Integrated groove body texturing wet-process equipment

Abstract

The utility model discloses integrated groove body texturing wet-process equipment, which comprises a texturing device, and the texturing device comprises a chemical process frame. The chemical process framework comprises at least one texturing unit arranged along a first direction; the texturing units are detachably connected, and the number of the texturing units can be increased or decreased according to process requirements. By designing the integrated tank body texturing equipment capable of being assembled and disassembled, different texturing units can be changed or replaced according to different production processes, so that the production processes are quickly switched at low cost, and cost reduction and efficiency improvement of enterprise production are realized.

Description

Technical Field

[0001] The utility model belongs to the technical field of solar cell preparation, and particularly relates to an integrated trough body texturing wet equipment. Background Art

[0002] In the manufacturing of solar cell wafers, the trough wet texturing process is to wet-etch the surface of crystalline silicon wafers to form a pyramid texture on the wafer surface to form a light-trapping effect, reduce the reflectivity of the wafer surface, so that sunlight is reflected multiple times on the wafer surface to improve the utilization rate of light. With the development of the market and the replacement of products, more and more texturing methods and processes have emerged. When enterprises produce wafers with different processes, different production lines will be set according to different processes. However, the currently practical single-machine cleaning and texturing equipment on the market has a large floor area and cannot be changed according to the texturing process. Only other types of production lines need to be newly added, which undoubtedly requires huge costs and does not conform to the principle of cost reduction and efficiency improvement of enterprises. Summary of the Utility Model

[0003] Purpose of the utility model: In order to overcome the above deficiencies, the purpose of the utility model is to provide an integrated trough body texturing wet equipment, which is reasonably designed and has a flexible structure. It can quickly change the production process through expandable texturing units, and can also change the liquid without stopping production.

[0004] Technical solution: In order to achieve the above purpose, the utility model provides an integrated trough body texturing wet equipment, including a texturing device, and the texturing device includes a chemical process framework; the chemical process framework includes at least one texturing unit arranged along a first direction; the texturing units are detachably connected, and the number of texturing units can be increased or decreased according to process requirements. Through the expandable texturing units, the production process can be changed without replacing the production line.

[0005] Furthermore, the texturing device includes a traveling crane, the traveling crane is erected on the texturing device and spans the entire texturing device; the traveling crane includes a lifting mechanism, a group of vertical plates, a top frame and an extension mechanism, and the vertical plates are respectively arranged on both sides of the texturing device; the lifting mechanism is arranged at the bottom of the vertical plates and drives the vertical plates to make lifting movements; one side of the vertical plate is fixedly connected to the top frame, and the other side of the vertical plate is fixedly connected to the extension mechanism; the texturing device also includes a robotic arm, and the robotic arm is movably connected to the top frame and the extension mechanism, and the robotic arm makes reciprocating movements on the top frame and the extension mechanism.

[0006] Furthermore, the lifting mechanism includes a housing, a first threaded rod, and a lifting drive cylinder; at least a part of the vertical plate is accommodated in the housing, and a first threaded hole is provided at the bottom end of the vertical plate; the first threaded rod is rotatably installed in the housing and is in threaded engagement with the first threaded hole; the lifting drive cylinder is fixedly installed in the housing, and pulley wheels are provided at the output end of the lifting drive cylinder and the bottom end of the first threaded rod, and the two are drivingly connected by a belt. Through the threaded engagement between the vertical plate and the first threaded rod, the lifting movement of the vertical plate in the height direction is realized.

[0007] Furthermore, a screw sleeve is provided in the top frame, the screw sleeve is fixedly installed on the wall plate in the top frame, and a second threaded hole is provided on the screw sleeve; at least a part of the extension mechanism is accommodated in the top frame.

[0008] Furthermore, the extension mechanism includes an extension frame, a mounting plate, an extension drive cylinder, and a second threaded rod; the extension frame is sleeved inside the top frame, and the two are movably connected; one end of the extension frame away from the top frame is fixedly connected to the mounting plate; the extension drive cylinder is fixedly installed at one end of the top frame away from the extension frame, and a second threaded rod is provided at the output end of the extension drive cylinder; the second threaded rod is rotatably installed in the top frame and is in threaded engagement with the second threaded hole. The design of the extension mechanism enables the traveling crane to more flexibly adapt to the expandable frame. The vertical plate is fixed to the extension mechanism, so that the vertical plate and the lifting mechanism can move along with the extension module.

