Mask detection device

Abstract

The utility model relates to the technical field of detection devices, and discloses a mask plate detection device which comprises a detection box, a detection device and a detection device, the fan is arranged on the outer side wall of the detection box; the exhaust inlet is formed in the wall of the inner side of the detection box and is connected with the fan; a cleaning assembly is arranged in the detection box, and the cleaning assembly is characterized in that one end of a cross rod is inserted into the detection box; the plate body is arranged at one end of the cross rod; the rotating rod is arranged at the bottom of the plate body; according to the detection device, the motor is used for driving the rotating rods to rotate through the cleaning assembly, the gears are driven to be meshed while the rotating rods rotate, so that all the rotating rods rotate together, and the cleaning brushes at the bottoms of the rotating rods rotate along with the rotating rods to clean the surface of the mask. Compared with an existing device, the cleaning effect is better. According to the detection device, the height of the threaded rod can be adjusted through rotation of the threaded sleeve through the adjusting assembly, so that the placement plate is controlled to ascend and descend, and the detection device is suitable for masks with different thicknesses.

Description

Technical Field

[0001] The utility model relates to the technical field of detection devices, in particular to a mask detection device. Background Art

[0002] A mask is a template with a transparent window, fabricated based on a magnified original image. For example, it can be made from a flat glass plate coated with a thin film of metallic chromium using a process similar to photolithography. Masks with micro- and nano-patterns are typically fabricated directly using an electron beam lithography machine. The manufacturing process is a typical photolithography process, including metal layer deposition, resist coating, electron beam lithography, development, chromium layer etching, and resist stripping.

[0003] Chinese utility model CN218068562U discloses a mask inspection device, which is designed with a cleaning structure that can clean the surface of the mask during inspection to prevent it from being contaminated by dust and impurities that affect the inspection effect. The principle is that a cleaning strip and an air suction port are provided on one side of the inspection box. When the mask is passed into the inspection box through a conveyor belt, the cleaning strip sweeps away impurities on the surface and the raised dust is sucked into the air suction port to achieve the purpose of cleaning.

[0004] However, the existing device relies on a cleaning strip to scrape the mask surface once, which has a poor cleaning effect. Some impurities will still be adsorbed on the mask surface. Therefore, a detection device with better cleaning effect is designed to solve the above problems. Utility Model Content

[0005] (1) Technical problems solved

[0006] In view of the deficiencies in the prior art, the present invention provides a mask inspection device having the advantage of better cleaning effect, thereby solving the problem of poor cleaning effect of the prior device.

[0007] (2) Technical solution

[0008] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a mask detection device, comprising: a detection box with a placement plate provided inside for placing the mask; a fan is provided on the outer wall of the detection box; an air suction port is provided on the inner wall of the detection box and is connected to the fan; a cleaning assembly is provided inside the detection box, and the cleaning assembly comprises: one end of a cross bar is inserted into the interior of the detection box; a plate body is provided at one end of the cross bar; a rotating rod is provided at the bottom of the plate body; a cleaning brush is provided at the bottom end of the rotating rod; a gear is fixedly sleeved on the outer wall of the cleaning brush, and the gears are engaged with each other; a motor is provided at the top of the plate body, and an output shaft passes through the plate body and is connected to the rotating rod.

[0009] In some embodiments, a groove is provided at the bottom of the plate to wrap the gear therein.

[0010] In some embodiments, the cleaning brush is designed as a soft-bristle brush.

[0011] In some embodiments, the cleaning assembly further includes: a button disposed at one end of the crossbar.

[0012] In some embodiments, the cleaning assembly further includes: a spring sleeved on the outside of the cross bar, with both ends connected to the outer side wall of the detection box and the button.

[0013] In some embodiments, the cleaning assembly further includes: a filter symmetrically arranged on the outer side wall of the detection box.

