Degumming tool

Abstract

The utility model relates to the technical field of silicon wafer production, in particular to a degumming tool which comprises a frame and a crystal support positioning assembly used for bearing a crystal support. The plurality of clamping rollers are sleeved with sponge rollers, and the clamping rollers are used for clamping a crystal support; and the control assembly is used for controlling the clamping rod to move towards the crystal support in the direction perpendicular to the axial direction of the clamping rod. The sponge roller is adopted to clamp the crystal support, the control assembly is arranged to control the multiple clamping rollers at the same time, it is ensured that silicon wafers in the crystal support cannot be damaged or inclined due to degumming in the degumming process, through the design and structure of the degumming tool, it is ensured that the silicon wafers are effectively supported in the degumming process, and the degumming tool can adapt to the crystal supports of different specifications; therefore, the degumming operation efficiency and the automation level are improved.

Description

Technical Field

[0001] This application relates to the technical field of silicon wafer production, and particularly to a degumming tooling. Background Art

[0002] In the production of crystalline silicon solar wafers, it generally includes processes such as ingot casting, squaring, gluing, slicing, degumming, cleaning, and inspection. After the slicing process is completed, the silicon wafers adhered to the crystal carrier need to be placed into the degumming tooling and then sent to a silicon wafer degumming machine for degumming treatment.

[0003] Common clamping toolings for handling and loading crystal carriers usually use 2 support rods installed between the front end plate and the rear end plate. During the process of workers taking silicon wafers, the silicon wafers are prone to collide with the support rods, resulting in edge chipping and cracking. At the same time, since there is no limiting device on the support rods, the string rods of the crystal carrier are prone to move back and forth or even fall off during placement and degumming, causing serious consequences of silicon wafer cracking. The existing clamping rods are fixed by manual bolts to adjust the width between the clamping rods. On the one hand, the distance is not easy to accurately grasp, resulting in the silicon wafers not being able to be firmly clamped and erected on the left and right sides of the support rods when falling off during degumming, and cracking or edge chipping after falling down; on the other hand, frequent adjustment of the bolts causes a certain workload for workers. Utility Model Content

[0004] The utility model aims to solve one of the problems in the background art.

[0005] For this reason, the utility model provides a degumming tooling.

[0006] The technical solution adopted by the utility model to solve its technical problems is as follows:

[0007] A degumming tooling includes:

[0008] A frame, and

[0009] A crystal carrier positioning component for placing and holding the crystal carrier;

[0010] Multiple clamping rods, with sponge rollers sleeved on the clamping rods, and the clamping rods are used for clamping the crystal carrier;

[0011] A control component for controlling the clamping rods to move perpendicular to their axial directions and towards the crystal carrier.

[0012] Further, there are two groups of clamping rods, and the two groups of clamping rods are arranged vertically. The two clamping rods in each clamping rod group are symmetrically arranged on the left and right sides of the crystal carrier. The two clamping rods in the upper clamping rod group are defined as upper clamping rods, and the two clamping rods in the lower clamping rod group are defined as lower clamping rods.

[0013] Further, the control assembly includes two guiding seats which move closer to or away from each other horizontally simultaneously. Vertically, the guiding seats are located between the upper pinch roller and the lower pinch roller on the same side as them. The guiding seats are connected to one upper pinch roller and one lower pinch roller on the same side as them. The frame is provided with an upper guiding groove for guiding the movement of the upper pinch roller and a lower guiding groove for guiding the movement of the lower pinch roller.

[0014] Further, a support plate is connected to the guiding seat. Among the two ends of the support plate, the distance between the upper end and the vertical shaft is greater than the distance between the lower end and the vertical shaft. A second connecting rod is hinged between the upper end and the upper pinch roller on the same side as the vertical shaft, and a third connecting rod is hinged between the lower end and the lower pinch roller on the same side as the vertical shaft.

[0015] Further, the control assembly further includes a vertical shaft which is slidably connected to the frame vertically and is located in the middle of the two guiding seats. First connecting rods are hinged between the vertical shaft and the two guiding seats respectively.

[0016] Further, both the upper guiding groove and the lower guiding groove are inclined towards the second guide rail, and the ends of the upper guiding groove and the lower guiding groove on the same side as the vertical shaft and close to the vertical shaft are close to each other.

