Silicon powder cleaning equipment

Abstract

The utility model provides silicon powder cleaning equipment which is used for cleaning silicon powder in a hydrogenation furnace. The silicon powder cleaning equipment comprises a silicon powder cleaning pipe, a first end of the silicon powder cleaning pipe extends into the hydrogenation furnace, and the first end is provided with a suction port; the vacuum pump is connected with the second end of the silicon powder cleaning pipe through a pipeline, and suction airflow generated by the vacuum pump sucks silicon powder in the hydrogenation furnace into the pipeline through the suction port; the silicon powder filter is arranged on the pipeline through which the silicon powder cleaning pipe and the vacuum pump are connected, and the silicon powder filter is used for filtering and intercepting the silicon powder flowing through the pipeline; and the receiving tank is communicated with the silicon powder filter and is used for receiving the silicon powder filtered and intercepted by the silicon powder filter. Through the arrangement, cleaning personnel do not need to enter the hydrogenation furnace, the effect of sucking and cleaning silicon powder in the hydrogenation furnace can be achieved only by using the silicon powder cleaning pipe outside the furnace, and the operation safety in the cleaning process is improved.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of chemical equipment, and in particular to a silicon powder cleaning device. Background Art

[0002] In the existing chemical system, the hydrogenation furnace is an important device. During the maintenance of the hydrogenation furnace, it is necessary to clean the silicon powder inside the hydrogenation furnace. In the existing solutions, the method of directly entering the furnace by workers to clean the silicon powder is adopted for the cleaning operation. However, the safety factor of the above method is relatively low, and there are potential safety hazards.

[0003] In view of this, the present application is specifically proposed. Summary of the Utility Model

[0004] In view of the above problems, the embodiments of the present application provide a silicon powder cleaning device, so that the cleaning personnel can clean the silicon powder inside the hydrogenation furnace without entering the hydrogenation furnace, thereby achieving the purpose of reducing risks.

[0005] To achieve the above purpose, the embodiments of the present application provide the following technical solutions: A silicon powder cleaning device is used to clean the silicon powder inside the hydrogenation furnace; the silicon powder cleaning device includes: a silicon powder cleaning pipe, the first end of which extends into the hydrogenation furnace, and a suction port is provided at the first end; a vacuum pump is connected to the second end of the silicon powder cleaning pipe through a pipeline, and the suction air flow generated by the vacuum pump sucks the silicon powder in the hydrogenation furnace into the pipeline through the suction port; a silicon powder filter is arranged on the pipeline connecting the silicon powder cleaning pipe and the vacuum pump, and the silicon powder filter filters and intercepts the silicon powder flowing through the pipeline; a receiving tank is communicated with the silicon powder filter, and the receiving tank receives the silicon powder filtered and intercepted by the silicon powder filter.

[0006] In a possible implementation manner, the second end of the silicon powder cleaning pipe is outside the hydrogenation furnace; a first joint is provided at the second end of the silicon powder cleaning pipe; a second joint is provided at one end of the pipeline; the first joint and the second joint are arranged in a pluggable and matching manner for conductively connecting the silicon powder cleaning pipe and the pipeline in a switchable manner.

[0007] In a possible implementation manner, the silicon powder cleaning pipe includes a straight pipe section extending along a straight line; a suction head is connected to the first end of the straight pipe section, a suction cavity is arranged in the suction head, a plurality of suction ports are arranged on the side wall of the suction cavity facing away from the straight pipe section, and each suction port is communicated with the straight pipe section through the suction cavity; the second end of the straight pipe section is commutably connected to a fixed holding pipe section, and the straight pipe section is communicated with the pipeline through the fixed holding pipe section.

[0008] In a possible implementation manner, the straight pipe section is a telescopic pipe with an axially variable length.

[0009] In a possible implementation, the pipeline includes: a connecting pipe, a first connecting pipe, a second connecting pipe, and an outlet connecting pipe; the second end of the silicon powder cleaning pipe is connected to the receiving tank through the connecting pipe; the receiving tank is respectively connected to the silicon powder filter through the first connecting pipe and the second connecting pipe. A first one-way valve for controlling the unidirectional flow of the fluid in the first connecting pipe towards the silicon powder filter is provided on the first connecting pipe, and a second one-way valve for controlling the unidirectional flow of the fluid in the second connecting pipe towards the receiving tank is provided on the second connecting pipe. A control valve for controlling the on-off of the second connecting pipe is provided on the second connecting pipe; the vacuum pump is connected to the silicon powder filter through the outlet connecting pipe.

