Chip probe card alignment adjusting device
Through the engagement structure and the motor-driven chip probe card alignment adjustment device, the problem of difficult replacement of traditional probe card is solved, rapid disassembly and installation is achieved, and the practicality of the device is improved.
Patent Information
- Application Number
- CN202421269586.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-05
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-06-05
AI Technical Summary
It is difficult to replace traditional chip probe cards, and the bolt fixation and disassembly steps are cumbersome and time-consuming.
The probe card is fixed with a clamping structure, and is unlocked by pulling up the pull rod, and a simple replacement is achieved by combining motor drive and clamping.
It simplifies the disassembly and installation process of probe cards, improves replacement efficiency, and enhances the linkage and practicality of the device.
Smart Images
Figure CN223155047U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of alignment adjustment devices, in particular to a chip probe card alignment adjustment device. Background Technique
[0002] Chip packaging is the shell for installing semiconductor integrated circuit chips, which has the functions of placing, fixing, sealing, protecting the chips and enhancing the electrothermal performance. Chip packaging is the bridge connecting the internal world of the chip and the external circuit. The contacts of the chip are connected to the pins of the packaging shell by wires, and the pins are connected to other devices through the wires on the printed circuit board; Packaging plays an important role in CPUs and other LSI integrated circuits. With the increase in the number of pins, the pin pitch decreases, the weight decreases, the reliability improves, and it is more convenient to use;
[0003] When chip packaging is carried out, a probe card is needed to test it. Alignment is often required between the chip and the probe card before assembly and testing, and thus an alignment adjustment device is needed. However, the probe cards of traditional alignment adjustment devices are fixed to the device using bolts. However, different chips are adapted to different probe cards, and thus the probe card on the device needs to be replaced. Disassembly of the bolt fixation requires the aid of professional tools, and the large number of bolts leads to many disassembly steps and long time consumption. Therefore, those skilled in the art have proposed a chip probe card alignment adjustment device. Content of the Utility Model
[0004] In view of the deficiencies of the prior art, the utility model provides a chip probe card alignment adjustment device. This device uses a clamping structure to fix the probe card, making its disassembly simple and solving the problem of difficult replacement of the probe card in the above background.
[0005] To achieve the above objectives, the utility model is realized through the following technical solutions: A chip probe card alignment adjustment device, comprising:
[0006] A probe mechanism that fixes the probe to the device using a clamping structure;
[0007] The probe mechanism includes a mounting base. A cavity is provided inside the mounting base. A card slot is provided on the side of the mounting base and below the cavity. A clamping member is provided inside the card slot. A jack is provided at the center of the upper surface of the clamping member. A limiting plate is slidably provided inside the cavity. A pull rod extending outside the cavity is installed at the center of the upper surface of the limiting plate. A first spring is sleeved on the pull rod inside the cavity. A plug is provided inside the jack and its upper end extends into the cavity and is fixed to the limiting plate. A probe card is installed outside the mounting base on the side of the clamping member;
[0008] A base mechanism that is used to move the probe mechanism;
[0009] Fixing mechanism, which is used to fix the chip.
[0010] As a further technical solution of the present invention, the base mechanism includes a base located below the mounting seat. A moving groove is provided on the upper surface of the base directly below the mounting seat. A first motor is provided on one side of the moving groove on the side of the base. A first screw rod with a driving end extending into the moving groove and rotatably connected to its inner wall is installed at the driving end of the first motor. A first threaded seat is arranged on the first screw rod.
[0011] As a further technical solution of the present invention, a moving seat is installed on the upper surface of the first threaded seat. A second motor is installed at one end of the moving seat. A second screw rod with a driving end extending into the moving seat groove and rotatably connected to its inner wall is installed at the driving end of the second motor. A second threaded seat with its side fixedly connected to the mounting seat is arranged on the second screw rod.
[0012] As a further technical solution of the present invention, the fixing mechanism includes a placing table installed on the upper surface of the base and on one side of the moving groove. Fixing shells are installed on both sides of the placing table on the upper surface of the base. A moving plate is slidably arranged in each fixing shell. A compressed second spring is arranged on one side of the moving plate in the fixing shell. An extension rod extending to the outside of the fixing shell is installed at the center of the side of each moving plate. The end of the extension rod extends to the outside of the fixing shell and a clamping plate is installed above the placing table.
