Cutter loading mechanism and vacuum coating machine

Abstract

The utility model discloses a tool loading mechanism and a vacuum coating machine. The tool loading mechanism comprises an objective table, a workpiece frame assembly, a first transmission structure, a first driver, a second transmission structure and a second driver, and the workpiece frame assembly is arranged on the objective table; the first transmission structure is fixedly connected with the objective table; the first driver drives the objective table to rotate through the first transmission structure, and the objective table rotates with the central axis of the objective table as the rotation axis. The second transmission structure penetrates through the first transmission structure, and the second transmission structure is rotatably connected with the bottom of the objective table; the second driver drives the second transmission structure to rotate, the second transmission structure drives the workpiece frame assembly to rotate in a gear transmission mode, and the workpiece frame assembly rotates with the central axis of the workpiece frame assembly as the rotation axis. Revolution and rotation of the cutter loading mechanism are combined, the direction of the blade in the cutter loading mechanism can be adjusted, and the blade coating uniformity is improved. The tool coating device can be widely applied to the technical field of tool coating.

Description

Technical Field

[0001] This application relates to the technical field of tool coating, and particularly to a tool loading mechanism and a vacuum coating machine. Background Art

[0002] For tools such as turning tools, milling cutters, and boring cutters, in order to improve their own properties such as oxidation resistance, wear resistance, and metal fatigue resistance, the surface of the tool needs to be coated during the production process. The tool is loaded into the coating chamber of the vacuum coating machine, and a coating is deposited on the surface of the tool by physical vapor deposition technology (PVD). The uniformity of the coating is crucial for improving the mechanical properties of the tool. The conventional methods are, one is to improve the uniformity of gas-phase molecules in the coating chamber, and the other is to move the fixture for loading the tool in the coating chamber. However, if we want to improve the uniformity of gas-phase molecules, we need to improve the structure of the vacuum coating machine, which has a high R & D cost and great difficulty in improvement; while moving the fixture in the coating chamber is easy to implement, but the movement mode of the fixture is single, and the improvement of the coating uniformity on the tool surface is limited. Summary of the Utility Model

[0003] To solve at least one of the above technical problems, this application provides a tool loading mechanism and a vacuum coating machine, and the technical solutions adopted are as follows.

[0004] The vacuum coating machine provided by this application includes a tool loading mechanism, and the carrier table and the workpiece holder assembly in the tool loading mechanism are located in the coating chamber of the vacuum coating machine.

[0005] The tool loading mechanism provided by this application includes a carrier table, a workpiece holder assembly, a first transmission structure, a first driver, a second transmission structure, and a second driver. The workpiece holder assembly is arranged on the carrier table, and the workpiece holder assembly includes at least one material rod; the first transmission structure is fixedly connected to the bottom of the carrier table; the first driver drives the carrier table to rotate through the first transmission structure, and the carrier table rotates around its own central axis; the second transmission structure penetrates through the first transmission structure, and the second transmission structure is rotatably connected to the bottom of the carrier table; the second driver drives the second transmission structure to rotate, and the second transmission structure drives the workpiece holder assembly to rotate in a gear transmission manner, and the workpiece holder assembly rotates around its own central axis.

[0006] In some embodiments of this application, the tool loading mechanism includes a base, the first transmission structure is connected to the base through a first magnetic fluid, the inner shaft sleeve of the first magnetic fluid is sleeved on the outer side wall of the first transmission structure and fixedly connected to the first transmission structure, and the outer housing of the first magnetic fluid is fixedly connected to the base.

[0007] In some embodiments of the present application, a flange is provided at one end of the first transmission structure away from the stage. The first driver drives the first transmission structure in a synchronous belt drive manner. A first driving pulley is provided on the rotating shaft of the first driver, and a first driven pulley is fixedly provided on the flange.

[0008] In some embodiments of the present application, the second driver drives the second transmission structure in a synchronous belt drive manner. A second driving pulley is provided on the rotating shaft of the second driver. A second driven pulley is provided on the flange through a second magnetic fluid. The inner sleeve of the second magnetic fluid is sleeved on the outer side wall of the rotating shaft of the second driven pulley, and the outer shell of the second magnetic fluid is fixedly connected to the flange.

