High-uniformity adjustable UVled photoetching light source group
By introducing water-cooled plates and multi-mirror structures into the UV LED lithography light source group, the heat dissipation and light homogenization problems of the light source group under high loads are solved, the uniformity of the lithography light source and the stability of the equipment are achieved, and the lithography accuracy and equipment life are improved.
Patent Information
- Application Number
- CN202421909716.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-08
- Publication Date
- 2025-07-18
- Estimated Expiration
- 2034-08-08
AI Technical Summary
The lack of heat dissipation structure of the existing UV LED lithography light source group under high load conditions leads to overheating, affecting the stability and life of the equipment, and the lack of light treatment structure leads to uneven light, affecting the use effect.
A highly uniform adjustable UVled lithography light source group is designed, including water-cooled plates, multiple convex mirrors and compound eye structures. Through angle adjustment and light concentration and homogenization, combined with heat dissipation functions, we ensure uniform light rays and equipment stability.
The uniformity and parallelism of light are achieved, the lithography accuracy and equipment stability are improved, and the equipment life is extended.
Smart Images
Figure CN223123364U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of optics, in particular to a high-uniformity adjustable UV led lithography light source group. Background Art
[0002] The high-uniformity adjustable UV LED lithography light source group is a key device in semiconductor manufacturing. Using ultraviolet LEDs as the light source, it exposes photoresist at wavelengths below 365 nanometers. Its main features include providing a highly uniform light distribution to ensure that the photoresist receives a consistent light intensity throughout the exposure process; being designed to adjust the light intensity and uniformity to meet different lithography requirements; and at the same time providing precise lithography control, including adjusting the spot size and shape, to ensure exposure accuracy at the micron or sub-micron level. This light source group is widely used in integrated circuit manufacturing and microelectronic device manufacturing to create precise micro patterns and structures, improving the accuracy, efficiency, and reliability of the lithography process.
[0003] In the prior art, most devices may have overheating problems due to improper thermal management caused by the lack of a heat dissipation structure inside the device under high load conditions, affecting the stability and lifespan of the device. And most devices do not have a light processing structure, resulting in non-uniform and non-parallel light, affecting the use effect.
[0004] Regarding the structure of the prior art, devices without a heat dissipation structure are prone to overheating problems after long-term use, which will lead to the stability and lifespan of the device, and thus affect the use effect. The lack of a light processing structure inside results in non-uniform and non-parallel light, making the light chaotic. Summary of the Utility Model
[0005] To make up for the above deficiencies, the utility model provides a high-uniformity adjustable UV led lithography light source group, aiming to improve the heat dissipation effect inside the light source group device and the light homogenization and parallelism effect in the prior art.
[0006] To achieve the above object, the utility model provides the following technical solution: A high-uniformity adjustable UV led lithography light source group, including a bracket. Above the bracket is provided a workbench. Inside the bracket is fixedly connected a curved mirror. On the upper surface of the bracket is fixedly connected a fixed seat. Inside the fixed seat is rotatably connected an angle adjustment mounting seat. Inside the angle adjustment mounting seat is provided an installation hole. On the outer wall of the angle adjustment mounting seat is fixedly connected an appearance sealing plate. On the outer wall of the appearance sealing plate is fixedly connected a bottom plate. On the outer wall of the bottom plate is fixedly connected a D-sub connector. On the outer wall of the bottom plate is fixedly connected a water-cooling plate. On the outer wall of the water-cooling plate is provided a light source assembly for providing a light source.
[0007] Further, the light source assembly includes a lamp board, which is fixedly connected to the outer wall of the water-cooling plate, and a light-emitting source is fixedly connected to the outer wall of the lamp board.
[0008] Further, a housing I is fixedly connected to the outer wall of the water-cooling plate, and a small convex lens is fixedly connected to the inside of the housing I.
[0009] Further, a housing II is fixedly connected to the outer wall of the water-cooling plate, and a large convex lens is fixedly connected to the inside of the housing II.
[0010] Further, the housing I is arranged inside the housing II, and the large convex lens is arranged on the outer wall of the small convex lens.
[0011] Further, the appearance sealing plate is arranged on one side of the outer wall of the bottom plate, and an inner compound eye is fixedly connected to the inner wall of the appearance sealing plate.
[0012] Further, an outer compound eye is fixedly connected to the inner wall of the appearance sealing plate, and the outer compound eye is arranged on the outer wall of the inner compound eye.
[0013] Further, the outer compound eye is arranged at the upper end of the appearance sealing plate, and the appearance sealing plate is arranged around the outer wall of the outer compound eye.
