Lifting door and wafer carrier lifting transmission equipment

Abstract

The utility model discloses a lifting door and wafer carrier lifting transmission equipment, and relates to the technical field of semiconductor equipment, the lifting door is applied to the wafer carrier lifting transmission equipment, and the lifting door comprises a fixed door plate which lifts along a first direction; the movable door plate is movably arranged on the fixed door plate in the second direction, the movable door plate and the fixed door plate synchronously ascend and descend, and a part of a lifting path coverage area is overlapped with the projection of the first transfer opening in the second direction; the expansion pieces are arranged on the side, facing the fixed door plate, of the movable door plate at intervals; the fixed door plate ascends, so that the movable door plate covers the first transfer opening, and then the movable door plate is driven by the multiple expansion pieces to move in the direction close to the first transfer opening so as to seal the first transfer opening. The lifting door at least can solve the problem that the lifting door is poor in sealing performance.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a lifting door and a wafer carrier lifting and transferring device. Background Art

[0002] During the wafer transfer process, a cassette is placed in the cavity and evacuated. When the pressure inside reaches the same as that of the vacuum environment, the lifting door is opened, and a vacuum manipulator extends into the cassette inside the cavity to pick up the wafer and transfer it to multiple process chambers.

[0003] In the prior art, the lifting door and the cavity are sealed by an airbag, and the airbag sealing method results in poor sealing performance of the lifting door.

[0004] Therefore, it is necessary to provide a new lifting door and a wafer carrier lifting and transferring device to solve the above problems existing in the prior art. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a lifting door and a wafer carrier lifting and transferring device, which can at least solve the following technical problems:

[0006] 1. The problem of poor sealing performance of the lifting door in the prior art;

[0007] 2. The problem that it is impossible to detect whether the lifting door is locked and sealed in place in the prior art.

[0008] To achieve the above purpose, the technical solution of the utility model is as follows:

[0009] A lifting door is applied to a wafer carrier lifting and transferring device, and the wafer carrier lifting and transferring device includes a cavity. The cavity is provided with at least one first transfer port for wafer cassette transfer along a second direction. The lifting door is characterized in that it includes:

[0010] A fixed door panel that moves up and down along a first direction;

[0011] A movable door panel that is movably arranged along the second direction on the fixed door panel. The movable door panel moves up and down synchronously with the fixed door panel, and a part of the area covered by the lifting path overlaps with the projection of the first transfer port along the second direction;

[0012] A plurality of telescopic devices are arranged at intervals on the side of the movable door panel facing the fixed door panel, so as to generate a relative displacement between the movable door panel and the fixed door panel in the second direction. The plurality of telescopic devices are used to drive the side of the movable door panel away from the fixed door panel to move along the second direction to seal or open the first transfer port;

[0013] Wherein, the fixed door panel rises, enabling the movable door panel to cover the first transfer port, and then the movable door panel is driven by a plurality of the telescopic devices to move towards the direction close to the first transfer port to seal the first transfer port.

[0014] By adopting the above technical solution, when the telescopic device is activated, the telescopic device pushes the movable door panel to move in a first direction away from the fixed door panel, that is, towards the first transfer port, increasing the relative acting force between the movable door panel and the side wall of the cavity, thereby improving the sealing performance between the movable door panel and the side wall of the cavity and solving the problem of poor sealing performance of the existing lifting door.

[0015] Optionally, a passing area for a plurality of the telescopic devices to pass through is provided on the surface of the fixed door panel facing the movable door panel;

[0016] The telescopic device has a driving end and a fixed end. The fixed end is fixedly connected to the surface of the movable door panel facing the fixed door panel, and the driving end passes through the passing area and is fixedly connected to the surface of the fixed door panel away from the movable door panel;

[0017] When the telescopic device is in a retracted state, the movable door panel fits with the fixed door panel.

[0018] By adopting the above technical solution, the telescopic device passes through the fixed door panel, and when the telescopic device is in a retracted state, the movable door panel fits with the fixed door panel, reducing the overall thickness of the movable door panel and the fixed door panel. At the same time, the fixed end of the telescopic device is arranged on the movable door panel, making the force on the movable door panel more uniform and facilitating the sealing process.