[0013] As a further technical solution of the present invention, a gear is rotatably installed on one side of the upper surface of the base for each fixing shell. A first rack extending to the outside of the fixing shell and meshing with the gear is installed on the other side of each moving plate. A second rack meshing with the gear is arranged below the first rack on one side of each gear. An L-shaped rod fixedly connected to the moving seat is installed at the end of each second rack.
[0014] Beneficial effects
[0015] The present invention provides a chip probe card alignment adjustment device. Compared with the prior art, it has the following beneficial effects:
[0016] 1. For a chip probe card alignment adjustment device, the probe mechanism of this device fixes the probe card on the device by using the clamping principle. When disassembling, only need to pull up the screw rod to let the plug move out of the socket to release the fixation of the probe card, and then it can be taken off. Therefore, only one operation of pulling up the pull rod is required to disassemble the probe card, and the operation is simple, which is convenient for replacing the probe card.
[0017] 2. A chip probe card alignment adjustment device. This device also uses a fixing mechanism to fix the chip. At the same time, during the movement of the probe card, two clamping plates in the fixing mechanism are driven by a component to clamp the chip, increasing the linkage between devices and making the device more practical. Description of the Drawings
[0018] Figure 1 It is a schematic structural diagram of a chip probe card alignment adjustment device;
[0019] Figure 2 It is a cross-sectional view of a chip probe card alignment adjustment device;
[0020] Figure 3 It is Figure 2 the enlarged view of part A in
[0021] Figure 4 It is a cross-sectional view of the fixing mechanism of a chip probe card alignment adjustment device;
[0022] Figure 5 It is a cross-sectional view of the fine adjustment mechanism of a chip probe card alignment adjustment device;
[0023] Figure 6 It is an exploded view of the probe card of a chip probe card alignment adjustment device.
[0024] In the figure: 1. Mounting base; 2. Cavity; 3. Card slot; 4. Card part; 5. Jack; 6. Limit plate; 7. Pull rod; 8. First spring; 9. Plug-in component; 10. Probe card; 11. Base; 12. Moving slot; 13. First motor; 14. First screw rod; 15. First threaded seat; 16. Moving seat; 17. Second motor; 18. Second screw rod; 19. Second threaded seat; 20. Placing table; 21. Fixed shell; 22. Moving plate; 23. Second spring; 24. Extension rod; 25. Clamping plate; 26. Gear; 27. First rack; 28. Second rack; 29. L-shaped rod. Detailed Implementation Modes
[0025] The following further elaborates on the present disclosure in conjunction with the drawings and implementation modes. It can be understood that the specific implementation modes described herein are only used to explain the relevant content and do not limit the present disclosure. Additionally, it should be noted that for the sake of description, only parts related to the present disclosure are shown in the drawings.
[0026] It should be noted that, without conflict, the implementation modes and features in the implementation modes of the present disclosure can be combined with each other. The following will elaborate on the technical solutions of the present disclosure in detail with reference to the drawings and implementation modes.
[0027] Unless otherwise specified, the illustrated exemplary embodiments will be understood to provide exemplary features of various details of some ways in which the technical conceptions of the present disclosure can be implemented in practice. Accordingly, unless otherwise specified, the features of the various embodiments can be additionally combined, separated, interchanged, and / or rearranged without departing from the technical conceptions of the present disclosure.
[0028] In the drawings, cross-hatching and / or shading are generally used to clarify the boundaries between adjacent components. Thus, unless otherwise stated, the presence or absence of cross-hatching or shading does not convey or imply any preference or requirement regarding the specific materials, material properties, dimensions, proportions, commonalities between the components shown, and / or any other characteristics, attributes, properties, etc. of the components. Additionally, in the drawings, the dimensions and relative dimensions of components may be exaggerated for clarity and / or descriptive purposes. When the exemplary embodiments can be implemented differently, the specific process orders may be performed in an order different from that described. For example, two consecutively described processes may be performed substantially simultaneously or in an order opposite to that described. Further, like reference numerals denote like components.
