High-low pressure purging gas cylinder rack

Abstract

The utility model discloses a high-low pressure purging gas cylinder rack which is used for installing at least two gas supply gas cylinders. The two gas supply cylinders are respectively communicated to the outlet end through a first gas supply pipeline 3 and a second gas supply pipeline; a first gas cylinder gas outlet pressure sensor, a first pneumatic valve and a first pressure regulating valve are sequentially arranged on the first gas supply pipeline 3 from the gas supply cylinder end to the outlet end; a second gas cylinder gas outlet pressure sensor, a second pneumatic valve and a second pressure regulating valve are sequentially arranged on the second gas supply pipeline from the gas supply cylinder end to the outlet end; a first linkage node is arranged between the first pneumatic valve and the first pressure regulating valve, a second linkage node is arranged between the second pneumatic valve and the second pressure regulating valve, the linkage pipeline is communicated with the first linkage node and the second linkage node, and a third pneumatic valve is arranged on the linkage pipeline. According to the utility model, the problems that waste is caused by excessive residual high-pressure gas and man-made accidents in the frequent man-made operation process cannot be effectively avoided are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, and particularly relates to a high and low pressure purging gas cylinder rack. Background Art

[0002] In recent years, the semiconductor wafer manufacturing industry has advanced to the 8-inch wafer scale. At the same time, it is also laying out the construction and production of 12-inch wafers, preparing to embrace the industrial scale of the next generation. Therefore, each manufacturing enterprise continuously expands its production capacity and factory area scale. This has promoted the continuous progress of the manufacturing process technology. Starting from the technology of 64Mb (megabit) DRAM (dynamic random access memory) memory density with a 0.25μm design specification, it has accelerated the development towards 256M with a 0.18μm specification; even the design of DRAM components with an integration degree of 1Gb (gigabit) at 0.13μm is not uncommon. The entire semiconductor industry is caught in the pursuit of cutting-edge technology iteration. In the competition, in addition to updating the manufacturing equipment, the most important thing is the cooperation of the facility work to maintain the operation of the factory area, and the expenditures in these two aspects still account for the largest proportion of the capital. Especially with multiple safety accidents and the increasing awareness of environmental protection, the facility work has become even more important and urgent.

[0003] In semiconductor gas supply, the facility system is required as the operating power. The facility work of semiconductor manufacturing enterprises is a multi-attribute work that requires the support of various facility systems. Among them, the facility system that mainly affects the gas quality is the high-purity nitrogen purging system. When the gas supply equipment changes the gas source, nitrogen purging and high-pressure pressure maintenance are required. And the high-pressure pressure maintenance requires the nitrogen pressure to be higher than the pressure of the gas supply cylinder. After several times of pressure maintenance and purging, the pressure in the cylinder cannot meet the requirement of high-pressure pressure maintenance, but there is still a large amount of remaining gas in the cylinder. Existing technical equipment cannot solve the waste caused by excessive residual high-pressure gas and cannot effectively avoid human accidents during frequent manual operations.

[0004] Therefore, how to provide a high and low pressure purging gas cylinder rack that helps to improve the operation safety and gas utilization rate is a technical problem that needs to be solved urgently by those skilled in the art. Summary of the Utility Model

[0005] In view of the above research status, the utility model provides a high and low pressure purging gas cylinder rack, which helps to solve the problems of waste caused by excessive residual high-pressure gas and the inability to effectively avoid human accidents during frequent manual operations.

[0006] A high and low pressure purging gas cylinder rack provided by the utility model includes a rack body for installing at least two gas supply cylinders; it also includes: a first gas supply pipeline 3, a second gas supply pipeline and a linkage pipeline; wherein,

[0007] The two gas supply cylinders are respectively connected to the outlet end through a first gas supply pipeline 3 and a second gas supply pipeline; a first gas cylinder outlet pressure sensor, a first pneumatic valve and a first pressure regulator are sequentially arranged on the first gas supply pipeline 3 from the gas supply cylinder end to the outlet end; a second gas cylinder outlet pressure sensor, a second pneumatic valve and a second pressure regulator are sequentially arranged on the second gas supply pipeline from the gas supply cylinder end to the outlet end;

[0008] A first linkage node is arranged between the first pneumatic valve and the first pressure regulator, a second linkage node is arranged between the second pneumatic valve and the second pressure regulator, a linkage pipeline connects the first linkage node and the second linkage node, and a third pneumatic valve is arranged on the linkage pipeline.

