Cover plate mechanism, wafer cleaning device and wafer packaging equipment

Abstract

The utility model discloses a cover plate mechanism, a wafer cleaning device and wafer packaging equipment, the wafer packaging equipment comprises a conveying device and the wafer cleaning device, the conveying device conveys a basket loaded with a wafer into the wafer cleaning device to clean the wafer, the wafer cleaning device comprises a cleaning tank and a cover plate mechanism, and the cover plate mechanism is arranged on the wafer cleaning device. The cover plate mechanism comprises a support, a driving assembly, a plurality of transmission assemblies and a plurality of cover plate assemblies, the support is fixed to the cleaning tank, the cover plate assemblies are fixed to the edge of an opening of the cleaning tank, the driving assembly and the transmission assemblies are arranged on the support, the driving assembly is connected with the transmission assemblies, and the cover plate assemblies and the transmission assemblies are connected in a one-to-one correspondence mode. The driving assembly drives the multiple transmission assemblies to drive the corresponding cover plate assemblies to be opened or closed at the same time. According to the technical scheme, the cover plate mechanism capable of being automatically opened and closed is designed for the cleaning tank, manual intervention is not needed, automation of wafer cleaning and packaging is achieved, and the wafer processing efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer equipment, in particular to a cover plate mechanism, a wafer cleaning device and a wafer packaging device. Background Art

[0002] A wafer is the substrate used to manufacture semiconductor transistors or integrated circuits. It is a crystalline material, round in shape, hence the name. The wafer storage basket used in automated wafer processing equipment in the semiconductor industry is a multi-layered, slotted structure.

[0003] During the wafer packaging process, wafers undergo a cleaning process. Prior to cleaning, a basket carrying the wafers is transported to a cleaning tank via a crane. While the wafers are being cleaned, the tank must remain closed to ensure a clean and contaminant-free working environment. After cleaning, the cleaning fluid in the tank is replaced and the tank is opened to allow the next basket to enter. Prior art systems lack intelligent control over the opening and closing of the tank, requiring manual intervention and inconvenience. Utility Model Content

[0004] One of the purposes of the present invention is to overcome the deficiencies in the prior art and to provide a cover mechanism, a wafer cleaning device and a wafer packaging device to address the problems in the prior art.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] In the first aspect, the utility model provides a cover mechanism, comprising a bracket, a drive assembly, multiple transmission assemblies and multiple cover assemblies, the drive assembly and the multiple transmission assemblies are arranged on the bracket, the drive assembly is connected to the multiple transmission assemblies, the cover assembly and the transmission assemblies are connected and arranged in a one-to-one correspondence, and the drive assembly simultaneously drives the multiple transmission assemblies to drive the corresponding cover assemblies to open or close at the same time.

[0007] In a preferred embodiment of the present application, the driving assembly includes a driving member, an output member and a plurality of connecting members, the driving member is fixed on the bracket, the output member is connected to the output end of the driving member, the plurality of connecting members are all connected to the output member, the connecting members are connected to the transmission assembly in a one-to-one correspondence, the driving member drives the output member to move back and forth in a first direction, and the output member drives the connecting member to move back and forth at the same time.

[0008] In a preferred embodiment of the present application, the output member extends along a second direction perpendicular to the first direction, the multiple connecting members are arranged on the output member at intervals along the second direction, and the output member drives the multiple connecting members to move back and forth simultaneously along the first direction.

[0009] In a preferred embodiment of the present application, the driving assembly further includes a plurality of guides and a plurality of sliders, the sliders, the guides and the connecting members being arranged in one-to-one correspondence, the plurality of guides being fixed on the bracket and extending along the first direction, the slider being slidably arranged on the guide, the connecting member being fixedly connected to the slider, and the connecting member sliding along the first direction on the guide through the slider.

[0010] In a preferred embodiment of the present application, each of the transmission assemblies includes a transmission gear and a transmission shaft, the transmission shaft is coaxially arranged with the transmission gear, the connecting member includes a first connecting rod and a second connecting rod, one end of the first connecting rod is hinged to the output member, the other end of the first connecting rod and one end of the second connecting rod are hinged to the ring gear of one of the transmission gears, and the other end of the second connecting rod is hinged to the ring gear of the other transmission gear.

