Liquid medicine tank device and semiconductor wet process table

Abstract

The utility model discloses a liquid medicine tank device and a semiconductor wet process table. The liquid medicine tank device comprises a liquid medicine tank body and a heating assembly. A liquid medicine cavity is formed in the liquid medicine tank body; the heating assembly comprises a heat conduction pipe and a heater. The heat conduction pipe is arranged at the bottom of the liquid medicine cavity, one end penetrates through the first side wall of the liquid medicine cavity, and the other end penetrates through the second side wall of the liquid medicine cavity; the heater is installed in the heat conduction pipe. According to the design, the heat transfer path is reduced, and the heat conduction heating efficiency is improved, so that the liquid medicine temperature can be more accurately controlled. Moreover, the heating assembly is directly arranged in the liquid medicine tank body, and an additional heating chamber is not needed, so that the space is saved, the whole system is more compact, and the cost is provided for miniaturization design.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor cleaning and etching, and particularly to a liquid medicine tank device and a semiconductor wet bench. Background Art

[0002] In the process of semiconductor manufacturing, cleaning is a key step to remove impurities and particles on the wafer surface, while wet etching is a technology to remove materials in specific areas on the wafer surface through chemical reactions. In order to improve the efficiency and quality of cleaning and etching, the design of the liquid medicine tank in the semiconductor cleaning machine is crucial. Usually, in order to improve the cleaning efficiency of the liquid medicine, the liquid medicine in the liquid medicine tank needs to be maintained at a certain temperature, and the required temperatures for different liquid medicines are also different. Therefore, the control of the liquid medicine temperature in the liquid medicine tank is extremely important.

[0003] Currently, the common temperature control methods are mostly water bath heating. For example, patent application number CN118053795A discloses a scientific research type wet etching fully automated system and machine platform, which specifically discloses that a heating device 312 is installed in a heating chamber 311 for heating a heat conduction medium (the heat conduction medium can be conventional water or heat conduction oil) in the heating chamber 311. The heat conduction medium can be conventional water or heat conduction oil, and then the heat is transferred to the liquid medicine in the inner tank body through the heat conduction medium via the inner tank body to achieve the water bath heating control of the liquid medicine. However, this heating method not only requires a large amount of space, but also has a low heating efficiency due to many heat transfer paths.

[0004] Therefore, there is an urgent need to provide a new solution to solve the above technical problems. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a liquid medicine tank device and a semiconductor wet bench, which can reduce the space occupation and facilitate miniaturization; at the same time, it has high heating efficiency to more precisely control the liquid medicine temperature.

[0006] To achieve the above technical purpose, this application provides a liquid medicine tank device, including a liquid medicine tank body and a heating component;

[0007] A liquid medicine cavity is provided in the liquid medicine tank body;

[0008] The heating component includes a heat conduction tube and a heater;

[0009] The heat conduction tube is arranged at the bottom of the liquid medicine cavity, and one end penetrates through the first side wall of the liquid medicine cavity, and the other end penetrates through the second side wall of the liquid medicine cavity;

[0010] The heater is installed in the heat conduction tube.

[0011] Further, the heater is an electric heating tube.

[0012] Further, the heater is a tungsten wire heating tube or an infrared heating tube.

[0013] Further, the first side wall and the second side wall are oppositely arranged;

[0014] There are at least two heat conduction tubes, which are arranged in parallel at intervals;

[0015] There are at least two heaters, which are respectively installed in the heat conduction tubes one by one.

[0016] Further, a support plate is fixed above the heat conduction tube in the liquid medicine cavity;

[0017] Through holes are arranged in an array on the support plate.

[0018] Further, several support protrusions are arranged on the inner wall of the liquid medicine cavity;

[0019] The support protrusions are in contact with and abutted against the bottom of the support plate for supporting the support plate.

[0020] Further, threaded holes are arranged on the support protrusions;

[0021] Through holes corresponding to the threaded holes are arranged on the support plate;

[0022] Threaded fasteners passing through the through holes and threadedly connected with the threaded holes are installed in the through holes;

[0023] The threaded fasteners are used to fasten the support protrusions and the support plate together.

