LCoS double-BF automatic piece taking and collecting batch production equipment

Abstract

The utility model relates to an LCoS double-BF automatic sheet taking and collecting batch production device, comprising a wafer storage jig, the inner side wall of the wafer storage jig is provided with a plurality of clamping groove groups, and the clamping groove groups are arranged along the vertical direction of the inner side wall at intervals; the incoming material conveying belt is located on one side of the wafer storage jig and used for conveying the wafers to be stored; and the carrying mechanism is located on one side of the wafer storage jig and comprises a linear driving assembly, a lifting driving part and a carrying fork hand, the lifting driving part is located on the linear driving assembly, the carrying fork hand is fixedly arranged on the lifting driving part, and the carrying fork hand is used for carrying the wafer so as to place the wafer into the wafer storage jig. According to the utility model, manual intervention is not needed in the whole sheet taking and placing process, so that the production efficiency is greatly improved, the pollution risk is effectively reduced, and the stability of the product quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of LCoS pick-up and collection wafers, and particularly relates to an LCoS double BF automatic pick-up and collection wafer batch production equipment. Background Art

[0002] In the field of LCOS technology, wafers, as the basic materials of LCoS chips, are processed through a series of processes to form LCOS chips. Currently, in the industry, the caching, picking, and placing of wafer runs are usually transferred to the designated position through a production line, and the turnover is completed by manual picking and placing. This method has low efficiency, and during the manual operation process, wafers are easily contaminated by environmental dust, static electricity, and other factors, thereby increasing the product defect rate and scrap rate and reducing the product quality stability.

[0003] Therefore, there is an urgent need to provide an LCoS double BF automatic pick-up and collection wafer batch production equipment to solve the above problems. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies and defects of the prior art and provide an LCoS double BF automatic pick-up and collection wafer batch production equipment, realizing that the entire wafer picking and placing process does not require manual intervention, not only improving the production efficiency, but also effectively reducing the risk of pollution and enhancing the stability of product quality.

[0005] The purpose of the utility model is achieved through the following technical solutions:

[0006] An LCoS double BF automatic pick-up and collection wafer batch production equipment, comprising:

[0007] A wafer storage fixture, wherein a card slot group is arranged on the inner side wall of the wafer storage fixture, and a plurality of the card slot groups are arranged at intervals along the vertical direction of the inner side wall;

[0008] A feeding conveyor belt, located on one side of the wafer storage fixture, for conveying wafers to be stored;

[0009] A handling mechanism, located on one side of the wafer storage fixture, comprising a linear drive assembly, a lifting drive member, and a handling fork. The lifting drive member is located on the linear drive assembly, and the handling fork is fixedly arranged on the lifting drive member. The handling fork is used to handle wafers to place the wafers into the wafer storage fixture.

[0010] As a preferred technical solution of the utility model, the linear drive assembly comprises a guide rail, a slider located on the guide rail, and an electric drive member for driving the slider to slide along the guide rail. The slider is slidably connected to the guide rail, and the electric drive member is electrically connected to the slider.

[0011] As a preferred technical solution of the present invention, a photoelectric sensor is provided on the incoming material conveyor belt, and the photoelectric sensor is electrically connected to the transport mechanism.

[0012] As a preferred technical solution of the present invention, the card slot group includes a first card slot located on one side wall and a second card slot located on the other side wall, and the first card slot and the second card slot are arranged correspondingly.

[0013] As an optimal technical solution of the present invention, the LCoS dual BF automated wafer collection and batch production equipment is also provided with a lifting platform, which is located below the wafer storage jig and is used to carry the wafer storage jig and drive the wafer storage jig to perform lifting and lowering movements.

[0014] As a preferred technical solution of the present invention, the incoming material conveyor belt is a roller-type clean conveyor belt.

[0015] As a preferred technical solution of the present invention, a control system display screen is provided on the outer wall of the wafer storage fixture, and the control system display screen is electrically connected to the transport mechanism.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The utility model realizes the fully automated processing of the wafer receiving process by arranging a wafer storage jig and a transport mechanism, effectively avoiding the secondary contamination problem that may be caused by the accumulation of wafers on the incoming material conveyor belt, and ensuring the cleanliness of the wafers; the wafers on the incoming material conveyor belt are accurately and automatically transported into the wafer storage jig by the transport mechanism, without the need for direct human intervention, which significantly improves production efficiency and reduces the risk of contamination caused by manual operation; the wafer storage jig is provided with multiple card slot groups, which can accommodate multiple wafers at a time, not only improving storage efficiency, but also facilitating subsequent wafer management and retrieval. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural diagram of the present utility model.