[0019] Optionally, a plurality of the telescopic devices are evenly distributed around the edge of the movable door panel;

[0020] In the working state, a plurality of the telescopic devices jointly drive one side of the movable door panel away from the fixed door panel to move in a second direction.

[0021] By adopting the above technical solution, a plurality of telescopic devices are activated simultaneously during the working process to jointly drive the movable door panel to move, enhancing the stability of the movement of the movable door panel and facilitating the sealing process.

[0022] Optionally, a fixing member is fixedly arranged on the fixed door panel. The fixing member includes a strip-shaped plate and a fixing rod. Two ends of the fixing rod are respectively connected to the fixed door panel and the strip-shaped plate;

[0023] The driving end is fixedly arranged on the strip-shaped plate, and the fixed end is fixedly arranged on the movable door panel.

[0024] By adopting the above technical solution, the driving end is fixedly arranged on the strip board, and the fixed end is fixedly arranged on the movable door panel. When the expander is started, the movable door panel and the fixed door panel can be pushed to move away from or close to each other in the first direction, facilitating the pushing of the movable door panel to seal or open the first transfer port on the side wall of the cavity.

[0025] Optionally, it further includes a detection component. The detection component includes a sensor and a baffle. The baffle is fixedly arranged on the movable door panel, and the sensor is fixedly arranged on the fixed door panel;

[0026] In the working state, the movable door panel moves, driving the baffle to pass by the sensor to detect the position of the movable door panel.

[0027] By adopting the above technical solution, when the movable door panel moves, it drives the baffle to move synchronously. During the movement, the baffle passes by the sensor, and the sensor records the position of the baffle to measure the position of the movable door panel, facilitating the detection of whether the movable door panel is locked in place.

[0028] Optionally, a traction member is penetrated through the fixed door panel. One end of the traction member is fixedly arranged on the movable door panel, and the other end is fixedly arranged on the baffle; a reset member is sleeved on the traction member to drive the movable door panel to reset;

[0029] The end of the traction member has a positioning block, and a positioning hole is formed on the movable door panel. The positioning block penetrates through the positioning hole to position the traction member.

[0030] By adopting the above technical solution, the traction member penetrates through the fixed door panel. When the movable door panel moves, it drives the baffle to move towards the direction close to the fixed door panel through the traction member, facilitating the sensor to detect the baffle. At the same time, the cooperation of the positioning block and the positioning hole facilitates the determination of the position of the baffle, reducing the possibility of the baffle shifting.

[0031] Optionally, it further includes a main body frame. The main body frame is fixedly arranged on the side wall of the cavity. The fixed door panel is movably arranged on the main body frame. A second transfer port corresponding to the first transfer port is formed on the main body frame;

[0032] An elevator is arranged on the main body frame. The fixed door panel is connected to the elevator. The elevator is used to drive the fixed door panel to lift in the first direction. A limiting plate is fixedly arranged on the main body frame to limit the movement position of the fixed door panel.

[0033] By adopting the above technical solution, the positions of the first transfer port and the second transfer port correspond and are communicated with each other, without interfering with the movement of the wafer cassette. At the same time, the limiting plate is used to limit the positions of the fixed door panel and the movable door panel, reducing the possibility of the fixed door panel and the movable door panel detaching from the main body frame.

[0034] Optionally, a rotating member is provided at the end of the lifter. The rotating member includes a first connecting member and a second connecting member that are rotatably connected to each other. The lifter and the fixed door panel are respectively fixedly provided on the first connecting member and the second connecting member.

[0035] By adopting the above technical solution, the rotating member enables the fixed door panel to rotate on the lifter, facilitating the maintenance of the fixed door panel or the movable door panel.

[0036] A wafer carrier lifting and transferring device includes a cavity and a lifting door. A first transfer opening is formed in the side wall of the cavity, and a sealing ring is provided on the side wall of the cavity. The sealing ring is arranged around the first transfer opening and protrudes from the side wall of the cavity.

[0037] In the working state, the fixed door panel rises, causing the movable door panel to cover the first transfer opening. The movable door panel is driven by a plurality of telescopic devices to approach the first transfer opening along a second direction, squeezing the sealing ring to seal the first transfer opening.