[0009] Preferably, the two gas supply cylinders are high-pressure cylinders with a pressure greater than a specified threshold.

[0010] Preferably, the output gas pressure value of the first pressure regulator is greater than the output gas pressure value of the second pressure regulator.

[0011] Preferably, a primary filter is provided between the first gas cylinder outlet pressure sensor and the first pneumatic valve, and between the second gas cylinder outlet pressure sensor and the second pneumatic valve.

[0012] Preferably, a secondary filter is provided on the first gas supply pipeline 3 between the output end of the first pressure regulator and the outlet end; a secondary filter is provided on the second gas supply pipeline between the output end of the second pressure regulator and the outlet end.

[0013] Preferably, a gas supply end pressure sensor is provided on the first gas supply pipeline 3 between the output end of the first pressure regulator and the outlet end; a gas supply end pressure sensor is provided on the second gas supply pipeline between the output end of the second pressure regulator and the outlet end.

[0014] Preferably, manual control valves are provided at positions on the first gas supply pipeline 3 and the second gas supply pipeline close to the outlet end.

[0015] Preferably, an exhaust pipeline is further included; a first exhaust node is arranged at a position on the first gas supply pipeline 3 close to the gas outlet of the gas supply cylinder, and a second exhaust node is arranged at a position on the second gas supply pipeline close to the gas outlet of the gas supply cylinder; the first exhaust node and the second exhaust node are respectively connected to the exhaust pipeline through exhaust pneumatic valves.

[0016] Preferably, a gas supply panel is provided on the frame body; the first gas supply pipeline 3, the second gas supply pipeline and the linkage pipeline are all arranged on the gas supply panel.

[0017] Preferably, it further includes a control device, and the control device is connected to the first gas cylinder outlet pressure sensor, the second gas cylinder outlet pressure sensor, and the third pneumatic valve.

[0018] The utility model has the following beneficial effects compared with the prior art:

[0019] The first gas cylinder outlet pressure sensor and the second gas cylinder outlet pressure sensor are helpful for obtaining the residual pressure in the gas cylinder, and the third pneumatic valve is used to realize the switching of the two gas supply cylinders. When the gas in one side of the gas cylinder is insufficient, high-pressure and low-pressure gas supply can still be obtained at the outlet end, so that the gas can be fully utilized and waste can be reduced.

[0020] Through the pipeline linkage of the gas supply pipeline, it is helpful to further realize the automatic control of gas supply and closing, reduce the risk of human misoperation, and the two independent gas supply cylinders on both sides can realize stable 24-hour gas supply.

[0021] The evacuation pipeline is helpful for evacuating the residual gas in the gas supply pipeline and keeping the pipeline clean. Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present utility model, and for those of ordinary skill in the art, other drawings can be obtained according to the provided drawings without creative efforts.

[0023] Figure 1 It is the pipeline diagram of the high and low pressure purging gas cylinder rack provided by the embodiment of the present utility model;

[0024] Figure 2 It is the front view of the high and low pressure purging gas cylinder rack provided by the embodiment of the present utility model;

[0025] Figure 3 It is the side view of the high and low pressure purging gas cylinder rack provided by the embodiment of the present utility model;

[0026] Figure 4 It is the three-dimensional view of the high and low pressure purging gas cylinder rack provided by the embodiment of the present utility model. Detailed Embodiments

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0028] The following will combine with the attached Figures 1-4 to make a detailed description of the application principle of the present utility model.

[0029] A high and low pressure purging gas cylinder rack according to an embodiment of the present utility model includes a rack body 1 for installing at least two gas supply cylinders 2, as Figure 2 shown; it further includes: a first gas supply pipeline 3, a second gas supply pipeline 4 and a linkage pipeline 6; wherein, as Figure 1 shown, the two gas supply cylinders 2 are respectively connected to the outlet end 5 through the first gas supply pipeline 3 and the second gas supply pipeline 4; on the first gas supply pipeline 3, a first gas cylinder outlet pressure sensor 31, a first pneumatic valve 32 and a first pressure regulating valve 33 are sequentially arranged from the gas supply cylinder 2 end to the outlet end 5; on the second gas supply pipeline 4, a second gas cylinder outlet pressure sensor 41, a second pneumatic valve 42 and a second pressure regulating valve 43 are sequentially arranged from the gas supply cylinder 2 end to the outlet end 5; a first linkage node is arranged between the first pneumatic valve 32 and the first pressure regulating valve 33, a second linkage node is arranged between the second pneumatic valve 42 and the second pressure regulating valve 43, the linkage pipeline 6 connects the first linkage node and the second linkage node, and a third pneumatic valve 61 is arranged on the linkage pipeline 6.

