Ultrahigh-purity graphite powder detection device for semiconductors

Abstract

The utility model discloses an ultra-pure graphite powder detection device for semiconductors, which belongs to the field of graphite detection and comprises a workbench, a detector and a graphite containing cup, adjusting support legs are uniformly screwed at four corners of the bottom of the workbench, a vertical column is vertically fixed on the rear side of the upper surface of the workbench, a raised line is arranged on the front side of the surface of the vertical column, and the raised line is connected with the detector. A sliding sleeve is slidably installed on the surface of the stand column, an extension rod is arranged forwards on the sliding sleeve, clamping rods are symmetrically arranged at the end, away from the sliding sleeve, of the extension rod, connecting plates are arranged forwards on the front sides of the clamping rods, a locking bolt is screwed between the two connecting plates, and the detector is arranged on one side of the upper surface of the workbench. The detection rod is mounted on the sliding sleeve capable of sliding up and down, so that the stability of the detection rod during movement is ensured, the position and depth of the detection rod inserted into the powder are conveniently controlled, the detection rod is lifted up after detection is finished, the powder attached to the surface of the detection rod can be scraped through the rubber ring, and the surface of the detection rod is ensured to be clean.

Description

Technical Field

[0001] The utility model relates to the field of graphite detection, and more specifically, to a detection device for ultra-high purity graphite powder for semiconductors. Background Art

[0002] Graphite is one of the allotropes of carbon with the chemical formula C. It has a variety of unique properties and wide application fields. Structurally, graphite has two types: hexagonal crystal system and trigonal crystal system. Its single crystal is scaly or tabular, usually an aggregate of scaly, massive or earthy forms, with complete cleavage parallel to the bottom surface, having a layered structure and weak interlayer bonding force. According to the "Guiding Catalog for the First Batch of Applications of Key New Materials (2024 Edition)", its ash content ≤ 5 ppm; the content of B, Al, and Fe ≤ 0.01 ppm; the resistivity (μΩ·m) is 11 - 15. Graphite meeting these requirements is ultra-high purity graphite, which is commonly used in semiconductor production. Therefore, in order to ensure production quality, it is necessary to detect the components of graphite to ensure that it meets the requirements of ultra-high purity graphite.

[0003] Detecting various data of ultra-high purity graphite requires the use of different detection devices. Among them, the dryness and humidity of graphite powder are also important data in graphite processing. Traditional graphite dry-wet detection, that is, the detection of moisture in graphite powder, mostly involves pouring the powder into a cup and inserting a detection rod into the powder for detection. However, after detection, the surface of the detection rod will adhere to powder. If the powder falls outside the cup, it will cause contamination of the workbench, and at the same time, the remaining powder may affect the detection accuracy of the next time. Content of the Utility Model

[0004] 1. Technical Problems to be Solved

[0005] Aiming at the problems existing in the prior art, the purpose of the utility model is to provide a detection device for ultra-high purity graphite powder for semiconductors, which can automatically scrape the powder on the surface of the detection rod after the detection contact ends to ensure the cleanliness of the surface of the detection rod.

[0006] 2. Technical Solutions

[0007] To solve the above problems, the utility model adopts the following technical solutions.

[0008] The invention discloses an ultra-high purity graphite powder detection device for semiconductor, comprising a workbench, a detector and a graphite containing cup, wherein the four corners of the bottom of the workbench are evenly screwed and installed with adjustment legs, a column is vertically fixed on the rear side of the upper surface of the workbench, a convex strip is arranged on the front side of the column surface, a sliding sleeve is slidably installed on the surface of the column, an extension rod is arranged forwardly on the sliding sleeve, a clamping rod is symmetrically arranged on the end of the extension rod away from the sliding sleeve, a connecting plate is arranged forwardly on the front side of the clamping rod, a locking bolt is screwed between the two connecting plates, the detector is placed on one side of the upper surface of the workbench, a signal line is connected to the surface of the detector, a fixing rod is arranged on the end of the signal line away from the detector, the fixing rod vertically penetrates between the two clamping rods, a detection rod is arranged at the bottom of the fixing rod, a connecting sleeve is installed on the surface of the column, a fixing bolt is screwed and installed on one side of the connecting sleeve, the connecting sleeve is fixed by the fixing bolt, a cross bar is arranged on the front side of the connecting sleeve, the cross bar is placed below the extension rod, a rubber ring is installed on the front end of the cross bar surface, and the detection rod penetrates the rubber ring.