[0017] Further, a guiding frame and a support block are connected to the frame. The guiding frame is located above the support block. The vertical shaft passes through the guiding frame and the support block, and a spring is sleeved on the vertical shaft. The spring is located between the guiding frame and the support block.

[0018] Further, a sliding seat is connected to the vertical shaft. The sliding seat is arranged in a T shape. The guiding frame is located below the horizontal part of the sliding seat, and the width of the horizontal part of the sliding seat is greater than the width of the guiding frame.

[0019] Further, a limiting block is connected to the end of the vertical shaft passing through the support block.

[0020] Further, two control assemblies are provided, and the two control assemblies are respectively located at both ends of the pinch rollers.

[0021] The beneficial effects of the present utility model are as follows: In this application, a sponge roller is used to clamp the crystal carrier, and a control assembly is set to control four pinch rollers simultaneously, ensuring that the silicon wafers in the crystal carrier will not be damaged or tilted during the debonding process. Through the design and structure of the debonding tooling, it is ensured that the silicon wafers are effectively supported during the debonding process and can adapt to crystal carriers of different specifications, thereby improving the debonding operation efficiency and automation level. The sponge roller avoids colliding with the debonding tooling due to its good water absorption and unique softness, preventing device damage or silicon wafer scrapping, and playing a role in protecting the crystal carrier and the equipment. Description of the Drawings

[0022] The present utility model will be further described below in conjunction with the accompanying drawings and embodiments.

[0023] Figure 1 It is a schematic structural view of the degumming tooling in the present utility model.

[0024] Figure 2 It is a schematic structural view of the control component in the present utility model.

[0025] In the figure: 1, frame; 2, outer edge baffle; 3, upper guide groove; 4, lower guide groove; 5, sponge roller; 6, clamping component; 7, crystal holder positioning component; 8, cross beam; 9, upper pinch roller; 10, lower pinch roller; 11, first slide rail; 12, second slide rail; 13, vertical shaft; 14, slide seat; 15, guide seat; 16, first connecting rod; 17, second connecting rod; 18, third connecting rod; 19, guide frame; 20, support block; 21, limit block; 22, connecting block; 23, support plate; 24, spring. Specific embodiments

[0026] The present utility model will now be further described in detail in conjunction with the accompanying drawings. These drawings are all simplified schematic views, only illustrating the basic structure of the present utility model in a schematic manner, so they only show the components related to the present utility model.

[0027] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation to the present utility model. In addition, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise stated, the meaning of "a plurality" is two or more.

[0028] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0029] A degumming tooling, comprising a frame 1, a sponge roller 5, a clamping assembly 6 and a crystal carrier positioning assembly 7. Outer edge baffles 2 are arranged at the front and rear ends of the frame 1.

[0030] The crystal carrier positioning assembly 7 is arranged at the top of the frame 1. The crystal carrier positioning assembly 7 includes two cross beams 8. The two cross beams 8 are arranged on the frame 1 along the front and rear directions of the frame 1, and the crystal carrier is supported between the two cross beams 8.

[0031] The clamping assembly 6 includes a control assembly and a plurality of clamping rods. The axial direction of the clamping rods is arranged along the front and rear direction. There are two groups of clamping rods. In each group of clamping rods, there are two clamping rods. The two groups of clamping rods are arranged vertically. The two clamping rods in the upper clamping rod group located above are defined as upper clamping rods 9, and the two clamping rods in the lower clamping rod group located below are defined as lower clamping rods 10. The two clamping rods in each group of clamping rods are symmetrically arranged on the left and right sides of the crystal carrier. The sponge roller 5 is coaxially sleeved on the clamping rods.

[0032] The control assembly is used to control the clamping rods to move perpendicular to their axial directions and towards the crystal carrier. The sponge roller 5 is sleeved on the clamping rods to clamp the crystal carrier. Due to its good water absorption and unique softness, it can avoid colliding with the degumming tooling to prevent device damage or silicon wafer scrapping, playing a protective role for the crystal carrier and the equipment. The two ends of the clamping rods respectively penetrate through the two outer edge baffles 2. Upper guide grooves 3 for the upper clamping rods 9 to penetrate through and providing guidance for the movement of the upper clamping rods 9, and lower guide grooves 4 for the lower clamping rods 10 to penetrate through and providing guidance for the movement of the lower clamping rods 10 are arranged on the outer edge baffles 2.

