Replacement-free ceramic substrate exposure limiting jig

Abstract

The utility model discloses a replacement-free ceramic substrate exposure limiting jig which comprises an elastic plate and a positioning framework, the positioning framework is of a grid structure and is arranged in the elastic plate, the elastic plate is provided with a plurality of groups of positioning inner frames in the positioning framework, ceramic substrates are placed in the positioning inner frames, the elastic plate comprises an upper elastic layer and a lower elastic layer, and the upper elastic layer and the lower elastic layer are arranged on the positioning framework. The upper elastic layer and the lower elastic layer are spliced up and down, and the positioning framework is clamped between the upper elastic layer and the lower elastic layer. The utility model has the advantages that the epoxy resin jig plates with different thicknesses do not need to be frequently replaced according to the thickness of the processed substrate, the thickness of the ceramic substrate can be elastically matched under the condition of ensuring the stable working state, and the replacement-free effect is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic substrate exposure, in particular to a replacement-free ceramic substrate exposure limiting fixture. Background Art

[0002] Copper-clad ceramic substrates are frequently used as substrates for power semiconductor device packaging. Ceramic substrates are typically double-sided, with two metal layers, one for the patterned side and the other for the non-patterned side. Pattern transfer and etching are used to create the desired pattern. Currently, the commonly used exposure device uses upper and lower glass tables, one for the patterned and the other for the non-patterned film. Vacuuming is performed on the upper and lower tables to achieve a sealed vacuum for exposure. The exposure process requires a multi-grid jig to limit the motherboard's position. The jig and the product must maintain the same height to avoid poor exposure, cracked edges, and other defects caused by height differences.

[0003] As the demand for copper-clad ceramic substrates increases, the thickness of the epoxy resin jigs commonly used for ceramic substrates must be customized according to different base thicknesses. Each time a product with a different thickness is switched, the epoxy resin jig must be replaced with a matching one. This significantly reduces exposure production efficiency and also creates the risk of incorrect thickness selection. Therefore, designing an exposure limit jig that can be flexibly adjusted to substrate thickness without requiring replacement is crucial to improving production efficiency. Utility Model Content

[0004] The purpose of the utility model is to provide a ceramic substrate exposure limit jig that does not require replacement, which does not require frequent replacement of epoxy resin jig plates of different thicknesses according to the thickness of the processed substrate. While ensuring a stable working state, it can flexibly match the thickness of the ceramic substrate to achieve replacement-free operation.

[0005] The above technical objectives of the present invention are achieved through the following technical solutions:

[0006] A replacement-free ceramic substrate exposure limit fixture, characterized in that it includes an elastic plate and a positioning frame, the positioning frame is arranged inside the elastic plate in a grid structure, the elastic plate is provided with several groups of positioning inner frames inside the positioning frame, the ceramic substrate is placed inside the positioning inner frame, the elastic plate includes an upper elastic layer and a lower elastic layer, the upper elastic layer and the lower elastic layer are spliced up and down, and the positioning frame is clamped between the upper elastic layer and the lower elastic layer.

[0007] Preferably, the size of the positioning inner frame is 142*194 mm, and the thickness of the upper elastic layer and the lower elastic layer in the uncompressed state is 3 mm.

[0008] Preferably, the positioning inner frame is rectangular, and four groups of arc grooves are symmetrically provided at the four corners of the positioning inner frame. The arc grooves are used to avoid the four corners of the ceramic substrate. The four arc grooves can avoid the four corners of the ceramic substrate when placing the ceramic substrate, so that the ceramic substrate can be placed flatly in the groove.

[0009] Preferably, rectangular notches are provided in the middle of the two opposite long sides of the positioning inner frame, and the corners of the rectangular notches are processed and set to be arc-shaped corners protruding outward. The transition corners between the rectangular notch and the positioning inner frame are also processed and set to be arc-shaped corners, and the arc angle of the arc-shaped corner is 90°. Rectangular notches are provided on both sides of the positioning inner frame and arc-shaped corners are provided to facilitate the placement and removal of the ceramic substrate and prevent the edges of the positioning inner frame from being pricked.