[0024] Further, an outer groove body is further included;

[0025] The bottom of the liquid medicine tank body is installed in the outer groove body through the top opening of the outer groove body;

[0026] A first sealing flange that is turned downwards is annularly arranged on the outer peripheral surface of the liquid medicine tank body;

[0027] The first sealing flange is hermetically connected to the top of the outer groove body;

[0028] A second sealing flange that extends into the first sealing flange and fits against the inner side wall of the first sealing flange is arranged on the top of the outer groove body.

[0029] Further, mounting openings are respectively arranged on both sides of the outer groove body;

[0030] The end of the heat conduction tube is located in the projection area of the mounting opening on the liquid medicine tank body;

[0031] A mounting plate is detachably fixed on the mounting opening;

[0032] Both ends of the heater are respectively connected to the mounting plate.

[0033] Further, a liquid outlet pipe is connected to the bottom of one side wall of the liquid medicine tank body;

[0034] A liquid inlet pipe is connected to a position near the top of one side wall of the liquid medicine tank body.

[0035] Further, a groove communicating with the liquid inlet pipe is provided at the position where the liquid medicine cavity is connected to the liquid inlet pipe;

[0036] A baffle is installed at a position a certain distance from one end of the liquid inlet pipe communicating with the groove in the groove;

[0037] A liquid inlet gap is formed between the bottom of the baffle and the bottom surface of the groove.

[0038] Further, a tank cover is also included;

[0039] The tank cover is installed on the top opening of the liquid medicine tank body in an openable and closable manner.

[0040] This application also discloses a semiconductor wet bench, including a wet bench body and the liquid medicine tank device described above.

[0041] As can be seen from the above technical solutions, the designed liquid medicine tank device in this application realizes the direct heating control of the liquid medicine by directly arranging the heating assembly at the bottom of the liquid medicine cavity in the liquid medicine tank body and adopting the combination of a heat conduction pipe and a heater. This design reduces the heat transfer path and improves the heat conduction and heating efficiency to more precisely control the temperature of the liquid medicine. Moreover, since the heating assembly is directly arranged in the liquid medicine tank body, no additional heating chamber is required, thus saving space, making the whole system more compact and providing convenience for miniaturization design. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of this application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0043] Figure 1 It is a perspective view of a liquid medicine tank device provided in this application;

[0044] Figure 2 It is a half-sectional view of a liquid medicine tank device provided in this application;

[0045] Figure 3 It is a partial structural cross-sectional view of a liquid medicine tank device provided in this application;

[0046] Figure 4 It is the top view of a liquid medicine tank device provided in this application;

[0047] Figure 5 It is the three-dimensional view of a liquid medicine tank device provided in this application with an outer tank body and a tank cover;

[0048] Figure 6 It is the half-sectional view of a liquid medicine tank device provided in this application with an outer tank body and a tank cover;

[0049] Figure 7 It is Figure 6 the enlarged schematic view of position A in

[0050] In the figure: 1. Liquid medicine tank body; 10. First sealing flange; 11. Liquid medicine cavity; 12. First side wall; 13. Second side wall; 14. Support protrusion; 15. Liquid outlet pipe; 16. Liquid inlet pipe; 17. Groove; 18. Baffle; 19. Liquid inlet gap; 2. Heating component; 21. Heat conduction pipe; 22. Heater; 31. Support plate; 32. Through hole; 33. Threaded fastener; 4. Outer tank body; 41. Installation opening; 42. Installation plate; 43. Second sealing flange; 5. Tank cover. Specific embodiments

[0051] Next, the technical solutions of the embodiments of this application will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of this application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the embodiments of this application.

[0052] In the description of the embodiments of this application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the embodiments of this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the embodiments of this application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0053] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium; it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0054] The embodiments of the present application disclose a liquid medicine tank device.

[0055] Please refer to Figure 1 and Figure 2 , an embodiment of a liquid medicine tank device provided in the specific implementation manner of the present application includes:

[0056] A liquid medicine tank body 1 and a heating assembly 2.

