Block type magnetron and coating equipment

Abstract

The utility model provides a block type magnetron and coating equipment, belonging to the semiconductor production equipment technical field, the block type magnetron comprises a plurality of magnetic poles and an insulation structure, a first spacing area is arranged between two adjacent magnetic poles, each magnetic pole is equally divided into a plurality of magnetic blocks, and the insulation structure is arranged between the plurality of magnetic blocks. A second spacer region is arranged between every two adjacent magnetic blocks; and the insulating structure is arranged in the first spacer region and the second spacer region. A first interval area is arranged between every two adjacent magnetic poles, the same magnetic pole is also internally divided into the magnetic blocks which are distributed at intervals, the insulating structures are used for performing separation and insulation, so that the magnetic blocks have good insulativity, when the magnetron performs high-speed scanning, due to the fact that the size of a single magnetic block is small, only tiny vortex current can be generated, and the magnetic blocks can be separated and insulated at intervals. The magnetic pole can be effectively prevented from generating high temperature, so that the demagnetization condition is avoided, and the utilization rate of the target material and the uniformity of a corrosion area on the target material can be improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor production equipment, and particularly relates to a block-type magnetron and film coating equipment. Background Art

[0002] With the continuous development of semiconductor technology, the wafer foundry process is shrinking and Moore's Law is approaching its limit. Advanced packaging is an inevitable choice in the post-Moore era. Advanced packaging technology is a key semiconductor manufacturing technology that aims to improve the performance, power efficiency, reliability and size of integrated circuits (ICs) to meet the needs of the growing electronic equipment market. Common types include flip chip, system-level packaging, 2.5D and 3D packaging, WLP, POP, etc.

[0003] In advanced packaging technology, sputtering technology (or physical vapor deposition technology PVD technology) is mainly used to deposit different metal layers and related material layers. In the relevant existing technology, sputtering technology is generally magnetron sputtering technology, which has a fast deposition rate and high deposition uniformity. This deposition technology can be used to evenly deposit copper and its barrier materials on the sides and bottom of the through hole. However, due to the high magnetic field intensity and fast scanning speed in the magnetron sputtering equipment, the magnetic poles inside the magnetron will generate large eddy currents, causing the upper guide rails to be charged. Utility Model Content

[0004] The utility model aims to solve at least one of the above-mentioned technical problems existing in the prior art. To this end, in a first aspect, the utility model provides a block-type magnetron, which can avoid the situation where the guide rail is electrified.

[0005] In a second aspect, the utility model provides a coating device using the above-mentioned segmented magnetron.

[0006] According to the first aspect of the utility model, a block-type magnetron includes a magnetic pole, a first insulating block and a guide rail connecting assembly connected in sequence, and the guide rail connecting assembly includes: an adapter plate, the adapter plate is connected to the end of the first insulating block away from the magnetic pole; a plurality of padding blocks, the padding blocks are connected to the end of the adapter plate away from the magnetic pole; a first guide rail mounting plate, the first guide rail mounting plate is connected to the end of the adapter plate away from the magnetic pole; a second guide rail mounting plate, the second guide rail mounting plate is connected to the ends of the plurality of padding blocks; wherein a guide rail mounting space is defined between the first guide rail mounting plate and the second guide rail mounting plate for guide rail installation, and the magnetic pole and the guide rail connecting assembly are insulated by the first insulating block.

[0007] The segmented magnetron according to the embodiment of the present utility model has at least the following beneficial effects: The segmented magnetron in this embodiment utilizes the spacer block, the first guide rail mounting plate, and the second guide rail mounting plate to jointly define a guide rail mounting space, which can effectively ensure the installation stability of the magnetron when assembled on the guide rail. And through the first insulating block, the insulation between the magnetic pole and the guide rail connection assembly can be effectively ensured, thereby avoiding the charging of the guide rail in the case of the generation of eddy currents in the magnetic pole. Further, by setting the spacer block, the height of the magnetic pole can be increased when the magnetron is installed in related equipment, improving the flexibility of the structural setting.

[0008] According to some embodiments of the present utility model, the segmented magnetron further includes a mounting block, the magnetic pole is connected to the mounting block, and is connected to the first insulating block through the mounting block.

[0009] According to some embodiments of the present utility model, the adapter plate is provided with a first relief opening, the first insulating block is connected to the mounting block by a first screw, and the head of the first screw is located within the first relief opening.