[0029] When a component is referred to as being "on" or "above" another component, "connected to" or "coupled to" another component, the component can be directly on, directly connected to, or directly coupled to the other component, or there can be intervening components. However, when a component is referred to as being "directly on" another component, "directly connected to" or "directly coupled to" another component, there are no intervening components. To this end, the term "connected" can refer to a physical connection, an electrical connection, etc., and can have or not have intervening components.
[0030] For descriptive purposes, the present disclosure may use spatial relative terms such as "under", "below", "beneath", "underneath", "above", "on", "over", "upper", and "side (e.g., as in "sidewall")" to describe the relationship of one component to another (other) component as illustrated in the drawings. In addition to the orientations depicted in the drawings, the spatial relative terms are also intended to encompass different orientations of the device during use, operation, and / or manufacture. For example, if the device in the drawings is flipped, a component described as "under" or "beneath" another component or feature will then be positioned "above" the other component or feature. Thus, the exemplary term "under" can encompass both the "above" and "below" orientations. Additionally, the device can be positioned otherwise (e.g., rotated 90 degrees or at other orientations), and accordingly, the spatial relative descriptors used herein are to be interpreted accordingly.
[0031] The terms used herein are for the purpose of describing particular embodiments and are not intended to be limiting. As used herein, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are also intended to include the plural forms. In addition, when the terms "comprising" and / or "including" and their variants are used in this specification, it is stated that there are the stated features, integers, steps, operations, components, assemblies and / or groups thereof, but does not preclude the presence or addition of one or more other features, integers, steps, operations, components, assemblies and / or groups thereof. It should also be noted that, as used herein, the terms "substantially", "about" and other similar terms are used as approximate terms and not as terms of degree, and thus they are used to explain the inherent deviations of measured values, calculated values and / or provided values that would be recognized by a person of ordinary skill in the art.
[0032] Figure 1 It is a schematic structural view of an alignment adjustment device for a chip probe card;
[0033] Figure 2 It is a cross-sectional view of an alignment adjustment device for a chip probe card;
[0034] Figure 3 It is Figure 3 the enlarged view of part A in
[0035] Figure 4 It is a cross-sectional view of a fixing mechanism of an alignment adjustment device for a chip probe card;
[0036] Figure 5 It is a cross-sectional view of a fine adjustment mechanism of an alignment adjustment device for a chip probe card;
[0037] Figure 6 It is a disassembly view of a probe card of an alignment adjustment device for a chip probe card;
[0038] As Figures 1-6 shown, an alignment adjustment device for a chip probe card according to the present disclosure may include components such as a base mechanism, a probe mechanism and a fixing mechanism;
[0039] As Figures 1-4 and Figure 6 shown, the probe mechanism includes a mounting base (1), a cavity (2), a card slot (3), a card member (4), a jack (5), a limiting plate (6), a pull rod (7), a first spring (8), a plug-in member (9), and a probe card (10);
[0040] The cavity (2) is opened inside the mounting base (1). The card slot (3) is opened on the side of the mounting base (1) and is directly below the cavity (2). The card member (4) is arranged in the card slot (3). The jack (5) is opened at the center of the upper surface of the card member (4). The limiting plate (6) is arranged inside the cavity (2). The pull rod (7) is installed at the center of the upper surface of the limiting plate (6) and its upper end extends outside the mounting base (1). The first spring (8) is sleeved on the surface of the pull rod (7) and is inside the cavity (2). The plug-in member (9) is arranged in the jack (5) and its upper end extends into the cavity (2) and is fixedly connected to the limiting plate (6). The probe card (10) is installed on the side of the card member (4) and is located outside the mounting base (1).
[0041] When disassembling the probe card (10), pull up the pull rod (7), and the plug-in member (9) is driven by the limiting plate (6) to rise and move out of the inserted jack (5) and into the cavity (2). At the same time, the rising limiting plate (6) will also compress the first spring (8). When the plug-in member (9) exits the jack (5), the fixation of the card member (4) can be released, and the probe card (10) connected to the card member (4) can be removed from the mounting base (1). During installation, just pull up the pull rod (7) and let the plug-in member (9) enter the cavity (2) through the above operation. Then insert the card member (4) of the probe card (10) into the card slot (3). When it is fully inserted, the jack (5) is exactly aligned with the plug-in member (9). Release the pull rod (7) to let the first spring (8) rebound and drive the plug-in member (9) to re-insert into the jack (5), and the probe card (10) can be fixed on the mounting base (1).
