Wafer clamping device

Abstract

The utility model relates to the technical field of wafer transfer, in particular to a wafer clamping device, which comprises a base, a sliding table cylinder and two clamping pieces, and is characterized in that the sliding table cylinder is arranged on the base; the two clamping pieces can be close to or away from each other, at least one of the two clamping pieces is in transmission connection with the driving end of the sliding table air cylinder, and one of the clamping pieces is provided with a limiting screw hole. The limiting assembly comprises a limiting screw, at least part of the limiting screw is located between the two clamping pieces and can be in threaded fit with the limiting screw hole, the limiting screw is arranged to be located outside the clamping piece with the limiting screw hole, the length of the limiting screw is adjustable, and the two clamping pieces are close to each other and stopped at the position abutting against the limiting screw. According to the above structure, by adjusting the position of the limiting screw, when the two clamping pieces are close to each other, the clamping piece without the limiting screw abuts against the limiting screw, so that the two clamping pieces cannot be further close to each other, the wafer is prevented from being broken by clamping, and the wafer can be prevented from falling off.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer transfer, in particular to a wafer clamping device. Background Art

[0002] After the wafer is thinned, a lot of small silicon slag particles will adhere to the surface of the wafer, and it needs to be cleaned at multiple cleaning stations. Therefore, a handling and clamping device is required to first clamp the wafer and then send it to each cleaning station.

[0003] The existing handling and clamping devices mostly adopt a single-axis cylinder to drive a rack and pinion mechanism to drive two jaws to approach or separate from each other to complete the clamping and release of the wafer. Among them, it is necessary to adjust the pressure of the cylinder to adjust the clamping force on the wafer, and it is necessary to continuously debug to find the appropriate pressure value. Moreover, if the pressure is small, the wafer is likely to fall off, and if the pressure is large, the wafer is likely to be clamped and broken.

[0004] Therefore, it is urgent to research a wafer clamping device to solve the problem that the clamping force of the cylinder is difficult to adjust, resulting in the wafer falling off or being clamped and broken. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a wafer clamping device to solve the problem that the clamping force of the cylinder in the prior art is difficult to adjust, resulting in the wafer falling off or being clamped and broken.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] A wafer clamping device, comprising:

[0008] A base;

[0009] A slide table cylinder, which is arranged on the base;

[0010] Two clamping members, the two clamping members can approach or separate from each other, and at least one of them is in transmission connection with the driving end of the slide table cylinder, and one of the clamping members is provided with a limit screw hole;

[0011] A limit assembly, the limit assembly includes a limit screw, at least part of the limit screw is located between the two clamping members and can be in threaded cooperation with the limit screw hole, and the limit screw is arranged such that the length located outside the clamping member having the limit screw hole is adjustable, and the two clamping members approach each other and stop at a position where they abut against the limit screw.

[0012] As an optional technical solution of a wafer clamping device, the limit assembly further includes a locking nut, the locking nut is in threaded cooperation with the limit screw and can abut against the clamping member having the limit screw hole.

[0013] As an alternative technical solution of a wafer clamping device, the slide cylinder includes a slide base, a sliding shaft, a connecting block and a driving assembly. There are two sliding shafts, both of which are slidably arranged on the slide base and are connected to the connecting block. The driving end is located on the connecting block, and the driving assembly is arranged on the slide base and is in transmission connection with the sliding shaft.

[0014] As an alternative technical solution of a wafer clamping device, the driving assembly includes a driving member, a gear and a rack. The driving member is arranged on the slide base. The gear is rotatably arranged on the slide base and is in transmission connection with the output end of the driving member. The rack is slidably arranged on the slide base, meshes with the gear and is in transmission connection with the sliding shaft to drive the sliding shaft to move synchronously.

[0015] As an alternative technical solution of a wafer clamping device, both the gear and the rack are made of stainless steel.

[0016] As an alternative technical solution of a wafer clamping device, the slide cylinder further includes a stroke adjusting assembly for adjusting the moving stroke of the driving end of the slide cylinder.

[0017] As an alternative technical solution of a wafer clamping device, the clamping member includes a base rod and a clamping rod. The base rod includes a first base connection portion and a second base connection portion. The first base connection portion is connected to the driving end, and the second base connection portion is connected to the clamping rod. The clamping rod is used for clamping the wafer. In the width direction, the distance L1 between the two first base connection portions is less than the distance L2 between the two second base connection portions.