[0030] Different gas supply cylinders 2 can be used to realize the output of gases with different pressures through their respective gas supply pipelines. The linkage pipeline 6 is used to realize the connection of different gas supply pipelines and the linkage of different gas supply cylinders 2, and finally supply the gas to the use point. Through the above pipeline connection method, it is helpful to realize the gas supply linkage at the multi-gas supply cylinder 2 end, and provides a technical basis for further realizing the full-automatic control of gas supply and closing.

[0031] As Figure 1 shown, HPV(A) and HPV(B) are high-pressure pneumatic valves for controlling the evacuation pipelines 7 of the left and right side gas supply cylinders 2, that is, the evacuation pneumatic valves 70. Through the opening and closing of the high-pressure pneumatic valves on the left and right sides, the residual gas in the evacuation pipelines 7 is evacuated to the PEOCESS VENT pipeline to keep the pipelines clean.

[0032] HPT(A) and HPT(B) are the outlet pressure sensors of the left and right side gas supply cylinders 2, that is, the first gas cylinder outlet pressure sensor 31 and the second gas cylinder outlet pressure sensor 41. The residual pressure in the gas supply cylinder 2 is monitored in real time through the pressure sensors, and the third pneumatic valve 61, that is, the HPV(a) high-pressure pneumatic valve, is further linked through monitoring the pressure of the gas supply cylinder 2 to realize the switching of the left and right half-side gas supply cylinders 2, so that the gas supply cylinder 2 can simultaneously meet the supply of high-pressure and low-pressure gases, and the gas can be fully utilized to reduce waste.

[0033] LPG(A) and LPG(B) are the high-pressure pneumatic valves on the left and right half sides, that is, the first pneumatic valve 32 and the second pneumatic valve 42. The supply control of high and low pressures on the left and right sides is realized through the opening and closing of the high-pressure pneumatic valves.

[0034] REG(A) and REG(B) are the left and right half pressure regulating valves, namely the first pressure regulating valve 33 and the second pressure regulating valve 43. The adjustable pressures on both sides are different. The inlet gas is 3000 PSI for both sides, and the outlet gas pressures are 5 - 150 PSI and 5 - 1500 PSI respectively, which are supplied to the left and right supply gas pipelines respectively.

[0035] In one embodiment, the frame 1 is of an open structure and is made of SS (stainless steel). The whole frame 1 is corrosion - resistant, with dimensions of 800 cm in length, 655 cm in width, and 2145 cm in height.

[0036] In one embodiment, the two gas supply cylinders 2 are high - pressure cylinders with a pressure greater than a specified threshold value. As Figure 1 shown, PN2 - 1 and PN2 - 2 are nitrogen high - pressure steel cylinders. The gas supply cylinders 2 are configured as 1 + 1 and can supply gas continuously for 24 hours. Through the settings of the first pressure regulating valve 33 and the second pressure regulating valve 43 at the left and right outlet ports, different supply gas pressures at the outlet end 5 are achieved. Conventionally, the low - pressure end supply gas is adjustable from 5 - 150 PSI, and the high - pressure end is adjustable from 0 - 1500 PSI, which can meet the requirements of the equipment for using high - pressure and low - pressure nitrogen simultaneously.

[0037] In one embodiment, the output gas pressure value of the first pressure regulating valve 33 is greater than the output gas pressure value of the second pressure regulating valve 43.

[0038] In one embodiment, a primary filter 20 is provided between the first gas cylinder outlet pressure sensor 31 and the first pneumatic valve 32, and between the second gas cylinder outlet pressure sensor 41 and the second pneumatic valve 42. As Figure 1 shown, CF(A) and CF(B) are the primary filters 20, and the filter accuracy is 0.1 μm. The solid - phase impurities existing in the gas supply cylinder 2 are preliminarily filtered through the primary filter 20.

[0039] In this embodiment, a secondary filter 40 is provided on the first gas supply pipeline 3 between the output end of the first pressure regulating valve 33 and the outlet end 5; a secondary filter 40 is provided on the second gas supply pipeline 4 between the output end of the second pressure regulating valve 43 and the outlet end 5. As Figure 1 shown, LF(A) and LF(B) are the secondary filters 40. The solid - phase impurities existing in the gas are further filtered through the high - precision filters, making the whole system cleaner and safer.

