Dust-containing waste gas treatment system

Through the dust-containing waste gas treatment system of the cyclone and baffle defogging device combined with the water-washing and spraying system, the problem of pipeline blockage during the silicon wafer cutting process is solved, automated maintenance and efficient dust removal are achieved, maintenance costs are reduced, and the stable operation of the equipment is ensured.

CN223144347UActive Publication Date: 2025-07-25SHANGHAI KELDE TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202422066875.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-26
Publication Date
2025-07-25
Estimated Expiration
2034-08-26

AI Technical Summary

Technical Problem

In the prior art, dust-containing waste gas generated by cutting silicon wafers is easily blocked in the pipeline, resulting in a decrease in exhaust effect, requiring frequent manual cleaning, increasing maintenance costs and affecting the process flow, and existing equipment cannot effectively reduce the probability of dust accumulation in pipelines.

Method used

Design a dust-containing waste gas treatment system, including dust removal components and defogging components, pretreatment using cyclones and baffle defogging devices, and automatic cleaning with water washing and spraying systems to reduce dust deposition and achieve automated maintenance.

Benefits of technology

It effectively reduces the frequency of pipeline blockage, reduces manual maintenance costs, ensures the normal operation of the equipment, and reduces economic losses. The equipment is compact in structure, flexible in installation, and easy to manage.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model discloses a dust-containing waste gas treatment system which comprises a dust removal assembly and a demisting assembly communicated with the dust removal assembly, the demisting assembly comprises a low-flow-speed air pipe, an air inlet reducing pipe, an air inlet increasing pipe and a baffle plate demister, wherein the air inlet reducing pipe and the air inlet increasing pipe are fixedly connected to the two ends of the low-flow-speed air pipe respectively, and the baffle plate demister is fixedly connected into the low-flow-speed air pipe. A liquid discharging pipe is fixedly connected to the position, located on the baffle plate demister, of the low-flow-speed air pipe; a washing spraying head is placed in the end, close to the air inlet reducing pipe, of the low-flow-speed air pipe, the washing spraying head is fixedly connected with a washing spraying pipe, and the washing spraying pipe extends out of the low-flow-speed air pipe. According to the dust-containing air pretreatment equipment, the structure is compact, the installation is flexible, the manufacturing and the maintenance are convenient, and the two requirements of dust removal and moisture removal can be met.
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Description

Technical Field

[0001] The utility model relates to the technical field of waste gas treatment, and particularly relates to a dust-containing waste gas treatment system. Background Technique

[0002] At present, the main material of solar photovoltaic cells in the world is silicon-based material, and silicon-based photovoltaic cells account for more than 85% of the world's photovoltaic cells. Therefore, as the front-end product of the solar photovoltaic industry, crystalline silicon wafers play an important role in the entire photovoltaic industrial chain. Wafer cutting is a key part of the manufacturing process of solar photovoltaic cells. This process is used to cut a single-crystalline silicon block or a polycrystalline silicon block after squaring into very thin silicon wafers using a wire saw. During the cutting process, a large amount of waste gas is generated, including components such as silicon powder, silicon oxide, and metal powder, which need to be connected to a special dust removal device for treatment. Since cutting fluid is inevitably mixed into the waste gas, the wet mortar is extremely likely to adhere to the inner wall of the exhaust pipe during transportation in the pipeline, resulting in pipeline blockage over time. On the one hand, the pipeline blockage leads to a decrease in the exhaust effect; on the other hand, it is necessary to clean the pipeline manually at regular intervals, which is troublesome, time-consuming, and increases the maintenance cost. The pipeline is usually set several meters above the ground in the factory building, making manual operation difficult. Moreover, during the period of manual cleaning, the equipment needs to stop running until the cleaning is completed and reinstalled before the equipment can be put into use, affecting the normal progress of the process flow. Therefore, it is very necessary to design a device that can reduce dust deposition in the pipeline and slow down pipeline blockage during the silicon material slicing stage.

