Purification furnace for hafnium tetrachloride

Abstract

The utility model relates to the technical field of purification furnaces, and discloses a purification furnace for hafnium tetrachloride, which comprises an overturning type heating furnace, the overturning type heating furnace is provided with a frame body and a furnace body, a furnace pipe is inserted in the furnace body, a boss is arranged at the upper end of the circumferential side of the furnace pipe, and a pair of electric cylinders is fixedly arranged on the upper side of the frame body. The upper ends of the electric cylinders are fixedly provided with the same foundation plate, the upper side of the foundation plate is provided with a butt joint pipe in a communicating mode, the boss is located between the furnace body and the foundation plate, the lower side of the foundation plate, the circumferential side of the boss and the upper end of the circumferential side of the furnace body are each fixedly provided with a pair of positioning plates, and a pair of locking plates used for being connected with the positioning plates in a clamping mode is arranged below the foundation plate. A driving assembly is arranged on the upper side of the foundation plate and connected and assembled with the locking plate through a transmission structure. Through the liftable foundation plate, the swingable furnace body and the locking structure, the whole furnace pipe maintenance or replacement process is simpler and more convenient, the operation amount and the maintenance difficulty are reduced, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of purification furnaces, in particular to a purification furnace for hafnium tetrachloride. Background Art

[0002] During the production of hafnium metal, hafnium tetrachloride needs to be purified and sublimated. That is, the temperature in the purification furnace is raised and controlled at 319°C, and hydrogen is introduced through a hydrogenation device (composed of a flow meter, a shut-off valve, a regulating valve, a hydrogen atom monitor, etc.) for reaction. The sublimated and purified hafnium tetrachloride is discharged into the reduction furnace through the gas line, where it undergoes a reduction reaction with the magnesium melt in the reduction furnace to obtain a sponge hafnium mixture.

[0003] The purification furnace currently in use is mainly composed of a power supply (providing medium-frequency current to the induction coil), a furnace body (used to store the induction coil and keep it warm), a control device (setting operating parameters for the purification furnace), a water cooling device (ensuring the working temperature of the induction coil) and other structures; the furnace body is fixedly installed on the base, and a replaceable furnace core is inserted into the furnace body. The external gas path is integrated and installed on a base plate. After the base plate and the base are connected by a bolt group, the furnace core is pressed and the gas path is connected to the inside of the furnace core at the same time. Although the installation and disassembly requirements can be met, each operation requires the installation and removal of at least four sets of bolt groups, which requires a large amount of operation and makes maintenance difficult.

[0004] Therefore, in order to solve the above problems, a purification furnace for hafnium tetrachloride is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a furnace for purifying hafnium tetrachloride, which is more convenient for maintaining the furnace core, thereby solving the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a purification furnace for hafnium tetrachloride, comprising a flip-type heating furnace, the flip-type heating furnace having a frame and a furnace body, a furnace core plugged and installed inside the furnace body, a boss is provided at the upper end of the circumferential side of the furnace core, a pair of electric cylinders are fixedly installed on the upper side of the frame, the upper end of the electric cylinders is fixedly installed with the same base plate, the upper side of the base plate is connected and connected with a docking pipe, the boss is located between the furnace body and the base plate, a pair of positioning plates are fixedly installed on the lower side of the base plate, the circumferential side of the boss, and the upper end of the circumferential side of the furnace body, a pair of locking plates for clamping the positioning plates are provided below the base plate, a driving assembly is provided on the upper side of the base plate, and the driving assembly is connected and assembled with the locking plate through a transmission structure.

[0007] Specifically, the transmission structure includes a linear slide rail, a first connecting rod, a second connecting rod and a third connecting rod. A pair of linear slide rails are fixedly installed on the upper side of the base plate. The linear slide rails are horizontally arranged. The sliders of the linear slide rails are fixedly installed with the first connecting rod. The first connecting rod is vertically arranged. The lower ends of the first connecting rods are fixedly assembled with the locking plates respectively. The base plate is provided with a through groove for passing the first connecting rod. The upper ends of the first connecting rods are rotatably installed with the second connecting rod, and the upper ends of the second connecting rods are rotatably installed with the same third connecting rod.

[0008] Furthermore, the two second connecting rods are symmetrically and tilted, the two second connecting rods are of equal length, and the distance between the upper ends of the two second connecting rods is smaller than the distance between the lower ends of the two second connecting rods.

[0009] Specifically, the driving assembly includes a vertical plate, a guide groove and an electric screw module. The electric screw module is fixedly assembled with the base plate, and the electric screw module is vertically arranged with the third connecting rod. The upper side of the slide of the electric screw module is fixedly installed with a vertical plate, and the vertical plate is provided with a guide groove, and the third connecting rod passes through the guide groove.