[0038] By adopting the above technical solution, the fixed door panel and the movable door panel move synchronously along the second direction to cover the first transfer opening. The movable door panel moves along the first direction, applying a force to the side wall of the cavity and squeezing the sealing ring, thereby improving the sealing performance of the lifting door.

[0039] Optionally, it further includes a process chamber, a first manipulator, and a second manipulator.

[0040] The first manipulator is movably arranged inside the cavity, and the second manipulator is movably arranged outside the cavity. The first manipulator is used to transfer the wafer cassette inside the cavity, and the second manipulator is used to transfer the wafer cassette in the cavity to the process chamber.

[0041] By adopting the above technical solution, the fixed door and the movable door move to open the first transfer opening. The second manipulator moves outside the cavity to transfer the wafers in the cavity to the process chamber, or transfer the external wafers to the cavity.

[0042] The beneficial effects of the lifting door and the wafer carrier lifting and transferring device provided by the present invention at least include:

[0043] 1. The movable door panel applies pressure to the side wall of the cavity and squeezes the sealing ring, thereby improving the sealing performance between the movable door panel and the side wall of the cavity and solving the problem of poor sealing performance of the existing lifting door.

[0044] 2. A sensor is provided on the fixed door panel, which can detect the position of the baffle to detect the position of the movable door panel, thereby determining whether the locking is in place.

[0045] 3. When the fixed door panel or the movable door panel needs to be maintained or repaired, run it to the lowest position, and the door can be manually opened outward for repair through the rotating part. Brief Description of the Drawings

[0046] Figure 1 Schematic diagram of the position of the lifting door according to an embodiment of the present invention;

[0047] Figure 2 Schematic diagram of the main structure of the lifting door according to an embodiment of the present invention;

[0048] Figure 3 Schematic diagram of the position of the telescopic device in the lifting door according to an embodiment of the present invention;

[0049] Figure 4 Schematic diagram of the connection method of the telescopic device in the lifting door according to an embodiment of the present invention;

[0050] Figure 5 Schematic diagram of the structure of the lifting assembly according to an embodiment of the present invention;

[0051] Figure 6 Schematic diagram of the structure and installation position of the detection assembly according to an embodiment of the present invention;

[0052] Figure 7 Schematic diagram of the installation position of the positioning block according to an embodiment of the present invention;

[0053] Figure 8 Schematic diagram of the usage scenario of the wafer carrier lifting and transferring device according to an embodiment of the present invention.

[0054] Reference Signs:

[0055] 100, cavity; 110, first transfer port; 120, sealing ring; 130, first manipulator; 140, sealing groove; 150, wafer cassette; 200, main body frame; 201, side frame; 202, top frame; 203, bottom frame; 210, second transfer port; 220, limiting plate; 230, outer door cover; 300, first door panel; 310, fixing part; 311, strip plate; 312, fixing rod; 320, traction part; 321, cylinder body; 322, reset part; 323, backing plate; 330, positioning block; 340, fixing block; 350, passing area; 400, second door panel; 410, positioning hole; 420, fixing hole; 430, cover plate; 500, telescopic device; 510, driving end; 520, fixed end; 600, lifter; 610, rotating part; 611, first connecting part; 612, second connecting part; 620, sliding table; 630, guide rod; 700, detection assembly; 710, sensor; 711, transmitting end; 712, receiving end; 720, baffle; 800, process chamber; 900, second manipulator; D1, first direction; D2, second direction. Detailed implementation manners

[0056] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without making creative efforts shall fall within the protection scope of the present utility model. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings as understood by those of ordinary skill in the art to which the present utility model pertains. The words such as "including" used herein are intended to mean that the elements or items appearing before this word cover the elements or items listed after this word and their equivalents, without excluding other elements or items.

[0057] The specific implementation manners of the present utility model will be further described in detail below with reference to the accompanying drawings.

[0058] Refer to Figure 1 、 Figure 2 and Figure 3 . An embodiment of the present utility model provides a lifting door, which is applied to a wafer carrier lifting and transferring device. The wafer carrier lifting and transferring device includes a cavity 100. The cavity 100 has an accommodation space inside. The accommodation space is used for placing a wafer cassette 150, and the wafer cassette 150 can move in the accommodation space in the vertical direction. A first transfer opening 110 is formed on the side wall of the cavity 100, and the wafer cassette 150 can be transported to the outside from the first transfer opening 110.