[0010] In a possible implementation, the silicon powder filter includes a filter tank body; a filter element is provided inside the filter tank body, and the filter element is located in the middle of the filter tank body. The filter element divides the inside of the filter tank body into a first part and a second part; the filter tank body is provided with an inlet, and the inlet is connected to the first part. The inlet is connected to the receiving tank through the first connecting pipe; a discharge port is provided at the bottom of the filter tank body, and the discharge port is connected to the first part. The discharge port is connected to the receiving tank through the second connecting pipe; an outlet is provided at the top of the filter tank body, and the outlet is connected to the second part. The outlet is connected to the vacuum pump through the outlet connecting pipe.

[0011] In a possible implementation, a conical portion with a gradually narrowing radial dimension downward is provided at the lower part of the filter tank body, and the discharge port is provided at the bottom end of the conical portion; the inlet is provided above the conical portion.

[0012] In a possible implementation, the vacuum pump is provided with a first suction port and a second suction port; the first suction port is connected to the outlet of the silicon powder filter through the outlet connecting pipe; the second suction port is connected to the external atmosphere; the vacuum pump is a two-way air extraction pump. When the vacuum pump is in different modes, the first suction port generates a negative pressure to suck the silicon powder in the hydrogenation furnace into the pipeline, or the second suction port generates a negative pressure to suck the external atmosphere into the pipeline.

[0013] In a possible implementation, an overflow outlet is provided at the upper part of the hydrogenation furnace. The overflow outlet is connected to an overflow inlet provided at the top of the receiving tank through an overflow pipe. The receiving tank collects the silicon powder that overflows from the overflow outlet during the operation of the hydrogenation furnace. A first connection port and a second connection port are further provided at the top of the receiving tank. The first connection port is connected to the inlet of the silicon powder filter through the first connecting pipe, and the second connection port is connected to the discharge port of the silicon powder filter through the second connecting pipe. An inlet is provided in the middle of the receiving tank, and the inlet is connected to the second end of the silicon powder cleaning pipe through a connecting pipe.

[0014] In a possible implementation, a discharge port is provided at the bottom of the receiving tank. A tapered portion with a gradually narrowing radial dimension downward is provided at the bottom of the receiving tank, and the discharge port is provided at the lowest point of the tapered portion. A discharge pipeline is connected to the discharge port, and a control valve for controlling the on-off of the discharge pipeline is provided on the discharge pipeline.

[0015] After the embodiments of the present application adopt the above technical solutions, the following remarkable technical improvements are also achieved:

[0016] Through the above settings in the embodiments of the present application, the cleaning personnel can achieve the effect of sucking and cleaning the silicon powder inside the hydrogenation furnace by using the silicon powder cleaning pipe outside the furnace without entering the inside of the hydrogenation furnace, which greatly improves the operation safety of the cleaning personnel during the process of cleaning the silicon powder. At the same time, the silicon powder filter provided on the connecting pipeline between the external silicon powder cleaning pipe and the vacuum pump can effectively intercept and filter the extracted silicon powder, and can convey the silicon powder intercepted and filtered by the silicon powder filter into the receiving tank, so as to collect the cleaned silicon powder by using the receiving tank, and then discharge the silicon powder outward through the discharge pipe of the receiving tank and quickly bag it.

[0017] In addition to the technical problems solved by the embodiments of the present application described above, the technical features constituting the technical solutions, and the beneficial effects brought by these technical features of the technical solutions, other technical problems that can be solved by a silicon powder cleaning device provided by the embodiments of the present application, other technical features included in the technical solutions, and the beneficial effects brought by these technical features will be further described in detail in the specific implementation manner. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for describing the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0019] Figure 1Structural schematic diagram of the cleaning of the hydrogenation furnace by the silicon powder cleaning equipment provided in the embodiment of the present application;

[0020] Figure 2 Structural schematic diagram of the silicon powder collection by the silicon powder cleaning equipment provided in the embodiment of the present application;

[0021] Figure 3 Structural schematic diagram of the hydrogenation furnace during normal operation provided in the embodiment of the present application.