[0011] In a preferred embodiment of the present application, the transmission assembly includes a linear rack, a transmission gear and a transmission shaft, the linear rack is fixed on the driving assembly, the transmission gear is fixed on the bracket, the transmission gear is meshed with the linear rack, the transmission shaft is coaxially connected to the transmission gear and passes through the bracket to be connected to the cover assembly, the driving assembly drives the linear rack to move linearly, driving the transmission gear to rotate, and the transmission shaft rotates synchronously with the transmission gear, thereby controlling the cover assembly to open or close at the same time.

[0012] In a preferred embodiment of the present application, the transmission gear includes a first gear and a second gear, the axle of the second gear is parallel to the axle of the first gear, the second gear is meshed with the first gear, and the transmission shaft is coaxially arranged with the axle of the second gear.

[0013] In a preferred embodiment of the present application, the cover plate assembly includes a rotating frame, a locking wheel, a primary cover plate and at least one secondary cover plate, the rotating frame is connected to the transmission assembly, the primary cover plate is fixed on the rotating frame, the secondary cover plate is hinged to the primary cover plate in turn, and at least one locking wheel is arranged on the secondary cover plate. The transmission assembly drives the rotating frame to rotate, so that the primary cover plate flips open or flips closed, and then drives the secondary cover plate to flip open or flip closed, and the locking wheel controls the bottom end of the secondary cover plate to always remain level with the bottom end of the primary cover plate.

[0014] In a second aspect, the utility model provides a wafer cleaning device, comprising a cleaning tank and a cover mechanism as described in the first aspect, wherein the bracket of the cover mechanism is fixed on the cleaning tank, and the cover assembly of the cover mechanism is fixed on the edge of the opening of the cleaning tank.

[0015] In a third aspect, the utility model provides a wafer packaging device, comprising a transport device and a wafer cleaning device as described in the second aspect, wherein the transport device transports a basket loaded with wafers to the wafer cleaning device for cleaning the wafers.

[0016] The cover mechanism, wafer cleaning device and wafer packaging equipment disclosed in the utility model are designed with a cover mechanism that can be automatically opened and closed for the cleaning tank, without the need for human intervention, thereby realizing the automation of wafer cleaning and packaging and improving the efficiency of wafer processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention is described with the help of the following drawings:

[0018] Figure 1 It is a structural schematic diagram of a wafer packaging device in an embodiment of the present utility model;

[0019] Figure 2 It is a structural schematic diagram of a wafer cleaning device in an embodiment of the present invention;

[0020] Figure 3 This is a structural diagram of the cover mechanism in an embodiment of the present utility model;

[0021] Figure 4 This is a schematic diagram of another structure of the cover mechanism in the embodiment of the present invention in the open state;

[0022] Figure 5 This is a schematic diagram of another structure of the cover mechanism in the embodiment of the present invention in a closed state;

[0023] Figure 6 This is a third structural schematic diagram of the cover mechanism of the embodiment of the present utility model.

[0024] Reference numerals:

[0025] 1-wafer cleaning device; 2-transport device; 3-wafer; 4-basket; 5-basket carrying device;

[0026] 10-cleaning tank; 100-cover mechanism; 101-bracket; 110-drive assembly; 111-drive member; 112-output member; 113-connecting member; 114-guide member; 115-slider; 116-first connecting rod; 117-second connecting rod; 120-transmission assembly; 121-linear rack; 122-transmission gear; 123-transmission shaft; 124-first gear; 125-second gear; 130-cover assembly; 131-rotating frame; 132-locking wheel; 133-primary cover; 134-secondary cover; 135-L-shaped arm; 136-support beam; 137-avoidance gap;

[0027] D1-first direction; D2-second direction. DETAILED DESCRIPTION

[0028] In order to better understand the technical solution of the present application, the embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0029] It should be clear that the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0030] like Figure 1 As shown, an embodiment of the present invention provides a wafer packaging device, including a wafer cleaning device 1 and a conveying device 2. The conveying device 2 conveys a basket 4 loaded with wafers 3 to the wafer cleaning device 1 through a basket carrying mechanism 5 to clean the wafers 3.

