a cooling device for a low-temperature magnetic field probe station, a gas storage cavity is provided below the bearing surface, the air outlets are multiple and are evenly distributed in a ring shape and are connected to the gas storage cavity, and the refrigeration mechanism is connected to the gas storage cavity.

[0010] As a preferred technical solution of the heat conduction device of a cryogenic magnetic field probe station, it further includes a covering part. There is a concave area below the bearing surface, and the covering part is rotationally matched with the concave area. The air storage cavity is formed between the covering part and the concave area.

[0011] As a preferred technical solution of the heat conduction device of a cryogenic magnetic field probe station, it further includes a power element which acts on the covering part.

[0012] As a preferred technical solution of the heat conduction device of a cryogenic magnetic field probe station, the power element includes a driving motor fixedly arranged relative to the bearing surface, and it is in transmission cooperation with the covering part.

[0013] As a preferred technical solution of the heat conduction device of a cryogenic magnetic field probe station, teeth are arranged on the covering part and are evenly distributed around its own rotation axis, and a driving gear meshing with the teeth is arranged on the driving motor.

[0014] As a preferred technical solution of the heat conduction device of a cryogenic magnetic field probe station, an air suction cavity is arranged on the back side of the pore area, and the suction assembly is communicated with the air suction cavity.

[0015] As a preferred technical solution of the heat conduction device of a cryogenic magnetic field probe station, the air storage cavity, the refrigeration mechanism, the suction assembly and the air suction cavity are sequentially connected through a main pipeline. A first valve body is arranged on the main pipeline and is located between the refrigeration mechanism and the suction assembly. A branch is communicated with the main pipeline, and the branch has an air outlet, and a second valve body is arranged on the branch.

[0016] The beneficial effect of the heat conduction device of the cryogenic magnetic field probe station provided by the present utility model is that: through the arrangement of the air outlet above the pore area, when the cold air blows towards the workpiece to be measured, the workpiece to be measured is stressed downward, so that it can abut against the pore area, and with the cooperation of the self-suction force of the pore area, the stable effect of the workpiece placed on the bearing surface can be further increased, thereby reducing or avoiding the displacement phenomenon during the test process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained according to these drawings without creative efforts. Among them:

[0018] Figure 1 It is a partial structural three-dimensional schematic diagram of the present utility model.

[0019] Figure 2 In the present utility model regarding Figure 1Another perspective view.

[0020] Figure 3 This utility model relates to Figure 1 A schematic diagram of the structure split in

[0021] Figure 4 This utility model relates to Figure 1 A three-dimensional vertical section schematic diagram of the structure in

[0022] Figure 5 A schematic diagram of the gas path connection between some structures in this utility model.

[0023] Reference numerals: 1, bearing surface; 2, pore area; 3, air outlet; 4, gas storage cavity; 5, covering part; 6, concave area; 7, power element; 701, driving motor; 702, teeth; 703, driving gear; 8, suction cavity; 9, main pipeline; 10, first valve body; 11, branch; 12, second valve body. Specific embodiments

[0024] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following detailed description of the specific embodiments of the present utility model is provided in conjunction with the accompanying drawings of the specification.

[0025] In the following description, many specific details are set forth to facilitate a full understanding of the present utility model. However, the present utility model can also be implemented in other ways different from those described herein. Those skilled in the art can make similar generalizations without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0026] Secondly, the so-called "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that can be included in at least one implementation manner of the present utility model. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it an individual or alternative embodiment that is mutually exclusive with other embodiments.

[0027] Thirdly, the present utility model is described in detail in conjunction with the schematic diagrams. When describing the embodiments of the present utility model in detail, for the convenience of explanation, the cross-sectional views showing the device structure will be enlarged locally out of the general proportion, and the schematic diagrams are only examples, and they should not limit the scope of protection of the present utility model herein. In addition, in actual production, three-dimensional spatial dimensions including length, width, and depth should be included.