[0033] There are two control assemblies. The two control assemblies are respectively arranged on the side walls of the two outer edge baffles 2 away from each other, and include a first slide rail 11, a second slide rail 12, a spring 24, a vertical shaft 13 and a handle. The first slide rail 11 is connected to the outer edge baffle 2 along the vertical direction, the second guide rail is connected to the outer edge baffle 2 along the horizontal direction, the first guide rail is located above the second guide rail. A slide seat 14 is slidably connected to the outer edge baffle 2 along the vertical direction through the first guide rail. The vertical shaft 13 is connected to the slide seat 14 through a mounting block. The axial direction of the vertical shaft 13 is arranged along the vertical direction. A support block 20 and a guide frame 19 are connected to the outer edge baffle 2. The support block 20 is located below the second slide rail 12, the guide frame 19 is located above the second slide rail 12. The slide seat 14 is arranged in a T shape. The guide frame 19 is located below the horizontal part of the slide seat 14. The width of the horizontal part of the slide seat 14 is greater than the width of the guide frame 19. The vertical shaft 13 penetrates through the guide frame 19 and the support block 20. One end of the vertical shaft 13 passing through the support block 20 is connected with a limit block 21. Both the limit block 21 and the T-shaped slide seat 14 limit the stroke of the slide seat 14. The spring 24 is sleeved on the vertical shaft 13. The spring 24 is located between the guide frame 19 and the support block 20. In addition, both ends of the horizontal part of the slide seat 14 are connected with handles. The two handles are symmetrically arranged on both sides of the vertical shaft 13.

[0034] It should be noted that the axis of the vertical shaft 13 coincides with the midpoint of the cross beam 8. Two upper clamping rollers 9 are symmetrically arranged on both sides of the vertical shaft 13, and two lower clamping rollers 10 are symmetrically arranged on both sides of the vertical shaft 13. Both the upper guide groove 3 and the lower guide groove 4 are inclined towards the second guide rail, and the ends of the upper guide groove 3 and the lower guide groove 4 on the same side of the vertical shaft 13 close to the vertical shaft 13 are close to each other.

[0035] Two guide seats 15 are slidably connected to each outer edge baffle 2 in the horizontal direction through a second slide rail 12. The guide seats 15 are symmetrically arranged on both sides of the vertical shaft 13. A connecting block 22 is fixedly connected to the vertical shaft 13. The connecting block 22 is located between the support block 20 and the guide frame 19. The spring 24 can be divided into two sections, and the two sections of the spring 24 are respectively arranged between the connecting block 22 and the support block 20, and between the connecting block 22 and the guide frame 19. A first connecting rod 16 is hinged between the connecting block 22 and the guide seat 15. A support plate 23 is connected to the guide seat 15. The support plate 23 is bent. Among the two ends of the support plate 23, the distance between the upper end and the vertical shaft 13 is greater than the distance between the lower end and the vertical shaft 13. Among the two ends of the support plate 23, a second connecting rod 17 is hinged between the upper end and the upper clamping roller 9 on the same side of the vertical shaft 13, and a third connecting rod 18 is hinged between the lower end and the lower clamping roller 10 on the same side of the vertical shaft 13.

[0036] The implementation principle of this application is as follows:

[0037] Lift the handle to lift the sliding seat 14. The vertical shaft 13 drives the connecting block 22 to move upward along the direction of the vertical shaft 13. The first connecting rod 16 rotates towards the direction away from the vertical shaft 13, pushing the two guide seats 15 towards the direction away from the vertical shaft 13, so that the upper clamping rollers 9 and the lower clamping rollers 10 move along the corresponding upper guide groove 3 and lower guide groove 4. The two upper clamping rollers 9 move away from each other, and the two lower clamping rollers 10 move away from each other. Then place the crystal tray on the two cross beams 8. The main body of the crystal tray is located between the two upper clamping rollers 9 and above the two lower clamping rollers 10. Release the handle, and the vertical shaft 13 drops. The two upper clamping rollers 9 move towards the crystal tray to clamp the crystal tray. The spring 24 is compressed to increase the tension in the vertical direction. The two lower clamping rollers 10 abut against the bottom of the crystal tray, thus completing the clamping of the crystal tray.