[0014] In some embodiments, an adjustment assembly is provided inside the detection box, and the adjustment assembly includes: a threaded sleeve rotatably provided on the bottom inner wall of the detection box; a threaded rod is provided inside the threaded sleeve and threadedly connected to the threaded sleeve, and the top end is fixedly connected to the placement plate; the bottom end of the protruding strip passes through the placement plate and is connected to the inner wall of the detection box.

[0015] In some embodiments, the adjustment assembly further includes: a plurality of shift rods, all of which are arranged on the outer side wall of the threaded sleeve.

[0016] (3) Beneficial effects

[0017] Compared with the prior art, the present invention provides a mask detection device with the following beneficial effects:

[0018] 1. This inspection device uses a motor to drive the rotating rods through the cleaning assembly. As the rotating rods rotate, the gears engage, causing all the rotating rods to rotate together. The cleaning brush at the bottom of the rotating rods rotates with it to clean the surface of the mask. Compared with existing devices, the cleaning effect is better.

[0019] 2. The detection device can adjust the height of the threaded rod by rotating the threaded sleeve through the adjustment component, thereby controlling the lifting and lowering of the placement plate, which is convenient for adapting to masks of different thicknesses. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the internal structure of the detection box of the utility model;

[0022] Figure 3 This is a schematic diagram of the structure of the connection between the spring and the crossbar of the utility model;

[0023] Figure 4 It is a schematic diagram of the structure inside the board body of the utility model.

[0024] In the figure: 11, detection box; 12, placement plate; 13, fan; 14, air intake;

[0025] 2. Cleaning assembly; 21. Crossbar; 22. Plate; 23. Rotating rod; 24. Cleaning brush; 25. Gear; 26. Motor; 27. Button; 28. Spring; 29. Filter;

[0026] 3. Adjustment assembly; 31. Threaded sleeve; 32. Threaded rod; 33. Raised strip; 34. Lever. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0028] It should be noted that all directional indications in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0029] In this application, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0030] In addition, the descriptions of "first", "second", etc. in this application are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0031] A mask is a template with a transparent window, fabricated based on a magnified original image. For example, it can be made from a flat glass plate coated with a thin film of metallic chromium using a process similar to photolithography. Masks with micro- and nano-patterns are typically fabricated directly using an electron beam lithography machine. The manufacturing process is a typical photolithography process, including metal layer deposition, resist coating, electron beam lithography, development, chromium layer etching, and resist stripping.

[0032] In the prior art, a cleaning strip and an air suction port are installed on one side of the inspection box. When the mask is passed into the inspection box via a conveyor belt, the cleaning strip sweeps away impurities on the surface, and the dust raised is sucked into the air suction port, achieving the cleaning purpose. However, the existing device relies on the cleaning strip to scrape the mask surface once, which is not very effective. Some impurities may still be adsorbed on the mask surface.

[0033] In order to solve the problems in the related art to a certain extent, the embodiment of the present application provides a mask inspection device. When the mask needs to be inspected, the door of the inspection box 11 needs to be opened and the mask is placed on the top of the placement plate 12. At this time, the door of the inspection box 11 is closed, and the motor 26 is started to drive the rotating rod 23 to rotate. When the rotating rod 23 rotates, the gears 25 are engaged with each other, which drives the other rotating rods 23 to rotate together, so that the cleaning brush 24 at the bottom of the rotating rod rotates. At this time, the plate 22 can be moved left and right inside the inspection box 11 by pushing and pulling the cross bar 21, so that the cleaning brush 24 contacts the top of the mask to clean the dust on the top of the mask and clean the impurities. At this time, the fan 13 and the air suction port 14 are used to discharge the air inside the inspection box 11 to the outside. If the discharged air is too heavy, the cleaned dust will be sucked away together. After cleaning, the plate 22 is pulled to the side of the inner wall of the inspection box 11, and the inspection module inside the inspection box 11 is used to inspect the surface of the mask.

