Miniature three-axis MEMS optical fiber acceleration sensor adopting double-lug installation

Abstract

The utility model relates to a miniature three-axis MEMS optical fiber acceleration sensor adopting double-lug installation, and the acceleration sensor comprises a double-lug three-axis installation part main body, a housing disposed on the double-lug three-axis installation part main body, and a bottom plate disposed on the housing. The double-lug three-shaft mounting part main body comprises a connecting body, a three-shaft mounting body arranged on the connecting body, three mounting positions arranged on the three-shaft mounting body and two groups of mounting holes symmetrically formed in the connecting body; the MEMS optical fiber accelerometer core bodies are arranged on the mounting positions, the connecting piece is arranged on the double-lug three-axis mounting piece body and connected with the three MEMS optical fiber accelerometer core bodies, and the three-axis mounting piece body is located in a closed space defined by the connecting piece, the shell and the bottom plate, and the axes of any two MEMS optical fiber accelerometer core bodies are perpendicular to each other. According to the miniature three-axis MEMS optical fiber acceleration sensor adopting double-lug installation, the internal structure is simplified and the size is reduced by using a three-axis integrated structural form, and meanwhile, the installation rigidity is improved through a double-lug three-axis installation part main body.

Description

Technical Field

[0001] This application relates to the technical field of sensors, and particularly to a miniature triaxial MEMS fiber optic accelerometer using binaural mounting. Background Art

[0002] At present, most of the fiber optic sensing accelerometers used in the market adopt a method of separating multiple measurement axes, which results in a larger size of the sensor. At the same time, due to the separation of multiple measurement axes, the internal structure of traditional triaxial accelerometers is relatively complex, the processing cost is high, and the structural installation stiffness is low, which is very unfavorable for the fiber optic sensor to be used in an integrated test system. Content of the Utility Model

[0003] Aiming at the problems of large structural size, separation of multiple mounting axes and low mounting stiffness existing in the prior art, this application provides a miniature triaxial MEMS fiber optic accelerometer using binaural mounting, which uses a triaxial integrated structural form to simplify the internal structure and reduce the volume, and at the same time improves the mounting stiffness through the binaural triaxial mounting part body.

[0004] The above object of this application is achieved through the following technical solutions:

[0005] This application provides a miniature triaxial MEMS fiber optic accelerometer using binaural mounting, including:

[0006] A binaural triaxial mounting part body, including a connecting body, a triaxial mounting body provided on the connecting body, three mounting positions provided on the triaxial mounting body, and two groups of mounting holes symmetrically provided on the connecting body;

[0007] A housing provided on the binaural triaxial mounting part body;

[0008] A bottom plate provided on the housing, and the triaxial mounting body is located in the enclosed space surrounded by the connecting body, the housing and the bottom plate;

[0009] A MEMS fiber optic accelerometer core provided on the mounting position;

[0010] A connecting member provided on the binaural triaxial mounting part body and connected to the three MEMS fiber optic accelerometer cores;

[0011] Among them, the axes of any two MEMS fiber optic accelerometer cores are perpendicular to each other.

[0012] In a possible implementation manner of this application, the connection method between the housing and the binaural triaxial mounting part body is laser welding and encapsulation connection.

[0013] In a possible implementation manner of this application, the connection method between the bottom plate and the housing is laser welding and encapsulation connection.

[0014] In a possible implementation manner of the present application, the connecting member includes:

[0015] A plug, connected to the housing;

[0016] An optical cable, connected to the plug, and the optical fiber of the MEMS fiber accelerometer core is connected to the corresponding connector on the optical cable after extending out of the plug.

[0017] In a possible implementation manner of the present application, the connection manner between the plug and the housing is a threaded connection.

[0018] In a possible implementation manner of the present application, the connection manner between the optical cable and the plug is adhesive bonding.

[0019] In a possible implementation manner of the present application, the MEMS fiber accelerometer core is fixed on the installation position by an adhesive fixing method.