[0057] A liquid medicine cavity 11 is provided in the liquid medicine tank body 1. The shape and structure of the liquid medicine tank body 1 can be designed according to actual needs, such as a cuboid structure, and its top is provided with an opening to facilitate the entry of the flower basket rack, which will not be elaborated here.

[0058] The heating assembly 2 includes a heat conduction tube 21 and a heater 22. The heat conduction tube 21 is arranged at the bottom of the liquid medicine cavity 11, and one end penetrates through the first side wall 12 of the liquid medicine cavity 11, and the other end penetrates through the second side wall 13 of the liquid medicine cavity 11; the heater 22 is installed in the heat conduction tube 21.

[0059] The heat conduction tube 21 plays a role in uniformly heating in the liquid medicine cavity 11 to ensure that the liquid medicine can be uniformly heated and improve the heating efficiency. The heater 22 is responsible for providing a heat source and transferring the heat to the liquid medicine through the heat conduction tube 21. This design enables the liquid medicine tank device to directly, quickly and uniformly heat the liquid medicine.

[0060] The heat conduction tube 21 and the liquid medicine tank body can be integrally formed or connected in a split manner. The split heat conduction tube 21 and the liquid medicine tank body can be fixed by means of welding, threaded connection, clamping, etc. to ensure the connection stability and sealing performance between the heat conduction tube 21 and the liquid medicine tank body. In addition, the material of the heat conduction tube 21 can be selected from materials with good heat conduction performance such as stainless steel, copper, quartz, etc. to improve the heating efficiency.

[0061] The liquid medicine tank device designed in this application is unique in that the heating component 2 is directly installed at the bottom of the liquid medicine cavity 11 inside the liquid medicine tank body 1. Through this innovative layout, combined with the efficient combination of the heat conduction tube 21 and the heater 22, direct heating control of the liquid medicine is achieved. This design significantly reduces the heat transfer path, thereby improving the heating efficiency and making the control of the liquid medicine temperature more precise. In addition, since the heating component 2 is directly arranged inside the liquid medicine tank body 1, there is no need for an additional (water bath) heating chamber, which not only saves valuable space resources but also makes the entire system structure more compact. This optimization in design provides great convenience for the miniaturization design of the liquid medicine tank device, facilitating its use in scientific research scenarios (especially for the use scenario of cleaning fragments). The miniaturization of the device will effectively reduce the occupancy of the clean space, while reducing the loss of the liquid medicine volume and lowering the maintenance and usage costs.

[0062] The above is the first embodiment of a liquid medicine tank device provided by this application. The following is the second embodiment of a liquid medicine tank device provided by this application. For details, please refer to Figures 1 to 7 。

[0063] Based on the solution of the above first embodiment:

[0064] Furthermore, the heater 22 can be an electric heating tube. The electric heating tube has the advantages of fast heating speed, high thermal efficiency, easy control, etc., and is suitable for various heating requirements. In this embodiment, the electric heating tube is used as the heat source, and the heat is evenly transferred to the liquid medicine through the heat conduction tube 21 to ensure that the liquid medicine can be evenly heated and achieve an ideal heating effect. In addition, the electric heating tube also has a long service life and stable heating performance, and can meet the needs of long-term continuous heating.

[0065] Furthermore, the heater 22 can specifically be a tungsten wire heating tube or an infrared heating tube. Both the tungsten wire heating tube and the infrared heating tube have high thermal efficiency and stable heating performance. The tungsten wire heating tube generates heat by heating the tungsten wire with an electric current, and it has a fast heating speed and can operate stably at a relatively high temperature. The infrared heating tube uses the principle of infrared radiation for heating and can directly transfer the heat to the liquid medicine molecules to improve the heating efficiency.

[0066] When the heater 22 is an infrared heater, attention should be paid to designing the heat conduction tube 21 with a material that can transmit red light, such as quartz material, to ensure the heating effect of the infrared heater.

[0067] Furthermore, as Figure 2 shown, the first side wall 12 and the second side wall 13 are arranged opposite to each other, so that the heat conduction tube 21 can be designed to penetrate in the length or width direction of the tank body (preferably the length direction), thereby contacting the liquid medicine in the liquid medicine cavity 11 more fully.