[0009] Furthermore, the graphite holding cup is placed on the upper surface of the detector, the graphite holding cup is placed in front of the column, and the graphite holding cup is placed directly below the detection rod.

[0010] Furthermore, a positioning hole is provided above the outer surface of the convex strip.

[0011] Furthermore, a mounting hole is provided on the front side of the interior of the sliding sleeve, and the mounting hole corresponds to the positioning hole. An open groove is provided on the front side of the upper surface of the sliding sleeve, and the open groove is connected to the interior of the mounting hole.

[0012] Furthermore, a sliding bolt is slidably installed inside the mounting hole, the end of the sliding bolt is adapted to the inner size of the positioning hole, a toggle plate is vertically arranged on the front side of the upper surface of the sliding bolt, and the toggle plate passes through the open slot.

[0013] Furthermore, a spring is arranged inside the mounting hole, and one end of the spring is in contact with the end surface of the sliding bolt.

[0014] 3. Beneficial effects

[0015] Compared with the prior art, the advantages of the utility model are: the utility model provides an ultra-high purity graphite powder detection device for semiconductors, the detection rod is installed on a sliding sleeve that can slide up and down to ensure the stability of the detection rod when moving, and then it is convenient to control the position and depth of the detection rod inserted into the powder. After the detection is completed, the detection rod can be lifted up to scrape off the powder attached to its surface through the rubber ring to ensure the cleanliness of the surface of the detection rod.

[0016] After the detection is completed, the test rod moves upward and slides, and the internal mechanism can keep the test rod at a high position to facilitate the loading and unloading of graphite powder. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model in the detection state;

[0018] Figure 2 It is a schematic cross-sectional structure diagram of the sliding sleeve and the extension rod of the utility model;

[0019] Figure 3 For the utility model Figure 2 A schematic diagram of the enlarged structure of area A;

[0020] Figure 4 It is a schematic diagram of the three-dimensional structure of the connecting sleeve of the utility model.

[0021] Explanation of the numbers in the figure: 1. Workbench; 101. Adjustment leg; 2. Detector; 201. Signal line; 202. Fixing rod; 203. Detection rod; 3. Column; 301. Raised strip; 302. Positioning hole; 4. Sliding sleeve; 401. Extension rod; 402. Clamping rod; 403. Connecting plate; 404. Locking bolt; 405. Mounting hole; 406. Open slot; 5. Sliding bolt; 501. Toggle plate; 6. Spring; 7. Connecting sleeve; 701. Cross bar; 702. Rubber ring; 703. Fixing bolt; 8. Graphite holding cup. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model; it is obvious that the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the utility model without making creative work are within the scope of protection of the utility model.

[0023] Example:

[0024] See also Figures 1-4As shown in the figure, an ultra-high purity graphite powder detection device for semiconductors includes a workbench 1, a detector 2, and a graphite holding cup 8. Adjusting legs 101 are evenly screwed and installed at the four corners of the bottom of the workbench 1 to ensure the stability of the workbench 1 and keep it in a horizontal state through the adjusting legs 101 at the four corners. A vertical column 3 is fixedly installed at the rear side of the upper surface of the workbench 1. A rib 301 is arranged on the front side of the surface of the column 3. A sliding sleeve 4 is slidably installed on the surface of the column 3. The rib 301 can ensure that the sliding sleeve 4 can only slide in the vertical direction and cannot rotate, so as to ensure that the extension rod 401 always faces forward. An extension rod 401 is arranged forward on the sliding sleeve 4. Clamping rods 402 are symmetrically arranged at the end of the extension rod 401 away from the sliding sleeve 4. A connecting plate 403 is arranged forward on the front side of the clamping rod 402. A locking bolt 404 is screwed between the two connecting plates 403. Screwing the locking bolt 404 can control the tightening or loosening of the two clamping rods 402 to realize the clamping of the fixing rod 202. The detector 2 is placed on one side of the upper surface of the workbench 1. A signal line 201 is connected to the surface of the detector 2. A fixing rod 202 is arranged at the end of the signal line 201 away from the detector 2. The fixing rod 202 vertically penetrates between the two clamping rods 402. A detection rod 203 is arranged at the bottom of the fixing rod 202 to detect the graphite powder through the detection rod 203. A connecting sleeve 7 is installed on the surface of the column 3. A fixing bolt 703 is screwed and installed on one side of the connecting sleeve 7. The connecting sleeve 7 is fixed by the fixing bolt 703. The height of the connecting sleeve 7 is fixed by the fixing bolt 703 so that its height is above the graphite holding cup 8. A cross bar 701 is arranged on the front side of the connecting sleeve 7. The cross bar 701 is placed below the extension rod 401. A rubber ring 702 is installed at the front end of the surface of the cross bar 701. The detection rod 203 penetrates through the rubber ring 702. The rubber material can prevent scratches on the detection rod 203 and can also scrape off the graphite powder attached to the surface of the detection rod 203.

[0025] Please refer to Figure 1 As shown in the figure, the graphite holding cup 8 is placed on the upper surface of the detector 2. The graphite holding cup 8 is placed in front of the column 3 and directly below the detection rod 203 to detect the dryness and wetness of the internal graphite powder by controlling the detection rod 203 to insert into the graphite holding cup 8.

[0026] Among them, a positioning hole 302 is opened above the outer surface of the rib 301.

[0027] Please refer to Figure 2 and Figure 3As shown, a mounting hole 405 is provided on the front side of the inner part of the sliding sleeve 4, and the mounting hole 405 corresponds to the positioning hole 302, and both are placed on the front side of the column 3; an open groove 406 is provided on the front side of the upper surface of the sliding sleeve 4, and the open groove 406 is connected with the inner part of the mounting hole 405; a sliding bolt 5 is slidably installed in the inner part of the mounting hole 405, and the end of the sliding bolt 5 is adapted to the inner size of the positioning hole 302, and the cooperation between the two can maintain the height stability of the sliding sleeve 4, and then ensure the stability of the position of the detection rod 203, so as to keep the detection rod 203 at the top during loading and unloading, and a toggle plate 501 is vertically arranged on the front side of the upper surface of the sliding bolt 5, and the toggle plate 501 passes through the open groove 406, so as to control the sliding bolt 5 through the outer toggle plate 501.

[0028] Among them, a spring 6 is arranged inside the mounting hole 405, and one end of the spring 6 contacts the end surface of the sliding bolt 5. The elastic force of the spring 6 is used to ensure that the sliding bolt 5 always has an outward force, so that when the sliding sleeve 4 is placed in the highest position, the sliding bolt 5 can be controlled to enter the positioning hole 302 to achieve fixation.

