High-reflection electrostatic adsorption device

Abstract

The utility model relates to the technical field of electrostatic adsorption, in particular to a high-light-reflection electrostatic adsorption device which comprises a base and an electrostatic chuck which is attached to the base and used for adsorbing a product to be detected, and further comprises a light source arranged above the electrostatic chuck, and a detection space used for containing the product to be detected is formed between the light source and the electrostatic chuck. The electrostatic chuck comprises a dielectric layer which is configured to be suitable for light beams emitted by the light source to pass through; the reflecting layer is configured to be suitable for reflecting the light beam to a to-be-detected product so as to illuminate a detection mark on the to-be-detected product; an electrode layer disposed below the reflective layer; and a substrate configured to be suitable for bearing the dielectric layer, the reflective layer and the electrode layer. The light source is arranged above the electrostatic chuck, the light beam emitted by the light source penetrates through the dielectric layer and then is reflected to the to-be-detected product through the reflecting layer so as to illuminate the detection mark on the to-be-detected product, the base is integrally machined, and the flatness of the electrostatic chuck can be effectively guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of electrostatic adsorption, in particular to a highly reflective electrostatic adsorption device. Background Art

[0002] In the production of OLED panels, in order for the CCD of the device to capture the fiducial points of the product, the electrostatic chuck needs to be light-transmissive. The application scenarios of the light-transmissive electrostatic chuck in the prior art are as Figure 1 shown.

[0003] The application scenario of the light-transmissive electrostatic chuck in the production of OLED panels involves the precise positioning of the product and the identification of fiducial points. In this process, the light source emits a light beam from the bottom of the base, and the light beam needs to pass through the light-transmissive lens and the electrostatic adsorption layer (including the insulating layer, the electrode layer, and the dielectric layer) on the base to illuminate the detection marks inside the product, so as to facilitate the CCD of the device to capture and identify the detection marks, and then guide the device to perform precise operations.

[0004] The currently adopted technologies have the following defects:

[0005] Due to the current manufacturing limitations, the light-transmissive lens and the base are made of two different materials, and the material differences during the manufacturing process make it difficult to ensure the flatness at the junction of the light-transmissive lens and the base. The flatness at the junction of the light-transmissive lens and the base has a great impact on the flatness of the entire electrostatic chuck, and the flatness of the electrostatic chuck is crucial for the manufacturing process of OLED products. An uneven electrostatic chuck may cause deformation when fixing the OLED panel, thereby affecting the quality and performance of the product.

[0006] At the same time, due to the material differences between the light-transmissive lens and the base, once the electrostatic chuck is worn or damaged, it is difficult to maintain and replace, which further increases the maintenance cost during the production process. Summary of the Utility Model

[0007] In order to overcome the defect that it is difficult to ensure the flatness at the junction of the light-transmissive lens and the base in the prior art, the utility model provides a highly reflective electrostatic adsorption device to ensure that the flatness of the electrostatic chuck can meet the production of OLED products while enabling the CCD of the device to identify the detection marks inside the product.

[0008] To achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0009] This specification provides a highly reflective electrostatic adsorption device, which includes a base and an electrostatic chuck attached to the base for adsorbing the product to be detected, and further includes a light source arranged above the electrostatic chuck, and a detection space for accommodating the product to be detected is provided between the light source and the electrostatic chuck;

[0010] The electrostatic chuck includes:

[0011] a dielectric layer configured to be suitable for the light beam emitted by the light source to transmit through;

[0012] a reflective layer configured to be suitable for reflecting the light beam to the product to be measured to illuminate the detection mark located on the product to be measured;

[0013] an electrode layer disposed below the reflective layer; and a substrate configured to be suitable for carrying the dielectric layer, the reflective layer and the electrode layer.

[0014] Further, the electrode layer has an avoidance space for avoiding the reflective layer, and the avoidance space is disposed below the reflective layer to prevent the reflective layer from generating electrostatic shielding on the electrode layer.

[0015] Further, the reflective layer is a thin sheet with an upper surface configured as a reflective surface.

[0016] Further, the reflective layer is a thin sheet with an upper surface configured as a reflective metal coating.

[0017] Further, the electrostatic chuck further includes a first insulating layer disposed between the reflective layer and the electrode layer, and a second insulating layer disposed between the electrode layer and the substrate.

[0018] Further, the reflective layer is disposed below the dielectric layer or embedded inside the dielectric layer.