[0018] As an alternative technical solution of a wafer clamping device, the clamping rod includes a clamping body and a contact member. The contact member is arranged on the clamping body and is used for abutting against the wafer when the two clamping rods are close to each other.

[0019] As an alternative technical solution of a wafer clamping device, there are four contact members. The four contact members are divided into two groups. Two contact members in each group are spaced apart on the clamping body. When the two clamping members are close to each other and clamp the wafer, the four contact members are located circumferentially around the wafer, and the center of the wafer coincides with the center of the circumcircle of the four contact members.

[0020] As an alternative technical solution of a wafer clamping device, the clamping body includes a vertical portion and an arc portion connected to each other. One end of the vertical portion far from the arc portion is connected to the second base connection portion, and the arc portion can surround the circumference of the wafer.

[0021] The beneficial effects of the present utility model are:

[0022] The present utility model provides a wafer clamping device, which includes a slide cylinder. Among the two clamping members, at least one is connected to the driving end of the slide cylinder to achieve the mutual approach or separation of the two. Wherein, the limiting component includes a limiting screw, the limiting screw is in threaded fit with the limiting screw hole of the clamping member, and the length of the limiting screw located outside the clamping member is adjustable. When the two clamping members approach each other, the clamping member without the limiting screw abuts against the limiting screw, so that the two clamping members cannot approach further, thereby avoiding breaking the wafer. At the same time, the position of the limiting screw can be adjusted so that the distance between the two clamping members when they approach is not greater than the outer diameter of the wafer, so as to avoid the wafer from falling. Description of the Drawings

[0023] Figure 1 It is a schematic structural diagram of the wafer clamping device in the embodiment of the present utility model.

[0024] In the figure:

[0025] 1000, wafer;

[0026] 100, base;

[0027] 200, slide cylinder; 210, stroke adjustment component;

[0028] 300, clamping member; 310, base rod; 320, clamping rod; 321, clamping body; 3211, mounting plate; 3212, vertical part; 3213, arc part; 322, contact part;

[0029] 400, limiting component; 410, limiting screw; 420, locking nut. Detailed Embodiment

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0031] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0032] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected" and "coupled" shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0033] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, in which the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0034] As Figure 1As shown, this embodiment provides a wafer clamping device, which includes a base 100, a slide cylinder 200, and two clamping members 300. The slide cylinder 200 is disposed on the base 100. The two clamping members 300 can move toward or away from each other, and at least one of the two is in transmission connection with the driving end of the slide cylinder 200. One of the clamping members 300 is provided with a limiting screw hole. The limiting assembly 400 includes a limiting screw 410. At least a portion of the limiting screw 410 is located between the two clamping members 300 and can be threadedly engaged with the limiting screw hole. The limiting screw 410 is arranged to be located outside the clamping member 300 having the limiting screw hole and has an adjustable length. The two clamping members 300 move toward each other and are stopped at a position abutting the limiting screw 410. The two clamping members 300 can move toward or away from each other along a first direction, and the limiting screw 410 extends along the first direction. The limiting screw 410 can be screwed to adjust the distance between the nut on the limiting screw 410 and the clamping member 300 having the limiting screw hole.

[0035] With the help of the above-mentioned structural setting, when the two clamping members 300 approach each other, the clamping member 300 without the limiting screw 410 abuts against the limiting screw 410, so that the two clamping members 300 cannot get closer, thereby avoiding breaking the wafer 1000. At the same time, by adjusting the position of the limiting screw 410, when the two clamping members 300 clamp the wafer 1000, the distance between the two clamping members 300 is not greater than the outer diameter of the wafer 1000, so as to avoid the wafer 1000 from falling.

[0036] To prevent the position of the limit screw 410 from automatically changing, in some embodiments, the limit assembly 400 further includes a locking nut 420. The locking nut 420 is threadedly engaged with the limit screw 410 and is capable of abutting the clamping member 300 having the limit screw hole. When the locking nut 420 abuts the clamping member 300, it locks the limit screw 410 and the clamping member 300, thereby preventing the position of the limit screw 410 from changing and losing the hard limit function, thereby preventing the wafer 1000 from being crushed or falling.

