Multi-station sensor calibration workbench

Abstract

The utility model provides a multi-station sensor calibration workbench, relates to the technical field of calibration equipment, and aims to solve the problem that an existing sensor calibration workbench cannot perform optical system calibration on a multi-station sensor. Comprising a base, a laser interferometer, a clamping device and a lens assembly, and the laser interferometer, the lens assembly and the clamping device are arranged in the Y direction; the clamping device is provided with a plurality of clamping positions arranged in the X direction, the clamping space of the clamping positions is adjustable, and the clamping positions are used for fixing the sensor. According to the utility model, optical system calibration can be carried out on the multi-station sensor.

Description

Technical Field

[0001] The utility model relates to the technical field of calibration equipment, and more specifically, to a multi-station sensor calibration workbench. Background Art

[0002] In the field of semiconductor detection, it is often necessary to calibrate an optical system according to the position of a sensor, which requires clamping the sensor on a workbench to keep the sensor fixed.

[0003] However, the existing sensor calibration workbench can only clamp sensors at a single station and cannot meet the clamping requirements of multi-station sensors, so that the purpose of calibrating the optical system for multi-station sensors cannot be achieved. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a multi-station sensor calibration workbench to solve the technical problem that the existing sensor calibration workbench cannot calibrate the optical system for multi-station sensors.

[0005] The multi-station sensor calibration workbench provided by the utility model includes a base, a laser interferometer, a clamping device and a lens assembly. Among them, the laser interferometer and the clamping device are both installed on the base, the lens assembly is movably arranged between the laser interferometer and the clamping device, and the laser interferometer, the lens assembly and the clamping device are arranged along the Y direction; the clamping device is provided with a plurality of clamping positions arranged along the X direction, the clamping space of the clamping position is adjustable, and the clamping position is used to fix the sensor.

[0006] Further, the lens assembly includes a movable seat, a mounting seat and a calibration sample. Among them, the movable seat is adjusted to move along the X direction through the mounting seat, and the calibration sample is installed on the mounting seat.

[0007] Further, the mounting seat includes a seat body and a pressing plate assembly. Among them, the seat body is provided with a light passing hole penetrating along the Y direction, and the calibration sample covers the light passing hole; the pressing plate assembly is installed on the seat body, and the pressing plate assembly is used to fix the calibration sample on the seat body.

[0008] Further, the seat body is provided with an annular limiting rib, the annular limiting rib surrounds the light passing hole, the annular limiting rib constructs a limiting space for accommodating the calibration sample, and the calibration sample is accommodated in the limiting space.

[0009] Further, the pressing plate assembly and the seat body are arranged along the Y direction. The pressing plate assembly includes an upper pressing plate, a first side pressing plate, and a second side pressing plate. Among them, the upper pressing plate is located above the light passing hole, and the upper pressing plate is provided with an upper pressing portion; the first side pressing plate and the second side pressing plate are respectively arranged on both sides of the light passing hole. The first side pressing plate is provided with a first side pressing portion, and the second side pressing plate is provided with a second side pressing portion. The calibration sample is clamped between the upper pressing portion, the first side pressing portion, and the second side pressing portion and the seat body.

[0010] Further, the pressing plate assembly further includes an upper buffer plate, a first side buffer plate, and a second side buffer plate. Among them, the upper buffer plate is arranged on the surface of the upper pressing plate facing the seat body, and the upper buffer plate forms the upper pressing portion; the first side buffer plate is arranged on the surface of the first side pressing plate facing the seat body, and the first side buffer plate forms the first side pressing portion; the second side buffer plate is arranged on the surface of the second side pressing plate facing the seat body, and the second side buffer plate forms the second side pressing portion.

[0011] Further, one of the clamping device and the mounting seat is provided with a guiding groove, and the other of the clamping device and the mounting seat is provided with a guide rail. The guiding groove extends along the X direction, and the guide rail is slidably matched with the guiding groove.