[0019] This specification also provides a highly reflective electrostatic adsorption device, including a base and an electrostatic chuck attached to the base for adsorbing the product to be detected, and further including a light source disposed above the electrostatic chuck, and a detection space for accommodating the product to be measured is provided between the light source and the electrostatic chuck;

[0020] The electrostatic chuck includes:

[0021] a dielectric layer configured to be suitable for the light beam emitted by the light source to transmit through;

[0022] an electrode layer, the upper surface of which is configured to be suitable for reflecting the light beam to the product to be measured to illuminate the detection mark located on the product to be measured; and a substrate configured to be suitable for carrying the dielectric layer and the electrode layer;

[0023] wherein, the electrode layer is disposed below the dielectric layer.

[0024] Further, the upper surface of the electrode layer is configured as a reflective surface.

[0025] Further, the upper surface of the electrode layer is a reflective coating.

[0026] Furthermore, there is an insulating layer between the electrode layer and the substrate.

[0027] Due to the adoption of the above technical solutions, the present utility model has the following beneficial effects:

[0028] 1. Compared with the prior art where the light source is arranged below the base, the light beam emitted by the light source passes through the light-transmitting lens and the electrostatic adsorption layer (including the insulating layer, electrode layer, and dielectric layer) on the base to illuminate the detection mark on the product to be tested. In the prior art, the base and the light-transmitting lens are made of two different materials, and it is very difficult to ensure the flatness at the junction of the light-transmitting lens and the base. In this application, the light source is arranged above the electrostatic chuck. After the light beam emitted by the light source passes through the dielectric layer, it is reflected by the reflective layer to the product to be tested to illuminate the detection mark located on the product to be tested. There is no need to set up a light-transmitting lens. The base is integrally processed with consistent material and convenient processing, and at the same time, it can effectively ensure the flatness of the electrostatic chuck.

[0029] 2. The reflective layer has strong reflection, and can reflect the light beam emitted by the upper light source to illuminate the detection mark on the product to be tested, so that the device CCD can recognize the product mark, thereby reducing the product processing difficulty and the production cost of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings described below only relate to some embodiments of the present utility model and do not limit the present utility model.

[0031] Figure 1 is a schematic structural diagram of a prior art light-transmitting electrostatic chuck;

[0032] Figure 2 is a schematic structural diagram of the electrostatic adsorption device provided in Embodiment 1;

[0033] Figure 3 is a schematic structural diagram of the electrostatic adsorption device provided in Embodiment 2.

[0034] Description of the reference numerals in the drawings:

[0035] 10. Light source;

[0036] 20. Electrostatic chuck; 210. Dielectric layer; 220. Reflective layer; 230. First insulating layer; 240. Electrode layer;

[0037] 2401. Avoidance space; 250. Second insulating layer; 260. Insulating layer; 270. Light-transmitting lens;

[0038] 30. Base;

[0039] 40. Product to be tested; 410. Detection mark. Detailed implementation mode

[0040] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the following will further elaborate on the present utility model in conjunction with the accompanying drawings. The components of the embodiments of the present utility model described and illustrated in the drawings here can be arranged and designed in various different configurations. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present utility model.

[0041] It should be noted that: similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0042] Unless otherwise defined, the technical terms or scientific terms used in this patent document should have the ordinary meaning understood by those of ordinary skill in the art belonging to the field of the present utility model. The "first", "second" and similar words used in the specification and claims of the present utility model patent do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "a", "an" or "the" do not indicate a quantity limitation, but indicate the existence of at least one. Words such as "comprising" or "including" mean that the elements or objects appearing before "comprising" or "including" cover the elements or objects listed after "comprising" or "including" and their equivalents, and do not exclude other elements or objects. "Center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are only used to represent relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation of the present utility model.

[0043] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0044] The following will describe in detail some embodiments of the present utility model in conjunction with the accompanying drawings. Without conflict, the features in the following embodiments can be combined with each other.

[0045] Embodiment 1:

[0046] Please refer to Figure 1 , in the prior art, the light source 10 is arranged below the base 30, and the light beam emitted by the light source 10 passes through the light-transmitting lens 270 and the electrostatic adsorption layer (insulating layer 260, electrode layer 240, dielectric layer 210) on the base 30 to illuminate the detection mark 410 on the product 40 to be tested.