[0010] According to some embodiments of the present utility model, the guide rail connection assembly further includes a second insulating block, the first guide rail mounting plate is provided with a second relief opening that completely exposes the first screw, the second insulating block is disposed in the second relief opening, and the second insulating block completely covers the head of the first screw.

[0011] According to some embodiments of the present utility model, the segmented magnetron includes a plurality of the magnetic poles, the plurality of magnetic poles are coaxially distributed, there is a first spacer area between two adjacent magnetic poles, each magnetic pole is equally divided into a plurality of magnetic blocks around the coaxial distribution center, and there is a second spacer area between two adjacent magnetic blocks; the segmented magnetron further includes an insulating structure, and the insulating structure is disposed in the first spacer area and the second spacer area.

[0012] According to some embodiments of the present utility model, the width of the first spacer area is equal to the width of the second spacer area.

[0013] According to some embodiments of the present utility model, the magnetic pole includes:

[0014] An inner magnetic pole, the inner magnetic pole includes a plurality of inner magnetic blocks, and the inner magnetic blocks are distributed in the same circumference;

[0015] A middle magnetic pole, the middle magnetic pole includes a plurality of middle magnetic blocks, and the middle magnetic blocks are distributed in the same circumference outside the inner magnetic pole;

[0016] An outer magnetic pole, the outer magnetic pole includes a plurality of outer magnetic blocks, and the outer magnetic blocks are distributed in the same circumference outside the middle magnetic pole;

[0017] Among them, the number of the inner magnetic poles, the middle magnetic blocks, and the outer magnetic blocks is the same, and along the radial direction, the inner magnetic poles, the middle magnetic blocks, and the outer magnetic blocks are aligned with each other.

[0018] According to some embodiments of the present invention, the magnetic field direction of the inner magnetic pole is opposite to the magnetic field directions of the middle magnetic pole and the outer magnetic poles.

[0019] According to some embodiments of the present invention, one end of the inner magnetic pole close to the target is an S pole, and one end of the middle magnetic pole and the outer magnetic poles close to the target is an N pole.

[0020] The coating device according to the second aspect embodiment of the present invention applies the segmented magnetron of any of the above embodiments.

[0021] The coating device according to the embodiment of the present invention has at least the following beneficial effects: By applying the above-mentioned segmented magnetron, the coating device of this embodiment uses the spacer block, the first guide rail mounting plate, and the second guide rail mounting plate to jointly define the guide rail mounting space. When assembled on the guide rail, the installation stability of the magnetron can be effectively ensured. And through the first insulating block, the insulation between the magnetic pole and the guide rail connection assembly can be effectively ensured, thereby avoiding the guide rail from being electrified in the case of vortex current generated in the magnetic pole. Further, by setting the spacer block, the height of the magnetic pole can be increased when the magnetron is installed in the relevant equipment, improving the flexibility of the structural setting.

[0022] Some additional aspects and advantages of the present invention will be given in the following description, some additional aspects and advantages will become obvious from the following description, or be understood through the practice of the present invention. Description of the Drawings

[0023] The following further describes the present invention in conjunction with the drawings and embodiments, where:

[0024] Figure 1 It is a structural cross-sectional view of a segmented magnetron in the present invention;

[0025] Figure 2 It is a schematic diagram of a setting of the insulation structure of a segmented magnetron in the present invention;

[0026] Figure 3 It is a schematic diagram of a setting of the magnetic pole direction of a segmented magnetron in the present invention;

[0027] Figure 4 It is a schematic diagram of a setting of the magnetic pole arrangement of a segmented magnetron in the present invention;

[0028] Figure 5It is an axonometric structure schematic diagram of a segmented magnetron in the present utility model;

[0029] Figure 6 It is a structural decomposition schematic diagram of a segmented magnetron in the present utility model.

[0030] In the figure:

[0031] 100 - magnetic pole, 101 - magnetic block, 102 - insulating structure, 103 - inner magnetic pole, 104 - middle magnetic pole, 105 - outer magnetic pole;

[0032] 1031 - inner magnetic block, 1041 - middle magnetic block, 1051 - outer magnetic block;

[0033] 200 - mounting block;

[0034] 300 - first insulating block, 301 - first screw, 302 - protruding part;

[0035] 400 - adapter plate, 401 - first relief opening;

[0036] 500 - spacer block;

[0037] 600 - second guide rail mounting plate;

[0038] 700 - second insulating block;

[0039] 800 - first guide rail mounting plate, 801 - second relief opening. Specific embodiments

[0040] The following details the embodiments of the present utility model. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0041] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as up and down, etc., is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.