[0012] Further, the clamping device includes a base, a driving mechanism, a clamping arm, a limiting strip extending along the X direction, and at least one separating strip extending along the Y direction. The limiting strip and the separating strip are both arranged on the bearing surface of the base. The limiting strip and the at least one separating strip divide the bearing surface into a plurality of clamping positions; the clamping arm is installed at the output end of the driving mechanism, and the driving mechanism is configured to enable the clamping arm to have degrees of freedom of movement along the X direction, along the Y direction, and along the Z direction. The clamping arm is used to push the sensor against the bearing surface, the limiting strip, and the corresponding separating strip.

[0013] Further, the clamping arm includes a top plate, a first side plate, and a second side plate. Among them, the top plate is used to abut against the upper surface of the sensor, and the first side plate and the second side plate are used to abut against the other set of adjacent side surfaces of the sensor.

[0014] Further, the driving mechanism includes an X-direction adjusting mechanism, a Y-direction adjusting mechanism, and a Z-direction adjusting mechanism. Among them, the X-direction adjusting mechanism is installed on the base, the Y-direction adjusting mechanism is installed at the output end of the X-direction adjusting mechanism, the Z-direction adjusting mechanism is installed at the output end of the Y-direction adjusting mechanism, and the clamping arm is installed at the output end of the Z-direction adjusting mechanism.

[0015] Further, a plurality of mounting positions are provided on the bearing surface, and the plurality of mounting positions are arranged at intervals in the X direction, and the partition strip is alternatively mounted on one of the plurality of mounting positions; and / or, the limiting strip and the base are of an integrally formed structure; and / or, the number of the partition strips is one, and the partition strip and the limiting strip divide the bearing surface into two clamping positions.

[0016] The beneficial effects brought by the multi-station sensor calibration workbench of the present utility model are as follows:

[0017] By providing a multi-station sensor calibration workbench mainly composed of a base, a laser interferometer, a clamping device and a lens assembly, when in use, each sensor can be respectively placed in each clamping position to realize the clamping and fixing of the sensor; then, by adjusting the position of the lens assembly relative to the base, the laser emitted by the laser interferometer can pass through the lens assembly and irradiate the sensor, so as to realize calibration.

[0018] It can be seen that through the above settings, the multi-station sensor calibration workbench can realize the simultaneous clamping and fixing of multiple sensors, meet the clamping requirements of multi-station sensors, and thus achieve the purpose of calibrating the optical system of multi-station sensors. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the provided drawings.

[0020] Figure 1 It is one of the structural schematic diagrams of the multi-station sensor calibration workbench provided by the embodiment of the present utility model;

[0021] Figure 2 It is the second structural schematic diagram of the multi-station sensor calibration workbench provided by the embodiment of the present utility model;

[0022] Figure 3 It is one of the structural schematic diagrams of the clamping device and the lens assembly of the multi-station sensor calibration workbench provided by the embodiment of the present utility model;

[0023] Figure 4 It is the second structural schematic diagram of the clamping device and the lens assembly of the multi-station sensor calibration workbench provided by the embodiment of the present utility model;

[0024] Figure 5 It is the structural schematic diagram of the clamping device of the multi-station sensor calibration workbench provided by the embodiment of the present utility model;

[0025] Figure 6 Schematic structural diagram of the base of the clamping device of the multi-station sensor calibration workbench provided by the embodiment of the present utility model;

[0026] Figure 7 Schematic structural diagram of the clamping arm of the clamping device of the multi-station sensor calibration workbench provided by the embodiment of the present utility model.

[0027] Explanation of reference numerals:

[0028] 010 - First sensor; 020 - Second sensor;

[0029] 100 - Base; 200 - Laser interferometer; 300 - Clamping device; 400 - Lens assembly;

[0030] 310 - Base; 311 - Bearing surface; 312 - Mounting position; 3121 - Threaded hole; 320 - Driving mechanism; 321 - X-direction adjusting mechanism; 322 - Y-direction adjusting mechanism; 323 - Z-direction adjusting mechanism; 330 - Clamping arm; 331 - Top plate; 332 - First side plate; 333 - Second side plate; 340 - Limiting strip; 350 - Partition strip; 351 - Connecting hole; 361 - Guide groove; 362 - Guide rail;

[0031] 3211 - X-direction slide rail; 3212 - X-direction slider; 3213 - First bolt;

[0032] 3221 - Y-direction slide rail; 3222 - Y-direction slider; 3223 - Second bolt;

