Multi-shaft synchronous lifting equipment

Abstract

The utility model provides a multi-shaft synchronous lifting device comprising a panel used for installing a needle seat for processing a wafer; a base; each lifting device comprises a lifting end, a fixed end and a transmission mechanism, the lifting ends are connected to the panel, the fixed ends are connected to the base, each transmission mechanism comprises an input end, and the input ends are in transmission connection with the lifting ends and used for driving the lifting ends to ascend and descend; the input ends of the lifting devices are in transmission connection with one another through the synchronizing devices, so that the lifting devices synchronously ascend and descend; and the driving device comprises a driving end, and the driving end is in transmission connection with one input end. According to the multi-shaft synchronous lifting equipment, the height of a plane can be synchronously adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a multi-axis synchronous lifting device. Background Art

[0002] In the prior art, when processing a wafer, the processing device for carrying the processed wafer needs to be lifted and adjusted. When using multiple processing devices to process the wafer simultaneously, it is necessary to synchronously lift or lower the height of the processing devices. There are many ways of planar lifting motion, and the way of using a single-axis lift to drive planar motion is the simplest and the accuracy is also easy to meet the requirements. However, for a single axis to obtain high precision, the moving axis needs to be placed at the centroid position of the load, which is not suitable for manual tables. The center of the manual table panel needs to be hollowed out, and the moving axis must be connected from the surrounding. If it is still a single axis, it is a cantilever structure, which is not suitable for high-precision manual tables. Therefore, a device that is suitable for wafer processing and can synchronously adjust the height of the plane where the processing device is located is needed. Summary of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a multi-axis synchronous lifting device that can synchronously adjust the height of the plane.

[0004] The multi-axis synchronous lifting device according to the first aspect embodiment of the utility model includes: a panel for mounting a needle base; a base; a plurality of lifting devices, each lifting device including a lifting end, a fixed end, and a transmission mechanism, the lifting ends are all connected to the panel, the fixed ends are connected to the base, the transmission mechanism includes an input end, the input end is in transmission connection with the lifting end and is used to drive the lifting end to lift and lower; a plurality of synchronous devices that mutually transmit and connect the input ends on the plurality of lifting devices to enable the lifting devices to lift and lower synchronously; a driving device, the driving device includes a driving end, and the driving end is in transmission connection with one of the input ends.

[0005] The multi-axis synchronous lifting device according to the first aspect embodiment of the utility model has at least the following beneficial effects: By driving one lifting device with the driving device and simultaneously using a plurality of synchronous devices to transmit and connect between the lifting devices, when the driving device drives one lifting device, the other lifting devices will also lift and lower synchronously under the transmission of the synchronous devices, so as to ensure that all positions of the panel lift and lower synchronously, thereby ensuring that the needle bases arranged on the panel lift and lower synchronously.

[0006] According to some embodiments of the present utility model, the lifting device includes a housing, a lead screw, a nut, and a moving rod. The housing is fixed on the base. The lead screw is in threaded cooperation with the nut. The lead screw is rotatably connected to the housing. The input end is provided on the lead screw. The nut is slidably connected to the housing. The nut moves relative to the housing along the axial direction of the lead screw. The moving rod is fixedly connected to the nut. The lifting end is provided on the moving rod.

[0007] According to some embodiments of the present utility model, a chute is provided in the housing. The chute is arranged along the axial direction of the lead screw. A key is provided on the nut and / or the moving rod. The key is arranged in the chute so that the moving rod moves along the axial direction of the lead screw when the lead screw rotates.

[0008] According to some embodiments of the present utility model, a gear is provided on the input end. The gear is fixedly connected to the lead screw. One end of the synchronization device is engaged with the gear on one lifting device, and the other end of the synchronization device is engaged with the gear on another lifting device so that the lead screws on multiple synchronization devices rotate synchronously.

[0009] According to some embodiments of the present utility model, the synchronization device includes a transmission rod. Gears are provided at both ends of the transmission rod. The gear at one end of the transmission rod is engaged with the gear on one lifting device, and the gear at the other end of the transmission rod is engaged with the gear on another lifting device.

[0010] According to some embodiments of the present utility model, the synchronization device includes a synchronous belt, a first synchronous pulley, and a second synchronous pulley. The synchronous belt is engaged with the first synchronous pulley and the second synchronous pulley so that the first synchronous pulley and the second synchronous pulley rotate synchronously. The first synchronous pulley is provided at the input end of one lifting device, and the second synchronous pulley is provided at the input end of another lifting device.