[0042] In the description of the present utility model, "a plurality of" means more than two. If there is a description of first and second, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence of the indicated technical features.

[0043] In the description of the present utility model, unless otherwise clearly defined, terms such as "set", "install", and "connect" shall be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present utility model in combination with the specific content of the technical solution.

[0044] With the continuous development of semiconductor technology, the wafer foundry process is constantly shrinking and Moore's Law is approaching its limit. Advanced packaging is an inevitable choice in the post-Moore era. Advanced packaging technology is a key semiconductor manufacturing technology aimed at improving the performance, power consumption efficiency, reliability, and size of integrated circuits (ICs) to meet the needs of the growing electronic device market. Its common types include flip chip, system-in-package, 2.5D and 3D packaging, wafer-level packaging (WLP), package-on-package (POP), etc.

[0045] In advanced packaging technology, sputtering technology (or physical vapor deposition technology, PVD technology) is mainly used to deposit different metal layers and related material layers. In the relevant prior art, the sputtering technology is generally magnetron sputtering technology, which has a fast deposition rate and high deposition uniformity. With this deposition technology, copper and its barrier materials can be uniformly deposited on the side and bottom of the through holes. However, due to the large magnetic field strength and fast scanning movement speed in the magnetron sputtering equipment, large eddy currents will be generated in the magnetic poles inside the magnetron, resulting in a large amount of heat generation. The magnetic poles will demagnetize at high temperatures, thereby reducing the utilization rate of the target material and the uniformity of the corrosion area on the target material.

[0046] Therefore, the present utility model provides a segmented magnetron, which can avoid generating excessive eddy currents during high-speed movement, thereby suppressing heat generation and improving the utilization rate of the target material and the uniformity of the corrosion area.

[0047] Refer to Figures 1 to 4, A segmented magnetron according to this embodiment includes three magnetic poles 100 distributed coaxially. The three magnetic poles 100 are sleeved and arranged in sequence from the inside out. The innermost magnetic pole 100 can be set as an annular structure or a circular structure, while the outer magnetic poles 100 are annular structures to achieve coaxial sleeving. A spacing is maintained between every two adjacent magnetic poles 100 to form a first interval region. Moreover, each magnetic pole 100 is equally divided into a plurality of magnetic blocks 101 around its own center, that is, each magnetic pole 100 is formed by arranging a plurality of magnetic blocks 101 of the same size in a circumferential arrangement. Inside the same magnetic pole 100, a spacing is maintained between two adjacent magnetic blocks 101 to form a second interval region. At the same time, the segmented magnetron of this embodiment is also provided with an insulating structure 102 in the first interval region and the second interval region. It can be understood that the segmented magnetron of this embodiment can effectively ensure the magnetic field strength of magnetron sputtering by coaxially distributing a plurality of magnetic poles 100. At the same time, there is a first interval region between two adjacent magnetic poles 100, and the same magnetic pole 100 is also divided into magnet blocks 101 distributed at intervals, and the insulating structure 102 is used for separation and insulation, so that there is good insulation between the respective magnetic blocks 101. When the magnetron is scanning at high speed, since the volume of a single magnetic block 101 is small, only extremely small eddy currents will be generated, which can effectively prevent the magnetic poles 100 from generating high temperatures and further avoid the occurrence of demagnetization, and can improve the utilization rate of the target material and the uniformity of the corrosion area on the target material.

[0048] It should be noted that in actual applications, those skilled in the art can set other numbers of magnetic poles 100 according to needs, not limited to three.

[0049] Refer to Figure 4 , In some embodiments of the present invention, the width of the first interval region is equal to the width of the second interval region, that is, the spacing between two adjacent magnetic poles 100 is the same as the spacing between two adjacent magnetic blocks 101 inside the same magnetic pole 100. It can be understood that the magnetic field is provided by a plurality of magnetic blocks 101 distributed in a circumferential array. The spacing between two adjacent magnetic poles 100 is essentially the spacing between two adjacent magnetic blocks 101 in the radial direction. By controlling the width of the first interval region to be equal to the width of the second interval region in this embodiment, the spacing between any two adjacent magnetic blocks 101 is equal, which is convenient for setting the insulating structure 102. And it is beneficial to ensure the magnetic field strength and control the overall volume of the magnetron.