[0040] In one embodiment, a supply gas end pressure sensor 30 is provided on the first gas supply pipeline 3 between the output end of the first pressure regulating valve 33 and the outlet end 5; a supply gas end pressure sensor 30 is provided on the second gas supply pipeline 4 between the output end of the second pressure regulating valve 43 and the outlet end 5. As Figure 1As shown, LPG(A) and LPG(B) are the pressure sensors 30 at the gas supply end, which monitor the pressure at the gas supply end, can ensure the real-time pressure during the gas supply process, and ensure the safety of gas supply.

[0041] In one embodiment, manual control valves 50 are provided at the positions of the first gas supply pipeline 3 and the second gas supply pipeline 4 close to the outlet end 5. As Figure 1 shown, MIV(H) and MIV(L) are the manual control diaphragm valves at the outlet end 5, and the gas supply system can be closed by manually controlling the diaphragm valves in case of emergency.

[0042] In one embodiment, an evacuation pipeline 7 is further included; a first evacuation node is provided at the position of the first gas supply pipeline 3 close to the gas outlet of the gas supply cylinder 2, and a second evacuation node is provided at the position of the second gas supply pipeline 4 close to the gas outlet of the gas supply cylinder 2; the first evacuation node and the second evacuation node are respectively connected to the evacuation pipeline 7 through evacuation pneumatic valves 70.

[0043] In one embodiment, a gas supply panel 8 is provided on the frame body 1; the first gas supply pipeline 3, the second gas supply pipeline 4 and the linkage pipeline 6 are all arranged on the gas supply panel 8.

[0044] In this embodiment, a cylinder connector is provided on the gas supply panel 8 for connecting the gas supply cylinder 2, and the gas is supplied through the high-pressure gas in the gas supply cylinder 2. The cylinder gas outlet pressure sensor, the primary filter 20, the first pneumatic valve 32, the first pressure regulator 33, the pressure sensor 30 at the gas supply end, the secondary filter 40, the manual control valve 50 of the gas supply pipeline, and the third pneumatic valve 61 of the linkage pipeline 6 and the pneumatic valve of the evacuation pipeline 7 can all be arranged on the gas supply panel 8 for stable, efficient and safe use. By optimizing the layout of the pipelines on the gas supply panel 8, the gas supply dead angle is reduced, and the function of linkage use is optimized, so that multiple devices can be used in linkage.

[0045] In this embodiment, an air supply hole and an exhaust hole are further provided on the frame body 1. The outlet end 5 is connected to an external gas-using device through the air supply hole, and the exhaust pipeline is connected to an external exhaust device through the exhaust hole.

[0046] In one embodiment, a control device 9 is further included, and the control device 9 is connected to the first cylinder gas outlet pressure sensor 31, the second cylinder gas outlet pressure sensor 41 and the third pneumatic valve 61.

[0047] In this embodiment, the control device 9 can adopt a PLC control box. As Figures 1-3 shown, the PLC control box is erected on the top of the frame body 1. The PLC control box is also electrically connected to a power supply box.

[0048] In this embodiment, the control device 9 is further provided with a light strip 94, a buzzer 91, a display screen 92 and an emergency stop button 93. The PLC control box is electrically connected to the light strip 94, the buzzer 91, the display screen 92 and the emergency stop button 93. The light strip 94 is a three-color light strip 94, which, in combination with the buzzer 91, the display screen 92 and the emergency stop button 93, assists in performing the high-purity nitrogen purging work.

[0049] In one embodiment, the control device 9 is provided with a door lock 95.

[0050] In one embodiment, a gas cylinder bracket 11 is provided on the frame body 1 for fixing the gas supply cylinder 2. The first end of the gas cylinder bracket 11 is horizontally and perpendicularly erected on the inner side surface of the frame body 1, and its end is fixed to the outer side surface of the gas supply cylinder 2, increasing the stability of the gas supply cylinder 2 on the frame body 1.

[0051] In one embodiment, a slope is provided at the bottom edge of the frame body 1. The slope design can facilitate on-site maintenance personnel to replace the gas supply cylinder 2. Optimizing the structure of the frame body 1 enables the operator to operate the equipment more safely, stably and comfortably, and reduces the situation of misoperation by the operator.

