Air sampling device

Abstract

The utility model provides an air sampling device. The air sampling device comprises a containing cavity, a sampling device and a control device, the sampling pipe is of a bent structure, the first end of the sampling pipe is connected with the containing cavity, and the second end of the sampling pipe is used for allowing air to enter; the switch valve is arranged on the sampling pipe; wherein the switch valve comprises a first operation part used for controlling the switch valve to be opened or closed, and the first operation part is arranged close to the bending area of the sampling pipe, so that the first operation part is far away from the second end of the sampling pipe. According to the invention, the sample can be prevented from being polluted by sampling personnel, and the sampling reliability and the accuracy of a test result are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and more particularly to an air sampling device. Background Art

[0002] A SUMMA canister is an air sampling device used to collect and store volatile organic compound gases, and is an important tool commonly used for detecting the ambient air in a wafer fab in the semiconductor field. The SUMMA canister samples by means of negative pressure. When the valve of the SUMMA canister is opened, due to the pressure difference inside and outside, the outside air will be quickly sucked into the storage tank, thus completing the collection of volatile organic compound gases.

[0003] In the related art, the sampling tube of the SUMMA canister is usually of a straight-line structure, and a switching valve is provided on the sampling tube. The switching valve includes an operating part for controlling the opening or closing of the switching valve. Since the sampling area at the sampling port of the sampling tube and the operating area of the operator on the operating part overlap in the vertical direction, the sample is easily contaminated by the sampling personnel.

[0004] In view of the existence of the above technical problems, the utility model provides a new air sampling device. Summary of the Utility Model

[0005] A series of simplified concepts are introduced in the summary of the utility model, which will be further described in detail in the detailed implementation section. The summary of the utility model does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the protection scope of the claimed technical solution.

[0006] In view of the existing problems, the utility model provides an air sampling device, which includes:

[0007] A receiving cavity;

[0008] A sampling tube, which is configured as a bent structure. The first end of the sampling tube is connected to the receiving cavity, and the second end is used for admitting air;

[0009] A switching valve, provided on the sampling tube;

[0010] Wherein, the switching valve includes a first operating part for controlling the opening or closing of the switching valve, and the first operating part is arranged near the bent area of the sampling tube so that the first operating part is far away from the second end of the sampling tube.

[0011] In some embodiments of the present application, the bent structure includes a right-angle bend.

[0012] In some embodiments of the present application, the switching valve further includes:

[0013] A switching valve unit is disposed inside the sampling tube;

[0014] A transmission member, one end of the transmission member is connected to the switching valve unit, and the other end is connected to the first operation unit, so that the first operation unit controls the opening or closing of the switching valve unit through the transmission member.

[0015] In some embodiments of the present application, the transmission member includes:

[0016] A first connecting member;

[0017] A first bevel gear, the first operation unit is connected to the first bevel gear through the first connecting member;

[0018] A second bevel gear, meshing with the first bevel gear;

[0019] A second connecting member, the second bevel gear is connected to the switching valve unit through the second connecting member.

[0020] In some embodiments of the present application, the air sampling device further includes:

[0021] A one-way valve is disposed in the sampling tube, and is used to only allow air to pass through the sampling tube unidirectionally in the working mode.

[0022] In some embodiments of the present application, the one-way valve includes:

[0023] A one-way valve unit is disposed inside the sampling tube;

[0024] A third connecting member;

[0025] A second operation unit, the second operation unit is connected to the one-way valve unit through the third connecting member, and is used to drive the one-way valve unit to switch between the working mode and the non-working mode.

[0026] In some embodiments of the present application, the air sampling device further includes:

[0027] An elastic member is connected to the one-way valve, and is used to drive the one-way valve to be in the working mode through its own elasticity.

[0028] In some embodiments of the present application, the air sampling device further includes:

[0029] A plug is detachably disposed at the second end of the sampling tube, and is used to seal the sampling tube.

[0030] In some embodiments of the present application, the air sampling device further includes:

[0031] A base, the base is configured as a hollow structure, and the bottom of the accommodating cavity is disposed inside the base.

[0032] In some embodiments of the present application, the air sampling device is used for air sampling in a semiconductor manufacturing environment.