[0022] Explanation of reference numerals:

[0023] 100 - Hydrogenation furnace; 200 - Silicon powder cleaning equipment; 300 - Spent catalyst tank;

[0024] 21 - Silicon powder cleaning pipe; 210 - Connecting pipe; 211 - First end; 212 - Second end; 213 - First joint; 214 - Second joint;

[0025] 22 - Receiving tank; 221 - First connecting pipe; 222 - Second connecting pipe; 223 - First check valve; 224 - Second check valve; 225 - Control valve; 226 - Discharge pipeline; 227 - Pressure gauge; 228 - Pressure relief valve;

[0026] 23 - Silicon powder filter; 231 - Filter tank body; 232 - Filter element; 233 - First part; 234 - Second part; 235 - Pressure gauge; 236 - Pressure relief valve;

[0027] 24 - Vacuum pump; 240 - Outlet connecting pipe; 241 - First suction port; 242 - Second suction port;

[0028] 301 - Overflow pipe; 302 - Control valve;

[0029] 101 - Cleaning port; 102 - Flap door. Detailed implementation manners

[0030] As described in the background art, silicon powder needs to be cleaned in the hydrogenation furnace of the polysilicon cold hydrogenation process system in the related art. The existing cleaning methods generally adopt manual operations; that is, it is necessary for the cleaning workers to enter the interior of the hydrogenation furnace and carry out the operation of cleaning the silicon powder in the hydrogenation furnace after wearing equipment such as long - tube breathing apparatuses. However, in the above - mentioned operation process, the cleaning workers need to carry out oxygen - free operations in a confined space, which has problems such as low safety factor and high cost.

[0031] To solve the above problems, in the embodiments of the present application, a silicon powder cleaning device 200 is provided. It uses an extended silicon powder cleaning pipe 21 to extend into the hydrogenation furnace 100, and connects the silicon powder cleaning pipe 21 to a vacuum pump 24 outside the hydrogenation furnace 100. The suction negative pressure generated by the vacuum pump 24 is transmitted through the pipeline to the silicon powder cleaning pipe 21, so that the silicon powder cleaning pipe 21 sucks and cleans the silicon powder in the hydrogenation furnace 100, enabling the cleaning personnel to clean the silicon powder inside the hydrogenation furnace 100 without entering the interior of the hydrogenation furnace 100, and only using the silicon powder cleaning pipe 21 can achieve the effect of sucking and cleaning the silicon powder inside the hydrogenation furnace 100; at the same time, a silicon powder filter 23 is provided on the pipeline connecting the external silicon powder cleaning pipe 21 and the vacuum pump 24. The silicon powder filter 23 can effectively intercept and filter the silicon powder drawn into the pipeline along with the suction air flow, and can convey the silicon powder intercepted by the silicon powder filter 23 to the connected receiving tank 22, so as to collect the silicon powder cleaned in the hydrogenation furnace 100 by using the receiving tank 22, and then discharge the collected silicon powder outward through the discharge pipeline 226 of the receiving tank 22 and quickly bag it.

[0032] In order to make the above objects, features and advantages of the embodiments of the present application more obvious and understandable, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0033] As Figures 1 to 3 shown, in the embodiments of the present application, a silicon powder cleaning device 200 is provided for cleaning the silicon powder inside the hydrogenation furnace 100; the silicon powder cleaning device 200 includes: a silicon powder cleaning pipe 21, the first end 211 of which extends into the hydrogenation furnace 100, and a suction port is provided at the first end 211 to suck the silicon powder in the hydrogenation furnace 100 into the silicon powder cleaning pipe 21; a vacuum pump 24 having a suction inlet for generating a suction force, and the suction inlet is connected to the silicon powder cleaning pipe 21 through a pipeline, so as to use the suction air flow generated by the vacuum pump to bring the silicon powder in the hydrogenation furnace 100 into the pipeline along with the suction air flow and flow in the direction of the vacuum pump; a silicon powder filter 23 is provided between the silicon powder cleaning pipe 21 and the vacuum pump 24, and the silicon powder filter 23 filters and intercepts the silicon powder in the flowing medium; a receiving tank 22 is connected to the silicon powder filter 23 to receive the silicon powder filtered and intercepted by the silicon powder filter 23.

