Workpiece rest mechanism and vacuum coating machine
By designing the workpiece frame mechanism, the position change of the tool in the vacuum coating machine is solved, the problem of uneven deposition of metal particles in the target material is improved, the uniformity of the coating is met, and the high mechanical performance requirements of the tool are met.
Patent Information
- Application Number
- CN202422417702.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-30
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-30
AI Technical Summary
During the vacuum coating process, different loading positions of the tool in the coating chamber make it difficult to deposit target metal particles uniformly, affecting the coating uniformity of the tool surface.
A workpiece frame mechanism is designed, including a stage, a main transmission structure, a drive, a base, a gear disk and a material rod. The stage is driven to rotate through the main transmission structure. The material rod rotates with its central axis as the rotation axis. The gear disk realizes the rotation and rotation of the material rod through gear transmission, ensuring the continuous change of the tool position and improving the uniformity of the coating.
Through the rotation of the material rod and the rotation, the tool position is continuously changed, the uniformity of the coating is improved, and the high mechanical performance requirements are met.
Smart Images

Figure CN223134569U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of tool coating, and particularly to a workpiece rack mechanism and a vacuum coating machine. Background Art
[0002] In the field of mechanical cutting, high requirements are imposed on the properties of tools such as high hardness, wear resistance, oxidation resistance, and friction resistance. Ordinary tools are difficult to meet these high requirements for mechanical properties. Therefore, the surface of the tool needs to be coated to form a coating with special mechanical properties, thereby improving the performance of the tool. Usually, a vacuum coating machine deposits a coating on the surface of the tool by physical vapor deposition technology (PVD). Among them, the uniformity of the coating on the surface of the tool is crucial for the mechanical properties. However, due to the different positions where the tools are loaded in the coating chamber, it is difficult for the metal particles generated by the target to be evenly deposited on the surface of the tool. Summary of the Utility Model
[0003] To solve at least one of the above technical problems, this application provides a workpiece rack mechanism and a vacuum coating machine, and the technical solutions adopted are as follows.
[0004] The vacuum coating machine provided by this application includes a workpiece rack mechanism, and the tools loaded by the workpiece rack mechanism are located in the coating chamber of the vacuum coating machine.
[0005] The workpiece rack mechanism provided by this application includes a carrier table, a main transmission structure, a driver, a base, a gear disk, and at least one material rod. The material rod is arranged on the carrier table; the upper end of the main transmission structure is fixedly connected to the bottom of the carrier table; the driver drives the carrier table to rotate through the main transmission structure, and the carrier table rotates around its own central axis; the driver is arranged on the base, and the main transmission structure is rotatably arranged on the base; the gear disk is fixed relative to the base, and the gear disk drives the material rod to rotate through gear transmission, and the material rod rotates around its own central axis.
[0006] In some embodiments of this application, a first transmission gear is arranged at the lower end of the material rod, the gear disk has external teeth or internal teeth, and the gear disk drives the material rod to rotate in a gear meshing transmission manner.
[0007] In some embodiments of this application, the workpiece rack mechanism includes a second transmission gear. The second transmission gear is arranged at the bottom of the carrier table, the second transmission gear meshes with the gear disk and the first transmission gear respectively, and the gear disk drives the material rod to rotate through the second transmission gear.
[0008] In some embodiments of this application, the number of the material rods is set to be at least two, and each of the material rods is distributed along the circumference around the central axis of the carrier table.
[0009] In some embodiments of the present application, the first transmission gears of two adjacent material rods mesh with each other.
[0010] In some embodiments of the present application, the fixed connection position between the main transmission structure and the carrier table is within or outside the circular area of the gear disk.
[0011] In some embodiments of the present application, the main transmission structure is rotatably arranged on the base through a magnetorheological fluid. The inner shaft sleeve of the magnetorheological fluid is sleeved on the outer side wall of the main transmission structure and fixedly connected to the main transmission structure, and the outer shell of the magnetorheological fluid is fixedly connected to the base.