[0010] Furthermore, the guide groove is a V-shaped groove formed by an upper groove and a lower groove, the angle between the center line of the upper groove and the horizontal plane is 15°, and the angle between the center line of the lower groove and the horizontal plane is 45°.

[0011] Furthermore, a limiting wheel is rotatably mounted on the circumferential side of the third connecting rod, and the limiting wheel is rollingly assembled in the guide groove.

[0012] Specifically, a V-shaped groove is evenly formed on one side of the locking plate close to the boss, and the end of the positioning plate away from the boss matches the shape of the V-shaped groove.

[0013] Specifically, sealing rings are fixedly mounted on the upper and lower ends of the boss.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] The base plate can be lifted by the electric cylinder to facilitate the alignment or separation of the base plate with the furnace core, while the flip heating furnace can tilt the furnace body forward to facilitate the maintenance or replacement of the furnace core.

[0016] In addition, the cooperation between the drive assembly and the transmission structure can conveniently control the clamping action of the locking plate and the positioning plate, so that the base plate, the boss and the furnace body can be locked when they are pressed together, and the action is reliable and fast, thus ensuring the safety of the operation;

[0017] The above structure makes the whole process of furnace maintenance or replacement simpler, reduces the operation workload and maintenance difficulty, and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic front view of the structure of the utility model;

[0019] Figure 2 It is a structural diagram of the transmission structure of the utility model;

[0020] Figure 3 for Figure 2 Schematic diagram of the structure of the AA drive assembly;

[0021] Figure 4 This is a schematic cross-sectional view of the structure of the furnace of the present invention.

[0022] In the figure: 1. frame, 2. furnace body, 3. boss, 4. base plate, 5. docking tube, 6. drive assembly, 61. vertical plate, 62. guide groove, 63. electric screw module, 7. transmission structure, 71. linear slide, 72. first connecting rod, 73. second connecting rod, 74. third connecting rod, 8. V-shaped groove, 9. electric cylinder, 10. locking plate, 11. positioning plate, 12. furnace core, 13. limiting wheel, 14. sealing ring. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] See also Figure 1 and Figure 2 The utility model provides a technical solution: a furnace for purifying hafnium tetrachloride, including a flip-type heating furnace. In addition to a frame 1, a furnace body 2, a power supply, a control device, a water cooling device and other structures, the flip-type heating furnace also has a driving device (including a reduction motor and a bearing seat), so that the furnace body 2 is rotatably assembled in the frame 1 through the bearing seat. After being driven by the reduction motor, the furnace body 2 can be swung forward and can also be restored to a vertical working position. The above is the existing technology and will not be described in detail here.

[0025] A furnace liner 12 is inserted and installed inside the furnace body 2. A boss 3 is provided at the upper end of the circumferential side of the furnace liner 12. The furnace liner 12 and the boss 3 are a crucible made of graphite material. When the furnace liner 12 is inserted into the furnace body 2, the lower end of the boss 3 is against the port of the furnace body 2, which serves as a limit placement.

[0026] A pair of electric cylinders 9 are fixedly installed on the upper side of the frame 1, and the same base plate 4 is fixedly installed on the upper end of the electric cylinder 9. The electric cylinder 9 is arranged vertically and the base plate 4 is arranged horizontally. A docking pipe 5 is installed on the upper side of the base plate 4. The number of docking pipes 5 is determined according to the needs of the external gas circuit. It is used to introduce hydrogen for reaction and discharge sublimated hafnium tetrachloride. The boss 3 is located between the furnace body 2 and the base plate 4; the electric cylinder 9 can vertically lift and move the base plate 4. When the base plate 4 is located at the lower work station, the boss 3 can be firmly pressed on the furnace body 2 for fixation. When the base plate 4 is located at the upper work station, the furnace body 2 can drive the furnace 12 and the boss 3 to tilt and swing forward as a whole to avoid affecting the swinging action.

[0027] A pair of positioning plates 11 are fixedly installed on the lower side of the base plate 4, the circumferential side of the boss 3, and the upper end of the circumferential side of the furnace body 2. The positioning plates 11 are all arranged horizontally. A pair of locking plates 10 for clamping the positioning plates 11 are arranged below the base plate 4, and a driving assembly 6 is provided on the upper side of the base plate 4. The driving assembly 6 is connected and assembled with the locking plates 10 through the transmission structure 7; when the driving assembly 6 is working, the two locking plates 10 can be moved in opposite directions (towards each other, away from each other) at the same time through the transmission structure 7. When the locking plates 10 are separated from the positioning plates 11, they do not affect the movement of the base plate 4, the boss 3 and the furnace body 2. When the locking plates 10 are clamped with the positioning plates 11, they can fix the relative positions between the base plate 4, the boss 3 and the furnace body 2, thereby playing a locking protection role.