[0003] Currently, when slicing silicon wafers, it is mostly considered to connect the dust-containing air in the slices to an outdoor dust removal device for treatment. The pipeline connecting the slicing machine and the outdoor dust removal device will be appropriately sloped and provided with a liquid leakage point for discharging part of the condensed water in the pipeline. Observation windows will be set at intervals in the pipeline to detect the flow situation in the pipeline. When the dust accumulation is too much, the pipeline will be removed for manual cleaning. This operation can ensure the safe operation of the system and avoid equipment damage caused by pipeline blockage in the system. However, it cannot directly reduce the probability of pipeline dust accumulation and reduce the frequency of manual dust cleaning. The maintenance cost of the system is relatively high, delaying the normal operation of the system and affecting the output of the factory. Content of the Utility Model

[0004] Aiming at the deficiencies existing in the prior art, the purpose of the present utility model is to provide a dust-containing waste gas treatment system, a dust-containing air pretreatment device with a compact structure, flexible installation, and easy manufacturing and maintenance, which can meet the two major requirements of dust removal and water vapor removal. To achieve the above-mentioned purpose and other advantages of the present utility model, a dust-containing waste gas treatment system is provided, including:

[0005] A dust removal component and a demisting component communicated with the dust removal component;

[0006] Among them, the demisting component includes a low-flow air duct, an intake air reducing pipe and an intake air expanding pipe respectively fixed at both ends of the low-flow air duct, and a baffle demister fixed in the low-flow air duct;

[0007] A drain pipe is fixed at the position of the low-flow air duct where the baffle demister is located;

[0008] A water washing spray head is placed inside one end of the low-flow air duct close to the intake air reducing pipe. The water washing spray head is fixed with a water washing spray pipe, and the water washing spray pipe extends out from the low-flow air duct;

[0009] An electric valve is fixed on the water washing spray pipe;

[0010] A differential pressure sensor is fixed on the low-flow air duct.

[0011] Preferably, the baffle demister is inclined in the low-flow air duct, and a drain pipe is installed at the lowest position of the baffle demister in the low-flow air duct.

[0012] Preferably, one end of the drain pipe is fixed with a third intake air pipe, and a wind valve is fixed on the third intake air pipe.

[0013] Preferably, the dust removal component includes a cyclone, a dust discharge pipe fixed at the bottom of the cyclone, and a dust hopper fixed on the dust discharge pipe;

[0014] The top of the cyclone is fixed with a second intake air pipe, and one side of the cyclone is fixed with a first intake air pipe. One end of the second intake air pipe is fixed with the intake air expanding pipe.

[0015] Preferably, a wind valve and a negative pressure gauge are fixed on the first intake air pipe.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows: The pre-treatment of dust-containing air with a compact structure, flexible installation, and convenient manufacturing and maintenance can meet the two major requirements of dust removal and water vapor removal. Most of the large-particle dust and water vapor are removed at a position close to the slicing machine in the air duct, so that the main air duct is filled with dry small-particle dust, greatly reducing the frequency of air duct blockage, thereby saving labor costs and reducing economic losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of a dust-containing waste gas treatment system according to the present utility model;

[0018] Figure 2 It is a schematic installation structure diagram of a dust-containing waste gas treatment system according to the present utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] Referring to Figure 1-2 , a dust-containing waste gas treatment system includes a dust removal component and a demisting component communicated with the dust removal component;

[0021] Wherein, the demisting component includes a low-flow air duct 8, an inlet converging pipe 7 and an inlet diverging pipe 6 respectively fixed at both ends of the low-flow air duct 8, and a baffle demister 10 fixed in the low-flow air duct 8;

[0022] A liquid discharge pipe 13 is fixed at the position of the low-flow air duct 8 where the baffle demister 10 is located;

[0023] A water washing spray head 15 is placed inside one end of the low-flow air duct 8 close to the inlet converging pipe 7. The water washing spray head 15 is fixed with a water washing spray pipe 14. The water washing spray pipe 14 extends out of the low-flow air duct 8. The water washing spray pipe 14 is connected to a water supply pipe for supplying water to clean the baffle demister 10. When a differential pressure sensor 16 is used to detect the differential pressure on the front and rear sides of the baffle demister 10, it triggers the automatic controller to open or close the electric valve 18. When the electric valve 18 is opened, the water washing spray pipe 14 and the water washing spray head 15 clean the baffle demister 10 to remove the dirt on its surface. The waste water after cleaning is discharged to the liquid discharge pipe 13 through the low-flow air duct 8 with a 1% slope; an electric valve 18 is fixed on the water washing spray pipe 14; a differential pressure sensor 16 is fixed on the low-flow air duct 8. The baffle demister 10 is inclined in the low-flow air duct 8, and a liquid discharge pipe 13 is installed at the lowest position of the baffle demister 10 in the low-flow air duct 8. One end of the liquid discharge pipe 13 is fixed with a third inlet air pipe 3, and a wind valve 4 is fixed on the third inlet air pipe 3. The liquid discharge pipe 13 is connected to a waste water discharge pipe for supplying water and finally discharges the waste water to the drainage ditch in the cutting area.