[0012] The workpiece rack mechanism provided by the present application includes a carrier table, a main transmission structure, a driver, a base, a gear disk, and at least one workpiece rack assembly. The workpiece rack assembly is arranged on the carrier table, and the workpiece rack assembly includes at least one material rod. The upper end of the main transmission structure is fixedly connected to the bottom of the carrier table. The driver drives the carrier table to rotate through the main transmission structure, and the carrier table rotates around its own central axis. The driver is arranged on the base, and the main transmission structure is rotatably arranged on the base. The gear disk is fixed relative to the base, and the gear disk drives the workpiece rack assembly to rotate through gears, and the workpiece rack assembly rotates around its own central axis.
[0013] The workpiece rack mechanism provided by the present application includes a carrier table, a main transmission structure, a driver, a base, a gear disk, and at least one workpiece rack assembly. The workpiece rack assembly is arranged on the carrier table, and the workpiece rack assembly includes at least one cutter head. The upper end of the main transmission structure is fixedly connected to the bottom of the carrier table. The driver drives the carrier table to rotate through the main transmission structure, and the carrier table rotates around its own central axis. The driver is arranged on the base, and the main transmission structure is rotatably arranged on the base. The gear disk is fixed relative to the base, and the gear disk drives the workpiece rack assembly to rotate through gears, and the workpiece rack assembly rotates around its own central axis.
[0014] The present application has at least the following beneficial effects: The workpiece rack mechanism is designed with a main transmission structure and a gear disk. The driver drives the carrier table to rotate through the main transmission structure, so as to realize the revolution of the material rods on the carrier table. The fixed gear disk drives the material rods to rotate in a gear transmission manner, so as to realize the rotation of the material rods on the carrier table. The combination of the revolution and rotation of the material rods enables the tool positions in the workpiece rack mechanism to be continuously changed, improving the coating uniformity. The present application can be widely applied to the field of tool coating technology.
[0015] Additional aspects and advantages of the present application will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present application. Description of the Drawings
[0016] The present application will be further illustrated below in conjunction with the drawings and embodiments. It should be noted that the embodiments shown in the following drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application.
[0017] Figure 1 It is a structural diagram of the workpiece rack mechanism.
[0018] Figure 2 It is a structural diagram of the workpiece rack mechanism.
[0019] Figure 3 It is a structural diagram of the bottom of the load platform.
[0020] Reference numerals: 1100, load platform; 1200, material rod; 1300, base; 2101, main transmission structure; 2102, driver; 2103, magnetorheological fluid; 2201, gear disk; 3101, first transmission gear; 3102, second transmission gear. Detailed Description of the Embodiments
[0021] The embodiments of the present application will be described in detail below in conjunction with the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application.
[0022] In the description of the present application, it should be understood that if terms such as "center", "middle", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. are used to indicate the orientation or positional relationship, it is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.
[0023] In the description of the present application, the meaning of "several" is more than one, the meaning of "multiple" is more than two, "greater than", "less than", "exceeding", etc. are understood as not including the present number, and "above", "below", "within", etc. are understood as including the present number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence of the indicated technical features.
[0024] In the description of the present application, unless otherwise clearly defined and limited, the terms "arranged", "installed", "connected", and "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.
[0025] In the description of the present application, when descriptions such as "as an implementation", "an embodiment", "some examples", "some embodiments", "illustrative embodiments", "examples", "specific examples", "some examples", etc. appear, it means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.
[0026] The present application relates to a vacuum coating machine, which includes a workpiece rack mechanism, and the tool loaded on the workpiece rack mechanism is located in the coating chamber of the vacuum coating machine.
[0027] The other components and operations of the vacuum coating machine are already recorded in the related art for those of ordinary skill in the art, and will not be described in detail here. The following will introduce the structure of the workpiece rack mechanism.