[0014] The utility model has the following beneficial effects:
[0015] 1. In the utility model, the angle adjustment mounting seat is fixed inside the fixed seat, the mounting hole is aligned with the hole inside the bottom plate for installation, which is convenient for the angle adjustment of the UV led lamp. The aviation plug is connected to the power supply, the lamp board is cooled circularly by the water-cooling plate, the light source is emitted by the light-emitting source and the angle of the UV led lamp is adjusted, and the light source is irradiated onto the curved mirror and then onto the workbench through the curved mirror, realizing the function of magnifying the light.
[0016] 2. In the utility model, the light source emitted by the light-emitting source is concentrated by the small convex lens and the large convex lens, and after the light is concentrated, it is irradiated into the inner compound eye, and then emitted after passing through the inner compound eye and into the inner part of the outer compound eye, so as to realize the homogenization and parallelization of the light, and uniform and parallel light can be obtained, and then the light is irradiated onto the workbench. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 is a schematic perspective view of a high-uniformity adjustable UV led lithography light source group proposed by the utility model;
[0018] Figure 2 is a schematic view of the appearance sealing plate structure of a high-uniformity adjustable UV led lithography light source group proposed by the utility model;
[0019] Figure 3Schematic diagram of the aviation plug structure of a highly uniform adjustable UV led lithography light source group proposed by the present utility model;
[0020] Figure 4 Schematic diagram of the water-cooling plate structure of a highly uniform adjustable UV led lithography light source group proposed by the present utility model.
[0021] Legend:
[0022] 1. Bracket; 2. Workbench; 3. Curved mirror; 4. Mounting hole; 5. Fixed seat; 6. Base plate; 7. Aviation plug; 8. Water-cooling plate; 9. Angle adjustment mounting seat; 10. Appearance sealing plate; 11. Lamp board; 12. Light-emitting source; 13. Housing I; 14. Small convex mirror; 15. Housing II; 16. Large convex mirror; 17. Inner layer fly-eye; 18. Outer layer fly-eye. Specific implementation mode
[0023] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.
[0024] Refer to Figure 1 - Figure 4 As shown in the figure, an embodiment provided by the present utility model: a highly uniform adjustable UV led lithography light source group, including a bracket 1, a workbench 2 is arranged above the bracket 1, a curved mirror 3 is fixedly connected inside the bracket 1, a fixed seat 5 is fixedly connected to the upper surface of the bracket 1, an angle adjustment mounting seat 9 is rotatably connected inside the fixed seat 5, a mounting hole 4 is opened inside the angle adjustment mounting seat 9, an appearance sealing plate 10 is fixedly connected to the outer wall of the angle adjustment mounting seat 9, a base plate 6 is fixedly connected to the outer wall of the appearance sealing plate 10, an aviation plug 7 is fixedly connected to the outer wall of the base plate 6, a water-cooling plate 8 is fixedly connected to the outer wall of the base plate 6, a light source assembly is arranged on the outer wall of the water-cooling plate 8, the light source assembly is used to provide a light source, and the light source assembly includes a lamp board 11, the lamp board 11 is fixedly connected to the outer wall of the water-cooling plate 8, and a light-emitting source 12 is fixedly connected to the outer wall of the lamp board 11;
[0025] Specifically, first, align the mounting holes 4 opened inside the angle adjustment mounting base 9 with the holes inside the fixed base 5 for installation. Install the UV led lamp inside the fixed base 5 to achieve the effect of angle adjustment. Connect the aviation plug 7 to the power supply, emit the light source line through the light source 12, adjust the angle of the UV led lamp, project the light source line onto the curved mirror 3, and refract it onto the upper part of the workbench 2 through the curved mirror 3. At the same time, it is also necessary to start the water-cooled plate 8 to circulate and cool the lamp board 11 and the light source 12 through the water-cooled plate 8, preventing the light source 12 from being damaged due to high temperature during use, achieving the light amplification effect while also performing the cooling treatment to ensure the stability of the light source group operation.
[0026] Refer to Figure 4 , a housing one 13 is fixedly connected to the outer wall of the water-cooled plate 8. A small convex mirror 14 is fixedly connected inside the housing one 13. A housing two 15 is fixedly connected to the outer wall of the water-cooled plate 8. A large convex mirror 16 is fixedly connected inside the housing two 15. The housing one 13 is arranged inside the housing two 15, and the large convex mirror 16 is arranged on the outer wall of the small convex mirror 14;
[0027] Specifically, the light emitted by the light source 12 is first concentrated by the small convex mirror 14 inside the housing one 13, and then the concentrated light is transmitted to the housing two 15 through the small convex mirror 14, and the light is concentrated again by the large convex mirror 16 to achieve the effect of light concentration, facilitating subsequent obtaining of uniform and parallel light. The water-cooled plate 8 can also cool the small convex mirror 14 and the large convex mirror 16 at the same time.