[0009] In some embodiments of the present application, the outer side wall of the second transmission structure is connected to the inner side wall of the first transmission structure through a rolling bearing.

[0010] In some embodiments of the present application, the first transmission structure includes a first sleeve and a second sleeve. One end of the first sleeve is fixedly connected to the bottom of the stage, and the other end of the first sleeve is fixedly connected to one end of the second sleeve. The rolling bearing is provided on the second sleeve for connecting one end of the first sleeve.

[0011] In some embodiments of the present application, a central gear is fixedly provided at one end of the second transmission structure for connecting the stage. A transmission gear is provided on the rotating shaft of the workpiece rack assembly. A rotatable sun gear is provided at the bottom of the stage. The sun gear has internal teeth and external teeth. The central gear meshes with the internal teeth of the sun gear through at least one planet gear, and the external teeth of the sun gear mesh with and drive the transmission gear of the workpiece rack assembly.

[0012] The tool loading mechanism provided by the present application includes a stage, a workpiece rack assembly, a first transmission structure, a first driver, a second transmission structure, and a second driver. The workpiece rack assembly is arranged on the stage, and the workpiece rack assembly includes at least one layer of tool disks. The first transmission structure is fixedly connected to the bottom of the stage. The first driver drives the stage to rotate through the first transmission structure, and the stage rotates around its own central axis. The second transmission structure penetrates the first transmission structure, and the second transmission structure is rotatably connected to the bottom of the stage. The second driver drives the second transmission structure to rotate, and the second transmission structure drives the workpiece rack assembly to rotate in a gear drive manner, and the workpiece rack assembly rotates around its own central axis.

[0013] The tool loading mechanism provided by this application includes a loading platform, a material rod, a first transmission structure, a first driver, a second transmission structure, and a second driver. The material rod is arranged on the loading platform; the first transmission structure is fixedly connected to the bottom of the loading platform; the first driver drives the loading platform to rotate through the first transmission structure, and the loading platform rotates with its own central axis as the rotation axis; the second transmission structure penetrates the first transmission structure, and the second transmission structure is rotatably connected to the bottom of the loading platform; the second driver drives the second transmission structure to rotate, and the second transmission structure drives the material rod to rotate in a gear transmission manner, and the material rod rotates with its own central axis as the rotation axis.

[0014] This application has at least the following beneficial effects: In the tool loading mechanism, the first transmission structure is designed to be sleeved on the outer side wall of the second transmission structure. The first driver drives the loading platform to rotate through the first transmission structure, so that the tool loading mechanism on the loading platform realizes revolution. The second driver drives the workpiece holder assembly to rotate on the loading platform through the second transmission structure, so as to realize the rotation of the workpiece holder assembly on the loading platform. By combining the revolution and rotation of the tool loading mechanism, the orientation of the cutting blade in the tool loading mechanism can be adjusted, and the uniformity of the blade coating can be improved. This application can be widely applied to the technical field of tool coating.

[0015] Additional aspects and advantages of this application will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of this application. Brief Description of the Drawings

[0016] The following further demonstrates this application in conjunction with the drawings and embodiments. It should be noted that the embodiments shown in the following drawings are exemplary and are only used to explain this application, and should not be construed as a limitation to this application.

[0017] Figure 1 It is a structural diagram of the tool loading mechanism.

[0018] Figure 2 It is a structural diagram of the tool loading mechanism.

[0019] Figure 3 It is a structural diagram of the tool loading mechanism.

[0020] Figure 4 It is a cross-sectional view of the tool loading mechanism.

[0021] Figure 5 It is a structural diagram of the bottom of the loading platform.

[0022] Reference Numerals: 1100, stage; 1200, workpiece holder assembly; 1300, base; 2100, first transmission structure; 2101, first sleeve; 2102, second sleeve; 2103, flange; 2200, first driver; 2201, first driving pulley; 2202, first driven pulley; 3100, second transmission structure; 3200, second driver; 3201, second driving pulley; 3202, second driven pulley; 3301, central gear; 3302, sun gear; 3303, planet gear; 3304, transmission gear; 4100, first magnetic fluid; 4200, second magnetic fluid. Detailed Embodiment

[0023] The embodiments of the present application will be described in detail below with reference to the accompanying drawings. Throughout the drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application.

