Film thickness measuring jig
The film thickness measurement fixture addresses inefficiencies in existing methods by enabling direct film thickness measurement and comprehensive analysis during the deposition process, enhancing production efficiency.
Patent Information
- Application Number
- CN202422368184.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-09-27
AI Technical Summary
In the prior art, the film thickness testing efficiency is low, which affects production efficiency.
A film thickness measurement fixture is designed, including a base plate, a film thickness test area and an abnormality detection area, with step forming components and capping components inside, which are used to form metal steps during the coating process and directly test the film thickness to avoid unnecessary metal steps.
By directly testing the film thickness, the detection time is shortened, the working efficiency is improved, and the accuracy of the film thickness distribution is ensured.
Smart Images
Figure CN223106861U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of film thickness testing, in particular to a film thickness measuring fixture. Background Technique
[0002] During the stripping process, it is necessary to obtain a patterned photoresist structure or a mask such as metal on the substrate by photolithography. A metal layer is deposited on the mask by a coating process, and then a target graphic structure consistent with the pattern is obtained by dissolving the photoresist with a stripping solution or mechanically removing the metal hard mask. When we need to measure the required film thickness, we need to remove the mask layer first and then measure it with a step meter, which seriously affects the production efficiency.
[0003] Based on this, in order to solve the above problems, we propose a film thickness measuring fixture. Content of the Utility Model
[0004] The purpose of the utility model is to solve the disadvantages such as low film thickness testing efficiency in the prior art, and to propose a film thickness measuring fixture.
[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:
[0006] Design a film thickness measuring fixture, including a bottom plate, the bottom of the bottom plate is in contact with the substrate, the top of the bottom plate is provided with a film thickness testing area and an abnormal detection area, and a plurality of step forming components for forming metal steps are arranged in the film thickness testing area and the abnormal detection area, and a cover component is arranged on one side of the step forming component.
[0007] Further, the step forming component includes a through hole penetrating the bottom plate.
[0008] Further, the projection of the through hole on the substrate is rectangular, with a length of 8 mm and a width of 1 mm.
[0009] Further, the step forming components in the film thickness testing area are annularly and arrayedly distributed along the edge of the bottom plate.
[0010] Further, the step forming components in the abnormal detection area are circumferentially distributed along the center of the bottom plate.
[0011] Further, the cover component includes a shielding plate for covering the step forming component and a bolt for fixing the shielding plate on the bottom plate.
[0012] A film thickness measurement jig proposed by the present utility model has the beneficial effects that: by providing a step forming component in the film thickness test area, a metal step is formed on the substrate during the film coating process, and the film thickness of the prepared film can be directly measured after the film coating is completed, effectively shortening the detection time and obtaining the required film thickness in advance. At the same time, by providing a cover component, part of the step forming component can be blocked, thus avoiding unnecessary metal steps; by providing a step forming component in the abnormal detection area, the film thickness distribution of the product can be tested, improving the work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 is a perspective view of the present utility model;
[0014] Figure 2 is a bottom view of the present utility model; DETAILED DESCRIPTION OF THE EMBODIMENTS
[0015] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments.
[0016] Refer to Figure 1-2 An embodiment of the present utility model discloses a film thickness measurement jig, which includes a bottom plate 1. The bottom of the bottom plate 1 is in contact with the substrate. The top of the bottom plate 1 is provided with a film thickness test area 101 and an abnormal detection area 102. A plurality of step forming components 2 for forming metal steps are provided in the film thickness test area 101 and the abnormal detection area 102. A cover component 3 is provided on one side of the step forming component 2.
[0017] By providing the step forming component 2 in the film thickness test area 101 of the present utility model, a metal step is formed on the substrate during the film coating process, and the film thickness of the prepared film can be directly measured after the film coating is completed, effectively shortening the detection time and obtaining the required film thickness in advance. At the same time, by providing the cover component 3, part of the step forming component 2 can be blocked, thus avoiding unnecessary metal steps; by providing the step forming component 2 in the abnormal detection area 102, the film thickness distribution of the product can be tested, improving the work efficiency.
[0018] In an optional embodiment of the present utility model, the step forming component 2 includes a through hole 201 penetrating the bottom plate 1. The setting of the through hole 201 enables a metal step to be formed on the substrate during the film coating process, and the film thickness of the prepared film can be directly measured after the film coating is completed, effectively shortening the detection time and obtaining the required film thickness in advance.
[0019] In an alternative embodiment of the present utility model, the projection of the through hole 201 on the substrate is rectangular, with a length of 8 mm and a width of 1 mm. In this embodiment, the rectangular structure of 8 mm * 1 mm is used to form metal steps of the same size.
[0020] In an alternative embodiment of the present utility model, the step forming assemblies 2 in the film thickness test area 101 are distributed in an annular array along the edge of the bottom plate 1. Such a setting enables one of the step forming assemblies 2 to be replaced by another when it becomes blocked after long-term use, thereby improving work efficiency.
[0021] In an alternative embodiment of the present utility model, the step forming assemblies 2 in the abnormal detection area 102 are distributed circumferentially around the center of the bottom plate 1. Preferably, the number of step forming assemblies 2 in this embodiment is five. One step forming assembly 2 is located at the center of the bottom plate 1, and the other four are respectively located in the four directions of up, down, left, and right of the center of the bottom plate 1. Such a setting can test the film thickness distribution of the product and improve work efficiency.
[0022] In an alternative embodiment of the present utility model, the cover assembly 3 includes a shielding plate 301 for covering the step forming assembly 2 and bolts 302 for fixing the shielding plate 301 to the bottom plate 1. Preferably, the area of the shielding plate 301 in this embodiment is larger than the projection area of the through hole 201 on the substrate to ensure that the shielding plate 301 can cover the through hole 201; the step forming assembly 2 is covered by the shielding plate 301 to avoid forming unnecessary metal steps. After the shielding plate 301 covers the step forming assembly 2, the bolts 302 are rotated to fix the position of the shielding plate 301 by loosening the bolts 302.
[0023] As described above, the above are only the preferred specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution and inventive concept of the present utility model, making equivalent replacements or changes should be covered within the protection scope of the present utility model.
Claims
1. A film thickness measurement jig, characterized in that: It includes a bottom plate (1), the bottom of the bottom plate (1) is in contact with the substrate, a film thickness test area (101) and an abnormality detection area (102) are provided on the top of the bottom plate (1), and a plurality of step forming components (2) for forming metal steps are provided in the film thickness test area (101) and the abnormality detection area (102), and a cover component (3) is provided on one side of the step forming component (2).
2. The film thickness measuring jig according to claim 1, wherein: The step forming component (2) includes a through hole (201) penetrating through the bottom plate (1).
3. The film thickness measurement jig according to claim 2, characterized in that: The projection of the through hole (201) on the substrate is rectangular, with a length of 8 mm and a width of 1 mm.
4. The film thickness measurement jig according to claim 1, wherein: The step forming components (2) in the film thickness test area (101) are distributed in a circular array along the edge of the bottom plate (1).
5. The film thickness measurement fixture according to claim 1, characterized in that: The step forming components (2) in the abnormality detection area (102) are distributed circumferentially along the center of the bottom plate (1).
6. The film thickness measurement jig according to claim 1, characterized in that: The cover component (3) includes a shielding plate (301) for covering the step forming component (2) and bolts (302) for fixing the shielding plate (301) on the bottom plate (1).