[0068] AsFigure 1 As shown, there are at least two heat conduction tubes 21, which are arranged in parallel at intervals; there are at least two heaters 22, which are respectively installed in the heat conduction tubes 21. The arrangement of multiple heat conduction tubes 21 and heaters 22 can further improve the heating uniformity and efficiency, ensuring that the liquid medicine in the liquid medicine tank device can reach the required temperature evenly and quickly. At the same time, this design also improves the heating capacity of the liquid medicine tank device, making it suitable for larger-scale or higher-requirement heating tasks.

[0069] Further, as Figures 2 to 4 shown, a support plate 31 is fixed above the heat conduction tube 21 in the liquid medicine chamber 11; through holes 32 are arranged in an array on the support plate 31. The support plate 31 can prevent the flower basket rack or (wafer / chip) workpiece from contacting the heat conduction tube 21, thereby preventing heat loss or workpiece damage caused by direct contact. The design of the through holes 32 on the support plate 31 enables the liquid medicine to flow smoothly, ensuring the heat exchange efficiency between the liquid medicine and the flower basket rack or workpiece. Such a design not only improves the heating uniformity but also ensures the stability and reliability of the liquid medicine tank device during the heating process. In addition, the presence of the support plate 31 also provides a stable support platform for the flower basket rack or workpiece, making the entire heating process safer and more efficient.

[0070] Further, as Figure 3 shown, a plurality of support protrusions 14 are provided on the inner wall of the liquid medicine chamber 11; the support protrusions 14 are in contact with and abut against the bottom of the support plate 31 for supporting the support plate 31.

[0071] The design of the support protrusions 14 not only enhances the structural strength of the inner wall of the liquid medicine chamber 11 but also ensures the stability and levelness of the support plate 31 after installation. Through the close contact between the support protrusions 14 and the bottom of the support plate 31, the weight borne by the support plate 31 can be effectively dispersed, preventing the support plate 31 from deforming or sinking due to long-term loading of heavy objects. The number of the support protrusions 14 can be designed to vary according to actual needs, and the support protrusions 14 can be integrally formed with the liquid medicine tank body 1.

[0072] Further, threaded holes (not shown in the figure) are provided on the support protrusions 14; through holes (not shown in the figure) corresponding to the threaded holes are provided on the support plate 31; as Figure 2 and Figure 3 shown, threaded fasteners 33 passing through the through holes and threadedly connected to the threaded holes are installed in the through holes; the threaded fasteners 33 are used to fasten the support protrusions 14 and the support plate 31 together.

[0073] The support protrusion 14 and the pallet 31 are firmly connected by the threaded fastener 33, which can further enhance the stability and reliability of the pallet 31 and prevent the pallet 31 from shaking or displacing due to the flow of the liquid medicine or the movement of the workpiece during the heating process. This design not only improves the overall structural strength of the liquid medicine tank device but also ensures the stability and safety of the heating process. In addition, the installation and disassembly of the threaded fastener 33 are relatively convenient, facilitating the user to maintain and replace the pallet 31.

[0074] The threaded fastener 33 can be a screw or a bolt.

[0075] Furthermore, as Figure 5 and Figure 7 shown, it further includes an outer tank body 4; the bottom of the liquid medicine tank body 1 is inserted into the outer tank body 4 through the top opening of the outer tank body 4; a first sealing flange 10 that is turned downwards is annularly arranged on the outer peripheral surface of the liquid medicine tank body 1; the first sealing flange 10 is hermetically connected to the top of the outer tank body 4; the outer tank body 4 is provided with a second sealing flange 43 that extends into the first sealing flange 10 and fits against the inner side wall of the first sealing flange 10.

[0076] The design of the outer tank body 4 not only provides additional protection and support for the liquid medicine tank device but also provides a more stable heating environment (playing a certain heat preservation role) for the liquid medicine tank device, reducing the influence of external factors on the heating process. Moreover, it is also convenient to process corresponding fixing structures on the outer tank body 4 to achieve the overall installation and fixation.