[0034] The present application is described below with reference to specific embodiments and with reference to the accompanying drawings:

[0035] Combine Figures 1-4, an embodiment of the present application provides a mask detection device, comprising: an inspection box 11 with a placement plate 12 provided inside thereof for placing the mask; a fan 13 fixedly arranged on the outer wall of the inspection box 11; an air suction port 14 arranged on the inner wall of the inspection box 11 and connected to the fan 13; a cleaning assembly 2 is provided inside the inspection box 11, and the cleaning assembly 2 comprises: one end of a cross bar 21 inserted into the interior of the inspection box 11; a plate body 22 fixedly arranged at one end of the cross bar 21; a rotating rod 23 arranged at the bottom of the plate body 22; a cleaning brush 24 arranged at the bottom end of the rotating rod 23; a gear 25 fixedly sleeved on the outer wall of the cleaning brush 24, and the gears 25 are engaged with each other; a motor 26 is arranged at the top of the plate body 22, and the output shaft passes through the plate body 22 and is connected to the rotating rod 23.

[0036] Specifically, the detection box 11 is equipped with a detection module, specifically a flatness detection instrument, model LXBP-5. Its principle is to use dual-camera calibration and laser triangulation principles, projecting light onto the object with a projector or laser, and projecting multiple images around the object. After the camera captures the image, it uses an algorithm to decode the height information to form spatial (x, y, z) point cloud data, thereby realizing the detection of the object's flatness.

[0037] When the mask needs to be inspected during use, the door of the inspection box 11 needs to be opened and the mask is placed on the top of the placement plate 12. At this time, the door of the inspection box 11 is closed and the motor 26 is started to drive the rotating rod 23 to rotate. When the rotating rod 23 rotates, the gears 25 are engaged with each other, which drives the other rotating rods 23 to rotate together, so that the cleaning brush 24 at the bottom of the rotating rod rotates. At this time, the plate body 22 can be moved left and right inside the inspection box 11 by pushing and pulling the cross bar 21 so that the cleaning brush 24 contacts the top of the mask to clean the dust and exhaust gas on the top of the mask and clean the impurities. At this time, the fan 13 and the air suction port 14 are used to discharge the air inside the inspection box 11 to the outside. The heavy air discharged will suck away the cleaned dust together. After cleaning, the plate body 22 is pulled to the side of the inner wall of the inspection box 11, and the inspection module inside the inspection box 11 is used to inspect the surface of the mask.

[0038] In some embodiments, a groove is provided at the bottom of the plate 22 to wrap the gear 25 therein.

[0039] When in use, this design can wrap the gear 25 inside the plate body 22, which protects the gear 25 and makes it more beautiful.

[0040] In some embodiments, the cleaning brush 24 is designed as a soft-bristle brush.

[0041] The soft-bristle brush design can prevent the top of the mask from being scratched while cleaning, thus better protecting the mask.

[0042] In some embodiments, the cleaning assembly 2 further includes a button 27 disposed at one end of the cross bar 21 .

[0043] The button 27 is provided for easy gripping during use, so that the crossbar 21 can be pulled left and right to avoid slipping or falling off.

[0044] In some embodiments, the cleaning assembly 2 further includes: a spring 28 sleeved on the outside of the cross bar 21 , with both ends connected to the outer side wall of the detection box 11 and the button 27 .

[0045] When the button 27 is pushed during use, the spring 28 is squeezed, and when the button 27 is released, the spring 28 rebounds and drives the crossbar 21 to move, causing the plate 22 to move accordingly, making it more convenient to use.

[0046] In some embodiments, the cleaning assembly 2 further includes: a filter 29 symmetrically arranged on the outer side wall of the detection box 11 .