[0034] Of course, the silicon powder cleaning device 200 in the embodiment of the present application is only discussed for the example of cleaning the silicon powder inside the hydrogenation furnace 100. The silicon powder cleaning device 200 in the embodiment of the present application can also be applied to other reaction equipment, and can be used as equipment for suction cleaning of silicon powder and other dust particles inside other containers such as tanks and vessels.

[0035] In the embodiment of the present application, the second end 212 of the silicon powder cleaning tube 21 is located outside the hydrogenation furnace 100, and the second end 212 is connected to the receiving tank 22 via the connecting tube 210. The silicon powder cleaning tube 21 is connected to the silicon powder filter 23 by means of the receiving tank 22 to achieve the effect of sucking and transporting the sucked silicon powder to the silicon powder filter 23.

[0036] In the embodiment of the present application, an internal pipeline is provided in the silicon powder cleaning tube 21 along the extension direction, the main body of the silicon powder cleaning tube 21 is a straight tube extending in a straight line, and the internal pipeline is also a straight pipeline extending in a straight line; the first end 211 of the silicon powder cleaning tube 21 is connected to a suction head, and the suction head is perpendicular to the axis of the silicon powder cleaning tube 21; the suction head is hollow inside to form a suction chamber, and the suction chamber is fixedly connected to the silicon powder cleaning tube 21 toward the side of the silicon powder cleaning tube 21, and the suction chamber is connected to the internal pipeline of the silicon powder cleaning tube 21; the suction chamber is arranged with a plurality of suction ports toward the side away from the silicon powder cleaning tube 21, and each suction port is connected to the silicon powder cleaning tube 21. The port is connected to the outside, and each suction port is connected to the internal pipeline through the suction cavity; the second end 212 of the silicon powder cleaning tube 21 is connected to a reversible fixed holding pipe section, the fixed holding pipe section is a horizontally extending pipe section, one end of the fixed holding pipe section is reversibly connected to the straight pipe section of the silicon powder cleaning tube 21 through a universal joint, and the other end is connected to the connecting pipe 210, and the silicon powder cleaning tube 21 is connected to the fixed holding pipe section through the universal joint, so that the internal pipeline of the silicon powder cleaning tube 21 is connected to one end of the connecting pipe 210 through the fixed holding pipe section, and the other end of the connecting pipe 210 is connected to the receiving tank 22.

[0037] Optionally, the silicon powder cleaning tube 21 is a telescopic tube with an axial length that can be telescoped, so that the silicon powder cleaning tube 21 with a changeable direction and length can be used to suck and clean the silicon powder at various positions inside the hydrogenation furnace 100.

[0038] Meanwhile, a first connecting pipe 221 and a second connecting pipe 222 are connected between the receiving tank 22 and the silicon powder filter 23. A first one-way valve 223 for controlling the one-way flow of the medium in the first connecting pipe 221 towards the silicon powder filter 23 is provided on the first connecting pipe 221, and a second one-way valve 224 for controlling the one-way flow of the medium in the second connecting pipe 222 towards the receiving tank 22 is provided on the second connecting pipe 222, such that the silicon powder-containing airflow extracted by the silicon powder cleaning pipe 21 can be transported to the silicon powder filter 23 through the connecting pipe 210, the receiving tank 22, and the first connecting pipe 221; the silicon powder-containing airflow is filtered at the silicon powder filter 23, and the filtered silicon powder flows back into the receiving tank 22 for storage through the second connecting pipe 222, while the filtered silicon powder-free gas flows out to the outside atmosphere through the vacuum pump 24.