[0031] like Figure 2As shown, the wafer cleaning apparatus 1 of this embodiment includes a cleaning tank 10 and a cover mechanism 100. The cover mechanism 100 includes a bracket 101, a drive assembly 110, multiple transmission assemblies 120, and multiple cover assemblies 130. The bracket 101 of the cover mechanism 100 is fixed to the cleaning tank 10, and the cover assemblies 130 of the cover mechanism 100 are fixed to the edge of the opening of the cleaning tank 10. The number of transmission assemblies 120 and cover assemblies 130 is the same and they are arranged in pairs, that is, each cover assembly 130 is equipped with a transmission assembly 120, which is used to transmit the output of the drive assembly 110 to each cover assembly 130 to control the simultaneous opening and closing of each cover assembly 130. The number of transmission assemblies 120 and cover plate assemblies 130 can be set according to actual needs. When the number is two, the space required to arrange the cover plate assembly 130 at the opening of the cleaning tank 10 is the least. It is only necessary to fix one cover plate assembly 130 at each of the opposite ends of the opening of the cleaning tank 10. Only two transmission assemblies 120 need to be set accordingly. Compared with setting a larger number of cover plate assemblies 130 and transmission assemblies 120 at the opening of the cleaning tank 10, the opening of the cleaning tank 10 can have enough space for the basket 4 loaded with wafers 3 to be placed in and out of the cleaning tank 10. The number of drive assemblies 110 can be set to one, or it can be set to multiple, such as two, according to the number of transmission assemblies 120 and cover plate assemblies 130. In this embodiment, when the number of drive components 110 is one, a single drive component 110 drives two transmission components 120 to control the corresponding cover components 130 to open and close at the same time. When the number of drive components 110 is two, each drive component 110 drives the corresponding transmission component 120 to control the corresponding cover component 130 to open and close at the same time. The cover mechanism 100 of this embodiment is described below for these two situations respectively.

[0032] like Figure 3 and Figure 6 In the cover mechanism 100 shown, there is one drive assembly 110, and two transmission assemblies 120 and cover assemblies 130. The drive assembly 110 and the two transmission assemblies 120 are arranged on the bracket 101. The drive assembly 110 is connected to the two transmission assemblies 120, and the cover assembly 130 is connected to the transmission assemblies 120 in a one-to-one correspondence. The drive assembly 110 simultaneously drives the two transmission assemblies 120 to drive the corresponding cover assemblies 130 to open or close simultaneously. Figure 4 and Figure 5In the cover mechanism 100 shown, the number of the drive assembly 110, the transmission assembly 120 and the cover assembly 130 are two, and the left half and the right half of the bracket 101 are respectively provided with a drive assembly 110, a transmission assembly 120 and a cover assembly 130. The drive assembly 110, the transmission assembly 120 and the cover assembly 130 are connected and arranged in a one-to-one correspondence. Each drive assembly 110 simultaneously drives the corresponding transmission assembly 120 to drive the corresponding cover assembly 130 to open simultaneously ( Figure 4 ) or close ( Figure 5 ).

[0033] The driving assembly 110 includes a driving member 111, an output member 112, multiple connecting members 113, multiple guiding members 114 and multiple sliders 115. The number of connecting members 113, guiding members 114 and sliders 115 is set according to the number of transmission assemblies 120. In this embodiment, the number of transmission assemblies 120 is two, and the number of connecting members 113, guiding members 114 and sliders 115 is also set to two. The driving member 111 is fixed to the bracket 101, the output member 112 is connected to the output end of the driving member 111, and the two connecting members 113 are both connected to the output member 112. The connecting member 113 is connected and arranged in a one-to-one correspondence with the transmission assembly 120. The slider 115 and the guide member 114 are arranged in a one-to-one correspondence with the connecting member 113. The two guide members 114 are fixed to the bracket 101 and extend along the first direction D1. The slider 115 is slidably arranged on the guide member 114. The connecting member 113 is fixedly connected to the slider 115. The connecting member 113 slides along the first direction D1 on the guide member 114 through the slider 115. The driving member 111 drives the output member 112 to move back and forth along the first direction D1, and the output member 112 drives the connecting member 113 to move back and forth at the same time. Figure 3 In the embodiment, the first direction D1 is the vertical direction, i.e., the direction in which the basket 4 enters and leaves the cleaning tank 10. The output member 112 extends along a second direction D2 perpendicular to the first direction D1. The two connecting members 113 are arranged on the output member 112 at intervals along the second direction D2. They can be arranged at the two ends of the output member 112. The output member 112 drives the two connecting members 113 to move back and forth simultaneously along the first direction D1. Figure 3 In the embodiment, the second direction D2 is horizontal, i.e., the direction in which the basket 4 is transported. In this embodiment, the driving member 111 may be a linear motor or a pneumatic cylinder. When the driving member 111 is a linear motor, the output shaft extends upward from the linear motor along the first direction D1 and can move up and down in the first direction D1. When the driving member 111 is a pneumatic cylinder, the piston rod extends upward from the cylinder along the first direction D1 and can move up and down in the first direction D1. The guide member 114 may be a linear guide rail.