[0047] When in use, the design of the filter 29 can create a negative pressure environment inside the detection box 11 after the fan 13 discharges the air inside the detection box 11, and the outside air will enter the inside of the detection box 11 through the filter. At this time, the filter 29 can filter out dust and impurities in the outside air, so that it is not easy for dust and impurities to be present inside the detection box 11, thereby avoiding affecting the detection.

[0048] In some embodiments, an adjustment component 3 is provided inside the detection box 11, and the adjustment component 3 includes: a threaded sleeve 31 rotatably provided on the bottom inner wall of the detection box 11; a threaded rod 32 is provided inside the threaded sleeve 31 and is threadedly connected to the threaded sleeve 31, and the top end is fixedly connected to the placement plate 12; the bottom end of the protrusion 33 passes through the placement plate 12 and is connected to the inner wall of the detection box 11.

[0049] When in use, if the thickness of the mask is different, the height of the placement plate 12 needs to be adjusted. At this time, you only need to rotate the threaded sleeve 31. While rotating, because the threaded rod 32 is threadedly connected to the threaded sleeve 31, and the ridge 33 can limit the rotation of the placement plate 12, the threaded rod 32 can be pulled back to the inside when the threaded sleeve 31 is rotated, and the reverse rotation can push the threaded rod 32 upward, thereby adjusting the height of the placement plate.

[0050] In some embodiments, the adjustment assembly 3 further includes: a plurality of shift rods 34 , all of which are disposed on the outer side wall of the threaded sleeve 31 .

[0051] The design of the shifting rod 34 during use can make it more convenient to rotate the threaded sleeve 31 .

[0052] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", "some examples", etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification.

[0053] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that ordinary technicians in this field can implement them. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0054] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A mask detection device, comprising: A detection box (11) is provided with a placement plate (12) inside thereof for placing a mask; A fan (13) is arranged on the outer side wall of the detection box (11); An air suction port (14) is provided on the inner wall of the detection box (11) and is connected to the fan (13); The feature is that a cleaning component (2) is provided inside the detection box (11), and the cleaning component (2) comprises: A crossbar (21), one end of which is inserted into the interior of the detection box (11); A plate body (22) is provided at one end of the crossbar (21); A rotating rod (23) is provided at the bottom of the plate (22); A cleaning brush (24) is provided at the bottom end of the rotating rod (23); Gears (25) are fixedly sleeved on the outer wall of the cleaning brush (24), and the gears (25) are meshed with each other; The motor (26) is arranged on the top of the plate body (22), and the output shaft passes through the plate body (22) and is connected to the rotating rod (23).

2. The mask detection device according to claim 1, characterized in that: A groove is provided at the bottom of the plate body (22) to wrap the gear (25) therein.

3. The mask detection device according to claim 1, wherein: The cleaning brush (24) is designed as a soft brush.

4. The mask detection device according to claim 1, wherein: The cleaning component (2) further comprises: A button (27) is provided at one end of the crossbar (21).

5. The mask detection device according to claim 4, characterized in that: The cleaning component (2) further comprises: The spring (28) is sleeved on the outside of the crossbar (21), and its two ends are connected to the outer wall of the detection box (11) and the button (27).

6. The mask detection device according to claim 1, characterized in that: The cleaning component (2) further comprises: The filter screen (29) is symmetrically arranged on the outer side wall of the detection box (11).

7. The mask detection device according to claim 1, characterized in that: An adjustment component (3) is provided inside the detection box (11), and the adjustment component (3) comprises: A threaded sleeve (31) is rotatably mounted on the inner side wall of the bottom of the detection box (11); A threaded rod (32) is disposed inside the threaded sleeve (31) and is threadably connected to the threaded sleeve (31), and a top end is fixedly connected to the placement plate (12); The bottom end of the convex strip (33) passes through the placement plate (12) and is connected to the inner wall of the detection box (11).

8. The mask detection device according to claim 7, characterized in that: The regulating component (3) further comprises: There are multiple shifting rods (34), all of which are arranged on the outer side wall of the threaded sleeve (31).

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