[0033] 3231 - Z-direction slide rail; 3232 - Z-direction slider; 3233 - Third bolt;

[0034] 410 - Movable seat; 420 - Mounting seat; 430 - Calibration sample;

[0035] 421 - Seat body; 4211 - Light passing hole; 4212 - Annular limiting rib; 422 - Pressing plate assembly; 4223 - Second side pressing plate; 4224 - Upper buffer plate; 4225 - First side buffer plate; 4226 - Second side buffer plate. Detailed implementation manners

[0036] To make the above objects, features and advantages of the present utility model more obvious and understandable, the following detailed description of the specific embodiments of the present utility model is given with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0037] Figure 1 One of the schematic structural diagrams of the multi-station sensor calibration workbench provided by this embodiment; Figure 2This is the second result schematic diagram of the multi-station sensor calibration workbench provided in this embodiment. As Figure 1 and Figure 2 shown, this embodiment provides a multi-station sensor calibration workbench, including a base 100, a laser interferometer 200, a clamping device 300, and a lens assembly 400. Among them, the laser interferometer 200 and the clamping device 300 are both installed on the base 100, the lens assembly 400 is movably arranged between the laser interferometer 200 and the clamping device 300, and the laser interferometer 200, the lens assembly 400, and the clamping device 300 are arranged along the Y direction.

[0038] Figure 3 This is the first structural schematic diagram of the clamping device 300 and the lens assembly 400 of the multi-station sensor calibration workbench provided in this embodiment; Figure 4 This is the second structural schematic diagram of the clamping device 300 and the lens assembly 400 of the multi-station sensor calibration workbench provided in this embodiment; Figure 5 This is the structural schematic diagram of the clamping device 300 of the multi-station sensor calibration workbench provided in this embodiment. As Figures 3 to 5 shown, the clamping device 300 is provided with a plurality of clamping positions arranged along the X direction, the clamping space of the clamping positions is adjustable, and the clamping positions are used to fix the sensors.

[0039] During use, each sensor can be placed in each clamping position respectively to realize the clamping and fixing of the sensors; then, by adjusting the position of the lens assembly 400 relative to the base 100, the laser emitted by the laser interferometer 200 can be irradiated to the sensors through the lens assembly 400, so as to realize calibration.

[0040] It can be seen that through the above settings, the multi-station sensor calibration workbench can realize the simultaneous clamping and fixing of multiple sensors, meet the clamping requirements of multi-station sensors, and thus achieve the purpose of optical system calibration for multi-station sensors.

[0041] Please continue to refer to Figures 3 to 5, in this embodiment, the clamping device 300 includes a base 310, a driving mechanism 320, a clamping arm 330, a limiting strip 340 extending in the X direction, and at least one partition strip 350 extending in the Y direction. Among them, both the limiting strip 340 and the partition strip 350 are fixedly arranged on the bearing surface 311 of the base 310. The limiting strip 340 and the at least one partition strip 350 divide the bearing surface 311 into a plurality of clamping areas for placing sensors. The clamping arm 330 is installed at the output end of the driving mechanism 320. The driving mechanism 320 is configured to enable the clamping arm 330 to have degrees of freedom of movement in the X direction, the Y direction, and the Z direction. The clamping arm 330 is used to push the sensor against the bearing surface 311, the limiting strip 340, and the corresponding partition strip 350. The limiting strip 340 and the corresponding partition strip 350 are used to abut against a set of adjacent side surfaces of the sensor.

[0042] Specifically, in this embodiment, the number of partition strips 350 is one. The partition strip 350 and the limiting strip 340 divide the bearing surface 311 into two clamping areas. This setting can meet the clamping requirements of two sensors, where the two sensors are the first sensor 010 and the second sensor 020 respectively.

[0043] During use, the first sensor 010 and the second sensor 020 can be respectively placed in the two clamping positions formed by the limiting strip 340 and the partition strip 350. Then, under the action of the driving mechanism 320, the clamping arm 330 moves to push the corresponding sensor against the bearing surface 311, the limiting strip 340, and the corresponding partition strip 350 to realize clamping and fixing of the sensor.