[0020] The beneficial effects of the present application are as follows:

[0021] The miniature three-axis MEMS fiber accelerometer sensor provided by the present application, which adopts double-ear installation, realizes volume reduction and internal structure simplification by integrating three MEMS fiber accelerometer cores on a three-axis installation body, and at the same time uses a high-strength connecting body to improve the installation stiffness. Description of the Drawings

[0022] Figure 1 is a structural schematic diagram of the appearance of a fiber accelerometer sensor provided by the present application.

[0023] Figure 2 is a structural schematic diagram of the interior of a fiber accelerometer sensor provided by the present application.

[0024] Figure 3 is based on Figure 2 A structural schematic diagram of the interior of a fiber accelerometer sensor after adjusting the viewing angle.

[0025] In the figure, 1 is the main body of the double-ear three-axis mounting member, 2 is the housing, 3 is the bottom plate, 4 is the MEMS fiber accelerometer core, 5 is the connecting member, 11 is the connecting body, 12 is the three-axis mounting body, 13 is the installation position, 14 is the installation hole, 51 is the plug, and 52 is the optical cable. Detailed Embodiments

[0026] The technical solutions in the present application will be further described in detail below with reference to the accompanying drawings.

[0027] The present application discloses a miniature three-axis MEMS fiber accelerometer sensor that adopts double-ear installation. Please refer to Figure 1, in some examples, the miniaturized three-axis MEMS fiber optic accelerometer using dual-ear mounting disclosed in the present application includes a dual-ear three-axis mounting body 1, a housing 2, a bottom plate 3, a MEMS fiber optic accelerometer core 4, and a connecting member 5.

[0028] Please refer to Figure 2 , the dual-ear three-axis mounting body 1 consists of two parts, a connecting body 11 and a three-axis mounting body 12. The connecting body 11 and the three-axis mounting body 12 can be processed by an integral molding method or fixed together by a method of separate processing followed by fixation.

[0029] There are three mounting positions 13 on the three-axis mounting body 1. The function of the mounting positions 13 is to fix the MEMS fiber optic accelerometer core 4. The MEMS fiber optic accelerometer core 4 is fixed on the mounting positions 13 by an adhesive method. The three mounting positions 13 and the three corresponding MEMS fiber optic accelerometer cores 4 are respectively responsible for detecting in the X-axis, Y-axis, and Z-axis directions.

[0030] The specific introduction of the MEMS fiber optic accelerometer core 4 is as follows:

[0031] The working principle of the MEMS fiber optic accelerometer is mainly based on the fiber optic sensing principle. Inside the accelerometer, the optical fiber serves as the sensing element, and its physical properties (such as optical path, phase, etc.) will change with the change of acceleration. By measuring the changes in these physical properties, precise measurement of acceleration can be achieved.

[0032] Specifically, when the accelerometer is subjected to acceleration, the sensitive element (such as a mass block) inside it will displace, thereby causing changes in the optical signal in the optical fiber. These optical signals can be converted into electrical signals for output after being processed, thus achieving the measurement of acceleration.

[0033] The optical signal enters the inside of the MEMS fiber optic accelerometer core 4 through the connecting member 5 and then exits. The exiting optical signal returns to the spectral analysis in the analysis terminal through the connecting member 5. By comparing the incident light spectrum and the reflected light spectrum, the final acceleration value can be obtained.

[0034] In some possible implementation manners, the housing 2 is fixed on the dual-ear three-axis mounting body 1 by a laser welding and encapsulation connection method. The specific fixed position is on the connecting body 11 of the dual-ear three-axis mounting body 1. At this time, the three-axis mounting body 12 of the dual-ear three-axis mounting body 1 is located inside the housing 2.

[0035] The bottom plate 3 is fixedly installed on the housing 2, and the fixing method still selects the laser welding and encapsulation connection. From this description, it can be seen that both ends of the housing 2 are open ends. The first open end is fixed on the connecting body 11 of the dual-ear three-axis mounting body 1, and the second open end is fixed to the bottom plate 3.