[0033] For the air sampling device of the present utility model, by constructing the sampling tube into a bent structure and arranging the first operating part of the switching valve near the bent area of the sampling tube, the first operating part is far from the second end of the sampling tube, and the operating area of the sampling personnel on the operating part does not overlap with the sampling area of the sampling tube, so that the sample can be prevented from being contaminated by the sampling personnel, and the reliability of sampling and the accuracy of test results can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The following drawings of the present utility model are used as a part of the present utility model to understand the present utility model. The embodiments and descriptions of the present utility model are shown in the drawings to explain the principles of the present utility model.

[0035] In the drawings:

[0036] Figure 1 shows a schematic structural diagram of an air sampling device according to a specific embodiment of the present utility model;

[0037] Figure 2 shows a schematic structural diagram of an air sampling device according to a specific embodiment of the present utility model;

[0038] Figure 3 shows Figure 1 a partial enlarged view of the air sampling device in

[0039] In the drawings:

[0040] 101 Base;

[0041] 102 Accommodating cavity;

[0042] 103 Sampling tube;

[0043] 104 Switching valve;

[0044] 1041 First operating part;

[0045] 1042 First connecting piece;

[0046] 1043 First bevel gear;

[0047] 1044 Second bevel gear;

[0048] 1045 Second connecting piece;

[0049] 1046 Switching valve part;

[0050] 105 Check valve;

[0051] 1051 Second operating part;

[0052] 1052 Third connecting piece;

[0053] 1053 One-way valve part;

[0054] 106 Pressure gauge;

[0055] 107 Plug;

[0056] 108 Elastic member. Detailed implementation manners

[0057] In the following description, numerous specific details are given to provide a more thorough understanding of the present utility model. However, it will be apparent to those skilled in the art that the present utility model may be practiced without one or more of these details. In other instances, well-known technical features are not described to avoid obscuring the present utility model.

[0058] It should be understood that the present utility model can be implemented in different forms and should not be construed as limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present utility model to those skilled in the art. In the drawings, the dimensions and relative dimensions of layers and regions may be exaggerated for clarity. Like reference numerals refer to like elements throughout.

[0059] It should be understood that when an element or layer is referred to as being "on", "adjacent to", "connected to" or "coupled to" another element or layer, it can be directly on, adjacent to, connected or coupled to the other element or layer, or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on", "directly adjacent to", "directly connected to" or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Thus, the first element, component, region, layer or part discussed below may be denoted as the second element, component, region, layer or part without departing from the teachings of the present utility model.

[0060] Spatial relationship terms such as "under", "below", "lower", "beneath", "above", "upper", etc. may be used herein for convenience of description to describe the relationship of one element or feature shown in the figures with other elements or features. It should be understood that, in addition to the orientations shown in the figures, spatial relationship terms are also intended to include different orientations of the device in use and operation. For example, if the device in the figures is flipped, then an element or feature described as "under other elements" or "beneath it" or "under it" will be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "beneath" can include both the upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or other orientations) and the spatial descriptors used herein are to be interpreted accordingly.

[0061] The purpose of the terms used herein is only to describe specific embodiments and not to limit the present utility model. When used herein, the singular forms "a", "an" and "the" are also intended to include the plural forms unless the context clearly dictates otherwise. It should also be understood that the terms "comprising" and / or "including", when used in this specification, identify the presence of the stated features, integers, steps, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups. When used herein, the term "and / or" includes any and all combinations of the related listed items.

[0062] In the related art, the sampling tube of a SUMMA canister is usually of a straight-line structure, and a switching valve is provided on the sampling tube. The switching valve includes an operating part for controlling the opening or closing of the switching valve. Since the sampling area of the sampling tube and the operating area of the operating part by the sampling personnel overlap in the vertical direction, the sample is easily contaminated by the sampling personnel.

[0063] To solve at least one of the above technical problems, the present application provides an air sampling device, which includes: a receiving cavity; a sampling tube, the sampling tube is configured as a bent structure, a first end of the sampling tube is connected to the receiving cavity, and a second end is used for introducing air; a switching valve, disposed on the sampling tube; wherein, the switching valve includes a first operating part for controlling the opening or closing of the switching valve, and the first operating part is disposed near the bent area of the sampling tube so that the first operating part is away from the second end of the sampling tube.