[0028] Referring to Figures 1-4 , an embodiment of the present utility model provides a heat conduction device for a low-temperature magnetic probe station, including a bearing surface 1 configured on the main body of the probe station equipment. The bearing surface 1 can be provided by the loading platform on the equipment. In addition, the present utility model further includes the following parts:

[0029] The suction assembly further has a pore area 2 for carrying a workpiece on the bearing surface 1. The suction assembly is used to suck at the back of the pore area 2 to ensure that the pore area 2 can form an air suction effect;

[0030] The air outlet 3 is located above the pore area 2 and faces the pore area 2;

[0031] The refrigeration mechanism is used to achieve a refrigeration effect. The refrigeration mechanism is connected to the suction assembly and the air outlet 3. When the suction assembly works, it forms a pumping effect on the air, so that the air flow is sucked from the pore area 2 and then passes through the suction assembly, the refrigeration mechanism and the air outlet 3 in sequence;

[0032] In the present utility model, the suction assembly can adopt structures such as a suction pump, and the refrigeration mechanism can adopt mechanisms such as a compression refrigerator. The connection between the mechanisms can adopt pipeline assemblies, etc. When the suction assembly works, the pore area 2 on the bearing surface 1 forms an air suction effect. The workpiece to be tested is placed at the pore area 2, and the workpiece can be sucked in the void area. When the air flow sucked from the pore area 2 reaches the refrigeration mechanism through the pipeline, the air flow is cooled, and finally blown out from the air outlet 3. The air outlet 3 is located above the pore area 2. When blowing towards the workpiece, in addition to being able to cool the workpiece by its own low temperature, it can also apply a downward pressure to the workpiece, and then cooperate with the suction force of the pore area 2 to make the workpiece more stable at the position of the pore area 2, so as to facilitate the test during the process;

[0033] Compared with the prior art, the present utility model only adds a set of air guiding process, which not only ensures the stability of the workpiece to be tested, but also can directly apply the low temperature to the workpiece. Compared with cooling the carrier table, the structure is simpler and the utilization efficiency of the low temperature is higher.

[0034] Further, referring to Figure 4 , a gas storage cavity 4 is arranged below the bearing surface 1. The air outlets 3 are multiple and are evenly distributed in a ring shape to evenly surround the pore area 2 and are connected to the gas storage cavity 4. The refrigeration mechanism is connected to the gas storage cavity 4. After the air flow passes through the refrigeration mechanism, it reaches the gas storage cavity 4. Through the action of the gas storage cavity 4, the air flow can be evenly ejected from the multiple air outlets 3. The simultaneous air outlet of the multiple air outlets 3 makes the blowing force acting on the workpiece more stable.

[0035] Further, referring to Figure 2 and Figure 3, regarding the setting method of the air storage cavity 4, the present utility model further includes a covering part 5. A concave area 6 is provided below the bearing surface 1. The covering part 5 is rotationally matched with the concave area 6. The air storage cavity 4 is formed between the covering part 5 and the concave area 6. The air outlet 3 is communicated with the covering part 5. Through the cooperation of the covering part 5, when the air outlet 3 finishes discharging air, it can also rotate around the pore area 2, so that when the air outlet 3 blocks the probe during the test process, the position of the air outlet 3 can be finely adjusted.

[0036] Furthermore, the present utility model further includes a power element 7. The power element 7 is used to provide power to the covering part 5 to enable it to automatically complete rotation.

[0037] Furthermore, referring to Figures 2-4 , the power element 7 includes a driving motor 701 fixedly arranged relative to the bearing surface 1. The driving motor 701 can be arranged on the carrier table. It is in transmission cooperation with the covering part 5, so as to realize the rotation of the covering part 5.

[0038] Furthermore, referring to Figure 3 and Figure 4 , regarding the transmission process between the driving motor 701 and the covering part 5, teeth 702 are arranged on the covering part 5 and are evenly distributed around its own rotation axis. A driving gear 703 meshing with the teeth 702 is arranged on the driving motor 701. The teeth 702 are distributed all around the circumference of the covering part 5. This transmission method has a simple structure and does not occupy too much space, thus helping to maintain the delicacy of the structure.