[0011] According to some embodiments of the present utility model, it includes four lifting devices, which are successively a first lifting device, a second lifting device, a third lifting device, and a fourth lifting device. A synchronization device is provided between the first lifting device and the second lifting device, a synchronization device is provided between the second lifting device and the third lifting device, a synchronization device is provided between the third lifting device and the fourth lifting device, and the driving device is connected to the input end of any one of the lifting devices.

[0012] According to some embodiments of the present utility model, the driving device includes a bracket and a rotating shaft. The rotating shaft is rotatably connected to the bracket. One end of the rotating shaft is provided with a knob, and the other end of the rotating shaft is provided with a driving end. The driving end is connected to one of the input ends through a synchronization device.

[0013] According to some embodiments of the present utility model, the driving device further includes a buckle and a lever. The buckle is sleeved on the rotating shaft, and the lever is arranged on the buckle to enable the buckle to switch between a first state and a second state. In the first state, the buckle is clamped tightly on the rotating shaft. In the second state, the buckle is disconnected from the rotating shaft. A limiting groove is arranged on the bracket, and the lever is arranged in the limiting groove to limit the rotation angle of the lever along the axial direction of the rotating shaft.

[0014] According to some embodiments of the present utility model, the lifting device is evenly arranged around the outside of the needle base.

[0015] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present utility model. Description of the Drawings

[0016] Figure 1 It is a schematic structural diagram of the multi-axis synchronous lifting device of the present utility model;

[0017] Figure 2 It is a schematic structural diagram of the lifting device of the multi-axis synchronous lifting device of the present utility model;

[0018] Figure 3 It is a schematic cross-sectional view of the lifting device of the multi-axis synchronous lifting device of the present utility model;

[0019] Figure 4 It is a schematic structural diagram of the driving device of the multi-axis synchronous lifting device of the present utility model;

[0020] Figure 5 It is a schematic partial structural diagram of the driving device of the multi-axis synchronous lifting device of the present utility model.

[0021] Reference Numerals in the Drawings:

[0022] 1. Panel; 2. Base; 3. Driving device; 31. Bracket; 32. Rotating shaft; 33. Knob; 34. Buckle; 35. Lever; 36. Limiting groove; 4. Lifting device; 41. Housing; 42. Lead screw; 43. Nut; 44. Moving rod; 5. Synchronization device; 51. Synchronous belt; 52. Synchronous pulley; 6. Needle base; 7. Wafer. Detailed Embodiments

[0023] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where like or similar reference numerals denote like or similar elements or elements having like or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as limiting the present utility model.

[0024] In the description of the present utility model, it should be understood that with respect to the orientation description, such as the upper and lower directions, the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

[0025] In the description of the present utility model, "a plurality" means more than two. If there is a description of the first and the second, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features or implicitly specifying the sequence relationship of the indicated technical features.

[0026] In the description of the present utility model, unless otherwise clearly defined, words such as "set", "installed", and "connected" should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meanings of the above words in the present utility model in combination with the specific content of the technical solution.

[0027] After a circuit pattern is fabricated on a wafer, a pin test (also known as a probe test) is performed. In this process, a socket equipped with tiny needles is used to contact each circuit point on the wafer, and the electrical characteristics (such as resistance, capacitance, current, etc.) are measured to detect whether the chip functions properly. This step can help detect and eliminate defective chips at an early stage, improving the quality and reliability of the product. When performing the detection, multiple probes are used to detect the wafer, and in order to ensure the accuracy of the detection, multiple probes need to be synchronized during sizing to avoid inaccurate probe detection.

[0028] Refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 and Figure 5, the multi-axis synchronous lifting device in the first embodiment of the present utility model includes: a panel 1, a driving device 3, a base 2, a plurality of lifting devices 4 and a plurality of synchronizing devices 5. The panel 1 is used for mounting a probe base 6; wherein the probe base 6 is used to detect a wafer 7. Specifically, a circular hole can be opened on the panel 1, and the wafer 7 is arranged in the circular hole so that the wafer 7 is fixed relative to the bottom plate. The probe base 6 is arranged along the circumference of the circular hole. At this time, the lifting of the panel 1 relative to the base 2 will drive the probes arranged on the probe base 6 to lift relative to the far view. The lifting device 4 includes a lifting end, a fixed end and a transmission mechanism. The lifting ends are all connected to the panel 1, and the fixed ends are connected to the base 2. Thus, when the lifting device 4 lifts, the lifting of the panel 1 relative to the base 2 can be adjusted. The transmission mechanism includes an input end, and the input end is in transmission connection with the lifting end and is used to drive the lifting end to lift. The synchronizing device 5 transmits the input ends on the plurality of lifting devices 4 to each other so that the lifting devices 4 lift synchronously; the driving device 3 includes a driving end, and the driving end is in transmission connection with an input end. By driving the input end on a lifting device 4 to rotate through the driving end of the driving device 3, when the input end on a lifting device 4 rotates, under the action of the synchronous total transmission connection, the input ends on other lifting devices 4 will rotate synchronously. Therefore, the input ends of the lifting devices 4 will synchronously drive the lifting ends to lift synchronously, so as to ensure that the lifting between the lifting devices 4 is synchronous, that is, the positions of the panel 1 for mounting the probe base 6 are lifted synchronously.