[0052] The utility model helps to reduce the risk of human misoperation. The left and right halves are independent and can achieve stable 24-hour gas supply, ensuring the stability of production, not affecting the operation of the gas supply system in the cabinet and completing the replacement of the gas supply cylinder 2. By adopting devices such as pressure sensors, pneumatic valves and manual valves installed, it has the advantage of low cost, can realize the safe and effective operation of the equipment, and at the same time ensures the normal production of the factory and the personal safety of employees.

[0053] The above has introduced in detail a high and low pressure purging gas cylinder rack provided by the utility model. Specific examples are used in this article to elaborate on the principle and implementation manner of the utility model. The description of the above embodiments is only used to help understand the method and its core idea of the utility model; at the same time, for those of ordinary skill in the art, according to the idea of the utility model, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the utility model.

[0054] In this document, relational terms such as first and second are used solely to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Also, the terms "comprises," "comprising," or any other variation thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements that are inherent to such process, method, article, or apparatus. Without further limitation, an element qualified by the phrase "comprising a" does not exclude the presence of additional identical elements in the process, method, article, or apparatus that comprises the element.

Claims

1. A high and low pressure purging gas cylinder rack, characterized in that, It includes a frame body for installing at least two gas supply cylinders; it further includes: a first gas supply pipeline, a second gas supply pipeline and a linkage pipeline; wherein, The two gas supply cylinders are respectively connected to the outlet end through the first gas supply pipeline and the second gas supply pipeline; on the first gas supply pipeline, a first gas cylinder outlet pressure sensor, a first pneumatic valve and a first pressure regulator are sequentially arranged from the gas cylinder end to the outlet end; on the second gas supply pipeline, a second gas cylinder outlet pressure sensor, a second pneumatic valve and a second pressure regulator are sequentially arranged from the gas cylinder end to the outlet end; A first linkage node is arranged between the first pneumatic valve and the first pressure regulator, a second linkage node is arranged between the second pneumatic valve and the second pressure regulator, the linkage pipeline connects the first linkage node and the second linkage node, and a third pneumatic valve is arranged on the linkage pipeline.

2. The high and low pressure purging gas cylinder rack according to claim 1, wherein The two gas supply cylinders are high-pressure cylinders with a pressure greater than a specified threshold.

3. The high and low pressure purging gas cylinder rack according to claim 1, characterized in that, The output gas pressure value of the first pressure regulator is greater than the output gas pressure value of the second pressure regulator.

4. A high and low pressure purging gas cylinder rack according to claim 1, characterized in that, Primary filters are provided between the first gas cylinder outlet pressure sensor and the first pneumatic valve, and between the second gas cylinder outlet pressure sensor and the second pneumatic valve.

5. A high and low pressure purging gas cylinder rack according to claim 4, characterized in that, A secondary filter is provided on the first gas supply pipeline between the output end of the first pressure regulator and the outlet end; a secondary filter is provided on the second gas supply pipeline between the output end of the second pressure regulator and the outlet end.

6. The high and low pressure purging gas cylinder rack according to claim 1, characterized in that, A supply end pressure sensor is provided on the first gas supply pipeline between the output end of the first pressure regulator and the outlet end; a supply end pressure sensor is provided on the second gas supply pipeline between the output end of the second pressure regulator and the outlet end.

7. The high and low pressure purging gas cylinder rack according to claim 1, wherein, Manual control valves are provided at positions of the first gas supply pipeline and the second gas supply pipeline close to the outlet end.

8. A high and low pressure purging gas cylinder rack according to claim 1, characterized in that, It further includes an evacuation pipeline; a first evacuation node is arranged at a position of the first gas supply pipeline close to the gas outlet of the gas supply cylinder, and a second evacuation node is arranged at a position of the second gas supply pipeline close to the gas outlet of the gas supply cylinder; the first evacuation node and the second evacuation node are respectively connected to the evacuation pipeline through evacuation pneumatic valves.

9. The high and low pressure purging gas cylinder rack according to claim 1, characterized in that, A gas supply panel is provided on the frame body; the first gas supply pipeline, the second gas supply pipeline and the linkage pipeline are all arranged on the gas supply panel.

10. A high and low pressure purging gas cylinder rack according to claim 1, characterized in that, It further includes a control device, and the control device is connected to the first gas cylinder outlet pressure sensor, the second gas cylinder outlet pressure sensor and the third pneumatic valve.

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