[0034] The transmission assembly 120 includes a linear rack 121, a transmission gear 122 and a transmission shaft 123. The linear rack 121 is fixed on the connecting piece 113 of the driving assembly 110 and can extend along the first direction D1. The transmission gear 122 is fixed on the bracket 101. The transmission gear 122 is meshed with the linear rack 121. The transmission shaft 123 is coaxially connected to the transmission gear 122 and passes through the bracket 101 to be connected to the cover assembly 130. The driving assembly 110 drives the linear rack 121 to move linearly, such as rising or falling along the first direction D1, driving the transmission gear 122 to rotate, and the transmission shaft 123 rotates synchronously with the transmission gear 122, thereby controlling the cover assembly 130 to open or close at the same time.

[0035] In this embodiment, the number of the transmission gear 122 can be set to one or more. When there is only one transmission gear 122, the transmission gear 122 is driven by the linear rack 121 to move clockwise to open the cover assembly 130, and the transmission gear 122 is driven by the linear rack 121 to move counterclockwise to close the cover assembly 130. Figure 4 and Figure 5 ,although Figure 4 and Figure 5 The linear rack 121 extends in the second direction D2, but the principle of driving the single transmission gear 122 remains unchanged. When there are two transmission gears 122, the transmission gears 122 include a first gear 124 and a second gear 125. The first gear 124 meshes with the linear rack 121, the axle of the second gear 125 is parallel to the axle of the first gear 124, the second gear 125 meshes with the first gear 124, and the transmission shaft 123 is coaxially arranged with the axle of the second gear 125. Figure 3 When the linear rack 121 rises, the first gear 124 on the left rotates counterclockwise, the second gear 125 on the left rotates clockwise, the first gear 124 on the right rotates clockwise, the second gear 125 on the right rotates counterclockwise, and the cover assembly 130 is closed; when the linear rack 121 descends, the first gear 124 on the left rotates clockwise, the second gear 125 on the left rotates counterclockwise, the first gear 124 on the right rotates counterclockwise, the second gear 125 on the right rotates clockwise, and the cover assembly 130 is opened. It should be noted that Figure 3 、 Figure 4 and Figure 5 Each of these is merely a feasible transmission method, and does not mean that the transmission assembly 120 of this embodiment must adopt these transmission methods. For example, Figure 3If both linear racks 121 are located between the first gear 124, the transmission assembly 120 will transmit in the manner described above. If the position of the linear racks 121 is adjusted so that the two first gears 124 are located between the two linear racks 121, the transmission method of the transmission assembly 120 will be opposite to the above method. It is conceivable that the extension direction of the linear racks 121, that is, the first direction D1, does not necessarily have to be set to a vertical direction. The first direction D1 can also be set to an inclined direction at a certain angle to the vertical direction, which can also achieve the control of the first gear 124 to rotate clockwise or counterclockwise. Of course, the number of transmission gears 122 can also be set to more, such as three or five, but setting more gears will not improve the transmission efficiency much. Instead, it will increase the space occupied by the components in the device. Therefore, in most cases, the number of transmission gears 122 is set to one or two.