[0077] Furthermore, as Figure 6 shown, installation openings 41 are respectively arranged on both sides of the outer tank body 4; the end of the heat conduction tube 21 is located within the projection of the installation opening 41 on the liquid medicine tank body 1; it can be understood that the installation opening 41 is directly opposite to the end of the heat conduction tube 21, facilitating the installation and disassembly of the heater 22 through the installation opening 41.

[0078] An installation plate 42 is detachably fixed on the installation opening 41; both ends of the heater 22 are respectively connected to the installation plate 42. The design of the installation plate 42 not only provides stable support for the heater 22 but also facilitates the installation and maintenance of the heater 22. Through the installation plate 42, the heater 22 can be easily fixed and disassembled, improving the flexibility and operability of the liquid medicine tank device. At the same time, the presence of the installation plate 42 also ensures the stability and reliability of the heater 22 after installation, preventing poor heating effects or safety hazards caused by the loosening or displacement of the heater 22.

[0079] Furthermore, as Figure 4 and Figure 6As shown, a liquid outlet pipe 15 is connected to the bottom of one side wall of the liquid medicine tank body 1. The liquid outlet pipe 15 can be connected to the first side wall 12 of the liquid medicine chamber 11. A liquid inlet pipe 16 is connected to a position near the top of one side wall of the liquid medicine tank body 1. The liquid inlet pipe 16 can be connected to the second side wall 13 of the liquid medicine chamber 11.

[0080] The design of the liquid inlet pipe 16 and the liquid outlet pipe 15 enables the liquid medicine to conveniently enter and exit the liquid medicine tank device, realizing the recycling of the liquid medicine. Valves can be provided on both the liquid inlet pipe 16 and the liquid outlet pipe 15 to control the flow rate and flow direction of the liquid medicine.

[0081] An avoidance hole can be provided on the mounting plate 42 on one side of the liquid outlet pipe 15 for the liquid outlet pipe 15 to extend out, without specific limitation.

[0082] Further, as Figure 6 shown, a groove 17 communicating with the liquid inlet pipe 16 is provided at the position where the liquid medicine chamber 11 is connected to the liquid inlet pipe 16. A baffle 18 is installed at a position a certain distance from one end of the liquid inlet pipe 16 communicating with the groove 17 in the groove 17. An inlet liquid gap 19 is formed between the bottom of the baffle 18 and the bottom surface of the groove 17. The baffle 18 can be an L-shaped plate structure, composed of two plate bodies vertically connected. The horizontally arranged plate body is vertically connected to the side surface of the groove 17 and is located above one end of the liquid inlet pipe 16 communicating with the groove 17. The vertical plate body just blocks in front of one end of the liquid inlet pipe 16 communicating with the groove 17. In this way, the liquid medicine output from one end of the liquid inlet pipe 16 communicating with the groove 17 will not directly rush into the liquid medicine chamber 11, but will change the flow direction due to the action of the baffle 18, and then flow out from the inlet liquid gap 19 and flow down along the side wall of the liquid medicine tank.

[0083] Such a design can slow down the impact of the liquid medicine on the liquid medicine chamber 11 and avoid affecting the heating effect due to violent disturbance during the heating process. At the same time, the presence of the baffle 18 can also prevent the liquid medicine from directly impacting the workpiece on the support plate 31 or the flower basket rack during liquid inlet, protecting the workpiece from damage.

[0084] Further, as Figure 6 shown, it further includes a tank cover 5. The tank cover 5 is installed on the top opening of the liquid medicine tank body 1 in an openable and closable manner.

[0085] The design of the tank cover 5 not only provides a closed heating environment for the liquid medicine tank device, reduces heat dissipation, improves heating efficiency, but also ensures safety and hygiene during the heating process. The tank cover 5 can be connected to the liquid medicine tank body 1 by means of hinges, buckles, etc., facilitating the opening and closing operations of the user. An observation window can also be provided on the tank cover 5 so that the user can observe the heating situation inside the liquid medicine tank device without opening the tank cover 5.

[0086] The present application also discloses a semiconductor wet bench, which includes a wet bench body and a liquid medicine tank device, and the liquid medicine tank device is installed on the wet bench body.