[0039] Furthermore, referring to Figure 4 , a suction cavity 8 is provided on the back side of the pore area 2. It can be arranged inside the carrier table. The suction assembly is communicated with the suction cavity 8. Through the action of the suction cavity 8, the suction force of each air hole in the pore area 2 can be kept uniform, thus helping to improve the adsorption stability of the workpiece.

[0040] Furthermore, referring to Figure 5, the gas storage chamber 4, the refrigeration mechanism, the suction assembly and the suction chamber 8 are sequentially connected through a main pipeline 9. A first valve body 10 is provided on the main pipeline 9, which is located between the refrigeration mechanism and the suction assembly. A branch 11 is also communicated with the main pipeline 9. The branch 11 has an air outlet. A second valve body 12 is provided on the branch 11. During normal operation, the first valve body 10 is kept open and the second valve body 12 is kept closed, so as to realize that only the main pipeline 9 is in a normal conduction state, and the air flow is completed in the direction from the suction chamber 8 to the gas storage chamber 4; when the device is not under test, the first valve body 10 is kept closed and the second valve body 12 is kept open. When the suction assembly moves reversely, external air can be sucked into the suction chamber 8 from the air outlet and then ejected from the pore area 2 to complete the cleaning of the dust on the surface of the pore area 2.

[0041] It should be understood that in the development process of any actual implementation, such as in any engineering or design project, a large number of specific implementation decisions can be made. Such development efforts may be complex and time-consuming, but for those of ordinary skill in the art who benefit from this disclosure, without excessive experimentation, the development efforts will be a routine task of design, manufacturing and production.

[0042] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A cooling device for a low-temperature magnetic probe station, characterized in that: Comprising a bearing surface (1), and: A suction assembly, a pore area (2) for bearing a workpiece is provided on the bearing surface (1), and the suction assembly acts on the back of the pore area (2); An air outlet (3), which is located above the pore area (2) and faces the pore area (2); A refrigeration mechanism, which is connected to the suction assembly and the air outlet (3), and air flow sequentially passes through the suction assembly, the refrigeration mechanism and the air outlet (3).

2. The heat conduction device of the low-temperature magnetic field probe station according to claim 1, wherein: A gas storage cavity (4) is provided below the bearing surface (1), the air outlets (3) are multiple and are evenly distributed in a ring shape and are connected to the gas storage cavity (4), and the refrigeration mechanism is connected to the gas storage cavity (4).

3. The cooling device of the low-temperature magnetic field probe station according to claim 2, characterized in that: It further includes a covering part (5), a concave area (6) is provided below the bearing surface (1), the covering part (5) is rotationally matched with the concave area (6), and the gas storage cavity (4) is formed between the covering part (5) and the concave area (6).

4. The cold conduction device of the low-temperature magnetic field probe table according to claim 3, characterized in that: It further includes a power element (7), which acts on the covering part (5).

5. The cold conduction device of the low-temperature magnetic field probe station according to claim 4, characterized in that: The power element (7) includes a driving motor (701) fixedly arranged relative to the bearing surface (1), and is in transmission cooperation with the covering part (5).

6. The cooling device of the cryogenic magnetic field probe station according to claim 5, characterized in that: Teeth (702) evenly distributed around the rotation axis of itself are provided on the covering part (5), and a driving gear (703) meshing with the teeth (702) is provided on the driving motor (701).

7. The cold conduction device of the low-temperature magnetic field probe station according to claim 2, characterized in that: An air suction cavity (8) is provided on the back side of the pore area (2), and the suction assembly is connected to the air suction cavity (8).

8. The cooling device of the low-temperature magnetic field probe table according to claim 7, characterized in that: The gas storage cavity (4), the refrigeration mechanism, the suction assembly and the air suction cavity (8) are sequentially connected through a main pipeline (9), a first valve body (10) is provided on the main pipeline (9) and is located between the refrigeration mechanism and the suction assembly, a branch pipeline (11) is communicated with the main pipeline (9), an air outlet is provided on the branch pipeline (11), and a second valve body (12) is provided on the branch pipeline (11).

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