[0029] According to some embodiments of the present utility model, the lifting device 4 includes a housing 41, a lead screw 42, a nut 43 and a moving rod 44. The housing 41 is fixed on the base 2. The lead screw 42 is in threaded cooperation with the nut 43. The lead screw 42 is rotatably connected to the housing 41. The input end is arranged on the lead screw 42. The nut 43 is slidably connected to the housing 41. The nut 43 moves relative to the housing 41 along the axial direction of the lead screw 42. The moving rod 44 is fixedly connected to the nut 43. The lifting end is arranged on the moving rod 44. Wherein the driving device 3 drives the input end to rotate, that is, drives the lead screw 42 to rotate. When the lead screw 42 rotates, under the action of the threaded cooperation and the action of the housing 41 restricting the rotation of the nut 43, the nut 43 will move up and down relative to the lead screw 42, thereby driving the moving rod 44 to move up and down. Using the threaded cooperation to convert the rotation of the lead screw 42 into the movement of the moving rod 44 to drive the panel 1 to lift, so that the panel 1 is more stable when lifting, and at the same time, the height of the panel 1 can be adjusted more accurately.

[0030] According to some embodiments of the utility model, a slide groove is provided in the housing 41, and the slide groove is provided along the axial direction of the screw rod 42. A key is provided on the nut 43 and / or the moving rod 44, and the key is provided in the slide groove, so that the moving rod 44 moves along the axial direction of the screw rod 42 when the screw rod 42 rotates. In order to make the nut 43 slide relative to the housing 41 when the screw rod 42 rotates, a slide groove is provided inside the housing 41, and a raised key is provided on the nut 43, so that the nut 43 cannot rotate relative to the housing 41, and can only slide relative to the housing 41 along the axial direction of the screw rod 42 under the drive of the thread. At the same time, the relationship between the nut 43 and the moving rod 44 is relatively fixed, so a raised key can also be provided on the moving rod 44, which can also achieve the effect of limiting the rotation of the nut 43.

[0031] According to some embodiments of the utility model, a gear is provided on the input end, the gear is fixedly connected to the screw rod 42, one end of the synchronization device 5 cooperates with the gear on one lifting device 4, and the other end of the synchronization device 5 cooperates with the gear on another lifting device 4, so that the screw rods 42 on multiple synchronization devices 5 rotate synchronously. In order to make the screw rod 42 rotate more stably, a gear is provided on the input end, and the rotation of the screw rod 42 is driven by the gear. When the gear on the input end cooperates with the synchronization device 5, power can be transmitted more stably.

[0032] According to some embodiments of the utility model, the synchronization device 5 includes a transmission rod, and gears are provided at both ends of the transmission rod. The gear on one end of the transmission rod cooperates with the gear on one lifting device 4, and the gear on the other end of the transmission rod cooperates with the gear on another lifting device 4. Specifically, the gear on the synchronization device 5 and the gear on the input end can be set as bevel gears. At this time, the bevel gears cooperate with each other, and multiple lifting devices 4 can be transmission-connected. Among them, the input end on some lifting devices 4 needs to be transmission-connected with two synchronization devices 5, that is, one lifting device 4 needs to be transmission-connected with two lifting devices 4. After the bevel gear is adopted, the bevel gear on the input end can cooperate with the other two bevel gears, that is, one bevel gear can be transmission-connected with two synchronization devices 5.