[0036] The cover plate assembly 130 includes a rotating frame 131, a locking wheel 132, a primary cover plate 133 and at least one secondary cover plate 134. The primary cover plate 133 is fixed on the rotating frame 131, and the secondary cover plate 134 is hinged to the primary cover plate 133 in turn. At least one locking wheel 132 is provided on the secondary cover plate 134. The transmission assembly 120 drives the rotating frame 131 to rotate, so that the primary cover plate 133 flips open or flips closed, thereby driving the secondary cover plate 134 to flip open or flip close. The locking wheel 132 controls the bottom end of the secondary cover plate 134 to always remain level with the bottom end of the primary cover plate 133. The rotating frame 131 is connected to the transmission shaft 123 of the transmission assembly 120. The rotating frame 131 has a pair of L-shaped arms 135 and a support beam 136 connecting the two L-shaped arms 135. The opening of the L-shaped arm 135 faces the interior of the cleaning tank 10. The two L-shaped arms 135 are respectively arranged on one side of the opening of the cleaning tank 10 connected to the bracket 101 and the other side away from the bracket 101. The support beam 136 is connected to the corners of the two L-shaped arms 135. The transmission shaft 123 is connected to the first end of the L-shaped arm 135, the long side of the first-level cover plate 133 is fixedly connected to the support beam 136, and the short side of the first-level cover plate 133 is connected to the second end of the L-shaped arm 135 through the connecting beam. The first end and the second end are respectively located on both sides of the corner, and the first end is located below the upper edge of the bracket 101, and the second end protrudes from the upper edge of the bracket 101. When the transmission shaft 123 rotates, the first end rotates with the transmission shaft 123, and the corner and the second end rotate around the first end. The long side of the secondary cover 134 is hinged to the other long side of the primary cover 133 that is not fixedly connected to the support beam 136, and an avoidance gap 137 can be opened on the other long side of the secondary cover 134. In this way, when the cover assembly 130 is in a closed state, the avoidance gaps 137 of the two oppositely closed secondary cover plates 134 can form a space for the connecting column of the basket 4 carrying device for carrying the basket 4 to pass through, and the gap between the avoidance gap 137 and the connecting column is matched. The avoidance gap 137 neither contacts the connecting column nor the gap between the two is too large. This can not only meet the cleaning needs of the wafer 3, but also prevent external foreign matter from entering the cleaning tank 10.The locking wheels 132 are provided on the short sides of the secondary cover plate 134. The number of the locking wheels 132 can be set as needed. In this embodiment, only one locking wheel 132 is provided on each short side of the secondary cover plate 134. The axle of the locking wheel 132 is fixed in a limiting groove (not shown in the figure) at the edge of the opening of the cleaning tank 10. The limiting groove extends in the horizontal direction. When the cover plate assembly 130 is opened, the primary cover plate 133 flips outward to apply an upward force to the secondary cover plate 134. The limiting groove and the locking wheel 132 can limit the secondary cover plate 13 As the primary cover 133 flips outward and the locking wheel 132 moves horizontally to control the secondary cover 134 to fold toward the primary cover 133, during the closing process of the cover assembly 130, the limiting groove and the locking wheel 132 can resist the weight of the secondary cover 134, preventing the secondary cover 134 from falling into the washing tank 10. The locking wheel 132 moves horizontally to control the secondary cover 134 to rotate from a vertical state to a horizontal state. Finally, the two primary cover plates 133 and the two secondary cover plates 134 jointly close the opening of the washing tank 10. The number of secondary cover plates 134 can be set as needed. In the present embodiment, the number of secondary cover plates 134 is one. When opened, the secondary cover plate 134 and the primary cover plate 133 can reduce the height of the opening edge protruding from the cleaning tank 10 in the vertical direction by folding. It is conceivable that providing more secondary cover plates 134 in the same length can further reduce the protruding height, but at the same time will increase the lateral thickness at the opening of the cleaning tank 10 and the structural complexity of the cover plate assembly 130. The former will affect the convenience of the basket 4 entering and leaving the cleaning tank 10, and the latter will increase the structural cost and reduce the service life. Therefore, when the number of secondary cover plates 134 is set to one, it is the most preferred embodiment.