[0087] The above has introduced in detail a liquid medicine tank device and a semiconductor wet bench provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A liquid medicine tank device, characterized in that, It includes a liquid medicine tank body (1) and a heating assembly (2); A liquid medicine cavity (11) is provided inside the liquid medicine tank body (1); The heating assembly (2) includes a heat conduction pipe (21) and a heater (22); The heat conduction pipe (21) is arranged at the bottom of the liquid medicine cavity (11), with one end penetrating through the first side wall (12) of the liquid medicine cavity (11) and the other end penetrating through the second side wall (13) of the liquid medicine cavity (11); The heater (22) is installed in the heat conduction pipe (21).

2. The liquid medicine tank device according to claim 1, characterized in that, The heater (22) is an electric heating pipe.

3. The liquid medicine tank device according to claim 2, characterized in that The heater (22) is a tungsten wire heating pipe or an infrared heating pipe.

4. The liquid medicine tank device according to claim 1, characterized in that, The first side wall (12) and the second side wall (13) are oppositely arranged; There are at least two heat conduction pipes (21), which are arranged in parallel at intervals; There are at least two heaters (22), which are respectively installed in the heat conduction pipes (21) in one-to-one correspondence.

5. The liquid medicine tank device according to claim 1, characterized in that A support plate (31) is fixed above the heat conduction pipe (21) inside the liquid medicine cavity (11); Through holes (32) are arranged in an array on the support plate (31).

6. The liquid medicine tank device according to claim 5, characterized in that A number of support protrusions (14) are provided on the inner wall of the liquid medicine cavity (11); The support protrusions (14) are in contact with and abutted against the bottom of the support plate (31) to support the support plate (31).

7. The liquid medicine tank device according to claim 6, characterized in that, Threaded holes are provided on the support protrusions (14); Through holes corresponding to the threaded holes are provided on the support plate (31); Threaded fasteners (33) passing through the through holes and threadedly connected to the threaded holes are installed in the through holes; The threaded fasteners (33) are used to fasten the support protrusions (14) and the support plate (31) together.

8. The liquid medicine tank device according to claim 1, characterized in that, It also includes an outer tank body (4); The bottom of the liquid medicine tank body (1) is loaded into the outer tank body (4) through the top opening of the outer tank body (4); A first sealing flange (10) that is turned downwards is annularly provided on the outer peripheral surface of the liquid medicine tank body (1); The first sealing flange (10) is hermetically connected to the top of the outer tank body (4); A second sealing flange (43) that extends into the first sealing flange (10) and fits against the inner side wall of the first sealing flange (10) is provided at the top of the outer tank body (4).

9. The liquid medicine tank device according to claim 8, characterized in that, Mounting openings (41) are respectively provided on both sides of the outer tank body (4); The end of the heat conduction pipe (21) is located in the projection area of the mounting opening (41) on the liquid medicine tank body (1); A mounting plate (42) is detachably fixed on the mounting opening (41); Both ends of the heater (22) are respectively connected to the mounting plate (42).

10. The liquid medicine tank device according to claim 1, wherein, A liquid outlet pipe (15) is connected to the bottom of one side wall of the liquid medicine tank body (1); A liquid inlet pipe (16) is connected to a position near the top of one side wall of the liquid medicine tank body (1).

11. The liquid medicine tank device according to claim 10, wherein, A groove (17) communicating with the liquid inlet pipe (16) is provided at the position where the liquid medicine cavity (11) is connected to the liquid inlet pipe (16); A baffle (18) is installed at a position a certain distance from one end of the groove (17) communicating with the liquid inlet pipe (16) and facing the liquid inlet pipe (16) in the groove (17); A liquid inlet gap (19) is formed between the bottom of the baffle (18) and the bottom surface of the groove (17).

12. The liquid medicine tank device according to claim 1, wherein It also includes a tank cover (5); The slot cover (5) is installed on the top opening of the liquid medicine tank body (1) in an openable and closable manner.

13. A semiconductor wet bench, characterized in that, It includes a wet bench body and the liquid medicine tank device according to any one of claims 1 to 12.

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