[0024] In the description of the present application, it should be understood that if terms such as "center", "middle part", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. are used to indicate the orientation or positional relationship, it is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0025] In the description of the present application, the meaning of "several" is more than one, the meaning of "multiple" is more than two, and understandings such as "greater than", "less than", "exceeding", etc. do not include the number itself, and understandings such as "above", "below", "within", etc. include the number itself. If the first and second are described only for the purpose of distinguishing technical features, they should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0026] In the description of the present application, unless otherwise clearly specified and defined, the terms "arrange", "install", "connect", "join" should be understood in a broad sense. For example: it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0027] In the description of the present application, when descriptions such as the reference terms "as an implementation", "an embodiment", "some examples", "some embodiments", "schematic embodiments", "examples", "specific examples", "some examples", etc. appear, it means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0028] The present application relates to a vacuum coating machine, which includes a tool loading mechanism. The vacuum coating machine has a coating chamber, and the blades loaded by the tool loading mechanism maintain the coating chamber.

[0029] The other components and operations of the vacuum coating machine are already recorded in the relevant art for those of ordinary skill in the art, and will not be described in detail here. The following will introduce the structure of the tool loading mechanism.

[0030] Combined with the attached Figure 1 to the attached Figure 5 The present application relates to a tool loading mechanism, which includes a carrier 1100 and a workpiece holder assembly 1200. The workpiece holder assembly 1200 is arranged on the carrier 1100, and the carrier 1100 and the workpiece holder assembly 1200 are located in the coating chamber of the vacuum coating machine.

[0031] The workpiece holder assembly 1200 is provided with at least one. The workpiece holder assembly 1200 includes at least one rod, and the blade is sleeved on the outer sidewall of the rod. It should be noted that when there are multiple workpiece holder assemblies 1200 arranged on the carrier 1100, the workpiece holder assemblies 1200 are circumferentially spaced apart around the central axis of the carrier 1100. When there are multiple rods arranged on the tool loading mechanism, the rods are circumferentially spaced apart around the central axis of the workpiece holder assembly 1200.

[0032] The carrier 1100 is set as a frustum or a circular plate. The carrier 1100 can rotate, and the carrier 1100 rotates around its own central axis as the rotation axis. Specifically, combined with the attached Figure 1, the tool loading mechanism includes a first transmission structure 2100 and a first driver 2200. The first transmission structure 2100 is vertically arranged and fixedly connected to the bottom of the stage 1100. The first transmission structure 2100 and the stage 1100 are arranged on the same central axis. The first driver 2200 drives the stage 1100 to rotate through the first transmission structure 2100. It can be understood that during the rotation of the stage 1100, the workpiece holder assembly 1200 moves around the central axis of the stage 1100, thereby realizing the revolution of the workpiece holder assembly 1200 around the central axis of the stage 1100.

[0033] The workpiece holder assembly 1200 can rotate on the stage 1100, and the workpiece holder assembly 1200 rotates with its own central axis as the rotation axis. Specifically, referring to Figure 1 to Figure 4 , the tool loading mechanism includes a second transmission structure 3100 and a second driver 3200. The second transmission structure 3100 is rotatably connected to the bottom of the stage 1100. The second driver 3200 drives the second transmission structure 3100 to rotate, and the second transmission structure 3100 drives the workpiece holder assembly 1200 to rotate in a gear transmission manner. It can be understood that under the drive of the second driver 3200, the workpiece holder assembly 1200 rotates with its own central axis as the rotation axis for self-rotation.

[0034] It should be noted that the tool loading mechanism drives the stage 1100 to rotate by the first driver 2200 and drives the workpiece holder assembly 1200 to rotate by the second driver 3200 respectively, so as to separate the power of the stage 1100 and the workpiece holder assembly 1200 and complete the revolution and self-rotation of the workpiece holder assembly 1200 respectively.