[0059] To better describe the present utility model, the first direction D1 and the second direction D2 are defined in the following embodiments. Among them, the first direction D1 represents the up-and-down position direction in the vertical direction in space. Specifically in this embodiment, it is the moving direction of the wafer cassette 150 in the accommodation space. The second direction D2 represents the front-and-back position in the horizontal direction in space. Specifically in this embodiment, it is the orientation of the first transfer opening 110 formed on the side wall of the cavity 100.

[0060] Among them, the lifting door includes a main frame 200, which is composed of two side frames 201, a top frame 202 and a bottom frame 203, and forms a rectangular frame around it. Whether to install a support plate inside the frame can be selected according to the actual working conditions; the main frame 200 is fixedly arranged on the side wall of the cavity 100 where the first transfer port 110 is opened, so as to fix the main frame 200 and the cavity 100. The fixing method can be selected as clamping, welding or bolt fixing, etc. In this embodiment, it is preferably fixed and connected by bolting the two; and a second transfer port 210 is opened on the main frame 200, and the second transfer port 210 communicates with the first transfer port 110, and their positions correspond; the lifting door also includes a fixed door panel and a movable door panel. In order to facilitate distinction in the figure, in this embodiment, the fixed door panel is named the first door panel 300, and the movable door panel is named the second door panel 400. Among them, the first door panel 300 is arranged on the main frame 200 and can slide on the main frame 200 along the first direction D1. At the same time, the second door panel 400 is movably arranged on the first door panel 300 along the second direction D2. During the working process, the second door panel 400 and the first door panel 300 can be lifted and lowered synchronously, and a part of the area covered by their lifting path overlaps with the projection of the first transfer port 110 along the second direction D2, so that the second door panel 400 and the first door panel 300 can close the first transfer port; a plurality of telescopic devices 500 are fixedly arranged on the second door panel 400 by bolting. The plurality of telescopic devices 500 are spaced apart on the end face of the second door panel 400 facing the first door panel 300. When the telescopic device 500 is activated, a relative displacement can be generated between the second door panel 400 and the first door panel 300 in the second direction D2. At the same time, the telescopic device 500 is used to drive the side of the second door panel 400 away from the first door panel 300 to move along the second direction D2 towards the first transfer port 110 to seal or open the first transfer port 110; during the actual working process, the first door panel 300 and the second door panel 400 are lifted and lowered synchronously. When rising, the second door panel 400 covers the first transfer port 110. After the second door panel 400 covers the first transfer port 110, a plurality of telescopic devices 500 are activated to drive the second door panel 400 to move along the second direction D2 towards the direction close to the first transfer port 110, so as to seal the first transfer port 110; in this embodiment, a plurality of telescopic devices 500 are evenly distributed around the edge of the second door panel 400. During the working process, a plurality of telescopic devices 500 are started or stopped at the same time, so as to jointly drive the side of the second door panel 400 away from the first door panel 300 to move along the second direction D2. Specifically, six telescopic devices 500 are provided, four of which are distributed at the four corners of the second door panel 400, and the remaining two telescopic devices 500 are placed in the middle of the length direction of the second door panel 400; during the working process, the telescopic device 500 is activated to drive the second door panel 400 to move in the direction away from the first door panel 300 to seal the first transfer port 110;Or, the second door panel 400 is driven to move toward the first door panel 300 to open the first transfer port 110. Under the action of the retractor 500, the second door panel 400 exerts more force on the side wall of the cavity, squeezing the sealing ring 120, thereby achieving a better sealing effect.