[0010] Preferably, four groups of positioning holes are symmetrically opened at the four corners of the positioning skeleton, and four groups of openings are opened above and below the upper elastic layer corresponding to the four groups of positioning holes. The positioning holes and the openings are limited and fixed by external positioning pins, and are fixed to the positioning holes on the positioning skeleton by the positioning pins to achieve stability in the overall working state.

[0011] Preferably, the inner diameter of the opening is larger than the inner diameter of the positioning hole. When pressing down on ceramic substrates of different thicknesses, an additional shrinkage deformation margin is provided between the inner side of the opening 10 and the outer positioning pin to avoid shrinkage bulges that affect subsequent sealing.

[0012] Preferably, positioning protrusions are provided above and below the grid connections in the positioning frame, and the positioning protrusions are 0.3 mm thick. During the process of downward compression, the relative displacement between the elastic layer, the lower elastic layer and the positioning frame under working pressure is reduced.

[0013] Preferably, limiting protrusions are provided in the middle of the two relative short sides of the positioning inner frame, and two relative long sides of the positioning inner frame are also symmetrically provided with two groups of limiting protrusions on both sides of the rectangular notch. The length of the limiting protrusion is 1 mm. The ceramic substrate is positioned and installed by the limiting protrusions arranged in four directions to prevent the ceramic substrate from rotating and shifting.

[0014] Preferably, when the elastic plate is compressed by 0.5 mm, the amount of inward shrinkage deformation generated on the inner side of the positioning inner frame is 0.3 mm.

[0015] Preferably, the upper elastic layer and the lower elastic layer are both made of high-resilience foam rubber material, which can elastically match the thickness of the ceramic substrate, so that there is no need to replace them each time when switching to products of different thicknesses.

[0016] In summary, the utility model has the following beneficial effects: The advantage of the utility model is that the elastic plate is made of high-elasticity foam rubber material, and it is matched with the internal positioning skeleton. There is no need to design a double plywood for compression springs, and the service life can reach more than 10,000 times. The upper table is pressed down until it contacts the motherboard. At this time, the limiting fixture is on the same plane as the motherboard, and the table is vacuumed and exposed. There is no need to frequently replace epoxy resin fixture plates of different thicknesses according to the thickness of the processed substrate. While ensuring the stability of the working state, it can flexibly match the thickness of the ceramic substrate and achieve no replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the external structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 3 yes Figure 2 Schematic diagram of the mechanism at AA in the middle. DETAILED DESCRIPTION

[0020] The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings. This embodiment does not constitute a limitation to the present invention.

[0021] like Figures 1 to 3 The shown embodiment shows a replacement-free ceramic substrate exposure limit fixture, comprising an elastic plate 1 and a positioning frame 2. The positioning frame 2 is arranged inside the elastic plate 1 in a grid structure. The elastic plate 1 is provided with several groups of positioning inner frames 3 inside the positioning frame 2. The ceramic substrate is placed inside the positioning inner frame 3. The elastic plate 1 comprises an upper elastic layer 4 and a lower elastic layer 5. The upper elastic layer 4 and the lower elastic layer 5 are spliced together up and down, and the positioning frame 2 is clamped between the upper elastic layer 4 and the lower elastic layer 5.

[0022] The size of the positioning inner frame 3 is 142*194 mm, and the thickness of the upper elastic layer 4 and the lower elastic layer 5 in the uncompressed state is 3 mm.

[0023] The positioning inner frame 3 is rectangular, and four groups of arc grooves 6 are symmetrically opened at the four corners of the positioning inner frame 3. The arc grooves 6 are used to avoid the four corners of the ceramic substrate. The four arc grooves 6 can avoid the four corners of the ceramic substrate when placing the ceramic substrate, so that the ceramic substrate can be placed flatly in the groove.