[0042] As Figures 1-2 and Figure 5 shown, it includes a base (11), a moving groove (12), a first motor (13), a first screw rod (14), a first threaded seat (15), a moving seat (16), a second motor (17), a second screw rod (18), and a second threaded seat (19).
[0043] The base (11) is arranged below the mounting base (1). The moving groove (12) is opened on the upper surface of the base (11) and is directly below the base (11). The first motor (13) is installed on the side of the base (11) and is on one side of the moving groove (12). The first screw rod (14) is installed at the end of the driving end of the first motor (13), and one end extends into the moving groove (12) and is rotatably connected to its inner wall. The first threaded seat (15) is arranged on the first screw rod (14). The moving seat (16) is installed on the upper surface of the first threaded seat (15). The second motor (17) is installed at one end of the moving seat (16). The second screw rod (18) is installed at the end of the driving end of the second motor (17), and one end extends into the groove of the second motor (17) and is rotatably connected to its inner wall. The second threaded seat (19) is arranged on the second screw rod (18), and its side is fixedly connected to the mounting base (1).
[0044] During use, the first motor (13) operates to drive the first screw rod (14) to rotate. The rotating first screw rod (14) drives the first threaded seat (15) to move. The moving first threaded seat (15) drives the probe card (10) to approach the chip. The first motor (13) drives the first screw rod (14) to reverse, and through the above operations, the probe card (10) can be made to move away from the chip.
[0045] After the chip approaches the chip, the operating second motor (17) drives the second screw rod (18) to rotate. The rotating second screw rod (18) drives the second threaded seat (19) to move horizontally, thereby driving the probe card (10) to move horizontally, and finely adjusting the position of the probe card (10) until the probe card (10) is directly opposite the docking position of the chip, realizing the alignment adjustment between the chip and the probe card. After that, the probe card 10 continues to move towards the chip for assembly.
[0046] As Figure 1 and Figure 4 shown, the fixing mechanism includes a placing table (20), a fixing shell (21), a moving plate (22), a second spring (23), an extension rod (24), a clamping plate (25), a gear (26), a first rack (27), a second rack (28), and an L-shaped rod (29).
[0047] The placement table (20) is installed on the upper surface of the base (11) and is on one side of the moving groove (12). The two fixed shells (21) are arranged on the upper surface of the base (11) and are on both sides of the placement table (20). The two moving plates (22) are respectively slidably arranged in the two fixed shells (21). The two extension rods (24) are installed on the sides of the two moving plates (22). The two clamping plates (25) are respectively installed at the ends of the two extension rods (24) extending outside the fixed shells (21) and are above the placement table (20). The two gears (26) are rotatably installed on the upper surface of the base (11) and are respectively on one side of the two fixed shells (21). The two first racks (27) are respectively installed on the other sides of the two moving plates (22) and extend outside the fixed shells (21) to mesh with the corresponding gears (26). The two second racks (28) are respectively arranged on one side of the two gears (26) and mesh with them and are below the first racks (27). The two L-shaped rods (29) are respectively installed at the ends of the two second racks (28) and one end of each is fixedly connected to the moving seat (16).
[0048] Place the chip face up on the placement table (20). When the moving first threaded seat (15) moves, it will also drive the two L-shaped rods (29) to move. Each moving L-shaped rod (29) drives the second rack (28) to move, thereby driving the gear (26) meshing with it to rotate. Each rotating gear (26) drives the first rack (27) meshing with it to move towards the moving plate (22), thereby driving the moving plate (22) to move and stretching the second spring (23) until the two clamping plates (25) clamp the chip. At this time, the second rack (28) just disengages from the gear (26), and at this time, the second spring (23) is not fully stretched. Thus, the rebounding force of the two second springs (23) acts on the two clamping plates (25) to clamp and fix the chip. When the first threaded seat (15) moves in the reverse direction, it drives the two second racks (28) to move in the reverse direction. After meshing with the gear (26), it makes the gear (26) rotate in the reverse direction, thereby driving each first rack (27) to move in the reverse direction towards the moving plate (22), driving the clamping plate (25) to move to release the clamping of the chip and also compressing the second spring (23), so as to release the fixation of the chip and it can be taken off.