[0028] Refer to Figure 2 - Figure 4 , the appearance sealing plate 10 is arranged on one side of the outer wall of the bottom plate 6. An inner layer compound eye 17 is fixedly connected to the inner wall of the appearance sealing plate 10. An outer layer compound eye 18 is fixedly connected to the inner wall of the appearance sealing plate 10. The outer layer compound eye 18 is arranged on the outer wall of the inner layer compound eye 17. The outer layer compound eye 18 is arranged at the upper end of the appearance sealing plate 10, and the appearance sealing plate 10 is arranged around the outer wall of the outer layer compound eye 18;
[0029] Specifically, the concentrated light passes through the inner layer compound eye 17 for light homogenization after being transmitted out by the large convex mirror 16. The homogenized light passes through the inner layer compound eye 17 and then through the outer layer compound eye 18 for homogenization and parallelization, so that uniform and parallel light can be obtained. This light can obtain magnified and uniform parallel light after being magnified by the curved mirror 3.
[0030] Working principle: When the high-uniformity adjustable UV led lithography light source group is needed, first connect the mounting hole 4 opened inside the angle adjustment mounting base 9 with the fixed seat 5 fixed on the upper surface of the bracket 1. After the connection, connect the aviation plug 7 with the power supply. At this time, the inside of the light source group is powered on, and the light source 12 emits light. The light is intensively processed through the small convex lens 14 inside the housing one 13 and the large convex lens 16 inside the housing two 15. The processed light is then homogenized through the inner fly-eye 17, and the homogenized light is further subjected to homogenization and parallel processing through the outer fly-eye 18, so that homogenized and parallel light can be obtained. During this process, the light source 12 is cooled by circulating water through the water-cooled plate 8 to prevent the light source 12 from overheating during long-term use and affecting the use effect. At this time, adjust the angle of the UV led lamp to irradiate the homogenized and parallel light onto the curved mirror 3, and refract it through the curved mirror 3 above the workbench 2. This process can magnify the light, so as to obtain magnified, homogenized and parallel light, which is also called lithography.
[0031] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. An adjustable UV led lithography light source group with high uniformity, comprising a bracket (1), characterized in that: Above the bracket (1), there is a workbench (2). Inside the bracket (1), there is a curved mirror (3) fixedly connected. On the upper surface of the bracket (1), there is a fixed seat (5) fixedly connected. Inside the fixed seat (5), there is an angle-adjustable mounting seat (9) rotatably connected. Inside the angle-adjustable mounting seat (9), there is a mounting hole (4). On the outer wall of the angle-adjustable mounting seat (9), there is an appearance sealing plate (10) fixedly connected. On the outer wall of the appearance sealing plate (10), there is a bottom plate (6) fixedly connected. On the outer wall of the bottom plate (6), there is a D-sub connector (7) fixedly connected. On the outer wall of the bottom plate (6), there is a water-cooling plate (8) fixedly connected. On the outer wall of the water-cooling plate (8), there is a light source assembly for providing a light source.
2. The adjustable UV led lithography light source group with high uniformity according to claim 1, characterized in that: The light source assembly includes a lamp board (11) fixedly connected to the outer wall of the water-cooling plate (8). On the outer wall of the lamp board (11), there is a light-emitting source (12) fixedly connected.
3. The adjustable UV led lithography light source group with high uniformity according to claim 1, characterized in that: On the outer wall of the water-cooling plate (8), there is a housing one (13) fixedly connected. Inside the housing one (13), there is a small convex mirror (14) fixedly connected.
4. A highly uniform adjustable UV led lithography light source group according to claim 3, characterized in that: On the outer wall of the water-cooling plate (8), there is a housing two (15) fixedly connected. Inside the housing two (15), there is a large convex mirror (16) fixedly connected.
5. The adjustable UV led lithography light source group with high uniformity according to claim 4, characterized in that: The housing one (13) is arranged inside the housing two (15), and the large convex mirror (16) is arranged on the outer wall of the small convex mirror (14).
6. The high-uniformity adjustable UV led lithography light source group according to claim 1, characterized in that: The appearance sealing plate (10) is arranged on one side of the outer wall of the bottom plate (6). On the inner wall of the appearance sealing plate (10), there is an inner layer compound eye (17) fixedly connected.
7. The adjustable UV led lithography light source group with high uniformity according to claim 6, characterized in that: On the inner wall of the appearance sealing plate (10), there is an outer layer compound eye (18) fixedly connected. The outer layer compound eye (18) is arranged on the outer wall of the inner layer compound eye (17).
8. A high-uniformity adjustable UV led lithography light source group according to claim 7, characterized in that: The outer layer compound eye (18) is arranged at the upper end of the appearance sealing plate (10), and the appearance sealing plate (10) is arranged around the outer wall of the outer layer compound eye (18).