[0047] In the prior art, the base 30 and the light-transmitting lens 270 are made of two different materials, and it is very difficult to ensure the flatness at the junction of the light-transmitting lens 270 and the base 30 during processing.

[0048] Therefore, this embodiment provides a highly reflective electrostatic adsorption device. Please refer to Figure 2 , in this embodiment, the electrostatic adsorption device includes a base 30 and an electrostatic chuck 20 attached to the base 30 for adsorbing the product 40 to be tested. The base 30 is integrally processed with the same material and good processability, which can effectively ensure the flatness of the electrostatic chuck.

[0049] The light source 10 is arranged above the electrostatic chuck 20, the product 40 to be tested is placed on the electrostatic chuck 20, and the detection mark 410 on the product 40 to be tested is located below the light source 10.

[0050] Specifically:

[0051] The electrostatic chuck 20 includes a dielectric layer 210, a reflective layer 220, a first insulating layer 230, an electrode layer 240, a second insulating layer 250, and a substrate.

[0052] The dielectric layer 210 allows the light beam emitted by the light source 10 to transmit through, and its light transmittance is greater than 80%. In order to ensure the light transmittance of the dielectric layer 210 and provide a certain protection to the reflective layer (to avoid loss of the reflective layer), the thickness range of the dielectric layer is 50 - 300 μm.

[0053] The reflective layer 220 reflects the light beam to the product 40 to be tested to illuminate the detection mark 410 located on the product 40 to be tested. The thickness of the reflective layer 220 affects its reflectivity. In order to ensure the reflection effect, the thickness range of the reflective layer is 0.05 - 1 μm.

[0054] Furthermore, the reflective layer 220 is a thin sheet with an upper surface configured as a reflective surface, or the reflective layer 220 is a thin sheet with an upper surface configured as a reflective metal coating. The reflective metal coating can be made of aluminum, silver, nickel, or an alloy of one of these metals.

[0055] During fabrication, the reflective layer 220 can be disposed below the dielectric layer 210. At this time, the reflective layer 220 is coated or plated on the first insulating layer 230; the reflective layer 220 can also be fabricated together with the dielectric layer 210. At this time, the reflective layer 220 is embedded inside the dielectric layer 210 and is integrally attached above the first insulating layer 230.

[0056] The electrode layer 240 is disposed below the reflective layer 220. The electrode layer 240 is made of a common conductive material to ensure good electrostatic adsorption force. At the same time, the electrode layer 240 has an avoidance space 2401 for avoiding the reflective layer 220. The avoidance space 2401 is disposed below the reflective layer 220 (i.e., below the detection mark 410 in the figure). While ensuring that the light beam emitted by the light source 10 can illuminate the detection mark 410 after being reflected by the reflective layer 220, it prevents the reflective layer 220 from generating electrostatic shielding on the electrode layer 240.

[0057] To prevent short circuits, the electrode layer 240 is isolated from the reflective layer 220 and the substrate. Therefore, the first insulating layer 230 is disposed between the reflective layer 220 and the electrode layer 240, and the second insulating layer 250 is disposed between the electrode layer 240 and the substrate.

[0058] Different from the prior art, in this embodiment, the light source 30 is arranged above the electrostatic chuck 20. After the light beam emitted by the light source 30 passes through the dielectric layer 210, the light beam is reflected by the reflective layer 220 to the product under test 40 to illuminate the detection mark 410 located on the product under test 40.

[0059] In the prior art, the base 30 and the light-transmitting lens 270 are made of two different materials. Therefore, it is very difficult to ensure the flatness at the junction of the light-transmitting lens 270 and the base 30 during processing. However, in the solution provided in this embodiment, there is no need to provide a light-transmitting lens 270. The base 30 is integrally processed with the same material, and the processing of the base 30 is more convenient. It can ensure that the flatness of the electrostatic chuck 20 can meet the requirements for fabricating OLED products while enabling the device CCD to recognize the detection mark 410 inside the product.

[0060] Embodiment 2:

[0061] A highly reflective electrostatic adsorption device provided in this embodiment is different from that in Embodiment 1 in terms of the structure of the electrostatic chuck 20.

[0062] Specifically, please refer to Figure 3 :

[0063] The electrostatic chuck 20 includes a dielectric layer 210, an electrode layer 240, an insulating layer 260, and a substrate.