[0050] Specifically, refer to Figure 4, the three magnetic poles 100 are, from the inside out, the inner magnetic pole 103, the middle magnetic pole 104, and the outer magnetic pole 105. The inner magnetic pole 103 includes four inner magnetic blocks 1031. The inner magnetic pole 103 has a sector structure with a central angle of 90°. The four inner magnetic blocks 1031 are distributed on the same circumference and are pieced together to form a circular inner magnetic pole 103. The middle magnetic pole 104 includes four middle magnetic blocks 1041. The middle magnetic blocks 1041 have a semi-circular ring structure with a central angle of 90°. The four middle magnetic blocks 1041 are distributed on the same circumference outside the inner magnetic pole 103. The outer magnetic pole 105 includes four outer magnetic blocks 1051. The outer magnetic blocks 1051 have a semi-circular ring structure with a central angle of 90°. The four outer magnetic blocks 1051 are distributed on the same circumference outside the middle magnetic pole 104. The inner magnetic blocks 1031, the middle magnetic blocks 1041, and the outer magnetic blocks 1051 are aligned with each other, so that the second spacer regions of the respective magnetic poles 100 are aligned with each other. With the structural arrangement of this embodiment, three magnetic poles 100 are coaxially distributed to form a magnetic field, and each magnetic pole 100 is divided into four magnetic blocks 101, which can reduce the size of a single magnetic body while ensuring the magnetic field strength. And it can take into account the structural composition of the magnetron at the same time, facilitating production and assembly as well as the setting of the insulating structure 102.

[0051] It should be noted that the specific number of magnetic blocks 101 divided for the inner magnetic pole 103, the middle magnetic pole 104, and the outer magnetic pole 105 does not need to be the same, as long as each magnetic pole 100 is equally divided into multiple magnetic blocks 101. For example, the inner magnetic pole 103 is equally divided into three blocks, the middle magnetic pole 104 is equally divided into four blocks, and the outer magnetic pole 105 is equally divided into five blocks. The equal division of the magnetic pole 100 into multiple magnetic blocks 101 can ensure that the magnetic induction lines of a single magnetic pole 100 are uniform.

[0052] Referring to Figure 3 , in some embodiments of the present invention, the magnetic field direction of the inner magnetic pole 103 is opposite to the magnetic field directions of the middle magnetic pole 104 and the outer magnetic pole 105, so as to form a uniform magnetic field between the inner magnetic pole 103 and the middle magnetic pole 104, and between the inner magnetic pole 103 and the outer magnetic pole 105. Specifically, the end of the inner magnetic pole 103 close to the target is the S pole, and the ends of the middle magnetic pole 104 and the outer magnetic pole 105 close to the target are the N poles. And, along the radial direction of the three, the overall thickness of the middle magnetic pole 104 and the outer magnetic pole 105 is the same as or close to the radius size of the inner magnetic pole 103. With the structural arrangement of this embodiment, the magnetic field direction where the target is located is from the circumferential N pole to the central S pole, and the magnetic pole 100 directions of the middle magnetic pole 104 and the outer magnetic pole 105 are the same, and the thickness matches that of the inner magnetic pole 103. Overall, it can be regarded as two magnets with matching sizes and opposite magnetic poles 100, and can form a magnetic field with uniform strength.

[0053] It is understandable that the insulation structure 102 is made of insulating materials. During actual production, it can be prefabricated according to the sizes and arrangements of the inner magnetic block 1031, the middle magnetic block 1041, and the outer magnetic block 1051, and according to the characteristics of the insulating materials used. Then, it can be assembled. For example, the insulation structure 102 can be made by injection molding and then assembled and fixed with the inner magnetic block 1031, the middle magnetic block 1041, and the outer magnetic block 1051. It is also possible to inject insulating materials into the gaps between the inner magnetic pole 103, the middle magnetic pole 104, and the outer magnetic pole 105 after they are installed and fixed. Or an insulating layer can be coated on each magnetic block 101 to form the overall insulation structure 102 after assembly. Those skilled in the art can flexibly set the specific form of the insulation structure 102 according to needs.