[0044] This method of using the clamping arm 330 to push the sensor against the bearing surface 311, the limiting strip 340, and the corresponding partition strip 350 to fix the sensor has a relatively high fixing efficiency for the sensor and can also quickly release the fixing of the sensor to complete the taking operation after calibration, eliminating the cumbersome steps of frequently tightening or loosening screws to fix or release the fixing of the sensor in the prior art, thereby effectively improving the calibration efficiency.

[0045] It should be noted that this embodiment only takes the number of sensors as two as an example to illustrate the structure and working principle of this multi-station sensor calibration workbench. It can be understood that in actual use, the number of partition strips 350 can be increased to clamp more sensors at multiple stations. Among them, when the number of sensors to be clamped needs to be increased, the number of driving mechanisms 320 and clamping arms 330 can be increased accordingly.

[0046] In this embodiment, the X direction, the Y direction, and the Z direction can refer to Figures 1 to 5 the coordinate system shown in

[0047] Please continue to refer to Figure 3 andFigure 4 In this embodiment, the lens assembly 400 may include a movable seat 410, a mounting seat 420, and a calibration sample 430. Among them, the movable seat 410 is adjusted to move along the X direction through the mounting seat 420, and the calibration sample 430 is mounted on the mounting seat 420.

[0048] By arranging the mounting seat 420 to be movably mounted on the base 100 along the X direction, the base 100 serves as both the bearing foundation for the first sensor 010 and the second sensor 020 and the support foundation for the mounting seat 420, thereby reducing the variables in the calibration process and improving the calibration efficiency.

[0049] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the mounting seat 420 may include a seat body 421 and a pressing plate assembly 422. Among them, the seat body 421 is provided with a light passing hole 4211 penetrating along the Y direction, and the calibration sample 430 covers the light passing hole 4211; the pressing plate assembly 422 is mounted on the seat body 421, and the pressing plate assembly 422 is used to fix the calibration sample 430 to the seat body 421.

[0050] This form of fixing the calibration sample 430 to the seat body 421 by using the pressing plate assembly 422 can utilize the seat body 421 to form a certain support for the calibration sample 430 to suppress the deformation of the calibration sample 430.

[0051] Please continue to refer to Figure 3 In this embodiment, the seat body 421 is provided with an annular limiting rib 4212. Among them, the annular limiting rib 4212 surrounds the light passing hole 4211, and the annular limiting rib 4212 constructs a limiting space for accommodating the calibration sample 430, and the calibration sample 430 is accommodated in the limiting space.

[0052] By arranging the above-mentioned annular limiting rib 4212 on the seat body 421, when the calibration sample 430 is fixed to the seat body 421, it can be restricted in the limiting space constructed by the annular limiting rib 4212, thereby effectively preventing the displacement of the calibration sample 430 and ensuring the position stability of the calibration sample 430.

[0053] Please continue to refer to Figure 3 In this embodiment, the pressing plate assembly 422 and the seat body 421 are arranged along the Y direction. The pressing plate assembly 422 may include an upper pressing plate (not shown in the figure), a first side pressing plate (not shown in the figure), and a second side pressing plate 4223. Among them, the upper pressing plate is located above the light passing hole 4211, and the upper pressing plate is provided with an upper pressing portion; the first side pressing plate and the second side pressing plate 4223 are respectively arranged on both sides of the light passing hole 4211 along the X direction. The first side pressing plate is provided with a first side pressing portion, and the second side pressing plate 4223 is provided with a second side pressing portion. The calibration sample 430 is clamped between the upper pressing portion, the first side pressing portion, and the second side pressing portion and the seat body 421.

[0054] When it is necessary to fix the calibration sample 430 to the seat body 421, the calibration sample 430 can be snapped into the limiting space constructed by the annular limiting rib 4212. At this time, the upper pressing plate, the first side pressing plate, and the second side pressing plate 4223 are all located on the side of the calibration sample 430 away from the seat body 421, thereby preventing the calibration sample 430 from detaching from the seat body 421.

[0055] This setting form of the pressing plate assembly 422 effectively reduces the risk of the calibration sample 430 falling off and ensures the installation stability of the calibration sample 430.