[0009] Furthermore, the texturing device further includes a water washing frame, the water washing frame is parallel and oppositely arranged with the chemical process frame, and the traveling crane moves back and forth between the chemical process frame and the water washing frame; the water washing device includes at least one water washing unit arranged in the first direction, and the water washing units are detachably connected.

[0010] Furthermore, the traveling crane further includes a lateral movement mechanism, the lateral movement mechanism includes a fixing plate, a toothed plate, a lateral movement drive cylinder, and a helical gear; the fixing plate is detachably installed on the wall plates of the texturing unit and the water washing unit, the toothed plate is fixedly installed on the fixing plate; the lateral movement drive cylinder is fixedly installed in the housing, a helical gear is provided at the output end of the lateral movement drive cylinder, and the helical gear meshes with the toothed plate. Through the meshing between the helical gear and the toothed plate, the traveling crane can move back and forth between the chemical function frame and the water washing frame.

[0011] Furthermore, the texturing unit includes a tank body and two addition barrels for containing chemical liquid; the tank body is detachably installed in the texturing unit, the addition barrels are fixedly installed above the tank body and inject liquid into the tank body through pipelines.

[0012] Further, it includes a plurality of the above-described texturing devices and a conveyor belt. The plurality of texturing devices are arranged perpendicular to the first direction to form an integrated trough-type wet texturing device; the conveyor belt penetrates through the integrated trough-type wet texturing device.

[0013] As can be seen from the above technical solutions, the present utility model has the following beneficial effects:

[0014] 1. In this embodiment, the integrated frame design enables each individual texturing unit to be detachably assembled, allowing the texturing units to be increased for complex production processes or reduced to lower energy consumption. Changing the production process without changing the equipment greatly reduces the production cost and realizes cost reduction and efficiency improvement. Compared with single-machine cleaning and texturing devices, it also greatly saves the floor area.

[0015] 2. In this embodiment, the design of two addition barrels enables liquid change without stopping the machine in case of production process change, greatly improving the production efficiency.

[0016] 3. In this embodiment, each texturing unit is designed with a heating device, enabling technicians to heat the texturing units required for specific process steps without heating the entire equipment, greatly saving the electric energy required for the heating device and reducing the production cost.

[0017] 4. In this embodiment, through the design of the overhead crane, the loading and unloading of the flower basket in the frame is very flexible. Compared with the design of each texturing unit on the single-machine cleaning and texturing equipment being equipped with loading and unloading equipment, the number of loading and unloading equipment is greatly reduced, and the cost is also greatly saved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of an integrated trough-type wet texturing device according to the present utility model;

[0019] Figure 2 is a partially enlarged schematic diagram of the chemical process frame in the present utility model;

[0020] Figure 3 is a schematic structural diagram of the texturing device in the present utility model;

[0021] Figure 4 is a side view of the overhead crane in the present utility model;

[0022] Figure 5 is Figure 4 a partially enlarged schematic diagram of the local structure in;

[0023] Figure 6 is a schematic structural diagram of the extension mechanism in the present utility model;

[0024] Figure 7Another perspective structural schematic diagram of the extension mechanism in the present utility model;

[0025] Figure 8 Front view of the texturing device in the present utility model;

[0026] Figure 9 Side view of the texturing device in the present utility model;

[0027] Figure 10 Partial enlarged schematic diagram of the lateral movement mechanism in the present utility model;

[0028] Figure 11 Top view of the texturing device in the present utility model;

[0029] Figure 12 Structural schematic diagram of the texturing unit in the present utility model. Detailed implementation manners

[0030] Now, reference will be made in detail to the embodiments of the present application, and one or more examples of the embodiments of the present application will be illustrated in the drawings. Each example is provided for the purpose of explaining the present application, rather than limiting the present application. In fact, those skilled in the art will clearly understand that various modifications and changes can be made to the present application without departing from the scope or spirit of the present application. It should be noted that the first direction described in this embodiment is the X direction in the figure.

[0031] The present utility model will be further illustrated below in conjunction with the accompanying drawings and specific embodiments.