[0039] Meanwhile, in order to avoid problems such as the reduction of the filtering effect of the silicon powder filter 23 caused by the reciprocating flow of silicon powder between the receiving tank 22 and the silicon powder filter 23 during the cleaning process, a control valve 225 for controlling the on-off of the second connecting pipe 222 can be provided on the second connecting pipe 222. During the cleaning of the silicon powder in the hydrogenation furnace 100, the vacuum pump 24 and the control valve 225 can be alternately opened, so that the vacuum pump 24 extracts the silicon powder-containing gas outward through the first connecting pipe 221 to the silicon powder filter 23, and the silicon powder is filtered and intercepted at the silicon powder filter 23; until the silicon powder intercepted at the silicon powder filter 23 reaches the set amount, then through the second connecting pipe 222 with the control valve 225 opened, the intercepted silicon powder is refluxed into the receiving tank 22. This effectively avoids the reciprocating cyclic flow of silicon powder between the receiving tank 22 and the silicon powder filter 23, resulting in the reduction of the filtering efficiency of the silicon powder filter 23, and further affecting the transfer of negative pressure airflow by the silicon powder filter 23 and reducing the silicon powder extraction rate and other problems. Also, in order to prevent the silicon powder refluxed into the receiving tank 22 from flowing towards the hydrogenation furnace 100 through the connecting pipe 210, a one-way valve can be installed on the connecting pipe 210, and the one-way valve is used to control the airflow in the connecting pipe 210 to flow only in the one-way direction from the hydrogenation furnace 100 towards the receiving tank 22 to prevent the silicon powder in the receiving tank 22 from flowing out backwards; and / or, a control valve can be installed on the connecting pipe 210, and the control valve is opened synchronously when the vacuum pump 24 is opened and closed synchronously when the vacuum pump 24 is closed to prevent the silicon powder in the receiving tank 22 from flowing backwards towards the hydrogenation furnace 100.

[0040] In the embodiment of the present application, the silicon powder filter 23 includes a filter tank body 231 which is a vertically arranged tank body; a filter element 232 is arranged inside the filter tank body 231, and the filter element 232 is located in the middle of the filter tank body 231. The filter element 232 divides the inside of the filter tank body 231 into a first part 233 and a second part 234. The first part 233 and the second part 234 are arranged vertically, and the first part 233 and the second part 234 are only connected through the filter holes provided on the filter element 232; a lower part of the filter tank body 231 is provided with an inlet which is connected to the first part 233, and the inlet is connected to the first connection port of the receiving tank 22 through a first connection pipe 221; a discharge port is arranged at the bottom of the filter tank body 231, and the discharge port is connected to the first part 233, and the discharge port is connected to the second connection port of the receiving tank 22 through a second connection pipe 222; an outlet is arranged at the top of the filter tank body 231, and the outlet is connected to the second part 234, and the outlet is connected to a vacuum pump 24 through an outlet connection pipe 240.

[0041] In the embodiment of the present application, a conical part with a gradually narrowing radial dimension downward is arranged at the lower part of the filter tank body 231, and a discharge port is arranged at the bottom end of the conical part; the inlet is arranged above the conical part, and the filter element 232 is located above the inlet, so that the silicon powder filtered and intercepted by the filter element 232 can fall downward into the conical part and be guided by the conical peripheral wall of the conical part to converge and flow out towards the bottom discharge port; in addition, the conical part constitutes at least part of the first part 233.

[0042] In the embodiment of the present application, the vacuum pump 24 is a Roots vacuum pump which can rotate in both forward and reverse directions to change the direction of the suction force; the Roots vacuum pump includes a first suction port 241 and a second suction port 242; the first suction port 241 is connected to the outlet of the silicon powder filter 23 through an outlet connection pipe 240; the second suction port 242 is connected to the external atmosphere; the Roots vacuum pump has two working states:

[0043] As Figure 1 shown, in the first working state, the first suction port 241 serves as the suction inlet of the vacuum pump 24 to generate negative pressure; the suction port of the silicon powder cleaning pipe 21 uses the negative pressure to extract the silicon powder in the hydrogenation furnace 100 into the pipeline. The extracted silicon powder-containing gas flow passes through the silicon powder cleaning pipe 21 and the connection pipe 210 and enters the receiving tank 22, and then is transported to the silicon powder filter 23 through the first connection pipe 221. The silicon powder filter 23 filters the silicon powder-containing gas flow, and the silicon powder contained in the gas is filtered and intercepted in the silicon powder filter 23; while the gas without silicon powder after filtration flows out of the silicon powder filter 23, then flows through the outlet connection pipe 240 to the vacuum pump 24 and is then transported to the external atmosphere;