[0056] It should be noted that when the upper pressing plate, the first side pressing plate, and the second side pressing plate 4223 clamp the calibration sample 430 to the seat body 421, the calibration sample 430 will have slight deformation, that is: the calibration sample 430 will remain stable under the action of the upper pressing plate, the first side pressing plate, and the second side pressing plate 4223.

[0057] Please continue to refer to Figure 3 , in this embodiment, the pressing plate assembly 422 may further include an upper buffer plate 4224, a first side buffer plate 4225, and a second side buffer plate 4226. Among them, the upper buffer plate 4224 is disposed on the surface of the upper pressing plate facing the seat body 421, and the upper buffer plate 4224 forms an upper pressing portion; the first side buffer plate 4225 is disposed on the surface of the first side pressing plate facing the seat body 421, and the first side buffer plate 4225 forms a first side pressing portion; the second side buffer plate 4226 is disposed on the surface of the second side pressing plate 4223 facing the seat body 421, and the second side buffer plate 4226 forms a second side pressing portion.

[0058] Through the above settings, during the working process of the multi-station sensor calibration workbench, the components of the pressing plate assembly 422 that come into contact with the calibration sample 430 are the upper buffer plate 4224, the first side buffer plate 4225, and the second side buffer plate 4226. This setting can effectively reduce the rigid impact between the pressing plate assembly 422 and the calibration sample 430, thereby playing a certain protective role for the calibration sample 430.

[0059] Please continue to refer to Figure 4 , in this embodiment, the base 310 is provided with a guide groove 361, and the mounting seat 420 is provided with a guide rail 362. Among them, the guide groove 361 extends along the X direction, and the guide rail 362 is slidably engaged with the guide groove 361.

[0060] By providing a guide groove 361 extending along the X direction in the base 310 and fixedly installing a guide rail 362 on the mounting seat 420 that is slidably engaged with the guide groove 361, it plays a guiding role for the movement of the mounting seat 420 relative to the base 310 and ensures the smooth movement of the mounting seat 420.

[0061] Figure 6 Schematic diagram of the base 310 of the clamping device 300 of the multi-station sensor calibration workbench provided in this embodiment. Please continue to refer to Figure 5 and in combination with Figure 6 , in this embodiment, the limiting strip 340 and the base 310 are of an integrally formed structure.

[0062] By setting the limiting strip 340 to be integrally formed with the base 310, not only the number of components is reduced, the assembly efficiency of the multi-station sensor calibration workbench in this embodiment is improved, but also the connection strength between the limiting strip 340 and the base 310 is ensured, the structural stability of the limiting strip 340 is improved, thereby ensuring the limiting reliability of the first sensor 010 and the second sensor 020.

[0063] Please continue to refer to Figure 5 and Figure 6 , in this embodiment, the bearing surface 311 is provided with a plurality of mounting positions 312, and the plurality of mounting positions 312 are arranged at intervals along the X direction, and the partition strip 350 is alternatively mounted in one of the plurality of mounting positions 312.

[0064] Through the above settings, when the multi-station sensor calibration workbench is in use, the operator can install the partition strip 350 in a suitable mounting position 312 according to the size and fixed position of the sensor to be clamped, so as to meet the fixing requirements under different working conditions.

[0065] Please continue to refer to Figure 5 and Figure 6 , in this embodiment, the mounting position 312 may include a plurality of threaded holes 3121 arranged at intervals along the Y direction, and the partition strip 350 is provided with a plurality of connection holes 351 arranged at intervals along the Y direction; the multi-station sensor calibration workbench may further include connection bolts, and the connection bolts pass through the connection holes 351 and are screwed into the corresponding threaded holes 3121.

[0066] This fixing form of the partition strip 350 on the bearing surface 311 not only ensures the position stability of the partition strip 350, improves the calibration accuracy, but also can be disassembled and reinstalled according to requirements, and has high use flexibility.

[0067] Figure 7 Schematic diagram of the clamping arm 330 of the clamping device 300 of the multi-station sensor calibration workbench provided in this embodiment. Please continue to refer to Figure 5 and in combination with Figure 7 , in this embodiment, the clamping arm 330 may include a top plate 331, a first side plate 332 and a second side plate 333, wherein the top plate 331 is used to abut against the upper surface of the sensor, and the first side plate 332 and the second side plate 333 are used to abut against the other set of adjacent side surfaces of the sensor.