[0061] In order to facilitate the installation of the expansion joint, refer to Figure 1 The first door panel 300 is provided with a through area 350, which is provided on the surface of the first door panel 300 facing the second door panel 400. At the same time, the through area 350 can allow multiple retractors 500 to pass through. The retractor 500 has a driving end 510 and a fixed end 520. During the fixing process of the retractor 500, the fixed end 520 is fixedly connected to the surface of the second door panel 400 facing the first door panel 300. The fixing method can be selected from card connection, bonding or bolt fixing, etc. In this embodiment, it is preferred that the fixed end 520 is fixed to the second door panel by bolt fixing. 400; after the driving end 510 passes through the passing area 350, it is fixedly connected to the surface of the first door panel 300 away from the second door panel 400. The fixing method can be selected from snap connection, bonding or bolt fixing, etc. In this embodiment, it is preferred that the driving end 510 is fixed to the end face of the second door panel 400 by bolt fixing; when the telescope 500 is in the retracted state, the second door panel 400 fits with the first door panel 300, thereby reducing the overall thickness of the first door panel 300 and the second door panel 400, and at the same time, the movement process of the second door panel 400 is stable and not prone to shaking.

[0062] During the movement of the second door panel 400, the two ends of the retractor 500 need to be fixed to the second door panel 400 and the first door panel 300, respectively. Figure 1 、 Figure 3 and Figure 4, a fixing member 310 is fixedly arranged on the first door panel 300, and the fixing method can be snap connection, bonding or bolt fixing, etc. In this embodiment, bolt fixing of the two is preferably adopted. The fixing member 310 includes a strip-shaped plate 311 and fixing rods 312. There are two fixing rods 312, and the two fixing rods 312 are respectively fixed at both ends of the strip-shaped plate 311. At the same time, the other ends of the fixing rods 312 abut against the first door panel 300. During the fixing process, bolts are passed through the fixing rods 312 and the first door panel 300 for threaded connection, so as to fix the strip-shaped plate 311, the fixing rods 312 and the first door panel 300, that is, to fix the fixing member 310 and the first door panel 300; in addition, a plurality of passing areas 350 are formed on the first door panel 300. The number of passing areas 350 corresponds to the number of expanders 500, and each expander 500 passes through the corresponding passing area 350, which is convenient for the installation of the expander 500. At the same time, the two fixing rods 312 are distributed on both sides of the passing area 350, which is convenient for the connection between the expander 500 and the strip-shaped plate 311; the expander 500 has a driving end 510 and a fixed end 520. In this embodiment, the expander 500 is a cylinder, the driving end 510 is the piston rod of the cylinder, and the fixed end 520 is the cylinder body. The fixed end 520 is fixedly arranged on the second door panel 400, and the fixing method can be snap connection, bonding or bolt fixing, etc. In this embodiment, bolt fixing of the two is preferably adopted; the driving end 510 is fixedly arranged on the strip-shaped plate 311 and is placed in the middle of the strip-shaped plate 311. The fixing method of the driving end 510 and the strip-shaped plate 311 can be snap connection, bonding or bolt fixing, etc. In this embodiment, bolt fixing of the two is preferably adopted, which is convenient for the expander 500 to drive the second door panel 400 to close the first transfer port 110 with the second door panel 400.

[0063] During the movement of the first door panel 300, it is required that the first door panel 300 can move in the vertical direction to close or open the second transfer port 210. Refer to Figure 1 , Figure 3 and Figure 5, a lifter 600 is provided on the main frame 200, and the first door panel 300 is connected to the lifter 600. When the lifter 600 is started, the first door panel 300 is driven to rise or fall in the first direction D1 to close or open the second transfer port 210. In this embodiment, the lifter 600 is selected as a magnetically coupled rodless cylinder. The magnetically coupled rodless cylinder includes a guide rod 630 and a slide 620. Therefore, the lifter 600 includes a guide rod 630 and a slide 620, that is, the end of the lifter 600 has a slide 620, and the first door panel 300 is connected to the slide 620. Therefore, when the lifter 600 is started, it can drive the first door panel 300 to rise or fall along the first direction D1 to close or open the second transfer port 210, allowing the wafer carrier to load or unload the wafer box 150; at the same time, since the lifter 600 is selected as a magnetically coupled rodless cylinder, the first door panel 300 does not need a guide rail, and can The linear bearings of the magnetically coupled rodless cylinder are used to ensure the overall rigidity of the door panel. At the same time, this structure eliminates the contact between the moving piston rod and the side guide rails that may generate particles. In addition, a rotating member 610 is provided at the end of the lifter 600. The rotating member 610 includes a first connecting member 611 and a second connecting member 612. The first connecting member 611 and the second connecting member 612 are rotatably connected. The first connecting member and the second connecting member are fixedly arranged at the end of the lifter 600 and the end of the first door panel 300, respectively. The setting method can be bonding, welding or bolt fixing, etc. In this embodiment, the bolt fixing method is preferably used. In this embodiment, the first connecting member 611 is fixedly arranged on the slide, and the second connecting member 612 is fixedly arranged on the first door panel 300. With this setting, the angle of the first door panel 300 can be rotated to facilitate the inspection of the first door panel 300 or the second door panel 400.