[0044] As Figure 2As shown, in the second working state, the second suction port 242 serves as the suction inlet of the vacuum pump 24 to generate negative pressure. The generated negative pressure sucks in the outside atmosphere into the vacuum pump 24. The sucked air flows through the outlet connecting pipe 240 into the silicon powder filter 23. The silicon powder filter 23 uses the blown sucked air to convey the internally filtered and collected silicon powder to the receiving tank 22 through the second connecting pipe 222, achieving the effect of supplying the cleaned silicon powder to the receiving tank 22 for collection. At the same time, the filter element 232 of the silicon powder filter 23 can be backflushed and cleaned by using the above-mentioned negative pressure sucked air flow, so that the residual silicon powder on the filter element 232 is backflushed and conveyed into the receiving tank 22, thereby achieving the effect of backflushing and cleaning the filter element 232 of the silicon powder filter 23.

[0045] In the embodiment of the present application, the receiving tank 22 is a waste susceptor tank 300 provided for supporting the hydrogenation furnace 100. The top of the waste susceptor tank 300 is provided with an overflow inlet, and the upper part of the hydrogenation furnace 100 is provided with an overflow outlet. The overflow outlet is connected to the overflow inlet through an overflow pipe 301. That is, the receiving tank 22 is composed of the equipment supporting the hydrogenation furnace 100 in the original system. The waste susceptor tank 300 is used to collect the silicon powder overflowing from the hydrogenation furnace 100 during the normal operation of the hydrogenation furnace 100, so that the silicon powder cleaning device 200 in the present application does not need to additionally install other tanks as the receiving tank 22, and only needs to use the waste susceptor tank 300 provided for supporting the hydrogenation furnace 100 to achieve the effect of collecting the cleaned silicon powder. In addition, a control valve 302 for controlling the on-off of the pipeline is provided on the overflow pipe 301 to close the control valve 302 during the silicon powder cleaning operation in the hydrogenation furnace 100 to prevent the silicon powder in the waste susceptor tank 300 from flowing into the overflow pipe 301.

[0046] At the same time, in the embodiment of the present application, the top of the waste susceptor tank 300 is also provided with a first connection port and a second connection port. The first connection port is connected to the inlet of the silicon powder filter 23 through a first connecting pipe 221, and the second connection port is connected to the discharge port of the silicon powder filter 23 through a second connecting pipe 222, so as to form a circulating air flow channel between the top of the waste susceptor tank 300 and the silicon powder filter 23, so that the gas flowing out of the waste susceptor tank 300 and the gas flowing into the waste susceptor tank 300 both flow out and in from the top, effectively avoiding problems such as the impact of the inflowing and outflowing air flows on the silicon powder settled and collected at the bottom of the waste susceptor tank 300, and further reducing the occurrence of situations such as the collected silicon powder in the tank being blown into the silicon powder filter 23 again.

[0047] In the embodiments of the present application, a discharge port is provided at the bottom of the waste catalyst body tank 300; a conical portion with a gradually narrowing radial dimension downward is provided at the bottom of the waste catalyst body tank 300, and a discharge port is provided at the lowest point of the conical portion; a discharge pipeline 226 is connected to the discharge port, and a control valve for controlling the on / off of the discharge pipeline 226 is provided on the discharge pipeline 226, so that after the control valve is opened, the silicon powder collected in the waste catalyst body tank 300 can be discharged outward through the discharge pipeline 226, achieving the effect of collecting and discharging the silicon powder. At the same time, in order to further improve the efficiency of discharging the silicon powder collected in the waste catalyst body tank 300, a pressure sensor can be installed on the discharge pipeline 226 to detect the pressure at the discharge port; after reaching the set value, it is prompted that the silicon powder needs to be discharged, so as to open the control valve of the discharge pipeline 226 and discharge and collect the silicon powder in the tank; and after the pressure is less than the set value, it is prompted that the silicon powder does not need to be discharged, so as to close the control valve of the discharge pipeline 226 and avoid situations such as the slow outflow rate of the silicon powder in the tank and ineffective bagging.