[0032] Please refer to Figures 1 to 2 , an integrated tank texturing wet equipment 1000 includes a texturing device 1. Specifically, the texturing device 1 includes a chemical process frame 11, and the chemical process frame 11 is composed of a plurality of texturing units 111 arranged along the first direction. The texturing units 111 are detachably connected by pins, and the number of texturing units 111 in the chemical process frame 11 can be increased or decreased according to the needs of the process.

[0033] When the production process is complex, the number of texturing units 111 can be increased to meet the complex production process; when the production process is simple, the number of texturing units 111 can be reduced to reduce production costs and achieve cost reduction and efficiency improvement.

[0034] Please continue to refer to Figures 2 to 4 , as shown in the figure, the texturing device 1 further includes a traveling crane 12, and the traveling crane 12 is erected above the texturing device 1 and spans the entire texturing device 1.

[0035] The traveling vehicle 12 includes a lifting mechanism 121 and a group of vertical plates 122. The vertical plates 122 are respectively arranged on both sides of the texturing device 1. The lifting mechanism 121 is arranged at the bottom of the vertical plates 122. The lifting mechanism 121 drives the vertical plates 122 to move up and down.

[0036] like Figure 8 As shown, the texturing device 1 also includes a robot arm 13, which is movably connected to the top frame 123 and the extension mechanism 124, and the robot arm 13 can make a reciprocating motion on the top frame 123 and the extension mechanism 124. The robot arm 13 is sleeved on the top frame 123 and the extension mechanism 124, and the robot arm 13 is designed with a roller 131 between the contact surface of the top frame 123 and the extension mechanism. It should be noted that in this embodiment, the robot arm 13 is driven by a servo motor to make a reciprocating motion on the top frame 123 and the extension mechanism 124. Through the cooperation of the lifting mechanism 121, the robot arm 13 can put down or lift the flower basket 15 containing silicon wafers, and send the flower basket 15 to the next texturing unit 111.

[0037] Furthermore, the lifting mechanism 121 includes a housing 1211, a first threaded rod 1212, and a lifting drive cylinder 1213. The vertical plate 122 is at least partially accommodated in the housing 1211, and a first threaded hole 1221 is provided at the bottom end of the vertical plate 122. The first threaded rod 1212 is rotatably installed in the housing 1211, and the top end of the first threaded rod 1212 is threadedly engaged with the first threaded hole 1221 on the vertical plate 122. The first threaded rod 1212 rotates clockwise or counterclockwise to achieve relative movement between the first threaded rod 1212 and the vertical plate 122.

[0038] Furthermore, the lifting drive cylinder 1213 is fixedly installed in the shell 1211, and the output end of the drive cylinder 1213 and the bottom end of the first threaded rod 1212 are provided with pulleys 1214, and the drive cylinder 1213 and the first threaded rod 1212 are connected by a belt 1215 to achieve transmission connection.

[0039] Therefore, through the threaded cooperation between the first threaded rod 1212 and the threaded hole 1221 on the vertical plate 122, the lifting drive cylinder 1213 drives the first threaded rod 1212 to rotate clockwise or counterclockwise, so that the lifting movement of the traveling crane 12 can be realized.

[0040] See also Figure 6 and Figure 7 The traveling crane 12 includes a top frame 123 and an extending mechanism 124 .

[0041] Specifically, a screw sleeve 1231 is disposed in the top frame 123 , and the screw sleeve 1231 is fixedly mounted on the wall plate in the top frame, and a second threaded hole 12311 is disposed on the screw sleeve 1231 . The extension mechanism 124 is fixedly connected to the vertical plate 121 , and is at least partially accommodated in the top frame 123 .

[0042] Further, the extension mechanism 124 includes an extension frame 1241, a mounting plate 1242, an extension driving cylinder 1243, and a second threaded rod 1244. The extension frame 1241 is movably sleeved on the wall plates on both sides of the top frame 123, and one end of the extension frame 1241 away from the top frame 123 is fixedly connected to the mounting plate 1242. The extension driving cylinder 1243 is fixedly installed on one side of the top plate 1242 away from the extension frame 1241. A second threaded rod 1244 is provided at the output end of the extension driving cylinder 1243. The second threaded rod 1244 is rotatably installed in the top frame 123 and is in threaded cooperation with the second threaded hole 12311.