[0035] Furthermore, the second transmission structure 3100 penetrates through the first transmission structure 2100. Specifically, the first transmission structure 2100 is formed in a hollow shape, the second transmission structure 3100 is arranged as a central shaft, and the second transmission structure 3100 and the first transmission structure 2100 are arranged on the same central axis.

[0036] As an implementation manner, the outer side wall of the second transmission structure 3100 is connected to the inner side wall of the first transmission structure 2100 through a rolling bearing to realize the respective rotations between the second transmission structure 3100 and the first transmission structure 2100. The outer ring of the rolling bearing is fixedly connected to the inner side wall of the first transmission structure 2100, and the inner ring of the rolling bearing is sleeved on the outer side wall of the second transmission structure 3100 and fixedly connected to the outer side wall of the second transmission structure 3100.

[0037] Referring to Figure 4, the first transmission structure 2100 includes a first sleeve 2101 and a second sleeve 2102. The first sleeve 2101 and the second sleeve 2102 are fixedly connected to each other and communicate with each other to form a hollow shape of the first transmission structure 2100. Specifically, one end of the first sleeve 2101 is fixedly connected to the bottom of the stage 1100, and the other end of the first sleeve 2101 is fixedly connected to one end of the second sleeve 2102. Further, the inner side wall of the first sleeve 2101 is sleeved on the outer side wall of the second sleeve 2102, and the first sleeve 2101 and the second sleeve 2102 are fixedly connected.

[0038] Combined with the attached Figure 4 , a rolling bearing is arranged on the second sleeve 2102 for connecting one end of the first sleeve 2101, and the outer ring of the rolling bearing is fixedly connected to the inner side wall of the first sleeve 2101. In this case, the rolling bearing can be conveniently assembled into the first sleeve 2101.

[0039] In some examples, the top of the first transmission structure 2100 is fixedly connected to the bottom of the stage 1100 through a plurality of columns. Specifically, the plurality of columns are arranged on the top of the first sleeve 2101.

[0040] As an implementation manner, combined with the attached Figure 1 to the attached Figure 4 , the tool loading mechanism includes a base 1300, and the first driver 2200 and the second driver 3200 are both fixedly connected to the base 1300. The first transmission structure 2100 penetrates through the base 1300, and the first transmission structure 2100 is rotatably arranged on the base 1300.

[0041] Further, combined with the attached Figure 1 and the attached Figure 4 , the first transmission structure 2100 is connected to the base 1300 through a first magnetic fluid 4100, and the first magnetic fluid 4100 can provide a good sealing effect between the first transmission structure 2100 and the base 1300. Specifically, the inner sleeve of the first magnetic fluid 4100 is sleeved on the outer side wall of the first transmission structure 2100 and is fixedly connected to the first transmission structure 2100, and the outer housing of the first magnetic fluid 4100 is fixedly connected to the base 1300.

[0042] At least one sealing ring is arranged between the outer housing of the first magnetic fluid 4100 and the base 1300, and at least one sealing ring is arranged between the inner sleeve of the first magnetic fluid 4100 and the outer side wall of the first transmission structure 2100.

[0043] In some examples, a bushing is sleeved on the outer sidewall of the first transmission structure 2100, and the inner bushing of the first magnetorheological fluid 4100 is sleeved on the outer sidewall of the bushing. At least one sealing ring is provided between the inner sidewall of the bushing and the outer sidewall of the first transmission structure 2100, and at least one sealing ring is provided between the inner sidewall of the inner bushing of the first magnetorheological fluid 4100 and the outer sidewall of the bushing.

[0044] As an implementation manner, the first driver 2200 drives the first transmission structure 2100 to rotate in a belt drive manner. Specifically, a first driving pulley 2201 is provided on the rotating shaft of the first driver 2200, and a first driven pulley 2202 is provided at one end of the first transmission structure 2100 away from the stage 1100.

[0045] Furthermore, a flange 2103 is provided at one end of the first transmission structure 2100 away from the stage 1100, and the first driven pulley 2202 is fixedly provided on the flange 2103. It can be understood that the flange 2103 is located at the end of the second sleeve 2102 away from the first sleeve 2101, and the flange 2103 is fixedly connected to the end of the second sleeve 2102 by bolts or screws. Alternatively, at least it can also be alternatively designed as: the flange 2103 and the second sleeve 2102 are integrally formed.