[0064] According to the air sampling device of the present application, by constructing the sampling tube into a bent structure and arranging the first operating part of the switching valve near the bent area of the sampling tube, the first operating part is far away from the second end of the sampling tube, and the operating area of the sampling personnel on the operating part does not overlap with the sampling area of the sampling tube, so that the sample can be prevented from being contaminated by the sampling personnel, and the reliability of sampling and the accuracy of test results can be improved.

[0065] To fully understand the present application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed by the present application. The preferred embodiments of the present application are described in detail below. However, in addition to these detailed descriptions, the present application may also have other implementation manners.

[0066] Reference is made below to Figures 1 to 3 Describe an air sampling device according to an embodiment of the present application. The air sampling device includes: a receiving cavity 102; a sampling tube 103, the sampling tube 103 is constructed into a bent structure, the first end of the sampling tube 103 is connected to the receiving cavity 102, and the second end is used for admitting air; a switching valve 104, arranged on the sampling tube 103; wherein, the switching valve 104 includes a first operating part 1041 for controlling the opening or closing of the switching valve 104, and the first operating part 1041 is arranged near the bent area of the sampling tube 103 so that the first operating part 1041 is far away from the second end of the sampling tube 103.

[0067] Specifically, the air sampling device can sample by means of negative pressure. During sampling, the sampling personnel can control the switching valve 104 to open through the first operating part 1041. Due to the pressure difference inside and outside, the outside air can enter the sampling tube 103 from the second end of the sampling tube 103, and then enter the receiving cavity 102 through the first end of the sampling tube 103. After sampling is completed, the sampling personnel can control the switching valve 104 to close through the first operating part 1041, thereby stopping sampling.

[0068] During the above sampling process, the second end of the sampling tube 103 corresponds to the sampling area, and the first operating part 1041 corresponds to the operating area of the sampling personnel. Since the sampling tube 103 is constructed into a bent structure and the first operating part 1041 is arranged near the bent area of the sampling tube 103, the first operating part 1041 is far away from the second end of the sampling tube 103, and the operating area of the sampling personnel does not overlap with the sampling area (as Figure 2 shown), so that the sample can be prevented from being contaminated by the sampling personnel, and the reliability of sampling can be improved.

[0069] In some embodiments, the air sampling device can be implemented as a SUMMA canister, or can also be implemented as other types of sampling devices, which are not limited herein.

[0070] In some embodiments, the air sampling device can be used to perform air sampling on a semiconductor manufacturing environment (such as a wafer fab, etc.), or it can also be used to perform air sampling on other environments, which is not limited herein.

[0071] In some embodiments, the material of the accommodating cavity 102 is selected according to the actual situation, such as metal, alloy, ceramic, glass, composite material, etc., which is not limited herein. Exemplarily, the accommodating cavity 102 can be made of 316 - type stainless steel. Additionally, the inner surface of the accommodating cavity 102 can be silanized to improve the corrosion resistance of the accommodating cavity 102 and reduce surface adhesion.

[0072] In some embodiments, the accommodating cavity 102 can be configured as a spherical shape, hemispherical shape, ellipsoidal shape, cylindrical shape, or any other suitable shape, which is not limited herein. Exemplarily, as Figure 1 shown, the accommodating cavity 102 is a spherical cavity.

[0073] It can be understood that the size of the accommodating cavity 102 can be determined according to the actual situation, as long as it is ensured that the accommodating cavity 102 is airtight without leakage.

[0074] In some embodiments, as Figure 1 shown, the air sampling device further includes: a base 101, the base 101 is configured as a hollow structure, and the bottom of the accommodating cavity 102 is disposed within the base 101. By providing the base 101, the stability of the accommodating cavity 102 can be improved.

[0075] In some embodiments, the material of the sampling tube 103 is selected according to the actual situation, such as metal, alloy, ceramic, glass, composite material, etc., which is not limited herein. Exemplarily, the sampling tube 103 can be made of 316 - type stainless steel.