[0028] Specifically:

[0029] The transmission structure 7 includes a linear slide rail 71, a first connecting rod 72, a second connecting rod 73 and a third connecting rod 74. A pair of linear slide rails 71 are fixedly installed on the upper side of the base plate 4. The linear slide rail 71 is arranged horizontally. The sliders of the linear slide rail 71 are fixedly installed with the first connecting rod 72. The first connecting rod 72 is arranged vertically. The lower ends of the first connecting rods 72 are fixedly assembled with the locking plates 10 respectively. The base plate 4 is provided with a through groove for passing the first connecting rod 72. The upper ends of the first connecting rods 72 are rotatably installed with the second connecting rod 73. The upper ends of the second connecting rods 73 are rotatably installed with the same third connecting rod 74. The linear slide rail 71 is an existing component with a guide rail and a slider. The "rotational installation" here is achieved through a rotating joint connection.

[0030] The two second links 73 are symmetrically and tilted, the two second links 73 are of equal length, and the distance between the upper ends of the two second links 73 is smaller than the distance between the lower ends of the two second links 73, so that the third link 74 can be parallel to the base plate 4. The third link 74, the base plate 4 and the two second links 73 can form an isosceles trapezoidal shape. When the distance between the third link 74 and the base plate 4 is changed, the tilt angle of the two second links 73 can be changed, thereby realizing the action of translating the first link 72 in opposite directions along the linear slide rail 71.

[0031] See also Figure 3 The driving assembly 6 includes a vertical plate 61, a guide groove 62 and an electric screw module 63. The electric screw module 63 is fixedly assembled with the base plate 4, and the electric screw module 63 is vertically arranged with the third connecting rod 74, that is, the electric screw module 63 is arranged along the longitudinal direction (front and back direction). The vertical plate 61 is fixedly installed on the upper side of the slide of the electric screw module 63. The vertical plate 61 is provided with a guide groove 62, and the third connecting rod 74 passes through the guide groove 62; the electric screw module 63 is an existing equipment with a servo motor, a screw, a screw nut and a slide. The electric screw module 63 is used to uniformly translate the vertical plate 61 and the guide groove 62 longitudinally, so that the third connecting rod 74 can change the distance between it and the base plate 4 along the guide groove 62 to realize the lifting action.

[0032] The guide groove 62 is a V-shaped groove formed by an upper groove and a lower groove. The angle between the center line of the upper groove and the horizontal plane is 15°, and the angle between the center line of the lower groove and the horizontal plane is 45°. The upper groove has a small inclination angle and the lower groove has a large inclination angle. When the vertical plate 61 moves longitudinally at a uniform speed, the lifting and lowering action of the third connecting rod 74 in the upper groove can be slow, while the lifting and lowering action of the third connecting rod 74 in the lower groove can be fast. After transmission, the locking plate 10 can move slowly when it is close to the positioning plate 11 area, and move quickly when it is away from the positioning plate 11 area, so as to ensure accurate and stable card connection.

[0033] The limiting wheel 13 is rotatably installed on the circumferential side of the third connecting rod 74, and the limiting wheel 13 is rollingly assembled in the guide groove 62. The rolling of the limiting wheel 13 in the guide groove 62 replaces the sliding of the third connecting rod 74 in the guide groove 62, which can reduce the friction loss between the components and improve the operation stability. In addition, the limiting wheel 13 is cylindrical with a diameter at both ends larger than the middle diameter. When the limiting wheel 13 rolls along the guide groove 62, it can ensure that the third connecting rod 74 will not move axially, and ensure that the two second connecting rods 73 are always symmetrical.

[0034] See also Figure 2 The locking plate 10 is evenly provided with a V-shaped groove 8 on one side close to the boss 3, and the end of the positioning plate 11 away from the boss 3 matches the shape of the V-shaped groove 8; the V-shaped groove 8 and the matching positioning plate 11 are centrally inserted and convenient.

[0035] See also Figure 4 , sealing rings 14 are fixedly installed on the upper and lower ends of the boss 3; the sealing ring 14 is preferably a graphite wound gasket, which can meet the sealing requirements of high temperature resistance and pressure resistance, and further improve the sealing performance of the base plate 4, boss 3 and furnace body 2 when they are pressed together.

[0036] The electric screw module 63 and the electric cylinder 9 are electrically connected to the control device of the flip-type heating furnace (including the industrial controller and the control panel), and unified operation control can be performed through the control device.