[0054] Referring to Figure 3 、 Figure 5 and Figure 6 In some embodiments of the present invention, the segmented magnetron further includes a mounting block 200. The inner magnetic pole 103, the middle magnetic pole 104, and the outer magnetic pole 105 are all mounted on the mounting block 200 to support the entire magnetic field source through the mounting block 200. The insulation structure 102 simultaneously covers one end of the magnetic pole 100 facing away from the mounting block 200. It is understandable that the insulation structure 102 in this embodiment integrally coats the inner magnetic block 1031, the middle magnetic block 1041, and the outer magnetic block 1051, which can not only achieve insulation separation between the magnetic blocks 101 but also protect the magnetic blocks 101. During actual production, after the inner magnetic block 1031, the middle magnetic block 1041, and the outer magnetic block 1051 are mounted and fixed to the mounting block 200, insulating materials can be integrally poured to form the insulation structure 102, eliminating the need to design connectors for the insulation structure 102 alone, which is beneficial to simplifying the structural composition and improving the assembly efficiency of the magnetron. During installation, the inner magnetic block 1031, the middle magnetic block 1041, and the outer magnetic block 1051 can be directly fixedly connected to the mounting block 200 by passing through screws.

[0055] The insulation structure 102 can specifically use high - molecular insulating materials, such as PEEK. PEEK has excellent mechanical properties, good self - lubricity, chemical corrosion resistance, and outstanding performance in terms of flame retardancy, peel resistance, wear resistance, etc., and can well meet the working environment and usage requirements of the magnetron. Of course, those skilled in the art can also use other engineering materials according to needs, which will not be listed one by one here.

[0056] In some magnetron sputtering devices, it is necessary to control the rapid movement and scanning of the magnetron, that is, it is necessary to control the movement of the magnetron along the guide rail. In view of this, in some embodiments of the present invention, the segmented magnetron further includes a guide rail connection component for mating with the guide rail through the guide rail connection component.

[0057] Referring to Figure 5 andFigure 6 Specifically, the guide rail connection assembly includes an adapter plate 400, a padding block 500, a first guide rail mounting plate 800 and a second guide rail mounting plate 600, wherein the adapter plate 400 is arranged at one end of the mounting block 200 away from the magnetic pole 100, and two padding blocks 500 are provided, and the two padding blocks 500 are arranged at intervals at one end of the adapter plate 400 away from the mounting block 200, and the two padding blocks 500 are symmetrical about the distribution center of the magnetic pole 100. The first guide rail mounting plate 800 is connected to one end of the adapter plate 400 away from the mounting block 200, and is located between the two padding blocks 500. The second guide rail mounting plate 600 is connected to the ends of the two padding blocks 500, so as to remain opposite to the first guide rail mounting plate 800. The spacing between the first guide rail mounting plate 800 and the second guide rail mounting plate 600 formed by the padding blocks 500 defines a guide rail installation space for guide rail installation. By adopting the structural setting of this embodiment, the guide rail installation space is defined by the spacer block 500, the first guide rail installation plate 800, and the second guide rail installation plate 600, and the installation stability of the magnetron can be effectively ensured when it is assembled on the guide rail. In addition, by using the spacer block 500, the height of the magnetic pole 100 can be increased when the magnetron is installed in the relevant equipment, so that it is close to the target material, or the distance between the guide rail and the magnetic pole 100 is increased, which is convenient for the arrangement of other components and more flexible.

[0058] To avoid the rails becoming electrically charged, continue to refer to Figure 5 and Figure 6 In some embodiments of the utility model, the guide rail connection assembly further includes a first insulating block 300, which is disposed between the mounting block 200 and the adapter plate 400. Specifically, a first clearance opening 401 is disposed in the central area of the adapter plate 400, and the first insulating block 300 is disposed at one end of the adapter plate 400 close to the mounting block 200. The first insulating block 300 has a protrusion 302 fitted in the first clearance opening 401, and the end of the protrusion 302 is nearly flush with the other end surface of the adapter plate 400. The end of the first insulating block 300 facing away from the adapter plate 400 is in contact with the mounting block 200, so that a certain distance is maintained between the mounting block 200 and the adapter plate 400 to achieve insulation. The first insulating block 300 is connected to the mounting block 200 by passing a first screw 301 through the protrusion 302, and screws are also disposed between the first insulating block 300 and the adapter plate 400 for connection and fixing. The head of the first screw 301 is located in the first clearance opening 401. By adopting the structural arrangement of this embodiment, the first insulating block 300 can be used to separate the mounting block 200 and the adapter plate 400 to achieve insulation between the two, thereby preventing the adapter plate 400 from being charged.