[0064] When the second door panel 400 seals the first transfer port 110, it is necessary to check whether the second door panel 400 is in place to check whether the sealing effect is good. Figure 3 、 Figure 6 and Figure 7, the lifting door further includes a detection component 700. The detection component 700 includes a sensor 710 and a baffle 720. The baffle 720 is fixed on the second door panel 400, and the sensor 710 is fixed on the first door panel 300. The movement of the second door panel 400 drives the baffle 720 to move, so that the baffle 720 passes by the sensor 710. The sensor 710 detects the position of the baffle 720, thereby determining the position of the second door panel 400. A fixing hole 420 is formed on the first door panel 300, and a fixing block 340 is fixedly arranged in the fixing hole 420 by means of bolts. One end of the fixing block 340 away from the second door panel 400 is integrally formed with a traction member 320. The traction member 320 is rod-shaped and can be a round rod or a square rod. In this embodiment, the traction member 320 is a round rod. At the same time, the traction member 320 passes through the first door panel 300, and the baffle 720 is fixedly arranged at the other end of the traction member 320 by means of bolts. With such a setting, when the second door panel 400 moves, it can drive the baffle 720 to move, so that the baffle 720 gradually approaches the first door panel 300 and passes by the sensor 710 on the first door panel 300. In this embodiment, the sensor 710 adopts an opposed sensor 710. Therefore, the sensor 710 has a transmitting end 711 and a receiving end 712. During detection, the baffle 720 moves to the transmitting end 711 and the receiving end 712, which is convenient for detecting the position of the baffle 720. In addition, a positioning hole 410 is formed at the inner bottom of the fixing hole 420. The positioning hole 410 is coaxially arranged with the fixing hole 420, that is, a positioning hole 410 is formed on the second door panel 400. One end of the fixing block 340 away from the traction member 320 is fixedly arranged with a positioning block 330 by means of integral molding. The positioning block 330 passes through the positioning hole 410, thereby positioning the traction member 320 to position the baffle 720, reducing the possibility of inaccurate detection results caused by the position deviation of the baffle 720.

[0065] After the second door panel 400 is reset, it is necessary to reset the baffle 720 so that there is no interference between the baffle 720 and the sensor 710. Refer to Figure 1 , Figure 6 and Figure 7, a reset member 322 is sleeved on the traction member 320. The reset member 322 has elasticity. In this embodiment, the reset member 322 is selected as a spring. In addition, a cylinder 321 is also sleeved on the traction member 320, wherein the cylinder 321 is fixedly arranged on the first door panel 300, and its fixing method can be bonding, welding or clamping, etc. In this embodiment, the cylinder 321 is selected to be clamped to the first door panel 300. At the same time, a backing plate 323 is fixedly arranged at the end of the cylinder 321. The backing plate 323 is used to reduce the possibility of damage to the end face where the cylinder 321 contacts the first door panel 300; one end of the reset member 322 abuts against the cylinder 321, and the other end abuts against the baffle 720. The reset member 322 is used to drive the baffle 720 to reset. Among them, the reset member 322 pushes the baffle 720 to move in the second direction D2 away from the first door panel 300, facilitating the reset process of the baffle 720; in addition, a limiting plate 220 is also arranged on the main body frame 200. The limiting plate 220 is fixedly arranged at the end of the main body frame 200, and its fixing method can be bonding, welding or bolt fixing, etc. In this embodiment, the limiting plate 220 is preferably fixed to the end of the main body frame 200 by bolt fixing. In this embodiment, three limiting plates 220 are arranged. The three limiting plates 220 jointly limit the first door panel 300 so that the first door panel 300 can close the second transfer port 210. At the same time, a cover plate 430 is fixedly arranged at the end of the first door panel 300 away from the second door panel 400 by bolt fixing. The cover plate 430 covers the first door panel 300, so that the electrical components on the first door panel 300 are not exposed to the outside, reducing the possibility of damage to the electrical components on the first door panel 300; an outer door cover 230 is fixedly arranged on the main body frame 200. The outer door cover 230 is arranged below the second transfer port 210 and covers the lifter 600, and there is a certain gap between the outer door cover 230 and the main body frame 200. During the working process, the lifter 600 drives the second door panel 400 and the first door panel 300 to be received in the gap between the outer door cover 230 and the main body frame 200.