[0068] In this embodiment, the sensor is generally in a cuboid structure, including four side surfaces and an upper surface and a lower surface that are opposite and spaced apart along the Z direction.

[0069] By setting the clamping arm 330 to the above shape, when the clamping device 300 clamps the first sensor 010 or the second sensor 020, taking the first sensor 010 as an example, a set of adjacent side surfaces of the first sensor 010 are respectively in contact with the partition bar 350 and the limiting bar 340, and the lower surface of the sensor is in contact with the bearing surface 311 to limit three degrees of freedom of movement of the sensor; then, under the action of the driving mechanism 320, the clamping arm 330 moves towards the direction of the first sensor 010, and the top plate 331 is in contact with the upper surface of the first sensor 010, while the first side plate 332 and the second side plate 333 are respectively in contact with the other set of adjacent side surfaces of the first sensor 010 to limit the other three degrees of freedom of movement of the first sensor 010, so as to achieve the purpose of fixing the first sensor 010 at the corresponding clamping position. For the second sensor 020, it is also fixed by the corresponding clamping arm 330.

[0070] This method of first restricting three degrees of freedom of movement of the sensor by using the partition bar 350, the limiting bar 340 and the bearing surface 311, and then restricting the other three degrees of freedom of movement of the sensor by using the top plate 331, the first side plate 332 and the second side plate 333 of the clamping arm 330 can achieve reliable clamping of the sensor, ensure the stability of the sensor, and is beneficial to improving the calibration accuracy.

[0071] Please continue to refer to Figures 3 to 5 In this embodiment, the driving mechanism 320 may include an X-direction adjusting mechanism 321, a Y-direction adjusting mechanism 322 and a Z-direction adjusting mechanism 323. Among them, the X-direction adjusting mechanism 321 is installed on the base 310, the Y-direction adjusting mechanism 322 is installed at the output end of the X-direction adjusting mechanism 321, the Z-direction adjusting mechanism 323 is installed at the output end of the Y-direction adjusting mechanism 322, and the clamping arm 330 is installed at the output end of the Z-direction adjusting mechanism 323.

[0072] With the above settings of the driving mechanism 320, the clamping arm 330 can generate a displacement along the X direction by using the X-direction adjusting mechanism 321, generate a displacement along the Y direction by using the Y-direction adjusting mechanism 322, and generate a displacement along the Z direction by using the Z-direction adjusting mechanism 323. By superimposing the displacements in the above three directions, the clamping arm 330 can accurately move to the position where the sensor is located, so as to be in contact and cooperate with the corresponding surfaces of the sensor by using the top plate 331, the first side plate 332 and the second side plate 333, and the control logic is simple.

[0073] Please continue to refer to Figure 5, in this embodiment, the X-direction adjusting mechanism 321 may include an X-direction slide rail 3211, an X-direction slider 3212, and a first bolt 3213. Among them, the X-direction slide rail 3211 is fixedly connected to the base 310, and the X-direction slider 3212 is slidably engaged with the X-direction slide rail 3211; a first screw hole is formed in the X-direction slider 3212, and the first bolt 3213 is threadedly connected to the first screw hole and can abut against the X-direction slide rail 3211.

[0074] When it is necessary to cause the clamping arm 330 to generate a displacement in the X direction, the first bolt 3213 can be loosened first to release the abutting fit between the first bolt 3213 and the X-direction slide rail 3211, so that the X-direction slider 3212 can move freely on the X-direction slide rail 3211; when the X-direction slider 3212 moves to the required position, the first bolt 3213 is tightened, and the X-direction slider 3212 is fixed at this position by using the abutting fit between the first bolt 3213 and the X-direction slide rail 3211, that is, the position adjustment of the clamping arm 330 in the X direction is completed.