[0043] By driving the second threaded rod 1244 to rotate through the extension driving cylinder 1243, due to the threaded cooperation between the threaded rod 1244 and the second threaded hole 12311, the extension frame 1241 can move away from or towards the screw sleeve 1231, realizing the elongation or shortening of the traveling crane 12 in the length direction. When the number of the texturing units 111 increases, the top frame 123 can be elongated to adapt to more complex production and manufacturing processes; when the number of the texturing units 111 decreases, the top frame 123 can be shortened, reducing the floor area while accelerating the texturing speed and improving production efficiency.

[0044] In addition, it should be noted that since the vertical plate 122 is fixedly connected to the extension mechanism 124, when the length of the top frame 123 is elongated or shortened, the vertical plate 122 and the lifting mechanism 121 also move together accordingly.

[0045] As Figures 9 to 10 shown, the texturing device 1 further includes a water washing frame 14. The water washing frame 14 is composed of a plurality of water washing units 141 arranged in a first direction, and the water washing units 141 are detachably connected.

[0046] Wherein, the water washing frame 14 and the chemical process frame 11 are parallel and relatively arranged to each other, and the traveling crane 12 makes a reciprocating movement between the water washing frame 14 and the chemical process frame 11.

[0047] Further, the traveling crane 12 further includes a lateral movement mechanism 125. The lateral movement mechanism 125 includes a fixed plate 1251, a toothed plate 1252, a lateral movement driving cylinder 1253, and a helical gear 1254. The fixed plate 1251 is detachably installed on the wall plates of the texturing unit 111 and the water washing unit 141, and the toothed plate 1252 is fixedly installed on the fixed plate 1251. The lateral movement driving cylinder 1253 is fixedly installed in the housing 1211. A helical gear 1254 is provided at the output end of the lateral movement driving cylinder 1253, and the helical gear 1254 meshes with the toothed plate 1252.

[0048] When the texturing process changes, the number of texturing units 111 or water washing units 141 in the texturing device 1 needs to be adjusted. The fixing plate 1252 can be removed from the wall plate and reinstalled after the assembly of the texturing unit 111 or the water washing unit 141 is completed. Through the setting of the helical gear 1254 and the toothed plate 1252, the reciprocating movement of the traveling crane 12 between the chemical process frame 11 and the water washing frame 14 is realized.

[0049] In addition, it should be noted that rollers are provided at the bottom of the housing 1211 to assist the reciprocating movement of the traveling crane 12. This embodiment does not limit this. As long as it can assist in realizing the reciprocating movement of the traveling crane 12 on the premise of meeting the basic functions of the traveling crane 12, it will not be elaborated here.

[0050] Please continue to refer to Figure 11 and Figure 12 , the texturing unit 111 includes a tank body 1111.

[0051] In the texturing process of solar cell wafers, different chemical agents and multiple cleaning processes are used in different stages of the entire texturing process. Therefore, in the entire texturing device 1, the components of the chemical liquid medicine contained in the tank body 1111 of different texturing units 111 are also different. As mentioned above, in the integrated tank body texturing wet equipment 1000 in this embodiment, when the texturing process changes, the texturing unit 111 is disassembled, and according to the different chemical liquid medicines in the tank body 1111, the position or quantity of the texturing unit 111 is adjusted, and they are recombined and reinstalled to realize the change of the production process. This greatly improves the applicability of the texturing process of the texturing device 1 and better realizes cost reduction and efficiency increase.

[0052] As Figure 8 shown, the texturing unit 111 further includes two additive barrels 1112.

[0053] Specifically, during the texturing process, since the silicon wafer reacts with the chemical liquid medicine and there is a bubbling phenomenon, the concentration of the chemical liquid medicine decreases, affecting the texturing effect. The setting of the additive barrel 1112 can realize the timely replenishment of the chemical liquid medicine and avoid this situation. In the embodiment of the present invention, two additive barrels 1112 are provided, and the chemical agent components in the two additive barrels 1112 are different, or one of them is an empty barrel. When the production process changes, one additive barrel 1112 is closed, the liquid injection into the tank body 1111 is stopped, and the chemical liquid medicine in the tank body 1111 is discharged; the other additive barrel 1112 is opened for liquid injection, or another required chemical liquid medicine is added to the other additive barrel 1112 and then liquid injection is carried out. It can realize the replacement of the chemical liquid medicine without stopping the machine, which is convenient for technicians and greatly improves the production efficiency at the same time.