[0046] In some examples, the first driver 2200 drives the first transmission structure 2100 in a synchronous belt drive manner, and both the first driving pulley 2201 and the first driven pulley 2202 are provided as synchronous pulleys.

[0047] As an implementation manner, the second driver 3200 drives the second transmission structure 3100 to rotate in a belt drive manner. Specifically, a second driving pulley 3201 is provided on the rotating shaft of the second driver 3200, and a second driven pulley 3202 is connected to the end of the second transmission structure 3100 away from the stage 1100.

[0048] Furthermore, the second driver 3200 drives the second transmission structure 3100 in a synchronous belt drive manner, and both the second driving pulley 3201 and the second driven pulley 3202 are provided as synchronous pulleys.

[0049] In some examples, in combination with the attached Figure 4 , the second driven pulley 3202 is connected to the flange 2103 through the second magnetorheological fluid 4200. The outer housing of the second magnetorheological fluid 4200 is fixedly connected to the flange 2103, the inner bushing of the second magnetorheological fluid 4200 is sleeved on the outer sidewall of the rotating shaft of the second driven pulley 3202, and the inner bushing of the second magnetorheological fluid 4200 is fixedly connected to the rotating shaft of the second driven pulley 3202. Arranging the second magnetorheological fluid 4200 at the ends of the first transmission structure 2100 and the second transmission structure 3100 can improve the sealing performance of the first transmission structure 2100.

[0050] At least one sealing ring is provided between the outer housing of the second magnetorheological fluid 4200 and the flange 2103, and at least one sealing ring is provided between the inner bushing of the second magnetorheological fluid 4200 and the rotating shaft of the second driven pulley 3202. At least one sealing ring is provided between the flange 2103 and the first transmission structure 2100.

[0051] As an implementation manner, in combination with the attached Figure 4 and the attached Figure 5 On one end of the second transmission structure 3100 for connecting the stage 1100, a central gear 3301 is fixedly provided, and a transmission gear 3304 is provided on the rotating shaft of the workpiece holder assembly 1200. The second transmission structure 3100 drives the central gear 3301 to rotate. Under the transmission of the central gear 3301, the transmission gear 3304 of the workpiece holder assembly 1200 rotates, thereby driving the workpiece holder assembly 1200 to rotate.

[0052] Further, a rotatable sun gear 3302 is provided at the bottom of the stage 1100. The sun gear 3302 has internal teeth and external teeth. The central gear 3301 meshes and drives the sun gear 3302, and then the sun gear 3302 meshes and drives the transmission gear 3304 of the workpiece holder assembly 1200.

[0053] In some examples, the position where the first transmission structure 2100 is fixedly connected to the stage 1100 is within the area enclosed by the sun gear 3302. The central gear 3301 meshes and drives the internal teeth of the sun gear 3302, and the external teeth of the sun gear 3302 mesh and drive the transmission gear 3304 of the workpiece holder assembly 1200. Further, the central gear 3301 meshes with the internal teeth of the sun gear 3302 through at least one planet gear 3303. The planet gear 3303 is rotatably provided at the bottom of the stage 1100. The planet gear 3303 is provided between the central gear 3301 and the internal teeth of the sun gear 3302 to form a position for the fixed connection between the first transmission structure 2100 and the stage 1100 at intervals between the central gear 3301 and the sun gear 3302.

[0054] Regarding the tool loading mechanism, there are at least the following alternative embodiments.

[0055] In some alternative embodiments, the workpiece holder assembly includes at least one layer of tool disks, and the tool shanks are inserted into the tool disks.

[0056] In some other alternative embodiments, the material rod is provided on the stage. Driven by the second transmission structure, the material rod rotates on the stage, and the material rod rotates around its own central axis. Further, when there are multiple material rods on the stage, the material rods are circumferentially spaced apart around the central axis of the stage.