[0028] Combined with Att Figure 1 to Att Figure 3 , the present application relates to a workpiece rack mechanism, which includes a carrier 1100 and at least one rod 1200. The rod 1200 is arranged on the carrier 1100, and the blade is sleeved on the outer sidewall of the rod 1200. It can be understood that the carrier 1100 and the rod 1200 are located in the coating chamber of the vacuum coating machine.
[0029] Combined with Att Figure 1, the stage 1100 is set as a frustum or a circular plate, and the stage 1100 is rotatable. Specifically, the workpiece holder mechanism includes a main transmission structure 2101 and a driver 2102. The upper end of the main transmission structure 2101 is fixedly connected to the bottom of the stage 1100, and the main transmission structure 2101 and the stage 1100 are arranged with the same central axis. The driver 2102 drives the stage 1100 to rotate through the main transmission structure 2101, and the stage 1100 rotates with its own central axis as the rotation axis. During the rotation of the stage 1100, the material rod 1200 moves around the central axis of the stage 1100, so as to realize the revolution of the material rod 1200 around the central axis of the stage 1100.
[0030] Further, in combination with the attached Figure 1 and the attached Figure 2 , the workpiece holder mechanism includes a base 1300. The driver 2102 is arranged on the base 1300, the main transmission structure is rotatably arranged on the base 1300, and the base 1300 can carry the driver 2102 and the main transmission structure 2101.
[0031] In combination with the attached Figure 3 , the workpiece holder mechanism includes a gear disk 2201. The gear disk 2201 drives the material rod 1200 to rotate through gears, so as to realize the rotation of the material rod 1200 with its own central axis as the rotation axis, that is, the material rod 1200 realizes self-rotation. It can be understood that the material rod 1200 revolves with the rotation of the stage 1100, and the material rod 1200 rotates on the stage 1100, so that the blades on the material rod 1200 can continuously adjust the orientation, improving the uniformity of the coating on the blade surface.
[0032] It should be noted that the gear disk 2201 is fixedly connected to the base 1300, so that the gear disk 2201 is fixed relative to the base 1300. Specifically, the gear disk 2201 is arranged on the upper side of the base 1300 through a column. In this case, when the stage 1100 rotates and the material rod 1200 revolves, the stationary gear disk 2201 drives the material rod 1200 to rotate through gears.
[0033] As an implementation manner, in combination with the attached Figure 2 , a first transmission gear 3101 is arranged at the lower end of the material rod 1200, and the gear disk 2201 drives the material rod 1200 to rotate in a gear meshing transmission manner.
[0034] Specifically, in combination with the attached Figure 3 , the gear disk 2201 has external teeth, and the external teeth of the gear disk 2201 mesh with the first transmission gear 3101 of the material rod 1200 to drive the material rod 1200 to rotate self.
[0035] Further, in combination with the attached Figure 3, the workpiece rack mechanism includes a second transmission gear 3102, the second transmission gear 3102 is disposed at the bottom of the stage 1100, the rotating shaft of the second transmission gear 3102 is fixedly connected to the stage 1100, the second transmission gear 3102 meshes with the gear disk 2201 and the first transmission gear 3101 respectively, and the gear disk 2201 drives the material rod 1200 to rotate through the second transmission gear 3102. Specifically, the external teeth of the gear disk 2201 are in meshing transmission with the first transmission gear 3101 of one of the material rods 1200 through the second transmission gear 3102.
[0036] In some examples, a plurality of material rods 1200 are provided, and the material rods 1200 are distributed in a circumferential direction around the central axis of the stage 1100. When the stage 1100 rotates relative to the gear disk 2201, the material rods 1200 on the stage 1100 are meshed with the second transmission gear 3102 one by one, so as to realize the self-rotation of each material rod 1200.
[0037] In some examples, in combination with the attached Figure 3 , the first transmission gears 3101 of two adjacent material rods 1200 are meshed, and the first transmission gears 3101 of each material rod 1200 can also be in meshing transmission with each other.