[0066] An embodiment of the present invention also provides a wafer carrier lifting and transferring device, referring to Figure 1 and Figure 8, the wafer carrier lifting and transfer device includes a cavity 100 and a lifting door. The cavity 100 is a vacuum cavity, and a first transfer port 110 is provided on the side wall of the cavity 100. A sealing groove 140 is also provided on the side wall of the cavity 100 where the first transfer port 110 is opened. The sealing groove 140 is distributed around the first transfer port 110, and a sealing ring 120 is installed in the sealing groove 140. The sealing ring 120 protrudes from the sealing groove 140, that is, the sealing ring 120 protrudes from the side wall of the cavity 100. At the same time, under the action of the sealing groove 140, the sealing ring 120 is distributed around the first transfer port 110. In the working state, the first door panel 300 and the second door panel 400 rise or fall synchronously along the first direction D1. During the rising process, the limiting plate 220 limits the first door panel 300 and the second door panel 400. The second door panel 400 covers the first transfer port 110. At the same time, a plurality of telescopic devices 500 are activated to drive the second door panel 400 to approach the first transfer port 110 along the second direction D2, squeezing the sealing ring 120 to seal the first transfer port 110, effectively improving the sealing effect of the sealing ring 120. In addition, the wafer carrier lifting and transfer device further includes a process chamber 800, a first manipulator 130, and a second manipulator 900. The first manipulator 130 is movably arranged inside the cavity 100 to drive the wafer cassette 150 to move inside the cavity 100. The second manipulator 900 is movably arranged outside the cavity 100 and is used to transfer the wafers in the cavity 100 to the process chamber 800.

[0067] The implementation principle of the lifting door and the wafer carrier lifting and transfer device according to the embodiment of the present application is as follows: Place the wafers in the wafer cassette 150 inside the cavity 100. When wafer transfer is required, the first manipulator 130 cooperates with the second manipulator 900 to transfer the wafers in the reaction chamber to the process chamber 800. After the transfer is completed, or after the wafers are placed in the cavity 100, the second door panel 400 and the first door panel 300 cover the first transfer port 110. At this time, the telescopic device 500 is activated to push the second door panel 400 to move in the direction close to the first transfer port 110, compressing the sealing ring 120 on the side wall of the cavity 100 to ensure good sealing at the first transfer port 110 of the cavity 100.

[0068] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention described in the claims. Moreover, the present invention described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A lifting door, which is applied to a wafer carrier lifting and transferring device. The wafer carrier lifting and transferring device includes a cavity (100), and at least one first transfer port (110) for transferring a wafer cassette (150) is formed in the cavity (100) along a second direction (D2). It is characterized in that, The lift gate includes: A fixed door panel that lifts along a first direction (D1); A movable door panel that is movably arranged along a second direction (D2) on the fixed door panel. The movable door panel lifts synchronously with the fixed door panel, and a part of the area covered by the lifting path overlaps with the projection of the first transfer opening (110) along the second direction (D2); A plurality of telescopic devices (500) that are arranged at intervals on the side of the movable door panel facing the fixed door panel, causing a relative displacement between the movable door panel and the fixed door panel in the second direction (D2). The plurality of telescopic devices (500) are used to drive the side of the movable door panel away from the fixed door panel to move along the second direction (D2) to seal or open the first transfer opening (110); Wherein, when the fixed door panel rises, the movable door panel covers the first transfer opening (110), and then the plurality of telescopic devices (500) are used to drive the movable door panel to move in a direction close to the first transfer opening (110) to seal the first transfer opening (110).