[0059] Furthermore, considering that the first guide rail mounting plate 800 is opposite to the distribution center of the magnetic pole 100, in order to prevent the first guide rail mounting plate 800 from being charged through the first screw 301, continue to refer to Figure 5 and Figure 6 , in some embodiments of the present invention, the guide rail connection assembly further includes a second insulating block 700. Specifically, a second relief opening 801 is provided in the central region of the first guide rail mounting plate 800, and the size of the second relief opening 801 is such that the first screw 301 is completely exposed. The second insulating block 700 is disposed in the second relief opening 801 so as to completely cover the head of the first screw 301. Among them, four first screws 301 are symmetrically arranged around the distribution center of the magnetic pole 100, and the second relief opening 801 and the second insulating block 700 have a circular contour that completely covers the first screw 301. The second screw is located at the distribution center of the magnetic pole 100 and passes through the second insulating block 700 to connect the first insulating block 300. With the structural arrangement of this embodiment, the end of the first screw 301 is covered by the second insulating block 700, avoiding the possible situation that the first guide rail mounting plate 800 is charged due to the first screw 301, which is beneficial to ensuring the normal operation and service life of the equipment.

[0060] Refer to Figures 1 to 6, in some embodiments of the present utility model, the segmented magnetron includes a mounting block 200, a magnetic field source, and a guide rail connection assembly. The magnetic field source and the guide rail connection assembly are located at opposite ends of the mounting block 200. The magnetic field source includes an inner magnetic pole 103, a middle magnetic pole 104, and an outer magnetic pole 105 that are concentrically distributed from the inside out. A gap of 0.5 mm is maintained between the inner magnetic pole 103, the middle magnetic pole 104, and the outer magnetic pole 105. The inner magnetic pole 103, the middle magnetic pole 104, and the outer magnetic pole 105 are each equally divided into four magnetic blocks 101, and a gap of 0.5 mm is maintained between two adjacent magnetic blocks 101 of the same magnetic pole 100. Each magnetic block 101 is fixed to the mounting block 200 by screws. At the same time, the segmented magnetron encapsulates the magnetic field source with epoxy resin, so that the above-mentioned gaps and the ends of the magnetic blocks 101 facing away from the mounting block 200 are all wrapped by epoxy resin. The guide rail connection assembly includes a first insulating block 300, a second insulating block 700, a transfer plate 400, a spacer block 500, a first guide rail mounting plate 800, and a second guide rail mounting plate 600. The first insulating block 300 is attached to the end of the mounting block 200 facing away from the magnetic pole 100. A convex portion 302 in the form of a frustum of a cone is provided in the central region of the end of the first insulating block 300 facing away from the mounting block 200. The convex portion 302 is connected to the mounting block 200 by four symmetrically distributed first screws 301. The transfer plate 400 is provided with a first relief opening 401 that matches the convex portion 302 and is sleeved on the convex portion 302, so as to be attached to the first insulating block 300. The transfer plate 400 and the first insulating block 300 are fixedly connected by a plurality of screws. Two spacer blocks 500 are provided and are arranged on both sides of the first relief opening 401 on the transfer plate 400. The second guide rail mounting plate 600 is installed between the ends of the two spacer blocks 500 and is spaced from the transfer plate 400. The first guide rail mounting plate 800 is attached to the transfer plate 400 and is located between the two spacer blocks 500, so as to be opposite to the second guide rail mounting plate 600. A second relief opening 801 is provided in the center of the first guide rail mounting plate 800. The size of the second relief opening 801 is larger than the diameter of the distribution circle of the four first screws 301, so as to completely expose the four first screws 301. The second insulating block 700 is arranged in the second relief opening 801, so as to cover the heads of the four first screws 301.

[0061] It can be understood that for the segmented magnetron with the structure set in this embodiment, the size of a single magnetic block 101 is small, which can effectively avoid generating excessive eddy currents, so the heat generation is small, which is beneficial to ensuring the uniformity of the corrosion area of the target. At the same time, the possibility of the guide rail being electrified can be completely avoided, which is beneficial to ensuring the smooth progress of safe production.