[0076] In some embodiments, the sampling tube 103 can be configured as a right - angled bending structure, an obtuse - angled bending structure, an acute - angled bending structure, or any other suitable bending structure, which is not limited herein. Exemplarily, as Figure 1 shown, the sampling tube 103 is a right - angled sampling tube 103 with a 90° bend design. It should be noted that the right - angled bending structure does not strictly limit the bending angle to 90°, and when the bending angle is close to 90°, it can also be considered a right - angled bending structure.

[0077] In some embodiments, the bending region of the sampling tube 103 can be designed smoothly or not, which is not limited herein. The smooth design can be achieved through chamfering, rounding, etc., which is not limited herein.

[0078] It can be understood that the size of the sampling tube 103 can be determined according to the actual situation, as long as it is ensured that there is no air leakage after the sampling tube 103 is installed in the accommodating cavity 102.

[0079] In some embodiments, as Figure 3 shown, the switching valve 104 further includes: a switching valve portion 1046 disposed in the sampling tube 103; a transmission member, one end of the transmission member is connected to the switching valve portion 1046, and the other end is connected to the first operation portion 1041, so that the first operation portion 1041 controls the opening or closing of the switching valve portion 1046 through the transmission member.

[0080] Among them, the first operation portion 1041 can be a handle, a handwheel, etc., and is not limited thereto. Taking the first operation portion 1041 as a handwheel as an example, the sampling personnel can apply a force to the handwheel to drive the handwheel to rotate, and the handwheel then transmits its rotational force to the switching valve portion 1046 through the transmission member to drive the switching valve portion 1046 to open or close.

[0081] It can be understood that the transmission member can be implemented in various forms, as long as it can transmit the force applied by the sampling personnel to the first operation portion 1041 to the switching valve portion 1046 and drive the switching valve portion 1046 to open or close. Therefore, the specific structural form of the transmission member is not limited in this embodiment.

[0082] Exemplarily, as Figure 3 shown, the transmission member can include: a first connecting member 1042; a first bevel gear 1043, the first operation portion 1041 is connected to the first bevel gear 1043 through the first connecting member 1042; a second bevel gear 1044, meshing with the first bevel gear 1043; a second connecting member 1045, the second bevel gear 1044 is connected to the switching valve portion 1046 through the second connecting member 1045.

[0083] Taking the first operation portion 1041 controlling the opening of the switching valve portion 1046 through the transmission member as an example, the first operation portion 1041 drives the first bevel gear 1043 to rotate through the first connecting member 1042, the first bevel gear 1043 then drives the second bevel gear 1044, and the second bevel gear 1044 drives the switching valve portion 1046 to open through the second connecting member 1045 for sampling. The process of the first operation portion 1041 controlling the closing of the switching valve portion 1046 through the transmission member can be analogized to the above opening process and will not be elaborated here.

[0084] In the summa canister in the related art, after sampling is completed, the opening valve needs to be manually closed to block the air circulation between the storage tank and the outside air. Since the operating part of the switching valve 104 is relatively close to the sampling area, the sample is easily contaminated by the sampling personnel. In this embodiment, transmission is achieved through a connecting piece and bevel gears, so that the first operating part 1041 can control the opening or closing of the switching valve part 1046 at a distance, realizing the remote control of the switching valve 104 by the sampling personnel. The operator can stay away from the sampling area, thereby further avoiding the contamination of the sample by the sampling personnel.

[0085] In some embodiments, as Figure 1 shown, the air sampling device further includes: a one-way valve 105 disposed in the sampling tube 103 for allowing only air to pass through the sampling tube 103 unidirectionally in the working mode.

[0086] In the summa canister in the related art, the switching valve 104 needs to be manually closed after sampling is completed to block the air circulation between the storage tank and the outside air. When the closing is not timely, it is easy to cause sample contamination. In this embodiment, by providing a one-way valve 105 on the sampling tube 103, after sampling is completed, the one-way valve 105 is in the working mode to allow only outside air to pass through the sampling tube 103 unidirectionally. The one-way valve 105 can automatically block the gas exchange between the accommodating cavity 102 and the outside, thereby not only avoiding post-sampling contamination, but also preventing sampling contamination caused by the sampling valve not being closed or not being tightly closed due to the misoperation of the sampling personnel.