[0075] Please continue to refer to Figure 5 , similarly, in this embodiment, the Y-direction adjusting mechanism 322 may include a Y-direction slide rail 3221, a Y-direction slider 3222, and a second bolt 3223. Among them, the Y-direction slide rail 3221 is fixedly connected to the X-direction slider 3212, the Y-direction slider 3222 is slidably engaged with the Y-direction slide rail 3221, and the Z-direction adjusting mechanism 323 is installed on the Y-direction slider 3222; a second screw hole is formed in the Y-direction slider 3222, and the second bolt 3223 is threadedly connected to the second screw hole and can abut against the Y-direction slide rail 3221.

[0076] When it is necessary to cause the clamping arm 330 to generate a displacement in the Y direction, the second bolt 3223 can be loosened first to release the abutting fit between the second bolt 3223 and the Y-direction slide rail 3221, so that the Y-direction slider 3222 can move freely on the Y-direction slide rail 3221; when the Y-direction slider 3222 moves to the required position, the second bolt 3223 is tightened, and the Y-direction slider 3222 is fixed at this position by using the abutting fit between the second bolt 3223 and the Y-direction slide rail 3221, that is, the position adjustment of the clamping arm 330 in the Y direction is completed.

[0077] Please continue to refer to Figure 5 , similarly, in this embodiment, the Z-direction adjusting mechanism 323 includes a Z-direction slide rail 3231, a Z-direction slider 3232, and a third bolt 3233. Among them, the Z-direction slide rail 3231 is fixedly connected to the Y-direction slider 3222, the Z-direction slider 3232 is slidably engaged with the Z-direction slide rail 3231, and the clamping arm 330 is installed on the Z-direction slider 3232; a third screw hole is formed in the Z-direction slider 3232, and the third bolt 3233 is threadedly connected to the third screw hole and can abut against the Z-direction slide rail 3231.

[0078] When it is necessary to cause the clamping arm 330 to generate a displacement in the Z direction, the third bolt 3233 can be loosened first to release the abutting fit between the third bolt 3233 and the Z-direction slide rail 3231, so that the Z-direction slider 3232 can move freely on the Z-direction slide rail 3231; when the Z-direction slider 3232 moves to the required position, the third bolt 3233 is tightened, and the Z-direction slider 3232 is fixed at this position by using the abutting fit between the third bolt 3233 and the Z-direction slide rail 3231, that is, the position adjustment of the clamping arm 330 in the Z direction is completed.

[0079] The above-mentioned setting forms of the X-direction adjustment mechanism 321, the Y-direction adjustment mechanism 322 and the Z-direction adjustment mechanism 323 not only have a simple adjustment structure and low cost, but also occupy less space.

[0080] It should be noted that there is no specific order for the adjustment processes of the above-mentioned X-direction adjustment mechanism 321, Y-direction adjustment mechanism 322 and Z-direction adjustment mechanism 323.

[0081] Although the present utility model is disclosed as above, the present utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model should be subject to the scope defined by the claims.

[0082] Finally, it should also be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0083] In the above embodiments, the descriptions of directions such as "inside" and "outside" are all based on the drawings shown.

[0084] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present utility model. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present utility model. Therefore, the present utility model will not be limited to the embodiments shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

Claims

1. A multi-station sensor calibration workbench, characterized in that, It includes a base (100), a laser interferometer (200), a clamping device (300) and a lens assembly (400). Among them, the laser interferometer (200) and the clamping device (300) are both installed on the base (100), the lens assembly (400) is movably arranged between the laser interferometer (200) and the clamping device (300), and the laser interferometer (200), the lens assembly (400) and the clamping device (300) are arranged along the Y direction; the clamping device (300) is provided with a plurality of clamping positions arranged along the X direction, the clamping space of the clamping position is adjustable, and the clamping position is used to fix the sensor.

2. The multi-station sensor calibration workbench according to claim 1, wherein The lens assembly (400) includes a movable seat (410), a mounting seat (420) and a calibration sample (430). Among them, the movable seat (410) is adjusted to move along the X direction through the mounting seat (420), and the calibration sample (430) is installed on the mounting seat (420).

3. The multi-station sensor calibration workbench according to claim 2, characterized in that, The mounting seat (420) includes a seat body (421) and a pressing plate assembly (422). Among them, the seat body (421) is provided with a light passing hole (4211) penetrating along the Y direction, and the calibration sample (430) covers the light passing hole (4211); the pressing plate assembly (422) is installed on the seat body (421), and the pressing plate assembly (422) is used to fix the calibration sample (430) on the seat body (421).