2. The lift gate according to claim 1, wherein: A through area (350) for the plurality of telescopic devices (500) to pass through is provided on the surface of the fixed door panel facing the movable door panel; The telescopic device (500) has a driving end (510) and a fixed end (520). The fixed end (520) is fixedly connected to the surface of the movable door panel facing the fixed door panel, and the driving end (510) passes through the through area (350) and is fixedly connected to the surface of the fixed door panel away from the movable door panel; When the telescopic device (500) is in a retracted state, the movable door panel is in contact with the fixed door panel.

3. The lifting door according to claim 1, wherein, The plurality of telescopic devices (500) are evenly distributed around the edge of the movable door panel; In the working state, the plurality of telescopic devices (500) jointly drive the side of the movable door panel away from the fixed door panel to move along the second direction (D2).

4. The lifting door according to claim 2, wherein, A fixing member (310) is fixedly arranged on the fixed door panel. The fixing member (310) includes a strip-shaped plate (311) and a fixing rod (312). The two ends of the fixing rod (312) are respectively connected to the fixed door panel and the strip-shaped plate (311); The driving end (510) is fixedly arranged on the strip-shaped plate (311), and the fixed end (520) is fixedly arranged on the movable door panel.

5. The lift door according to claim 1, characterized in that, It further includes a detection component (700). The detection component (700) includes a sensor (710) and a baffle (720). The baffle (720) is fixedly arranged on the movable door panel, and the sensor (710) is fixedly arranged on the fixed door panel; In the working state, when the movable door panel moves, it drives the baffle (720) to pass by the sensor (710) to detect the position of the movable door panel.

6. The lifting door according to claim 5, characterized in that, A traction member (320) is penetrated through the fixed door panel. One end of the traction member (320) is fixedly arranged on the movable door panel, and the other end is fixedly arranged on the baffle (720); A reset member (322) is sleeved on the traction member (320) to drive the movable door panel to reset; The end of the traction member (320) is provided with a positioning block (330). A positioning hole (410) is formed in the movable door panel. The positioning block (330) passes through the positioning hole (410) to position the traction member (320).

7. The lift gate according to claim 1, wherein It further includes a main body frame (200). The main body frame (200) is fixedly arranged on the side wall of the cavity (100). The fixed door panel is movably arranged on the main body frame (200). A second transfer port (210) corresponding to the first transfer port (110) is formed on the main body frame (200). An elevator (600) is arranged on the main body frame (200). The fixed door panel is connected to the elevator (600). The elevator (600) is used to drive the fixed door panel to lift along the first direction (D1). A limiting plate (220) is fixedly arranged on the main body frame (200) to limit the movement position of the fixed door panel.

8. The lift door according to claim 7, characterized in that, A rotating member (610) is arranged at the end of the elevator (600). The rotating member (610) includes a first connecting member (611) and a second connecting member (612) that are rotatably connected to each other. The elevator (600) and the fixed door panel are respectively fixedly arranged on the first connecting member (611) and the second connecting member (612).

9. A wafer carrier lifting and transferring device, characterized in that, It includes a cavity (100) and the lift door according to any one of claims 1-8. A first transfer port (110) is formed on the side wall of the cavity (100). A sealing ring (120) is arranged on the side wall of the cavity (100). The sealing ring (120) is arranged around the first transfer port (110) and protrudes from the side wall of the cavity (100). In the working state, the fixed door panel rises, so that the movable door panel covers the first transfer port (110). The movable door panel is driven by a plurality of the telescopic members (500) to approach the first transfer port (110) along the second direction (D2), squeezing the sealing ring (120) to seal the first transfer port (110).

10. The wafer carrier lifting and transferring device according to claim 9, characterized in that, It further includes a process chamber (800), a first manipulator (130) and a second manipulator (9)00). The first manipulator (130) is movably arranged inside the cavity (100). The second manipulator (900) is movably arranged outside the cavity (100). The first manipulator (130) is used to transfer a wafer cassette (150) inside the cavity (100). The second manipulator (900) is used to transfer the wafer cassette (150) in the cavity (100) into the process chamber (800).

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