[0087] In some embodiments, as Figure 3 shown, the one-way valve 105 may include: a one-way valve part 1053 disposed in the sampling tube 103; a third connecting piece 1052; and a second operating part 1051. The second operating part 1051 is connected to the one-way valve part 1053 through the third connecting piece 1052 and is used to drive the one-way valve part 1053 to switch between the working mode and the non-working mode.

[0088] Among them, the second operating part 1051 can be a handle, a handwheel, etc., which is not limited herein. Taking the second operating part 1051 as a handwheel as an example, the sampling personnel can apply a force to the handwheel to drive the handwheel to rotate. The handwheel then drives the one-way valve part 1053 to move through the third connecting piece 1052, so that the one-way valve part 1053 is switched from the working mode to the non-working mode, or from the non-working mode to the working mode. In the working mode, the one-way valve part 1053 only allows air to pass through the sampling tube 103 unidirectionally to block the gas exchange between the accommodating cavity 102 and the outside; in the non-working mode, the one-way valve part 1053 no longer plays a restrictive role, and air can freely pass through the sampling tube 103, so that the sample gas in the accommodating cavity 102 can be detected.

[0089] In some embodiments, in addition to the above structural forms, the one-way valve 105 can also be a switchable butterfly one-way valve 105, a spherical one-way valve 105, etc., and no limitation is imposed thereon.

[0090] In some embodiments, as Figure 3 shown, the air sampling device further includes: an elastic member 108, connected to the one-way valve 105, for driving the one-way valve 105 into the working mode through its own elasticity.

[0091] Specifically, after the sampling is completed, the elastic member 108 can drive the one-way valve 105 into the working mode through its own elasticity, thereby blocking the gas exchange between the accommodation cavity 102 and the outside world and achieving good sealing performance.

[0092] Among them, the elastic member 108 can be a spring, a spring sheet, etc., and no limitation is imposed thereon.

[0093] In some embodiments, the materials of the switching valve 104 and the one-way valve 105 are selected according to the actual situation, such as metals, alloys, ceramics, glass, composite materials, etc., and no limitation is imposed thereon. Exemplarily, the switching valve 104 and the one-way valve 105 can be made of type 316 stainless steel.

[0094] In some embodiments, as Figure 1 shown, the air sampling device further includes: a pressure gauge 106, disposed on the sampling tube 103, for detecting the pressure inside the accommodation cavity 102.

[0095] By providing the pressure gauge 106, the pressure inside the accommodation cavity 102 can be detected in real time. According to the acquired pressure information, both the gas storage amount inside the accommodation cavity 102 can be known, and corresponding safety measures can be taken in a timely manner when the pressure is abnormal.

[0096] In some embodiments, as Figure 1 shown, the air sampling device further includes: a plug 107, detachably disposed at the second end of the sampling tube 103, for closing the sampling tube 103.

[0097] Among them, the plug 107 and the second end of the sampling tube 103 can be connected by threads, or by a buckle, or other detachable connection methods can also be adopted, and no limitation is imposed thereon. After the sampling is completed, in addition to closing the switching valve 104, the sampling tube 103 can be closed by the plug 107 to prevent moisture, dust, gas, etc. from entering the sampling tube 103, and it can also avoid the leakage of the sample gas inside the accommodation cavity 102, thereby further avoiding sample contamination and ensuring the reliability of sampling.

[0098] Generally speaking, the operation process of the air sampling device of the present application can be as follows:

[0099] Before use, ensure that the switching valve 104 is in the open state, the check valve 105 is in the non-operating mode, remove the plug 107, connect the sampling tube 103 to the cleaning device, and clean the air sampling device;

[0100] After cleaning, close the switching valve 104, put the check valve 105 in the operating mode, and install the plug 107;

[0101] When sampling, remove the plug 107 and open the switching valve 104. Due to the pressure difference inside and outside, the outside air can enter the accommodation cavity 102 through the sampling tube 103;

[0102] After sampling is completed, the check valve 105 blocks the gas exchange between the accommodation cavity 102 and the outside under the driving action of the elastic member 108, close the switching valve 104, and install the plug 107 to complete the sampling;

[0103] When performing sample detection, the plug 107 can be removed, the sampling tube 103 is inserted into the detection system, the switching valve 104 is opened and the check valve 105 is switched to the non-operating mode, and then the sample detection can be performed; after the detection is completed, the air sampling device can be cleaned to prepare for the next sampling.