[0036] Please refer to Figure 1 and Figure 2 , at this time, the connecting body 11, the housing 2 and the bottom plate 3 form a sealed space, wrapping the triaxial mounting body 12 on the biaxial triaxial mounting member body 1. This structural form can provide perfect protection and also provide a stable working environment, isolating interference errors caused by external factors (such as air, moisture, light and dust, etc.), while improving the detection accuracy and prolonging the service life of the MEMS fiber optic accelerometer core 4.

[0037] Two groups of mounting holes 14 are symmetrically arranged on the connecting body 11. The function of the mounting holes 14 is to fix the miniature triaxial MEMS fiber optic acceleration sensor using biaxial mounting disclosed in the present application at the detection position by means of a connecting member (such as a bolt).

[0038] The connecting member 5 is arranged on the biaxial triaxial mounting member body 1 and connected to the three MEMS fiber optic accelerometer cores 4. Specifically, please refer to Figure 3 , the connecting member 5 is composed of a plug 51 and an optical cable 52. The plug 51 is connected to the housing 2, the optical cable 52 is connected to the plug 51, and the optical fiber of the MEMS fiber optic accelerometer core 4 extends out from the plug 51 and is connected to the corresponding joint on the optical cable 52.

[0039] The connection manner between the plug 51 and the housing 2 is a threaded connection. For example, a threaded hole can be opened on the housing 2, and one end of the plug 51 has an external thread and is directly tightened on the housing 2.

[0040] The connection manner between the optical cable 52 and the plug 51 is adhesive bonding.

[0041] The embodiments of the present specific implementation manners are all preferred embodiments of the present application, and do not limit the protection scope of the present application accordingly. Therefore, all equivalent changes made according to the structure, shape and principle of the present application shall be covered within the protection scope of the present application.

Claims

1. A miniature three-axis MEMS fiber optic acceleration sensor with binaural installation, characterized in that: include: A double-ear triaxial mounting member main body (1) comprises a connecting body (11), a triaxial mounting body (12) provided on the connecting body (11), three mounting positions (13) provided on the triaxial mounting body (12), and two groups of mounting holes (14) symmetrically provided on the connecting body (11); A housing (2) is provided on the main body (1) of the double-ear three-axis mounting member; The bottom plate (3) is provided on the housing (2), and the three-axis mounting body (12) is located in a closed space surrounded by the connecting body (11), the housing (2) and the bottom plate (3); A MEMS fiber optic accelerometer core (4) is disposed on the mounting position (13); A connecting member (5) is provided on the binaural triaxial mounting member body (1) and is connected to the three MEMS fiber optic accelerometer cores (4); The axes of any two MEMS optical fiber accelerometer cores (4) are perpendicular to each other.

2. The micro three-axis MEMS fiber optic acceleration sensor with binaural installation according to claim 1, characterized in that: The shell (2) and the double-ear triaxial mounting component main body (1) are connected by laser welding and packaging.

3. The binaurally mounted miniature three-axis MEMS fiber optic acceleration sensor according to claim 1 or 2, characterized in that: The base plate (3) and the housing (2) are connected by laser welding and packaging.

4. The binaurally mounted miniature three-axis MEMS fiber optic acceleration sensor according to claim 1, characterized in that: The connecting piece (5) comprises: A plug (51) connected to the housing (2); The optical cable (52) is connected to the plug (51), and the optical fiber of the MEMS optical fiber accelerometer core (4) extends from the plug (51) and is connected to a corresponding connector on the optical cable (52).

5. The binaurally mounted miniature three-axis MEMS fiber optic acceleration sensor according to claim 4, characterized in that: The plug (51) and the housing (2) are connected in a threaded manner.

6. The binaurally mounted miniature three-axis MEMS fiber optic acceleration sensor according to claim 5, characterized in that: The optical cable (52) and the plug (51) are connected by glue.

7. The binaurally mounted miniature three-axis MEMS fiber optic acceleration sensor according to claim 1, characterized in that: The MEMS optical fiber accelerometer core (4) is fixed on the installation position (13) by bonding.

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