[0048] In the embodiments of the present application, a first joint 213 is provided at the second end 212 of the silicon powder cleaning pipe 21; a second joint 214 is provided at the end of the connecting pipe 210; the first joint 213 and the second joint 214 are arranged in a pluggable connection for conductively connecting the silicon powder cleaning pipe 21 and the connecting pipe 210 in a switchable manner. Through the above settings, the connecting pipe 210 and the silicon powder cleaning pipe 21 can be quickly disassembled and assembled by using the matching joint structure, enabling the above two pipelines to be connected or separated. Moreover, the above first joint 213 and second joint 214 can be any existing quick-release joint, such as: a threaded joint, a snap joint, etc.

[0049] In the embodiments of the present application, a pressure gauge 227 is provided on the receiving tank 22 to detect the pressure in the receiving tank 22 to prevent situations such as excessive pressure in the receiving tank 22; a pressure relief valve 228 is provided on the receiving tank 22 to relieve the pressure in the receiving tank 22, so as to adjust the pressure in the receiving tank 22 by using components such as the pressure relief valve 228, thereby preventing situations such as the receiving tank 22 operating under excessive or too low pressure. At the same time, the above pressure gauge 227 and pressure relief valve 228 are both provided at the top of the receiving tank 22 to monitor and regulate the pressure at the top of the receiving tank 22.

[0050] In the embodiments of the present application, a pressure gauge 235 is provided on the silicon powder filter 23 to detect the pressure in the silicon powder filter 23 to prevent situations such as excessive pressure in the silicon powder filter 23; a pressure relief valve 236 is provided on the silicon powder filter 23 to relieve the pressure in the silicon powder filter 23.

[0051] In the embodiments of the present application, the silicon powder cleaning device 200 is applied to the hydrogenation furnace 100 and is used to extract and clean the silicon powder in the hydrogenation furnace 100. The silicon powder cleaning pipe 21 of the above-mentioned silicon powder cleaning device 200 extends into the interior of the hydrogenation furnace 100 from the cleaning port 101 opened on the hydrogenation furnace 100; the cleaning port 101 is generally located in the middle of the side wall of the hydrogenation furnace 100, and a turning door 102 that can be turned outwards to open and close is provided at the cleaning port 101. After the turning door 102 is closed, the cleaning port 101 can be closed and sealed, and after it is opened, the silicon powder cleaning pipe 21 can extend into the hydrogenation furnace 100 therefrom. The cleaning port 101 is generally below the highest limit height of the silicon powder in the hydrogenation furnace 100 and above the highest liquid level height in the hydrogenation furnace 100 during the operation of the hydrogenation furnace 100, and the cleaning port 101 is below the overflow port where the hydrogenation furnace 100 is connected to the overflow pipe 301. Of course, after the cleaning process is completed, during the normal operation of the hydrogenation furnace 100, as Figure 3 shown, the silicon powder cleaning pipe 21 will be taken out from the hydrogenation furnace 100, the turning door 102 will close the cleaning port 101, and a sealed container will be directly formed inside the hydrogenation furnace 100 to carry out reactions inside.

[0052] In this specification, the embodiments or implementation manners are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts among the various embodiments can be referred to each other.

[0053] It should be noted that the phrases such as "an embodiment", "embodiment", "exemplary embodiment", "some embodiments" mentioned in the specification indicate that the described embodiments may include specific features, structures or characteristics, but not necessarily each embodiment includes the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when combining an embodiment to describe a specific feature, structure or characteristic, it is within the knowledge scope of those skilled in the art to implement such a feature, structure or characteristic in combination with other embodiments that are explicitly or not explicitly described.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A silicon powder cleaning device, characterized in that, Used for cleaning silicon powder inside the hydrogenation furnace; The silicon powder cleaning device includes: A silicon powder cleaning pipe, with the first end extending into the hydrogenation furnace, and a suction port provided at the first end; A vacuum pump, connected to the second end of the silicon powder cleaning pipe through a pipeline, and the suction air flow generated by the vacuum pump sucks the silicon powder in the hydrogenation furnace into the pipeline through the suction port; A silicon powder filter, provided on the pipeline connected to the silicon powder cleaning pipe and the vacuum pump, and the silicon powder filter filters and intercepts the silicon powder flowing through the pipeline; A receiving tank, connected to the silicon powder filter, and the receiving tank receives the silicon powder filtered and intercepted by the silicon powder filter.