[0104] In summary, according to the air sampling device of the embodiment of the present application, by configuring the sampling tube as a bent structure and arranging the first operation part of the switching valve near the bent area of the sampling tube, the first operation part is far from the second end of the sampling tube, and the operation area of the operation part by the sampling personnel does not overlap with the sampling area of the sampling tube, so that the sample can be prevented from being contaminated by the sampling personnel, and the reliability of sampling and the accuracy of the test results can be improved.

[0105] Although the exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely exemplary and are not intended to limit the scope of the present application thereto. Those of ordinary skill in the art can make various changes and modifications therein without departing from the scope and spirit of the present application. All such changes and modifications are intended to be included within the scope of the present application as claimed in the appended claims.

[0106] Similarly, it should be understood that, for the purpose of streamlining the present application and assisting in the understanding of one or more of the various aspects of the application, in the description of the exemplary embodiments of the present application, the various features of the present application are sometimes grouped together into a single embodiment, figure, or description thereof. However, the methods of the present application should not be construed as reflecting an intention that the claimed present application requires more features than are expressly recited in each claim. Rather, as reflected by the corresponding claims, the point of the application is that the corresponding technical problems can be solved with features less than all the features of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into the detailed description, where each claim itself serves as a separate embodiment of the present application.

[0107] In addition, those skilled in the art will appreciate that although some of the embodiments described herein include certain features included in other embodiments but not others, the combination of features of different embodiments is meant to be within the scope of the present application and forms different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0108] It should be noted that the above embodiments illustrate rather than limit the present application, and those skilled in the art can design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The use of the words first, second, and third, etc. does not denote any order. These words can be interpreted as names.

Claims

1. An air sampling device, characterized in that, The air sampling device includes: A housing cavity; A sampling tube, the sampling tube is configured as a bent structure, a first end of the sampling tube is connected to the housing cavity, and a second end is for admitting air; A switching valve, disposed on the sampling tube; Wherein, the switching valve includes a first operating portion for controlling the opening or closing of the switching valve, and the first operating portion is disposed near the bent region of the sampling tube so that the first operating portion is away from the second end of the sampling tube.

2. The air sampling device according to claim 1, characterized in that, The bent structure includes a right-angle bend.

3. The air sampling device according to claim 1, wherein, The switching valve further includes: A switching valve portion, disposed inside the sampling tube; A transmission member, one end of the transmission member is connected to the switching valve portion, and the other end is connected to the first operating portion, so that the first operating portion controls the opening or closing of the switching valve portion through the transmission member.

4. The air sampling device according to claim 3, characterized in that, The transmission member includes: A first connecting member; A first bevel gear, the first operating portion is connected to the first bevel gear through the first connecting member; A second bevel gear, meshing with the first bevel gear; A second connecting member, the second bevel gear is connected to the switching valve portion through the second connecting member.

5. The air sampling device according to claim 1, wherein The air sampling device further includes: A check valve, disposed on the sampling tube, for only allowing air to pass through the sampling tube unidirectionally in the working mode.

6. The air sampling device according to claim 5, characterized in that, The check valve includes: A check valve portion, disposed inside the sampling tube; A third connecting member; A second operating portion, the second operating portion is connected to the check valve portion through the third connecting member, for driving the check valve portion to switch between the working mode and the non-working mode.

7. The air sampling device according to claim 5, wherein The air sampling device further includes: An elastic member, connected to the check valve, for driving the check valve to be in the working mode through its own elasticity.

8. The air sampling device according to claim 1, characterized in that, The air sampling device further includes: A plug, detachably disposed at the second end of the sampling tube, for closing the sampling tube.

9. The air sampling device according to claim 1, wherein The air sampling device further includes: A base, the base is configured as a hollow structure, and the bottom of the housing cavity is disposed inside the base.

10. The air sampling device according to claim 1, characterized in that, The air sampling device is used for air sampling in a semiconductor manufacturing environment.

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