[0037] The working principle of this embodiment is as follows:

[0038] After the butt joint 5 is connected to the external gas line, the furnace body 2 heats the furnace core 12, so that the hafnium tetrachloride stored in the furnace body 2 completes the reaction and sublimates, and is discharged into the reduction furnace through the gas line for reduction reaction.

[0039] After the reaction is completed, the electric screw module 63 moves the vertical plate 61 backward at a uniform speed, and the third connecting rod 74 can move downward along the guide groove 62 and maintain a parallel relationship with the base plate 4, so that the angle between the two second connecting rods 73 and the horizontal plane is reduced, and the two first connecting rods 72 and the two locking plates 10 are moved away from each other.

[0040] After the V-shaped groove 8 is separated from the multiple pairs of positioning plates 11, the electric cylinder 9 lifts the base plate 4, and the flip heating furnace can tilt the furnace body 2 forward. At this time, the staff can take out the furnace 12 for maintenance or replacement.

[0041] After refilling, it can be reset to press against the base plate 4, the boss 3 and the furnace body 2, and then locked by the locking plate 10 and the positioning plate 11.

[0042] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0043] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A furnace for purifying hafnium tetrachloride, comprising a reversible heating furnace, the reversible heating furnace comprising a frame (1) and a furnace body (2), characterized in that: A furnace core (12) is plugged into and installed inside the furnace body (2), and a boss (3) is provided at the upper end of the circumferential side of the furnace core (12). A pair of electric cylinders (9) are fixedly installed on the upper side of the frame (1), and the upper end of the electric cylinder (9) is fixedly installed with the same base plate (4). A butt-jointing pipe (5) is connected and installed on the upper side of the base plate (4). The boss (3) is located between the furnace body (2) and the base plate (4). A pair of positioning plates (11) are fixedly installed on the lower side of the base plate (4), the circumferential side of the boss (3), and the upper end of the circumferential side of the furnace body (2). A pair of locking plates (10) for clamping the positioning plates (11) are provided below the base plate (4). A driving assembly (6) is provided on the upper side of the base plate (4), and the driving assembly (6) is connected and assembled with the locking plate (10) through a transmission structure (7).

2. The purification furnace for hafnium tetrachloride according to claim 1, characterized in that: The transmission structure (7) includes a linear slide rail (71), a first connecting rod (72), a second connecting rod (73) and a third connecting rod (74). A pair of linear slide rails (71) are fixedly installed on the upper side of the base plate (4). The linear slide rails (71) are arranged horizontally. The sliders of the linear slide rails (71) are fixedly installed with the first connecting rod (72). The first connecting rod (72) is arranged vertically. The lower ends of the first connecting rods (72) are fixedly assembled with the locking plates (10). The base plate (4) is provided with a through groove for passing the first connecting rod (72). The upper ends of the first connecting rods (72) are rotatably installed with the second connecting rod (73). The upper ends of the second connecting rods (73) are rotatably installed with the same third connecting rod (74).

3. The purification furnace for hafnium tetrachloride according to claim 2, characterized in that: The two second connecting rods (73) are symmetrical and tilted, the two second connecting rods (73) are of equal length, and the distance between the upper ends of the two second connecting rods (73) is smaller than the distance between the lower ends of the two second connecting rods (73).

4. The purification furnace for hafnium tetrachloride according to claim 2, characterized in that: The driving assembly (6) includes a vertical plate (61), a guide groove (62) and an electric screw module (63), wherein the electric screw module (63) is fixedly assembled with the base plate (4), and the electric screw module (63) and the third connecting rod (74) are arranged vertically, and the vertical plate (61) is fixedly installed on the upper side of the slide of the electric screw module (63), and the vertical plate (61) is provided with a guide groove (62), and the third connecting rod (74) passes through the guide groove (62).

5. The purification furnace for hafnium tetrachloride according to claim 4, characterized in that: The guide groove (62) is a V-shaped groove formed by an upper groove and a lower groove, the angle between the center line of the upper groove and the horizontal plane is 15°, and the angle between the center line of the lower groove and the horizontal plane is 45°.

6. The purification furnace for hafnium tetrachloride according to claim 4, characterized in that: A limiting wheel (13) is rotatably mounted on the circumferential side of the third connecting rod (74), and the limiting wheel (13) is rollingly assembled in the guide groove (62).

7. The purification furnace for hafnium tetrachloride according to claim 1, characterized in that: A V-shaped groove (8) is evenly formed on one side of the locking plate (10) close to the boss (3), and the end of the positioning plate (11) away from the boss (3) matches the shape of the V-shaped groove (8).

8. The purification furnace for hafnium tetrachloride according to claim 1, characterized in that: Sealing rings (14) are fixedly mounted on both the upper and lower ends of the boss (3).

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