[0057] The embodiments of the present application have been described in detail above with reference to the accompanying drawings. However, the present application is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present application within the scope of knowledge possessed by those of ordinary skill in the art. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A tool loading mechanism, characterized in that: including a stage; a workpiece holder assembly disposed on the stage, the workpiece holder assembly including at least one stock rod; a first transmission structure fixedly connected to the bottom of the stage; a first driver that drives the stage to rotate through the first transmission structure, and the stage rotates about its own central axis; a second transmission structure passing through the first transmission structure and rotatably connected to the bottom of the stage; a second driver that drives the second transmission structure to rotate, and the second transmission structure drives the workpiece holder assembly to rotate in a gear transmission manner, and the workpiece holder assembly rotates about its own central axis.

2. The tool loading mechanism according to claim 1, wherein: The tool loading mechanism includes a base, and the first transmission structure is connected to the base through a first magnetic fluid. The inner sleeve of the first magnetic fluid is sleeved on the outer side wall of the first transmission structure and fixedly connected to the first transmission structure, and the outer housing of the first magnetic fluid is fixedly connected to the base.

3. The tool loading mechanism according to claim 1, wherein: A flange is provided at one end of the first transmission structure away from the stage. The first driver drives the first transmission structure in a synchronous belt transmission manner. A first driving pulley is provided on the rotating shaft of the first driver, and a first driven pulley is fixedly provided on the flange.

4. The tool loading mechanism according to claim 3, wherein: The second driver drives the second transmission structure in a synchronous belt transmission manner. A second driving pulley is provided on the rotating shaft of the second driver. A second driven pulley is provided on the flange through a second magnetic fluid, and the inner sleeve of the second magnetic fluid is sleeved on the outer side wall of the rotating shaft of the second driven pulley, and the outer housing of the second magnetic fluid is fixedly connected to the flange.

5. The tool loading mechanism according to claim 1, characterized in that: The outer side wall of the second transmission structure is connected to the inner side wall of the first transmission structure through a rolling bearing.

6. The tool loading mechanism according to claim 5, characterized in that: The first transmission structure includes a first sleeve and a second sleeve. One end of the first sleeve is fixedly connected to the bottom of the stage, and the other end of the first sleeve is fixedly connected to one end of the second sleeve. The rolling bearing is provided on the second sleeve for connecting one end of the first sleeve.

7. The tool loading mechanism according to claim 1, wherein: A central gear is fixedly provided at one end of the second transmission structure for connecting the stage. A transmission gear is provided on the rotating shaft of the workpiece holder assembly. A rotatable sun gear is provided at the bottom of the stage. The sun gear has internal teeth and external teeth. The central gear meshes with the internal teeth of the sun gear through at least one planet gear, and the external teeth of the sun gear mesh with and drive the transmission gear of the workpiece holder assembly.

8. A tool loading mechanism, characterized in that: including a stage; a workpiece holder assembly disposed on the stage, the workpiece holder assembly including at least one layer of tool disks; a first transmission structure fixedly connected to the bottom of the stage; a first driver that drives the stage to rotate through the first transmission structure, and the stage rotates about its own central axis; A second transmission structure, the second transmission structure passing through the first transmission structure, and the second transmission structure being rotatably connected to the bottom of the stage; A second driver, the second driver driving the second transmission structure to rotate, the second transmission structure driving the workpiece holder assembly to rotate in a gear transmission manner, and the workpiece holder assembly rotating about its own central axis.

9. A tool loading mechanism, characterized in that: Comprising A stage; A rod, the rod being disposed on the stage; A first transmission structure, the first transmission structure being fixedly connected to the bottom of the stage; A first driver, the first driver driving the stage to rotate through the first transmission structure, and the stage rotating about its own central axis; A second transmission structure, the second transmission structure passing through the first transmission structure, and the second transmission structure being rotatably connected to the bottom of the stage; A second driver, the second driver driving the second transmission structure to rotate, the second transmission structure driving the rod to rotate in a gear transmission manner, and the rod rotating about its own central axis.

10. A vacuum coating machine, characterized in that: Comprising the tool loading mechanism according to any one of claims 1 to 9, wherein the stage and the workpiece holder assembly are located in the coating chamber of the vacuum coating machine.

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