[0019] Figure 2 It is a front view of the utility model.

[0020] Figure 3 It is a side view of the present utility model.

[0021] The above drawings include the following reference numerals:

[0022] 1. Wafer storage fixture, 11. Slot group, 12. First slot, 13. Second slot, 2. Incoming conveyor belt, 3. Transport mechanism, 4. Linear drive assembly, 5. Lifting drive component, 6. Transport fork, 7. Guide rail, 8. Slider, 9. Lifting platform, 10. Wafer. Detailed implementation manners

[0023] The present utility model will be further described in detail below in conjunction with embodiments and the accompanying drawings, but the implementation manners of the present utility model are not limited thereto.

[0024] The specific implementation process of the present utility model is as follows:

[0025] As Figures 1 to 3 shown, a batch production equipment for automatically picking and receiving wafers of LCoS double BF includes a wafer storage jig 1 for storing wafers 10, a feeding conveyor belt 2 for conveying wafers 10 to be stored, and a handling mechanism 3 for moving the wafers 10 conveyed on the feeding conveyor belt 2 to the wafer storage jig 1 for storage. The wafers 10 in this embodiment are sheet-shaped wafers.

[0026] The inner side wall of the wafer storage jig 1 is provided with a slot group 11 for carrying a single wafer 10. The slot group 11 includes a first slot 12 on one side wall and a second slot 13 on the other side wall. The first slot 12 and the second slot 13 are correspondingly arranged, and the first slot 12 and the second slot 13 support the wafer 10 relatively to make the wafer 10 placed neatly and stably in the wafer storage jig 1. A plurality of slot groups 11 are arranged at intervals along the vertical direction of the inner side wall, so that the wafer storage jig 1 can store multiple wafers 10 at one time, making reasonable use of the internal space of the jig.

[0027] The feeding conveyor belt 2 and the handling mechanism 3 are both located on one side of the wafer storage jig 1. The feeding conveyor belt 2 is provided with a photoelectric sensor, and the photoelectric sensor is electrically connected to the handling mechanism 3. The handling mechanism 3 includes a linear driving component 4, a lifting driving member 5, and a handling fork 6. The lifting driving member 5 is located on the linear driving component 4, and the handling fork 6 is fixedly arranged on the lifting driving member 5. The linear driving component 4 is used to drive the handling fork 6 to perform a linear motion to approach or move away from the feeding conveyor belt 2. The linear driving component 4 includes a guide rail 7, a slider 8 located on the guide rail 7, and an electric driving member for driving the slider 8 to slide along the guide rail 7. The slider 8 is slidably connected to the guide rail 7, and the electric driving member is electrically connected to the slider 8. The lifting driving member 5 is fixedly arranged on the slider 8. The electric driving member drives the slider 8 to slide on the guide rail 7, and then drives the lifting driving member 5 and the handling fork 6 to perform a linear motion along the guiding direction of the guide rail 7. The electric driving member can be a motor, a servo motor, or a cylinder. The lifting driving member 5 is used to drive the handling fork 6 to lift and lower to place the wafer 10 into the wafer storage jig 1.

[0028] Specifically, when the wafer 10 to be stored is conveyed to the wafer storage jig 1 station by the incoming material conveyor belt 2, the handling mechanism 3 will immediately respond to the received incoming material signal. The linear drive assembly 4 drives the handling fork 6 to move linearly, gradually approaching the incoming material conveyor belt 2. The lifting drive member 5 drives the handling fork 6 to rise, smoothly lift the wafer 10 from the incoming material conveyor belt 2, and place it on the card slot group 11 of the wafer storage jig 1. After the placement is completed, the linear drive assembly 4 moves in the reverse direction, causing the handling fork 6 to move backward and withdraw from the wafer storage jig 1. Then, the lifting drive member 5 drives the handling fork 6 to descend and reposition below the next wafer 10 to be stored on the incoming material conveyor belt 2. The handling fork 6 rises again to lift the wafer 10 and place the wafer 10 into the next empty card slot group 11 of the wafer storage jig 1. The above operations are continuously repeated in a cycle until all the card slot groups 11 in the wafer storage jig 1 are filled with wafers 10, thus efficiently and orderly completing the automated loading and unloading process of the wafers 10.