[0038] In some examples, at least one second transmission gear 3102 is provided, and each second transmission gear 3102 is meshed with the external teeth of the gear disk 2201.
[0039] Regarding the gear disk 2201, there are at least the following alternative examples.
[0040] In some alternative examples, the gear disk 2201 has internal teeth, the first transmission gears 3101 of each material rod 1200 are located within the circular area of the gear disk 2201, and the internal teeth of the gear disk 2201 are in meshing transmission with the first transmission gears 3101 of the material rods 1200 to drive the material rods 1200 to rotate self. Further, the internal teeth of the gear disk 2201 are in meshing transmission with the first transmission gears 3101 of the material rods 1200 through the second transmission gear 3102.
[0041] It should be noted that the fixed connection position of the main transmission structure 2101 and the stage 1100 is within the circular area of the gear disk 2201. In this case, the gear disk 2201 has external teeth. Or, the gear disk 2201 has internal teeth, and the fixed connection position of the main transmission structure 2101 and the stage 1100 is within the area of the circumference where the material rods 1200 are located. Or, the gear disk 2201 has internal teeth, the internal teeth of the gear disk 2201 are in meshing transmission with the first transmission gears 3101 of the material rods 1200 through the second transmission gear 3102, the fixed connection position of the main transmission structure 2101 and the stage 1100 is within the circular area of the gear disk 2201, and outside the area of the circumference where the material rods 1200 are located.
[0042] Of course, the design can also be replaced as follows: the fixed connection position between the main transmission structure 2101 and the stage 1100 is outside the circular area of the gear disk 2201. In this case, the gear disk 2201 has internal teeth. Alternatively, the gear disk 2201 has external teeth, and the fixed connection position between the main transmission structure 2101 and the stage 1100 is outside the area of the circumference where the material rod 1200 is located. Alternatively, the gear disk 2201 has external teeth, the external teeth of the gear disk 2201 drive the first transmission gear 3101 of the material rod 1200 through the second transmission gear 3102, the fixed connection position between the main transmission structure 2101 and the stage 1100 is outside the circular area of the gear disk 2201 and within the area of the circumference where the material rod 1200 is located.
[0043] As an implementation manner, in combination with the attached Figure 1 and the attached Figure 2 , the main transmission structure 2101 is rotatably arranged on the base 1300 through the magnetorheological fluid 2103, and the magnetorheological fluid 2103 can provide a good sealing effect between the main transmission structure 2101 and the base 1300. Specifically, the inner bushing of the magnetorheological fluid 2103 is sleeved on the outer side wall of the main transmission structure 2101 and fixedly connected to the main transmission structure 2101, and the outer housing of the magnetorheological fluid 2103 is fixedly connected to the base 1300.
[0044] Further, at least one sealing ring is arranged between the outer housing of the magnetorheological fluid 2103 and the base 1300, and at least one sealing ring is arranged between the inner bushing of the magnetorheological fluid 2103 and the outer side wall of the main transmission structure 2101.
[0045] In some examples, a bushing is sleeved on the outer side wall of the main transmission structure 2101, and the inner bushing of the magnetorheological fluid 2103 is sleeved on the outer side wall of the bushing. At least one sealing ring is arranged between the inner side wall of the bushing and the outer side wall of the main transmission structure 2101, and at least one sealing ring is arranged between the inner side wall of the inner bushing of the magnetorheological fluid 2103 and the outer side wall of the bushing.
[0046] Regarding the workpiece rack mechanism, there are at least the following alternative embodiments.
[0047] In some alternative embodiments, the stage is provided with a workpiece rack assembly, and the workpiece rack assembly includes at least one material rod. Driven by the gear disk, the workpiece rack assembly can rotate on the stage, and the workpiece rack assembly rotates around its own central axis. Further, when the number of the material rods is multiple, the material rods are circumferentially spaced apart around the central axis of the workpiece rack assembly.