[0038] This application uses a sponge roller 5 to clamp the crystal tray, and sets a control component to control the four clamping rollers at the same time to ensure that the silicon wafer in the crystal tray will not be damaged or tilted during the debonding process. Through the design and structure of the debonding tooling, it is ensured that the silicon wafer is effectively supported during the debonding process, thereby improving the debonding operation efficiency and automation level. The sponge roller 5 avoids touching the debonding tooling with its good water absorption and unique softness, preventing device damage or silicon wafer scrapping, and playing a protective role for the crystal tray and the equipment.

[0039] Inspired by the above ideal embodiments of the present utility model, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this utility model. The technical scope of this utility model is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A degumming tooling, characterized in that, Comprising, a frame (1), and a crystal tray positioning component (7), the crystal tray positioning component (7) being used for placing a crystal tray; a plurality of pinch rollers, a sponge roller (5) being sleeved on the pinch rollers, the pinch rollers being used for clamping the crystal tray; a control component, the control component being used for controlling the pinch rollers to move perpendicular to their axial directions and towards the crystal tray.

2. The degumming tooling according to claim 1, wherein, There are two groups of the pinch rollers, the two groups of pinch rollers being arranged in the vertical direction, two pinch rollers in each pinch roller group being symmetrically arranged on the left and right sides of the crystal tray, the two pinch rollers in the upper pinch roller group being defined as upper pinch rollers (9), and the two pinch rollers in the lower pinch roller group being defined as lower pinch rollers (10).

3. The degumming tooling according to claim 2, wherein The control component includes two guide seats (15), the two guide seats (15) moving closer to or away from each other simultaneously in the horizontal direction, in the vertical direction, the guide seat (15) being located between the upper pinch roller (9) and the lower pinch roller (10) on the same side as it, the guide seat (15) being connected to an upper pinch roller (9) and a lower pinch roller (10) on the same side as it, an upper guide groove (3) for guiding the movement of the upper pinch roller (9) and a lower guide groove (4) for guiding the movement of the lower pinch roller (10) being provided on the frame (1).

4. The degumming tooling according to claim 3, wherein, A support plate (23) is connected to the guide seat (15), the distance between the upper end of the two ends of the support plate (23) and the vertical shaft (13) being greater than the distance between the lower end of the two ends of the support plate (23) and the vertical shaft (13), a second connecting rod (17) being hinged between the upper end and the upper pinch roller (9) on the same side as the vertical shaft (13), and a third connecting rod (18) being hinged between the lower end and the lower pinch roller (10) on the same side as the vertical shaft (13).

5. The degumming tooling according to claim 3, wherein The control component further includes a vertical shaft (13), the vertical shaft (13) being slidably connected to the frame (1) in the vertical direction and being located in the middle of the two guide seats (15), and a first connecting rod (16) being hinged between the vertical shaft (13) and each of the two guide seats (15).

6. The degumming tooling according to claim 5, wherein, Both the upper guide groove (3) and the lower guide groove (4) are inclined towards the second guide rail, and the ends of the upper guide groove (3) and the lower guide groove (4) on the same side as the vertical shaft (13) and close to the vertical shaft (13) are close to each other.

7. The degumming tooling according to claim 5, characterized in that, A guide frame (19) and a support block (20) are connected to the frame (1), the guide frame (19) being located above the support block (20), the vertical shaft (13) passing through the guide frame (19) and the support block (20), and a spring (24) being sleeved on the vertical shaft (13), the spring (24) being located between the guide frame (19) and the support block (20).

8. The degumming tooling according to claim 7, wherein, A sliding seat (14) is connected to the vertical shaft (13), the sliding seat (14) being arranged in a T shape, the guide frame (19) being located below the horizontal part of the sliding seat (14), and the width of the horizontal part of the sliding seat (14) being greater than the width of the guide frame (19).

9. The degumming tooling according to claim 7, wherein, A limiting block (21) is connected to the end of the vertical shaft (13) passing through the support block (20).

10. The degumming tooling according to claim 1, wherein, There are two control components, the two control components being respectively located at both ends of the pinch rollers.

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