[0029] In an embodiment of the present invention, the LCoS dual BF automated wafer loading and unloading batch production equipment further includes a lifting table 9. The lifting table 9 is located below the wafer storage jig 1 and is used to carry the wafer storage jig 1 and drive the wafer storage jig 1 to perform lifting movements. The lifting table 9 cooperates with the lifting drive member 5 of the handling mechanism 3, enabling the handling mechanism 3 to accurately place the wafer 10 to be stored into each card slot group 11 of the wafer storage jig 1.

[0030] In an embodiment of the present invention, the incoming material conveyor belt 2 is a roller-type clean conveyor belt to ensure that no dust, particles or other pollutants are generated during the conveying process. The roller-type clean conveyor belt includes rollers, bearings, and a driving device. The rollers and the bearings cooperate with each other, and the driving device drives the rollers to roll, thereby driving the wafer 10 to move forward. The rollers are made of corrosion-resistant and easy-to-clean materials such as stainless steel or aluminum alloy to ensure that no pollution is caused to the materials during the transmission process.

[0031] In an embodiment of the present invention, a control system display screen is provided on the outer wall of the wafer storage jig 1. The control system display screen is electrically connected to the handling mechanism 3. The control system display screen is a touch type, and the operator can set operating parameters or view the working status and other conditions of the equipment through the control system display screen.

[0032] The production equipment of the present invention is located in a hundred-level ultra-clean space to isolate external pollutants. The present invention is applicable to the wafer 10 loading and unloading processes during the processing of products such as VR-LCOS chip products, AR-LCOS chip products, micro-LCOS chip projection products, 3D scanning LCOS chip products, and phase modulation LCOS chip products, and can solve the problems of product backlog and storage pollution during the wafer 10 wafer flow process.

[0033] The above-described embodiments merely represent the implementation manners of the present utility model. The description thereof is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patent of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several variations and improvements can still be made, and these all fall within the protection scope of the present utility model. Therefore, the protection scope of the patent of the present utility model shall be subject to the appended claims.

Claims

1. An LCoS dual-BF automated film taking and receiving batch production equipment, characterized in that, Including: A wafer storage fixture, on the inner sidewall of which a card slot group is provided, and a plurality of the card slot groups are arranged at intervals in the vertical direction of the inner sidewall; A feeding conveyor belt, located on one side of the wafer storage fixture, for conveying wafers to be stored; A handling mechanism, located on one side of the wafer storage fixture, includes a linear driving assembly, a lifting driving member, and a handling fork. The lifting driving member is located on the linear driving assembly, and the handling fork is fixedly arranged on the lifting driving member. The handling fork is used to handle wafers to place the wafers into the wafer storage fixture.

2. The automated batch production equipment for LCoS dual BF pick-up and receiving sheets according to claim 1, wherein The linear driving assembly includes a guide rail, a slider located on the guide rail, and an electric driving member for driving the slider to slide along the guide rail. The slider is slidably connected to the guide rail, and the electric driving member is electrically connected to the slider.

3. The automated batch production equipment for taking and receiving LCoS double BF according to claim 1, characterized in that, An optoelectronic sensor is provided on the feeding conveyor belt, and the optoelectronic sensor is electrically connected to the handling mechanism.

4. A kind of LCoS dual-BF automatic film taking and receiving batch production equipment according to claim 1, characterized in that, The card slot group includes a first card slot on one sidewall and a second card slot on the other sidewall, and the first card slot and the second card slot are arranged corresponding to each other.

5. The LCoS dual-BF automated film picking and receiving batch production equipment according to claim 1, wherein, The LCoS dual BF automatic wafer loading and unloading batch production equipment is further provided with a lifting table, which is located below the wafer storage fixture and is used to carry the wafer storage fixture and drive the wafer storage fixture to perform lifting motion.

6. The LCoS dual-BF automated film picking and receiving batch production equipment according to claim 1, characterized in that, The feeding conveyor belt is a roller type clean conveyor belt.

7. An LCoS dual-BF automated film taking and receiving batch production equipment according to claim 1, characterized in that, A control system display screen is provided on the outer wall of the wafer storage fixture, and the control system display screen is electrically connected to the handling mechanism.

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