[0048] In some alternative embodiments, the stage is provided with a workpiece holder assembly. The workpiece holder assembly includes at least one layer of tool disks, and the tool shanks of the cutting tools are inserted into the tool disks. Driven by the gear disk, the workpiece holder assembly can rotate on the stage, and the workpiece holder assembly rotates about its own central axis.
[0049] The embodiments of the present application have been described in detail above with reference to the accompanying drawings. However, the present application is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art, various changes can be made without departing from the spirit of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.
Claims
1. A workpiece rack mechanism, characterized in that: including a stage; at least one material rod, the material rod being arranged on the stage; a main transmission structure, the upper end of the main transmission structure being fixedly connected to the bottom of the stage; a driver, the driver driving the stage to rotate through the main transmission structure, and the stage rotating about its own central axis; a base, the driver being arranged on the base, and the main transmission structure being rotatably arranged on the base; a gear disk, the gear disk being fixed relative to the base, the gear disk driving the material rod to rotate through gear transmission, and the material rod rotating about its own central axis.
2. The workpiece rack mechanism according to claim 1, wherein: A first transmission gear is arranged at the lower end of the material rod, the gear disk has external teeth or internal teeth, and the gear disk drives the material rod to rotate in a gear meshing transmission manner.
3. The workpiece rack mechanism according to claim 2, characterized in that: The workpiece holder mechanism includes a second transmission gear, the second transmission gear being arranged at the bottom of the stage, the second transmission gear meshing with the gear disk and the first transmission gear respectively, and the gear disk driving the material rod to rotate through the second transmission gear.
4. The workpiece rack mechanism according to claim 2 or 3, characterized in that: The material rods are arranged to be at least two, and each of the material rods is distributed circumferentially around the central axis of the stage.
5. The workpiece holder mechanism according to claim 4, characterized in that: The first transmission gears of two adjacent material rods are meshed.
6. The workpiece rack mechanism according to claim 2 or 3, characterized in that: The fixed connection position of the main transmission structure and the stage is inside or outside the circular area of the gear disk.
7. The workpiece rack mechanism according to any one of claims 1 to 3, characterized in that: The main transmission structure is rotatably arranged on the base through a magnetorheological fluid, an inner sleeve of the magnetorheological fluid is sleeved on the outer side wall of the main transmission structure and fixedly connected to the main transmission structure, and an outer shell of the magnetorheological fluid is fixedly connected to the base.
8. A workpiece holder mechanism, characterized in that: including a stage; at least one workpiece holder assembly, the workpiece holder assembly being arranged on the stage, and the workpiece holder assembly including at least one material rod; a main transmission structure, the upper end of the main transmission structure being fixedly connected to the bottom of the stage; a driver, the driver driving the stage to rotate through the main transmission structure, and the stage rotating about its own central axis; a base, the driver being arranged on the base, and the main transmission structure being rotatably arranged on the base; a gear disk, the gear disk being fixed relative to the base, the gear disk driving the workpiece holder assembly to rotate through gear transmission, and the workpiece holder assembly rotating about its own central axis.
9. A workpiece holder mechanism, characterized in that: including a stage; at least one workpiece holder assembly, the workpiece holder assembly being arranged on the stage, and the workpiece holder assembly including at least one layer of cutter disks; a main transmission structure, the upper end of the main transmission structure being fixedly connected to the bottom of the stage; a driver, the driver driving the stage to rotate through the main transmission structure, and the stage rotating about its own central axis; a base, the driver being arranged on the base, and the main transmission structure being rotatably arranged on the base; a gear disk, the gear disk being fixed relative to the base, the gear disk driving the workpiece holder assembly to rotate through gear transmission, and the workpiece holder assembly rotating about its own central axis.
10. A vacuum coating machine, characterized in that: Including the workpiece holder mechanism according to any one of claims 1 to 9, and the tool loaded by the workpiece holder mechanism is located in the coating chamber of the vacuum coating machine.