[0024] Further, the dust removal assembly includes a cyclone 9, a dust discharge pipe 11 fixedly connected to the bottom of the cyclone 9, and a dust hopper fixedly connected to the dust discharge pipe 11; a second air inlet pipe 2 is fixedly connected to the top of the cyclone 9, and a first air inlet pipe 1 is fixedly connected to one side of the cyclone 9. One end of the second air inlet pipe 2 is fixedly connected to the air inlet expansion pipe 6. A wind valve 4 and a negative pressure gauge 5 are fixedly connected to the first air inlet pipe 1. The first air inlet pipe 1 is connected to the slicing machine and the dust removal section; the second air inlet pipe 2 is connected to the dust removal section and the demisting section; the third air inlet pipe 3 is connected to the demisting section and the main exhaust pipe. A negative pressure gauge and a wind valve are installed on the first air inlet pipe 1, a wind valve 4 is installed on the third air inlet pipe 3, and the dust removal section is connected to the first air inlet pipe 1 and the second air inlet pipe 2, and the low-flow air pipe 8 is connected to the air inlet expansion pipe 6 and the air inlet contraction pipe 7, and all are connected by flanges.

[0025] The utility model provides a device for pre-treating waste gas containing water vapor and dust near the slicing machine, so that a large amount of water-containing dust is removed at the branch pipe, the dust content in the main pipe is reduced, and further the dust deposition in the main pipe section is avoided, and the purpose of reducing the maintenance and operation work of the main pipe is achieved. The first air inlet pipe 1 is used to connect the slicing machine and the dust removal section, and is used to transport water-containing and dust-containing waste gas into the dust removal section. The negative pressure gauge is installed on the first air inlet pipe 1 to display the negative pressure value at this place to ensure that the waste gas here can be discharged normally.

[0026] After the waste gas enters the dust removal section, the air flow enters the cyclone 9 tangentially, and the air flow changes from linear motion to circular motion. Most of the rotating air flow spirals downward along the cylindrical body of the wall and moves towards the cone. Centrifugal force is generated during the rotation of the gas, and dust particles with a relative density greater than that of air will be thrown towards the wall and fall along the wall surface under the action of gravity, and finally fall into the dust hopper through the dust discharge port. The remaining separated air flow turns upward after reaching the bottom end of the cone and is finally axially discharged from the cyclone 9.

[0027] The air flow treated by the dust removal section enters the demisting section through the second air inlet pipe 2. During the above process, due to the negative pressure effect and secondary entrainment, some dust and water vapor are still carried out. At this time, this part of the air flow passes through the demisting section. When the air flow passes through the baffle demister at a certain speed, due to the inertial impact of the air flow and the collision of the water vapor with the corrugated plate, liquid droplets are formed. Due to the action of centrifugal force and inertia, the liquid droplets are collected on the blades of the baffle demister 10 to form a water flow, and flow downward along the laid amplitude to the drain pipe 13 and finally flow into the waste water discharge pipe. The differential pressure controller 16 detects the differential pressure between the front and rear ends of the baffle demister 10. When the differential pressure is too large, it indicates that the baffle demister 10 is seriously fouled and needs to be washed to ensure the normal use of the demisting section. After the automatic controller detects the signal from the differential pressure sensor 16, it issues an opening instruction to the electric valve 18, and the water flow passes through the water washing spray pipe 14 and the water washing spray head 15 to wash the baffle demister 10 until the differential pressure sensor 16 detects that the differential pressure condition meets the requirements.

[0028] The gas processed by the demisting section enters the main pipe section through the third intake pipe 3. The main pipe section can be connected to multiple slicing machines with pretreatment equipment. Since the airflow entering the main pipe section at this time only contains a small amount of dust, this part of the dust can be uniformly processed by a relatively small dust removal device or directly discharged under the condition of meeting environmental requirements.

[0029] Both the dust removal section and the demisting section are connected to the system by flanges, which is convenient for maintenance and replacement. It only needs to close the air valves 4 on the first intake pipe 1 and the third intake pipe 3; the demisting section is provided with a water washing and spraying device, which can automatically detect the scaling state on the surface of the baffle demister and automatically control the opening and closing of the water washing and spraying device, realizing full automation and saving manpower; the dust-containing exhaust gas pretreatment equipment on each slicing machine can be controlled independently without affecting the process of the entire slicing stage, realizing flexible management.