[0037] like Figure 4 and Figure 5In the illustrated cover mechanism 100, there are two drive assemblies 110, arranged in a left-right arrangement on the bracket 101. Each drive assembly 110 includes a driver 111, an output member 112, a connector 113, a guide member 114, and a slider 115. The two drive members 111 are located between the two output members 112. The output of the driver 111 extends along the second direction D2, and the output member 112 extends along the first direction D1. The connector 113 is connected to the output member 112, and the guide member 114 extends along the second direction D2. The slider 115 is connected to the connector 113. The driver 111 drives the output member 112, which in turn drives the connector 113, via the slider 115, along the guide member 114, to move back and forth in the second direction D2. The first direction D1 is vertical, and the second direction D2 is horizontal. There are two transmission assemblies 120, one corresponding to each drive assembly 110, and arranged in a left-right arrangement on the bracket 101. Each transmission assembly 120 includes a linear rack 121, a transmission gear 122, and a transmission shaft 123. The linear rack 121 is connected to the connector 113, with the teeth of the linear rack 121 meshing with those of the transmission gear 122. The transmission shaft 123 is coaxially connected to the transmission gear 122 and passes through the bracket 101 to connect to the rotating frame 131 of the cover assembly 130. The linear rack 121 extends and reciprocates along the second direction D2. When the linear rack 121 moves outward along the second direction D2, that is, the left linear rack 121 moves leftward, driving the left transmission gear 122 to rotate clockwise. The left transmission shaft 123 then drives the left rotating frame 131 to rotate clockwise, achieving a closed position. The right linear rack 121 moves rightward, driving the right transmission gear 122 to rotate counterclockwise. The left transmission shaft 123 then drives the left rotating frame 131 to rotate counterclockwise, achieving a closed position. When the linear rack 121 moves inward along the second direction D2, that is, the linear rack 121 on the left moves to the right, driving the transmission gear 122 on the left to rotate counterclockwise, and then the transmission shaft 123 on the left drives the rotating frame 131 on the left to rotate counterclockwise to achieve opening. The linear rack 121 on the right moves to the left, driving the transmission gear 122 on the right to rotate clockwise, and then the transmission shaft 123 on the left drives the rotating frame 131 on the left to rotate clockwise to achieve opening.

[0038] like Figure 6In the illustrated cover mechanism 100, there is one drive assembly 110, mounted on a bracket 101. Within drive assembly 110, there are one drive member 111, one output member 112, and one connector 113. There are two transmission assemblies 120, arranged left and right on bracket 101. Each transmission assembly 120 has two transmission gears 122, namely a first gear 124 and a second gear 125, and one transmission shaft 123. The driving member 111 is a motor or cylinder, and the output member 112 is hingedly connected to the output shaft or piston rod of the driving member 111. The connecting member 113 includes a first connecting rod 116 and a second connecting rod 117. One end of the first connecting rod 116 radially passes through and protrudes from the first gear 124 located on the right half of the bracket 101 and is hingedly connected to the output member 112. The other end of the first connecting rod 116 radially connected to the ring gear of the first gear 124 and one end of the second connecting rod 117 are hingedly connected to the ring gear of the first gear 124 on the right half. The other end of the second connecting rod 117 is hingedly connected to the ring gear of the first gear 124 located on the left half of the bracket 101. A transmission shaft 123 is coaxially connected to the transmission gear 122 and passes through the bracket 101 to connect to the rotating frame 131 of the cover assembly 130. In this way, the driving member 111 drives the output member 112, causing the first connecting rod 116 to rotate clockwise or counterclockwise around the first gear 124 on the right side. When the driving member 111 drives the output member 112 to extend to the right, the first connecting rod 116 rotates counterclockwise around the first gear 124 on the right, driving the first gear 124 on the right to rotate counterclockwise, and the second gear 125 on the right immediately rotates clockwise. At the same time, the second connecting rod 117 moves to the lower left, driving the first gear 124 on the left to rotate clockwise, and the second gear 125 on the left immediately rotates counterclockwise, thereby achieving opening. When the driving member 111 drives the output member 112 to retract to the left, the first connecting rod 116 rotates clockwise around the first gear 124 on the right, driving the first gear 124 on the right to rotate clockwise, and the second gear 125 on the right immediately rotates counterclockwise. At the same time, the second connecting rod 117 moves to the upper right, driving the first gear 124 on the left to rotate counterclockwise, and the second gear 125 on the left immediately rotates clockwise, thereby achieving closing. It should be noted that Figure 6 The first connecting rod 116 is hinged to the first gear 124 on the right half. Figure 6 By mirroring the structure left and right, we can obtain the situation that the first connecting rod 116 is hinged to the first gear 124 on the left half, which will not be described again here.