[0062] In addition, the present utility model also provides a coating device, which is applied with the segmented magnetron of any one of the above embodiments. By applying the above segmented magnetron, the coating device of this embodiment can ensure the magnetic field strength of magnetron sputtering by using a plurality of coaxially distributed magnetic poles 100. At the same time, there is a first spacer region between two adjacent magnetic poles 100, and the same magnetic pole 100 is also divided into magnet blocks 101 distributed at intervals, which are separated and insulated by the insulating structure 102, so that there is good insulation between the magnet blocks 101. When the magnetron is scanning at high speed, since the volume of a single magnet block 101 is small, only extremely small eddy currents will be generated, which can effectively prevent the magnetic poles 100 from generating high temperature, thereby avoiding the occurrence of demagnetization, and improving the utilization rate of the target material and the uniformity of the corrosion area on the target material.

[0063] The present utility model has been described in detail above in conjunction with the embodiments, but the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art to which the present utility model pertains, various changes can be made without departing from the gist of the present utility model.

Claims

1. A block-type magnetron, characterized in that, It includes a magnetic pole, a first insulating block and a guide rail connection assembly connected in sequence. The guide rail connection assembly includes: An adapter plate, which is connected to one end of the first insulating block facing away from the magnetic pole; A plurality of spacer blocks, which are connected to one end of the adapter plate facing away from the magnetic pole; A first guide rail mounting plate, which is connected to one end of the adapter plate facing away from the magnetic pole; A second guide rail mounting plate, which is connected to the ends of a plurality of the spacer blocks; Wherein, a guide rail mounting space is defined between the first guide rail mounting plate and the second guide rail mounting plate for mounting the guide rail, and insulation is maintained between the magnetic pole and the guide rail connection assembly through the first insulating block.

2. The segmented magnetron according to claim 1, wherein The sectional magnetron further includes a mounting block, the magnetic pole is connected to the mounting block, and the first insulating block is connected through the mounting block.

3. The segmented magnetron according to claim 2, wherein The adapter plate is provided with a first relief opening, the first insulating block is connected to the mounting block by a first screw, and the head of the first screw is located in the first relief opening.

4. The segmented magnetron according to claim 3, wherein, The guide rail connection assembly further includes a second insulating block. The first guide rail mounting plate is provided with a second relief opening that completely exposes the first screw. The second insulating block is arranged in the second relief opening, and the second insulating block completely covers the head of the first screw.

5. The segmented magnetron according to claim 1, characterized in that, The sectional magnetron includes a plurality of the magnetic poles, the plurality of magnetic poles are coaxially distributed, there is a first interval area between two adjacent magnetic poles, each magnetic pole is equally divided into a plurality of magnetic blocks around the coaxial distribution center, and there is a second interval area between two adjacent magnetic blocks; the sectional magnetron further includes an insulating structure, and the insulating structure is arranged in the first interval area and the second interval area.

6. The segmented magnetron according to claim 5, characterized in that, The widths of the first interval area and the second interval area are equal.

7. The segmented magnetron according to claim 5, wherein, The magnetic pole includes: An inner magnetic pole, the inner magnetic pole includes a plurality of inner magnetic blocks, and the inner magnetic blocks are distributed in the same circumference; A middle magnetic pole, the middle magnetic pole includes a plurality of middle magnetic blocks, and the middle magnetic blocks are distributed in the same circumference outside the inner magnetic pole; An outer magnetic pole, the outer magnetic pole includes a plurality of outer magnetic blocks, and the outer magnetic blocks are distributed in the same circumference outside the middle magnetic pole; Wherein, the number of the inner magnetic poles, the middle magnetic blocks and the outer magnetic blocks is the same, and along the radial direction, the inner magnetic poles, the middle magnetic blocks and the outer magnetic blocks are aligned with each other.

8. The segmented magnetron according to claim 7, wherein The magnetic field direction of the inner magnetic pole is opposite to that of the middle magnetic pole and the outer magnetic pole.

9. The segmented magnetron according to claim 8, wherein, One end of the inner magnetic pole close to the target is the S pole, and one ends of the middle magnetic pole and the outer magnetic pole close to the target are the N poles.

10. A coating device, characterized in that, The sectional magnetron according to any one of claims 1 to 9 is applied.

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