[0033] According to some embodiments of the utility model, the synchronization device 5 includes a synchronization belt 51, a first synchronization wheel 52 and a second synchronization wheel 52. The synchronization belt 51 cooperates with the first synchronization wheel 52 and the second synchronization wheel 52 to make the first synchronization wheel 52 and the second synchronization wheel 52 rotate synchronously. The first synchronization wheel 52 is set at the input end of one lifting device 4, and the second synchronization wheel 52 is set at the input end of another lifting device 4. The synchronization belt 51 and the synchronization wheel 52 are used to cooperate, so that the rotation of the screw rods 42 on different lifting devices 4 is synchronized, that is, the transmission efficiency is higher and the transmission accuracy is also higher.

[0034] According to some embodiments of the present utility model, it includes four lifting devices 4. The four lifting devices 4 are successively the first lifting device 4, the second lifting device 4, the third lifting device 4, and the fourth lifting device 4. A synchronization device 5 is provided between the first lifting device 4 and the second lifting device 4, a synchronization device 5 is provided between the second lifting device 4 and the third lifting device 4, and a synchronization device 5 is provided between the third lifting device 4 and the fourth lifting device 4. The driving device 3 is connected to the input end of any one of the lifting devices 4. Specifically, the driving device 3 is connected to the input end of the first lifting device 4 and drives the lead screw 42 on the first lifting device 4 to rotate. At this time, while the first lifting device 4 is lifting and lowering, it also drives the lead screw 42 of the second lifting device 4 to rotate through a synchronization device 5. In turn, when the lead screw 42 of the second lifting device 4 rotates, it drives the lead screw 42 of the third lifting device 4 to rotate through a synchronization device 5, so as to realize the synchronous lifting and lowering of all the lifting devices 4. The input end of the first lifting device 4 is in transmission connection with two synchronization devices 5. One synchronization device 5 enables the first lifting device 4 to be in transmission connection with the driving device 3, and the other synchronization device 5 enables the first lifting device 4 to be in transmission connection with the second lifting device 4. The input end of the second lifting device 4 is in transmission connection with two synchronization devices 5. One synchronization device 5 enables the second lifting device 4 to be in transmission connection with the third lifting device 4, and the other synchronization device 5 enables the first lifting device 4 to be in transmission connection with the second lifting device 4. The input end of the third lifting device 4 is in transmission connection with two synchronization devices 5. One synchronization device 5 enables the second lifting device 4 to be in transmission connection with the third lifting device 4, and the other synchronization device 5 enables the third lifting device 4 to be in transmission connection with the fourth lifting device 4. And the input end of the fourth lifting device 4 only needs to be connected to one synchronization device 5. That is to say, two synchronizing wheels 52 are provided on the lead screws 42 of the first lifting device 4, the second lifting device 4, and the third lifting device 4, and only one synchronizing wheel 52 is provided on the lead screw 42 of the fourth lifting device 4.

[0035] According to some embodiments of the present utility model, the driving device 3 includes a bracket 31 and a rotating shaft 32. The rotating shaft 32 is rotatably connected to the bracket 31. One end of the rotating shaft 32 is provided with a knob 33, and the other end of the rotating shaft is provided with a driving end. The driving end is connected to an input end through a synchronization device 5. The synchronization device 5 is used to transmit the power of the driving device 3 to the input end, so that the lead screw 42 of the lifting device 4 rotates. That is, when the knob 33 is rotated, the knob 33 will drive the rotating shaft 32 to rotate. When the rotating shaft 32 rotates, it will drive the lifting device 4 through the synchronization device 5, so that the lead screw 42 rotates, thereby adjusting the height of the lifting device 4.

[0036] According to some embodiments of the present utility model, the driving device 3 further includes a buckle 34 and a lever 35. The buckle 34 is sleeved on the rotating shaft 32, and the lever 35 is arranged on the buckle 34 to enable the buckle 34 to switch between a first state and a second state. In the first state, the buckle 34 is clamped on the rotating shaft 32. In the second state, the buckle 34 is disconnected from the rotating shaft 32. A limiting groove 36 is provided on the bracket 31, and the lever 35 is arranged in the limiting groove 36 to limit the rotation angle of the lever 35 along the axial direction of the rotating shaft 32. When the rotating shaft 32 is rotated by the knob 33, the lead screw 42 can be rotated quickly. When the rotating shaft 32 is rotated by using the lever 35, the height of the lifting device 4 can be adjusted more precisely. Specifically, first adjust the lever 35 to loosen the buckle 34 from the rotating shaft 32. At this time, the height of the lifting device 4 can be quickly adjusted by the knob 33. After adjusting to the corresponding position, by adjusting the lever 35, the buckle 34 is fixedly clamped on the rotating shaft 32. At this time, by rotating the lever 35 around the axial direction of the rotating shaft 32, the lifting height of the lifting device 4 can be precisely and finely adjusted. At the same time, the lever 35 can only rotate within a certain angle under the limitation of the limiting groove 36, avoiding excessive rotation angle of the lever 35 and resulting in an excessive lifting range of the lifting device 4.