[0037] To accommodate wafers 1000 of varying sizes, in some embodiments, the slide cylinder 200 further includes a stroke adjustment assembly 210 for adjusting the travel of the drive end of the slide cylinder 200. The specific structure and operating principle of the stroke adjustment assembly 210 of the slide cylinder 200 are well known to those skilled in the art and are not limited herein.

[0038] To improve the stability of the moving process of the clamping member 300, in some embodiments, the slide cylinder 200 is a double-axis cylinder. Specifically, the slide cylinder 200 includes a slide base, sliding shafts, a connecting block, and a driving assembly. There are two sliding shafts. Both sliding shafts are slidably disposed on the slide base and are connected to the connecting block. The driving end is located on the connecting block. The driving assembly is disposed on the slide base and is in transmission connection with the sliding shafts. The arrangement of the two sliding shafts makes the movement of the connecting block more stable, avoiding shaking or twisting, which may cause the wafer 1000 at the end of the clamping member 300 to fall off.

[0039] Considering the transmission reliability, in some embodiments, the driving assembly includes a driving member, a gear, and a rack. The driving member is disposed on the slide base. The gear is rotatably disposed on the slide base and is in transmission connection with the output end of the driving member. The rack is slidably disposed on the slide base, meshes with the gear, and is in transmission connection with the sliding shafts to drive the sliding shafts to move synchronously. Among them, the driving member can be a pneumatic motor. In other embodiments, the slide cylinder 200 can also be implemented in other ways in the prior art.

[0040] In the transmission mechanism in the prior art, considering the environmental requirements, it needs to be made of plastic material, which is prone to wear, thus affecting the later transmission accuracy. In some embodiments, both the gear and the rack are made of stainless steel. Since the gear and the rack in this embodiment are both located inside the slide base, they can be made of stainless steel, which can also meet the environmental requirements; in addition, the stainless steel gear and rack have high hardness and are not easily worn, which is beneficial to ensuring the transmission accuracy.

[0041] In some embodiments, the clamping member 300 includes a base rod 310 and a clamping rod 320. The base rod 310 includes a first base connection portion and a second base connection portion. The first base connection portion is connected to the driving end, and the second base connection portion is connected to the clamping rod 320. The clamping rod 320 is used to clamp the wafer 1000. In the width direction, the distance L1 between the two first base connection portions is less than the distance L2 between the two second base connection portions. This setting can minimize the size of the slide cylinder 200 and reduce the cost.

[0042] The parts in contact with the wafer 1000 have high requirements and high processing costs. To reduce the processing costs, in some embodiments, the clamping rod 320 includes a clamping body 321 and a contact member 322. The contact member 322 is disposed on the clamping body 321 and is used to abut against the wafer 1000 when the two clamping rods 320 are close to each other. The separate setting of the clamping rod 320 makes the processing requirements of the clamping body 321 that is not in contact with the wafer 1000 lower, reducing the processing costs.

[0043] There are four contact members 322. The four contact members 322 are divided into two groups. Two contact members 322 in each group are spaced apart and arranged on the clamping body 321. When the two clamping members 300 approach and clamp the wafer 1000, the four contact members 322 are located circumferentially around the wafer 1000, and the center of the wafer 1000 coincides with the center of the circumscribed circle of the four contact members 322. This setting can ensure that the center of gravity of the wafer 1000 does not shift when it is carried, improving the safety of the transfer process.

[0044] Among them, the contact member 322 is a columnar structure. There are four mounting parts on the clamping body 321, and the contact member 322 is fixed to the mounting parts. Among them, the mounting part includes two mounting plates 3211 arranged at intervals along the axis direction of the wafer 1000. The contact member 322 can be clamped between the two mounting plates 3211. A screw can pass through the mounting hole on the mounting plate 3211 and be screwed into the threaded hole of the contact member 322. Among them, one of the two mounting plates 3211 is on the upper side and the other is on the lower side, and the mounting hole is arranged on the upper mounting plate 3211. Further, the clamping body 321 is also provided with a positioning boss, and the positioning boss extends along a direction perpendicular to the axis of the wafer 1000. A positioning groove is recessed on the side wall of the contact member 322. When the contact member 322 is installed between the two mounting plates 3211, the positioning boss can be inserted into the positioning groove.