2. The silicon powder cleaning device according to claim 1, characterized in that The second end of the silicon powder cleaning pipe is outside the hydrogenation furnace; A first joint is provided at the second end of the silicon powder cleaning pipe; One end of the pipeline is provided with a second joint; The first joint and the second joint are arranged in a pluggable and matching manner for conducting the silicon powder cleaning pipe and the pipeline in a switchable manner.

3. The silicon powder cleaning device according to claim 2, characterized in that The silicon powder cleaning pipe includes a straight pipe section extending in a straight line; A suction head is connected to the first end of the straight pipe section, a suction cavity is provided in the suction head, and a plurality of suction ports are arranged on the side wall of the suction cavity facing away from the straight pipe section, and each suction port is connected to the straight pipe section through the suction cavity; The second end of the straight pipe section is commutably connected to a fixed holding pipe section, and the straight pipe section is connected to the pipeline through the fixed holding pipe section.

4. The silicon powder cleaning device according to claim 3, characterized in that The straight pipe section is a telescopic pipe with an axially variable length.

5. The silicon powder cleaning device according to any one of claims 1 to 4, characterized in that The pipeline includes: a connecting pipe, a first connecting pipe, a second connecting pipe and an outlet connecting pipe; The second end of the silicon powder cleaning pipe is connected to the receiving tank through the connecting pipe; The receiving tank is respectively connected to the silicon powder filter through the first connecting pipe and the second connecting pipe. A first one-way valve for controlling the unidirectional flow of fluid in the first connecting pipe towards the silicon powder filter is provided on the first connecting pipe, and a second one-way valve for controlling the unidirectional flow of fluid in the second connecting pipe towards the receiving tank is provided on the second connecting pipe. A control valve for controlling the on-off of the second connecting pipe is provided on the second connecting pipe; The vacuum pump is connected to the silicon powder filter through the outlet connecting pipe.

6. The silicon powder cleaning device according to claim 5, characterized in that The silicon powder filter includes a filter tank body; a filter element is provided in the filter tank body, the filter element is in the middle of the filter tank body, and the filter element divides the inside of the filter tank body into a first part and a second part; The filter tank body is provided with an inlet, the inlet is connected to the first part, and the inlet is connected to the receiving tank through the first connecting pipe; The bottom of the filter tank body is provided with a discharge port, which is communicated with the first part, and the discharge port is connected to the receiving tank through the second connecting pipe; The top of the filter tank body is provided with an outlet, which is communicated with the second part, and the outlet is connected to the vacuum pump through the outlet connecting pipe.

7. The silicon powder cleaning device according to claim 6, characterized in that The lower part of the filter tank body is provided with a conical part whose radial dimension gradually narrows downward, and the bottom end of the conical part is provided with the discharge port; The inlet is arranged above the conical part.

8. The silicon powder cleaning device according to claim 5, characterized in that The vacuum pump is provided with a first suction port and a second suction port; The first suction port is communicated with the outlet of the silicon powder filter through the outlet connecting pipe; The second suction port is communicated with the external atmosphere; The vacuum pump is a two-way air extraction pump. When the vacuum pump is in different modes, the first suction port generates negative pressure to suck the silicon powder in the hydrogenation furnace into the pipeline, or the second suction port generates negative pressure to suck the external atmosphere into the pipeline.

9. The silicon powder cleaning device according to claim 5, characterized in that The upper part of the hydrogenation furnace is provided with an overflow outlet, and the overflow outlet is connected to the overflow inlet arranged at the top of the receiving tank through an overflow pipe. The receiving tank collects the silicon powder overflowing from the overflow outlet during the operation of the hydrogenation furnace; The top of the receiving tank is further provided with a first connection port and a second connection port. The first connection port is connected to the inlet of the silicon powder filter through the first connecting pipe, and the second connection port is connected to the discharge port of the silicon powder filter through the second connecting pipe; An inlet is arranged in the middle of the receiving tank, and the inlet is connected to the second end of the silicon powder cleaning pipe through a connecting pipe.

10. The silicon powder cleaning device according to claim 9, characterized in that The bottom of the receiving tank is provided with a discharge port; The bottom of the receiving tank is provided with a conical part whose radial dimension gradually narrows downward, and the lowest part of the conical part is provided with the discharge port; A discharge pipeline is connected to the discharge port, and a control valve for controlling the on-off of the discharge pipeline is arranged on the discharge pipeline.

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