[0037] According to some embodiments of the present utility model, the lifting device 4 is evenly arranged around the outside of the needle base 6. By evenly arranging the lifting device 4 outside the needle base 6, the supporting points of the lifting device 4 on the panel 1 are more uniform, and the lifting of the panel 1 is also more stable.

[0038] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art to which the present utility model pertains, various changes can be made without departing from the gist of the present utility model.

Claims

1. A multi-axis synchronous lifting device, characterized in that, Comprising: A panel for mounting a needle holder; A base; A plurality of lifting devices, each lifting device including a lifting end, a fixed end and a transmission mechanism. The lifting ends are all connected to the panel, the fixed ends are connected to the base, and the transmission mechanism includes an input end which is in transmission connection with the lifting end and is used for driving the lifting end to lift; A plurality of synchronizing devices which transmit the input ends on the plurality of lifting devices to each other to enable the lifting devices to lift synchronously; A driving device including a driving end which is in transmission connection with one of the input ends.

2. The multi-axis synchronous lifting device according to claim 1, wherein The lifting device includes a housing, a lead screw, a nut and a moving rod. The housing is fixed on the base, the lead screw is in threaded cooperation with the nut, the lead screw is rotatably connected to the housing, the input end is arranged on the lead screw, the nut is slidably connected to the housing, the nut moves axially along the lead screw relative to the housing, the moving rod is fixedly connected to the nut, and the lifting end is arranged on the moving rod.

3. The multi-axis synchronous lifting device according to claim 2, wherein A chute is arranged in the housing and is arranged axially along the lead screw. A key is arranged on the nut and / or the moving rod, and the key is arranged in the chute so that the moving rod moves axially along the lead screw when the lead screw rotates.

4. The multi-axis synchronous lifting device according to claim 3, wherein, A gear is arranged on the input end and is fixedly connected to the lead screw. One end of the synchronizing device is engaged with the gear on one lifting device, and the other end of the synchronizing device is engaged with the gear on another lifting device to enable the lead screws on the plurality of synchronizing devices to rotate synchronously.

5. The multi-axis synchronous lifting device according to claim 4, wherein The synchronizing device includes a transmission rod, and gears are arranged at both ends of the transmission rod. The gear at one end of the transmission rod is engaged with the gear on one lifting device, and the gear at the other end of the transmission rod is engaged with the gear on another lifting device.

6. The multi-axis synchronous lifting device according to claim 3, wherein The synchronizing device includes a synchronous belt, a first synchronous pulley and a second synchronous pulley. The synchronous belt is engaged with the first synchronous pulley and the second synchronous pulley to enable the first synchronous pulley and the second synchronous pulley to rotate synchronously. The first synchronous pulley is arranged at the input end of one lifting device, and the second synchronous pulley is arranged at the input end of another lifting device.

7. The multi-axis synchronous lifting device according to claim 6, wherein, Four lifting devices are included. The four lifting devices are successively a first lifting device, a second lifting device, a third lifting device and a fourth lifting device. A synchronizing device is arranged between the first lifting device and the second lifting device, a synchronizing device is arranged between the second lifting device and the third lifting device, a synchronizing device is arranged between the third lifting device and the fourth lifting device, and the driving device is connected to the input end of any one of the lifting devices.

8. The multi-axis synchronous lifting device according to claim 7, wherein, The driving device includes a bracket and a rotating shaft. The rotating shaft is rotatably connected to the bracket. A knob is arranged at one end of the rotating shaft, and a driving end is arranged at the other end of the rotating shaft. The driving end is connected to one of the input ends through a synchronizing device.

9. The multi-axis synchronous lifting device according to claim 8, wherein, The driving device further includes a buckle and a lever. The buckle is sleeved on the rotating shaft, and the lever is arranged on the buckle to switch the buckle between a first state and a second state; In the first state, the buckle is clamped on the rotating shaft; in the second state, the buckle is disconnected from the rotating shaft. A limiting groove is provided on the bracket, and the lever is arranged in the limiting groove to limit the rotation angle of the lever along the axial direction of the rotating shaft.

10. The multi-axis synchronous lifting device according to claim 7, wherein The lifting device is uniformly arranged around the outside of the needle seat.

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