4. The multi-station sensor calibration workbench according to claim 3, wherein The seat body (421) is provided with an annular limiting rib (4212), the annular limiting rib (4212) surrounds the light passing hole (4211), and the annular limiting rib (4212) constructs a limiting space for accommodating the calibration sample (430).

5. The multi-station sensor calibration workbench according to claim 3, characterized in that, The pressing plate assembly (422) includes an upper pressing plate, a first side pressing plate and a second side pressing plate (4223). Among them, the upper pressing plate is located above the light passing hole (4211), and the upper pressing plate is provided with an upper pressing part; the first side pressing plate and the second side pressing plate (4223) are respectively arranged on both sides of the light passing hole (4211), the first side pressing plate is provided with a first side pressing part, the second side pressing plate (4223) is provided with a second side pressing part, and the calibration sample (430) is clamped between the upper pressing part, the first side pressing part and the second side pressing part and the seat body (421).

6. The multi-station sensor calibration workbench according to claim 5, wherein The pressing plate assembly (422) further includes an upper buffer plate (4224), a first side buffer plate (4225) and a second side buffer plate (4226). Among them, the upper buffer plate (4224) is arranged on the surface of the upper pressing plate facing the seat body (421), and the upper buffer plate (4224) forms the upper pressing part; the first side buffer plate (4225) is arranged on the surface of the first side pressing plate facing the seat body (421), and the first side buffer plate (4225) forms the first side pressing part; the second side buffer plate (4226) is arranged on the surface of the second side pressing plate (4223) facing the seat body (421), and the second side buffer plate (4226) forms the second side pressing part.

7. The multi-station sensor calibration workbench according to claim 2, characterized in that, One of the clamping device (300) and the mounting base (420) is provided with a guiding groove (361), and the other of the clamping device (300) and the mounting base (420) is provided with a guide rail (362), and the guide rail (362) is in sliding fit with the guiding groove (361).

8. The multi-station sensor calibration workbench according to any one of claims 1-7, characterized in that, The clamping device (300) includes a base (310), a driving mechanism (320), a clamping arm (330), a limiting strip (340) extending in the X direction, and at least one separating strip (350) extending in the Y direction. The limiting strip (340) and the separating strip (350) are both arranged on the bearing surface (311) of the base (310). The limiting strip (340) and the at least one separating strip (350) divide the bearing surface (311) into a plurality of clamping positions. The clamping arm (330) is mounted on the output end of the driving mechanism (320). The driving mechanism (320) is configured to enable the clamping arm (330) to have degrees of freedom of movement in the X direction, the Y direction, and the Z direction. The clamping arm (330) is used to push the sensor against the bearing surface (311), the limiting strip (340), and the corresponding separating strip (350).

9. The multi-station sensor calibration workbench according to claim 8, wherein, The clamping arm (330) includes a top plate (331), a first side plate (332), and a second side plate (333). Among them, the top plate (331) is used to abut against the upper surface of the sensor, and the first side plate (332) and the second side plate (333) are used to abut against the other set of adjacent side surfaces of the sensor; and / or, a plurality of mounting positions (312) are arranged on the bearing surface (311) at intervals in the X direction, and the separating strip (350) is alternatively mounted on one of the plurality of mounting positions (312); and / or, the limiting strip (340) and the base (310) are of an integrally formed structure; and / or, the number of the separating strips (350) is one, and the separating strip (350) and the limiting strip (340) divide the bearing surface (311) into two clamping positions.

10. The multi-station sensor calibration workbench according to claim 8, wherein, The driving mechanism (320) includes an X-direction adjusting mechanism (321), a Y-direction adjusting mechanism (322), and a Z-direction adjusting mechanism (323). Among them, the X-direction adjusting mechanism (321) is mounted on the base (310), the Y-direction adjusting mechanism (322) is mounted on the output end of the X-direction adjusting mechanism (321), the Z-direction adjusting mechanism (323) is mounted on the output end of the Y-direction adjusting mechanism (322), and the clamping arm (330) is mounted on the output end of the Z-direction adjusting mechanism (323).

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