[0030] Example 1

[0031] The baffle demister 10 is made of fiberglass, and all duct sections are made of ordinary steel plates. Figure 1 In, the outer diameters of the first intake pipe 1, the second intake pipe 2, and the third intake pipe 3 are 168 mm. The cyclone 9 is a prior art, and this structure does not pose any difficulties to those skilled in the art, so it will not be elaborated here. In this implementation plan, the XP type cyclone dust collector with a specification of 200 mm is selected, which can be used for general pre-dust removal, and the resistance of the dust removal section is 880 Pa. The low-flow velocity duct is selected with a cross-sectional diameter of 250 mm. The baffle demister 10 fixed inside by bolts uses S-shaped blades, and the resistance of the demisting section ≤ 150 Pa.

[0032] The water-containing and dust-containing waste gas enters the dust removal section from the slicing machine through the first intake pipe 1. Most of the dust particles are separated here. Since the silicon powder will agglomerate due to the high water content, the particle size becomes larger and it is easier to settle. The dust removal efficiency at this stage can be as high as 95 - 99%. The waste gas processed by the dust removal section enters the demisting section through the second intake pipe 2. Here, due to the negative pressure effect and the water vapor of secondary entrainment being blocked by the baffle, the liquid droplets in the waste gas are further removed. The waste gas processed by the demisting section only contains a small amount of dust particles, and is brought into the main pipe through the third intake pipe 3. At this time, the dust content and water content in the main pipe both drop sharply, reducing the dust deposition in the pipeline, thereby saving labor costs and reducing economic losses. And the overall structure of this pretreatment equipment is small and compact, does not occupy space, is flexible to install, has a low cost, is convenient for management and operation and maintenance, and can bring various benefits.

[0033] In the above, the dust removal section and the demisting section of the present application are integrated, with a compact structure and flexible installation. An automatic water washing and spraying system is set in the demisting section, which is convenient to use and does not require manual operation. The waste gas originally passing through the main pipe is pretreated at the branch pipe, reducing the dust concentration at the main pipe and the maintenance cost and economic loss caused by overhaul due to the accumulation of dust particles at the main pipe.

[0034] The equipment quantity and processing scale described here are used to simplify the description of the present utility model, and the application, modification and variation of the present utility model are obvious to those skilled in the art.

[0035] Although the embodiments of the present utility model have been disclosed as above, it is not limited to the applications listed in the description and embodiments. It can be fully applied to various fields suitable for the present utility model. For those familiar with the art, additional modifications can be easily achieved. Therefore, without departing from the general concept defined by the claims and the equivalent scope, the present utility model is not limited to the specific details and the illustrated and described examples here.

Claims

1. A dust-containing waste gas treatment system, characterized in that, Comprising: A dust removal component and a demisting component communicated with the dust removal component; Wherein, the demisting component includes a low-flow air duct (8), an inlet converging pipe (7) and an inlet diverging pipe (6) respectively fixed at both ends of the low-flow air duct (8), and a baffle demister (10) fixed in the low-flow air duct (8); A drain pipe (13) is fixed at the position of the low-flow air duct (8) where the baffle demister (10) is located; A water washing spray head (15) is placed inside one end of the low-flow air duct (8) close to the inlet converging pipe (7), the water washing spray head (15) is fixed with a water washing spray pipe (14), and the water washing spray pipe (14) extends out of the low-flow air duct (8); An electric valve (18) is fixed on the water washing spray pipe (14); A differential pressure sensor (16) is fixed on the low-flow air duct (8).

2. The dust-containing waste gas treatment system according to claim 1, wherein The baffle demister (10) is inclined in the low-flow air duct (8), and a drain pipe (13) is installed at the lowest position of the baffle demister (10) in the low-flow air duct (8).

3. The dust-containing waste gas treatment system according to claim 2, characterized in that, One end of the drain pipe (13) is fixed with a third intake pipe (3), and a wind valve (4) is fixed on the third intake pipe (3).

4. A dust-containing waste gas treatment system according to claim 1, characterized in that, The dust removal component includes a cyclone (9), a dust discharge pipe (11) fixed at the bottom of the cyclone (9), and a hopper fixed on the dust discharge pipe (11); The top of the cyclone (9) is fixed with a second intake pipe (2), one side of the cyclone (9) is fixed with a first intake pipe (1), and one end of the second intake pipe (2) is fixed with the inlet diverging pipe (6).

5. The dust-containing waste gas treatment system according to claim 4, characterized in that, A wind valve (4) and a negative pressure gauge (5) are fixed on the first intake pipe (1).