[0029] Working principle: First, the four bottom corners of the adjustment legs 101 are used to keep the workbench 1 in a horizontal state. Due to the presence of the spring 6, the slide bolt 5 always has an outward force. Before testing, the slide sleeve 4 can be placed at the top, and the slide bolt 5 and the positioning hole 302 can be matched to keep it fixed, which is convenient for the placement of the graphite cup 8. Then, according to the height of the graphite cup 8, the height of the connecting sleeve 7 is adjusted, so that the cross bar 701 is just above the graphite cup 8. Then, according to the height of the graphite cup 8, the height of the connecting sleeve 7 is adjusted, so that the cross bar 701 is just above the graphite cup 8. Above the cup 8, the control toggle plate 501 can make the sliding bolt 5 disengage from the positioning hole 302. At this time, the sliding sleeve 4 can slide along the surface of the column 3 to control the height of the detection rod 203, so that the detection rod 203 is inserted into the graphite holding cup 8 to detect the graphite powder inside. After a single detection contact, the sliding sleeve 4 is slid up. At this time, the rubber ring 702 is installed inside the cross bar 701 to effectively scrape off the graphite powder attached to the surface of the detection rod 203, and when the sliding sleeve 4 is placed at the top, the sliding bolt 5 and the positioning hole 302 can be used to achieve automatic limiting to keep the height fixed.

[0030] The above is only a preferred specific implementation of the utility model; however, the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and improved ideas of the utility model within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model.

Claims

1. Ultra-high purity graphite powder detection device for semiconductors, including a workbench (1), a detector (2) and a graphite holding cup (8). Four corners at the bottom of the workbench (1) are evenly screwed and installed with adjustment legs (101), and it is characterized in that: A column (3) is vertically fixed on the rear side of the upper surface of the workbench (1), a convex strip (301) is arranged on the front side of the surface of the column (3), a sliding sleeve (4) is slidably installed on the surface of the column (3), an extension rod (401) is arranged forward of the sliding sleeve (4), a clamping rod (402) is symmetrically arranged at one end of the extension rod (401) away from the sliding sleeve (4), a connecting plate (403) is arranged forward of the front side of the clamping rod (402), a locking bolt (404) is screwed between the two connecting plates (403), the detector (2) is placed on one side of the upper surface of the workbench (1), a signal line (201) is connected to the surface of the detector (2), and the signal line (201) is arranged away from the detector. A fixing rod (202) is arranged at one end of the measuring instrument (2), the fixing rod (202) vertically passes through between the two clamping rods (402), a detection rod (203) is arranged at the bottom of the fixing rod (202), a connecting sleeve (7) is installed on the surface of the column (3), a fixing bolt (703) is screwed and installed on one side of the connecting sleeve (7), the connecting sleeve (7) is fixed by the fixing bolt (703), a cross bar (701) is arranged on the front side of the connecting sleeve (7), the cross bar (701) is placed below the extension rod (401), a rubber ring (702) is installed on the front end of the surface of the cross bar (701), and the detection rod (203) passes through the rubber ring (702).

2. The semiconductor ultra-high purity graphite powder detection device according to claim 1, characterized in that: The graphite holding cup (8) is placed on the upper surface of the detector (2), the graphite holding cup (8) is placed in front of the column (3), and the graphite holding cup (8) is placed directly below the detection rod (203).

3. The ultra-high purity graphite powder detection device for semiconductors according to claim 1, characterized in that: A positioning hole (302) is provided above the outer surface of the convex strip (301).

4. The ultra-high purity graphite powder detection device for semiconductors according to claim 3, wherein: A mounting hole (405) is provided on the front side of the interior of the sliding sleeve (4), and the mounting hole (405) corresponds to the positioning hole (302). An open groove (406) is provided on the front side of the upper surface of the sliding sleeve (4), and the open groove (406) is connected to the interior of the mounting hole (405).

5. The ultra-high purity graphite powder detection device for semiconductors according to claim 4, characterized in that: A sliding bolt (5) is slidably installed inside the installation hole (405), the end of the sliding bolt (5) is adapted to the internal size of the positioning hole (302), and a toggle plate (501) is vertically arranged on the front side of the upper surface of the sliding bolt (5), and the toggle plate (501) passes through the open groove (406).

6. The ultra-high purity graphite powder detection device for semiconductors according to claim 5, wherein: A spring (6) is arranged inside the mounting hole (405), and one end of the spring (6) is in contact with the end surface of the sliding bolt (5).

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