[0054] Please continue to refer to Figure 12, The texturing unit 111 includes a heating device 1113, which is used for the chemical liquid medicine in the tank body 1111 to keep the temperature of the chemical liquid medicine in the tank body 1111 within a suitable range, thereby improving the texturing yield. During the texturing process, some processes require the texturing environment to reach a certain temperature range. However, large-area heating is a high-energy-consuming measure and does not conform to the concept of cost reduction and efficiency improvement of enterprises. Therefore, in this utility model, only the heating device 1113 is set for the texturing unit 111 in the chemical liquid medicine frame 11, and no heating device 1113 is configured in the water washing frame 14. The number of configured heating devices 1113 is reduced, and at the same time, the energy consumption is reduced.

[0055] In addition, this utility model integrates the chemical function tank and the water washing tank into two types of frames, which is convenient for technicians to supply liquid centrally and discharge separately for the equipment.

[0056] Please continue to refer to Figure 1 , as shown in the figure, an integrated tank body texturing wet equipment 1000 in this embodiment includes a plurality of texturing devices 1, and the plurality of texturing devices 1 are arranged along a direction perpendicular to the first direction.

[0057] Furthermore, the conveyor belt 2 extends along a direction perpendicular to the first direction and passes through the texturing device 1. The conveyor belt 2 includes a feed inlet 21 and a discharge outlet 22. The silicon wafers to be textured are stacked in the flower basket 15, placed at the feed inlet 21, and conveyed to the position of the texturing device 1 through the conveyor belt 2; the textured silicon wafers are placed on the conveyor belt 2 by the robotic arm 13 and transported to the discharge outlet 22 by the conveyor belt 2, waiting for the next process.

[0058] The working principle of the integrated tank body texturing wet equipment 1000 described in this embodiment is as follows: First, according to the process requirements, the number of texturing units 111 and water washing units 141 in the texturing device 1 is changed, and at the same time, the traveling crane 12 is adjusted according to the lengths of the chemical process frame 11 and the water washing frame 14. After the adjustment is completed, the flower basket 15 loaded with the silicon wafers to be textured is transported to the feed inlet 21 of the conveyor belt 2 by the AGV cart or technician. The conveyor belt 2 conveys each group of flower baskets 15 to a predetermined position near each texturing device 1. The robotic arm 13 on the traveling crane 12 slides above the flower basket 15, and the lifting mechanism 121 adjusts the robotic arm 13 to a suitable height, and then the robotic arm 13 clamps the flower basket 15. After clamping, it slides above the first texturing unit 111 corresponding to the texturing step, and then the robotic arm 13 puts the flower basket 15 into the tank body 1111. After waiting for the process to be completed, the robotic arm 13 takes out the flower basket 15 and sends it to the next process, and so on until the texturing is completed. After the texturing is completed, the robotic arm 13 places the flower basket 15 on the conveyor belt 2, and the conveyor belt 2 conveys it to the discharge outlet 22. After placing it at the predetermined position, it waits for the AGV cart or the staff to send the flower basket 15 to the next process.

[0059] When the texturing process needs to be changed, the texturing units 111 are rearranged according to the chemical liquid in the tank 1111 to form a new texturing production line. If there are not many texturing units 111 that need to be changed, the chemical liquid in the addition barrel 1112 can also be replaced to achieve liquid change without stopping the machine, and the texturing process can also be changed. At the same time, the staff can specifically heat the texturing units 111 that need to be heated. Thus, the above is the working principle of the integrated tank texturing wet equipment 1000 provided in this embodiment.

[0060] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, several improvements can be made without departing from the principle of the present invention, and these improvements should also be regarded as the protection scope of the present invention.

Claims

1. An integrated wet etching equipment for grooved texturing, characterized in that Comprising: A texturing device (1), the texturing device (1) comprising a chemical process framework (11); the chemical process framework (11) comprising at least one texturing unit (111) arranged along a first direction; the texturing units (111) are detachably connected, and the number of the texturing units (111) can be increased or decreased according to process requirements.