[0064] The dielectric layer 210 allows the light beam emitted by the light source 10 to pass through it, and its light transmittance is greater than 80%. To ensure the light transmittance of the dielectric layer 210 and provide a certain degree of protection to the electrode layer 240 (to avoid losses caused by the reflective surface on the surface of the electrode layer 240), the thickness range of the dielectric layer is 50 - 300 μm.

[0065] The electrode layer 240 is disposed below the dielectric layer 210. The upper surface of the electrode layer 240 is configured as a reflective surface or a reflective metal coating to reflect the light beam emitted by the light source 10 to the product under test 40 to illuminate the detection mark 410 located on the product under test 40. The reflective metal coating can be made of aluminum, silver, nickel, or an alloy of one of these metals. The thickness range of the reflective surface or the reflective metal coating is 0.05 - 1 μm.

[0066] To prevent short - circuits, the electrode layer 240 is isolated from the substrate, so an insulating layer 260 is disposed between the electrode layer 240 and the substrate.

[0067] Different from the prior art, in this embodiment, the light source 10 is arranged above the electrostatic chuck 20. After the light beam emitted by the light source 10 passes through the dielectric layer 210, it is reflected by the reflective surface or the reflective metal coating on the surface of the electrode layer 240 to the product under test 40 to illuminate the detection mark 410 located on the product under test.

[0068] In the prior art, the base 30 and the light - transmitting lens 270 are made of two different materials, so it is very difficult to ensure the flatness at the junction of the light - transmitting lens 270 and the base 30 during processing. However, the solution provided in this embodiment does not require the setting of the light - transmitting lens 270. The base 30 is integrally processed with a consistent material, which makes the processing of the base 30 more convenient. While ensuring that the flatness of the electrostatic chuck 20 can meet the production requirements of OLED products, the device CCD can identify the detection marks inside the product.

[0069] As described above, the above is only the specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present utility model should be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model should be subject to the protection scope of the claims.

Claims

1. A highly reflective electrostatic adsorption device, comprising a base and an electrostatic chuck attached to the base for adsorbing a product to be detected, characterized in that: It further comprises a light source arranged above the electrostatic chuck, and a detection space for accommodating the product to be detected is provided between the light source and the electrostatic chuck; The electrostatic chuck comprises: A dielectric layer configured to be suitable for the light beam emitted by the light source to transmit through; A reflective layer configured to be suitable for reflecting the light beam to the product to be detected to illuminate a detection mark located on the product to be detected; An electrode layer arranged below the reflective layer; and A substrate configured to be suitable for carrying the dielectric layer, the reflective layer and the electrode layer.

2. The electrostatic adsorption device according to claim 1, characterized in that, The electrode layer has an avoidance space for avoiding the reflective layer, and the avoidance space is arranged below the reflective layer to prevent the reflective layer from generating electrostatic shielding on the electrode layer.

3. The electrostatic adsorption device according to claim 1, characterized in that, The reflective layer is a thin sheet with an upper surface configured as a reflective surface.

4. The electrostatic adsorption device according to claim 1, wherein The reflective layer is a thin sheet with an upper surface configured as a reflective metal coating.

5. The electrostatic adsorption device according to claim 1 or 2 or 3 or 4, characterized in that, The electrostatic chuck further comprises a first insulating layer arranged between the reflective layer and the electrode layer, and a second insulating layer arranged between the electrode layer and the substrate.

6. The electrostatic adsorption device according to claim 1, characterized in that, The reflective layer is arranged below the dielectric layer or embedded inside the dielectric layer.

7. A highly reflective electrostatic adsorption device, comprising a base and an electrostatic chuck attached to the base for adsorbing a product to be detected, characterized in that: It further comprises a light source arranged above the electrostatic chuck, and a detection space for accommodating the product to be detected is provided between the light source and the electrostatic chuck; The electrostatic chuck comprises: A dielectric layer configured to be suitable for the light beam emitted by the light source to transmit through; An electrode layer with an upper surface configured to be suitable for reflecting the light beam to the product to be detected to illuminate a detection mark located on the product to be detected; and A substrate configured to be suitable for carrying the dielectric layer and the electrode layer; Wherein, the electrode layer is arranged below the dielectric layer.

8. The electrostatic adsorption device according to claim 7, characterized in that, The upper surface of the electrode layer is configured as a reflective surface.

9. The electrostatic adsorption device according to claim 7, characterized in that, The upper surface of the electrode layer is a reflective coating.

10. The electrostatic adsorption device according to claim 7, characterized in that, An insulating layer is provided between the electrode layer and the substrate.

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