[0049] In the description of this specification, the description with reference to terms such as "one embodiment / way", "some embodiments / ways", "example", "specific example", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment / way or example are included in at least one embodiment / way or example of this application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment / way or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments / ways or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments / ways or examples described in this specification and the features of different embodiments / ways or examples.
[0050] In addition, the terms "first" and "second" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of this application, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.
[0051] Those skilled in the art should understand that the above embodiments are only for clearly illustrating the present disclosure and are not intended to limit the scope of the present disclosure. For those skilled in the art, other changes or modifications can be made on the basis of the above disclosure, and these changes or modifications are still within the scope of the present disclosure.
Claims
1. A chip probe card alignment adjustment device, characterized in that Comprising: A probe mechanism that fixes the probe to the device using a clamping structure; The probe mechanism includes a mounting base (1), a cavity (2) is formed inside the mounting base (1), a card slot (3) is formed on the side of the mounting base (1) and below the cavity (2), a clamping member (4) is arranged inside the card slot (3), a jack (5) is formed at the center of the upper surface of the clamping member (4), a limiting plate (6) is slidably arranged inside the cavity (2), a pull rod (7) extending outside the cavity (2) is installed at the center of the upper surface of the limiting plate (6), a first spring (8) is sleeved on the pull rod (7) inside the cavity (2), a plug-in member (9) is arranged inside the jack (5) and its upper end extends into the cavity (2) and is fixedly connected to the limiting plate (6), and a probe clamp (10) is installed outside the mounting base (1) on the side of the clamping member (4); A base mechanism that is used to move the probe mechanism; A fixing mechanism that is used to fix the chip.
2. The alignment adjustment device for a chip probe card according to claim 1, characterized in that, The base mechanism includes a base (11) located below the mounting base (1), a moving slot (12) is formed on the upper surface of the base (11) directly below the mounting base (1), a first motor (13) is arranged on the side of the base (11) at one side of the moving slot (12), a first screw rod (14) with its end extending into the moving slot (12) and rotatably connected to its inner wall is installed at the driving end of the first motor (13), and a first threaded seat (15) is arranged on the first screw rod (14).
3. The alignment adjustment device for a chip probe card according to claim 2, characterized in that, A moving seat (16) is installed on the upper surface of the first threaded seat (15), a second motor (17) is installed at one end of the moving seat (16), a second screw rod (18) with its end extending into the slot of the moving seat (16) and rotatably connected to its inner wall is installed at the driving end of the second motor (17), and a second threaded seat (19) with its side fixedly connected to the mounting base (1) is arranged on the second screw rod (18).
4. A chip probe card alignment adjustment device according to claim 2, characterized in that, The fixing mechanism includes a placing table (20) installed on the upper surface of the base (11) and at one side of the moving slot (12), fixing shells (21) are installed on both sides of the placing table (20) on the upper surface of the base (11), a moving plate (22) is slidably arranged inside each fixing shell (21), a compressed second spring (23) is arranged on one side of the moving plate (22) inside the fixing shell (21), an extension rod (24) extending outside the fixing shell (21) is installed at the center of the side of each moving plate (22), and a clamping plate (25) is installed above the placing table (20) at the end of the extension rod (24) extending outside the fixing shell (21).
5. The alignment adjustment device for a chip probe card according to claim 4, wherein On the upper surface of the base (11), a gear (26) is rotatably installed on one side of each fixed housing (21). On the other side surface of each moving plate (22), a first rack (27) is installed which extends outside the fixed housing (21) and meshes with the gear (26). Below the first rack (27) on one side of each gear (26), a second rack (28) which meshes with the gear (26) is provided. At the end of each second rack (28), an L-shaped rod (29) fixedly connected to the moving seat (16) is installed.