[0039] The cover mechanism, wafer cleaning device and wafer packaging equipment disclosed in the utility model are designed with a cover mechanism that can be automatically opened and closed for the cleaning tank, without the need for human intervention, thereby realizing the automation of wafer cleaning and packaging and improving the efficiency of wafer processing.

[0040] It should be understood that the above description of the specific embodiments of the present invention is merely for the purpose of illustrating the technical approach and features of the present invention. Its purpose is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. However, the present invention is not limited to the above-described specific embodiments. Any changes or modifications made within the scope of the claims of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A cover mechanism, characterized in that: It includes a bracket, a drive component, multiple transmission components and multiple cover components. The drive component and the multiple transmission components are arranged on the bracket. The drive component is connected to the multiple transmission components. The cover components are connected to the transmission components in a one-to-one correspondence. The drive component simultaneously drives the multiple transmission components to drive the corresponding cover components to open or close at the same time.

2. The cover mechanism according to claim 1, wherein: The driving assembly includes a driving member, an output member and multiple connecting members. The driving member is fixed to the bracket, the output member is connected to the output end of the driving member, and the multiple connecting members are all connected to the output member. The connecting members are connected to the transmission assembly in a one-to-one correspondence. The driving member drives the output member to move back and forth in a first direction, and the output member drives the connecting members to move back and forth at the same time.

3. The cover mechanism according to claim 2, characterized in that: The output member extends along a second direction perpendicular to the first direction, the multiple connecting members are arranged on the output member at intervals along the second direction, and the output member drives the multiple connecting members to move back and forth simultaneously along the first direction.

4. The cover mechanism according to claim 2, wherein: The driving assembly also includes a plurality of guides and a plurality of sliders, wherein the sliders, the guides and the connecting members are arranged in a one-to-one correspondence, the plurality of guides are fixed on the bracket and extend along the first direction, the sliders are slidably arranged on the guides, the connecting members are fixedly connected to the sliders, and the connecting members slide along the first direction on the guides through the sliders.

5. The cover mechanism according to claim 2, characterized in that: Each of the transmission assemblies includes a transmission gear and a transmission shaft, the transmission shaft is coaxially arranged with the transmission gear, and the connecting member includes a first connecting rod and a second connecting rod, one end of the first connecting rod is hinged to the output member, the other end of the first connecting rod and one end of the second connecting rod are hinged to the gear ring of one of the transmission gears, and the other end of the second connecting rod is hinged to the gear ring of the other transmission gear.

6. The cover mechanism according to claim 1, wherein: The transmission assembly includes a linear rack, a transmission gear and a transmission shaft. The linear rack is fixed on the drive assembly, and the transmission gear is fixed on the bracket. The transmission gear is meshed with the linear rack. The transmission shaft is coaxially connected to the transmission gear and passes through the bracket to be connected to the cover assembly. The drive assembly drives the linear rack to move linearly, driving the transmission gear to rotate. The transmission shaft rotates synchronously with the transmission gear, thereby controlling the cover assembly to open or close at the same time.

7. The cover mechanism according to claim 5 or 6, characterized in that: The transmission gear includes a first gear and a second gear, the axle of the second gear is parallel to the axle of the first gear, the second gear is meshed with the first gear, and the transmission shaft is coaxially arranged with the axle of the second gear.

8. The cover mechanism according to claim 1, wherein: The cover plate assembly includes a rotating frame, a locking wheel, a primary cover plate and at least one secondary cover plate, the rotating frame is connected to the transmission assembly, the primary cover plate is fixed on the rotating frame, the secondary cover plate is hinged to the primary cover plate in turn, and at least one locking wheel is arranged on the secondary cover plate. The transmission assembly drives the rotating frame to rotate, so that the primary cover plate flips open or flips closed, and then drives the secondary cover plate to flip open or flip closed, and the locking wheel controls the bottom end of the secondary cover plate to always remain level with the bottom end of the primary cover plate.

9. A wafer cleaning device, characterized in that: It comprises a cleaning tank and a cover mechanism according to any one of claims 1 to 8, wherein a bracket of the cover mechanism is fixed on the cleaning tank, and a cover assembly of the cover mechanism is fixed on the edge of the opening of the cleaning tank.

10. A wafer packaging device, characterized in that: It comprises a transport device and the wafer cleaning device as claimed in claim 9, wherein the transport device transports a basket loaded with wafers to the wafer cleaning device to clean the wafers.

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