[0045] In some embodiments, the material of the contact member 322 can be rubber or silica gel.

[0046] To reduce the space required for the movement of the clamping body 321, in some embodiments, the clamping body 321 includes a connected vertical portion 3212 and an arc portion 3213. One end of the vertical portion 3212 far from the arc portion 3213 is connected to the second base connection portion, and the central angle of the arc portion 3213 is between 60° and 90°. Among them, in this embodiment, the central angle of the arc portion 3213 is 70°. When in use, the two arc portions 3213 of the two clamping bodies 321 are arranged with their openings facing each other and surround the outer periphery of the wafer 1000.

[0047] Obviously, the above embodiments of the present invention are merely examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A wafer clamping device, characterized in that, include: Base (100); A slide cylinder (200), the slide cylinder (200) being arranged on the base (100); Two clamping members (300), the two clamping members (300) can move closer to or farther from each other, and at least one of the two is in transmission connection with the driving end of the slide cylinder (200), and one of the clamping members (300) is provided with a limiting screw hole; A limiting assembly (400), the limiting assembly (400) includes a limiting screw (410), at least a portion of the limiting screw (410) is located between the two clamping members (300) and can be threadedly engaged with the limiting screw hole, the limiting screw (410) is arranged to be located outside the clamping member (300) having the limiting screw hole and has an adjustable length, and the two clamping members (300) are close to each other and stopped at a position abutting the limiting screw (410).

2. The wafer clamping device according to claim 1, characterized in that, The limiting assembly (400) further comprises a locking nut (420), wherein the locking nut (420) is threadedly matched with the limiting screw (410) and can abut against the clamping member (300) having the limiting screw hole.

3. The wafer holding device according to claim 1, wherein The slide cylinder (200) comprises a slide seat, a sliding shaft, a connecting block and a driving assembly. Two sliding shafts are provided. Both sliding shafts are slidably arranged on the slide seat and are connected to the connecting block. The driving end is located on the connecting block. The driving assembly is arranged on the slide seat and is in transmission connection with the sliding shaft.

4. The wafer clamping device according to claim 3, wherein The driving assembly includes a driving member, a gear and a rack. The driving member is arranged on the slide seat. The gear is rotatably arranged on the slide seat and is transmission-connected to the output end of the driving member. The rack is slidably arranged on the slide seat and meshes with the gear and is transmission-connected to the sliding shaft to drive the sliding shaft to move synchronously.

5. The wafer clamping device according to claim 4, characterized in that, The gear and the rack are both made of stainless steel.

6. The wafer holding device according to claim 1, wherein The slide cylinder (200) further comprises a stroke adjustment component (210), wherein the stroke adjustment component (210) is used to adjust the movement stroke of the driving end of the slide cylinder (200).

7. The wafer clamping device according to any one of claims 1-6, characterized in that, The clamping member (300) includes a base rod (310) and a clamping rod (320), the base rod (310) includes a first base connecting portion and a second base connecting portion, the first base connecting portion is connected to the driving end, and the second base connecting portion is connected to the clamping rod (320), the clamping rod (320) is used to clamp the wafer (1000), and in the width direction, the distance L1 between the two first base connecting portions is smaller than the distance L2 between the two second base connecting portions.

8. The wafer clamping device according to claim 7, characterized in that, The clamping rod (320) comprises a clamping body (321) and a contact member (322). The contact member (322) is provided on the clamping body (321) and is used for contacting the wafer (1000) when the two clamping rods (320) are close to each other.

9. The wafer clamping device according to claim 8, wherein, There are four contact members (322), and the four contact members (322) are divided into two groups. Two contact members (322) in each group are spaced apart and arranged on the clamping body (321). When the two clamping members (300) approach and clamp the wafer (1000), the four contact members (322) are circumferentially distributed around the wafer (1000), and the center of the wafer (1000) coincides with the center of the circumscribed circle of the four contact members (322).

10. The wafer clamping device according to claim 8, wherein The clamping body (321) includes a vertical portion (3212) and an arc portion (3213) connected to each other. One end of the vertical portion (3212) away from the arc portion (3213) is connected to the second base connection portion, and the arc portion (3213) can surround the circumference of the wafer (1000).

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