2. An integrated trough-type texturing wet equipment according to claim 1, characterized in that The texturing device (1) comprises a traveling crane (12), the traveling crane (12) is mounted on the texturing device (1) and spans the entire texturing device (1); the traveling crane (12) comprises a lifting mechanism (121), a group of vertical plates (122), a top frame (123) and an extension mechanism (124), the vertical plates (122) are respectively arranged on both sides of the texturing device (1); the lifting mechanism (121) is arranged at the bottom of the vertical plate (122) and drives the vertical plate (122) to move up and down; one side of the vertical plate (122) is fixedly connected to the top frame (123), and the other side of the vertical plate (122) is fixedly connected to the extension mechanism (124); the texturing device (1) further comprises a robotic arm (13), the robotic arm (13) is movably connected to the top frame (123) and the extension mechanism (124), and the robotic arm (13) moves back and forth on the top frame (123) and the extension mechanism (124).

3. An integrated trough-type texturing wet equipment according to claim 2, characterized in that The lifting mechanism (121) comprises a housing (1211), a first threaded rod (1212) and a lifting drive cylinder (1213); at least part of the vertical plate (122) is received in the housing (1211), and a first threaded hole (1221) is provided at the bottom end of the vertical plate (122); the first threaded rod (1212) is rotatably installed in the housing (1211) and is in threaded engagement with the first threaded hole (1221); the lifting drive cylinder (1213) is fixedly installed in the housing (1211), and pulley wheels (1214) are provided at the output end of the lifting drive cylinder (1213) and the bottom end of the first threaded rod (1212), and the two are connected by a belt (1215) to achieve drive connection.

4. An integrated trough-type texturing wet equipment according to claim 3, characterized in that A screw sleeve (1231) is provided in the top frame (123), the screw sleeve (1231) is fixedly installed on the wall plate inside the top frame (123), and a second threaded hole (12311) is provided on the screw sleeve (1231); one end of the top frame (123) is fixedly connected to the vertical plate (122), and the other end is sleeved with the extension mechanism (124), and at least part of the extension mechanism (124) is received in the top frame (123).

5. An integrated trough-type texturing wet equipment according to claim 4, characterized in that The extension mechanism (124) includes an extension frame (1241), a mounting plate (1242), an extension drive cylinder (1243), and a second threaded rod (1244); the extension frame (1241) is sleeved inside the top frame (123), and the two are movably connected; one end of the extension frame (1241) away from the top frame (123) is fixedly connected to the mounting plate (1242); the extension drive cylinder (1243) is fixedly installed at one end of the top frame (123) away from the extension frame (1241), and the output end of the extension drive cylinder (1243) is provided with a second threaded rod (1244); the second threaded rod (1244) is rotatably installed in the top frame (123) and is in threaded cooperation with the second threaded hole (12311).

6. The integrated groove body texturing wet equipment according to claim 5, characterized in that The texturing device (1) further includes a water washing frame (14), the water washing frame (14) and the chemical process frame (11) are parallel and oppositely arranged, and the traveling crane (12) moves back and forth between the chemical process frame (11) and the water washing frame (14); the water washing frame (14) includes at least one water washing unit (141) arranged along the first direction, and the water washing units (141) are detachably connected to each other.

7. The integrated groove body texturing wet equipment according to claim 6, characterized in that The traveling crane (12) further includes a lateral movement mechanism (125), the lateral movement mechanism (125) includes a fixing plate (1251), a toothed plate (1252), a lateral movement drive cylinder (1253), and a helical gear (1254); the fixing plate (1251) is detachably installed on the wall plates of the texturing unit (111) and the water washing unit (141), and the toothed plate (1252) is fixedly installed on the fixing plate (1251); the lateral movement drive cylinder (1253) is fixedly installed in the housing (1211), the output end of the lateral movement drive cylinder (1253) is provided with a helical gear (1254), and the helical gear (1254) meshes with the toothed plate (1252).

8. The integrated groove body texturing wet equipment according to claim 7, characterized in that The texturing unit (111) includes a tank body (1111) and two addition barrels (1112) for containing chemical liquid medicine; the tank body (1111) is detachably installed in the texturing unit (111), the addition barrels (1112) are fixedly installed above the tank body (1111), and inject liquid into the tank body (1111) through pipelines.

9. An integrated wet etching equipment for groove texturing according to any one of claims 1 to 8, characterized in that, It further includes a conveyor belt (2), and a plurality of the texturing devices (1) are arranged perpendicular to the first direction to form an integrated groove body texturing wet equipment (1000); the conveyor belt (2) penetrates through the integrated groove body texturing wet equipment (1000).

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