[0024] Rectangular notches 7 are provided in the middle of the two opposite long sides of the positioning inner frame 3. The corners of the rectangular notches 7 are processed and set to arc-shaped corners 8 protruding outward. The transition corners between the rectangular notch 7 and the positioning inner frame 3 are also processed and set to arc-shaped corners 8. The arc angle of the arc-shaped corner is 90°. Rectangular notches 7 are provided on both sides of the positioning inner frame 3 and arc-shaped corners 8 are provided to facilitate the placement and removal of the ceramic substrate and prevent the corners of the positioning inner frame 3 from being pricked.

[0025] Four groups of positioning holes 9 are symmetrically opened at the four corners of the positioning frame 2, and four groups of openings 10 are opened above and below the upper elastic layer 4 and the lower elastic layer 5 corresponding to the four groups of positioning holes 9. The positioning holes 9 and the openings 10 are limited and fixed by external positioning pins, and are fixed to the positioning holes 9 on the positioning frame 2 by the positioning pins to achieve stability in the overall working state.

[0026] The inner diameter of the opening 10 is larger than that of the positioning hole 9. When pressing down on ceramic substrates of different thicknesses, an additional inward deformation margin is provided between the inner side of the opening 10 and the outer positioning pin to avoid inward bulges that affect subsequent sealing.

[0027] Positioning protrusions 11 are provided above and below the grid connections in the positioning frame 2. The thickness of the positioning protrusions 11 is 0.3 mm. During the process of downward compression, the relative displacement between the elastic layer 4, the lower elastic layer 5 and the positioning frame 2 under the working pressure state is reduced.

[0028] Limiting protrusions 12 are provided in the middle of the two opposite short sides of the positioning inner frame 3, and two groups of limiting protrusions 12 are also symmetrically provided on both sides of the rectangular notch 7 of the two opposite long sides of the positioning inner frame 3. The length of the limiting protrusion 12 is 1 mm. The ceramic substrate is positioned and installed by the limiting protrusions 12 set in four directions to prevent the ceramic substrate from rotating and shifting.

[0029] Every time the elastic plate 1 is compressed by 0.5 mm, the inner side of the positioning inner frame 3 will shrink by 0.3 mm. The upper elastic layer 4 and the lower elastic layer 5 are both made of high-elasticity foam rubber materials, which can elastically match the thickness of the ceramic substrate, so there is no need to replace them every time you switch to products of different thicknesses.

[0030] The usage process of the present invention is as follows: first, the upper and lower films are installed, and the upper and lower films are vacuumed to a vacuum degree of -600~-700mmHg; then, the limiting fixture is put on the positioning pins fixedly installed on the exposure table, and the ceramic substrate is placed in the inner frame of the fixture, and the frame is closed and vacuumed; the upper table presses down the limiting fixture until the upper table contacts the upper surface of the ceramic substrate. At this time, the top of the limiting fixture and the ceramic substrate are in the same plane, and the table is vacuumed for exposure to a vacuum degree of -350~-400mmHg.

[0031] The advantage of the present invention is that the elastic plate is made of high-resilience foam rubber material, which is matched with the internal positioning skeleton. There is no need to design a double plywood for compression springs. The service life can reach more than 10,000 times. The upper table is pressed down until it contacts the motherboard. At this time, the limit fixture is on the same plane as the motherboard, and the table is vacuumed for exposure. There is no need to frequently replace epoxy resin fixture plates of different thicknesses according to the thickness of the processed substrate. While ensuring a stable working state, it can flexibly match the thickness of the ceramic substrate and achieve no replacement.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and protection scope of the present invention, and such modifications or equivalent substitutions should also be deemed to fall within the protection scope of the technical solution of the present invention.

Claims

1. A ceramic substrate exposure limiting fixture that does not require replacement, characterized in that: It includes an elastic plate and a positioning frame. The positioning frame is arranged inside the elastic plate in a grid structure. The elastic plate is provided with several groups of positioning inner frames inside the positioning frame. A ceramic substrate is placed inside the positioning inner frame. The elastic plate includes an upper elastic layer and a lower elastic layer. The upper elastic layer and the lower elastic layer are spliced up and down. The positioning frame is clamped between the upper elastic layer and the lower elastic layer.

2. The non-replaceable ceramic substrate exposure limiting fixture according to claim 1, characterized in that: The size of the positioning inner frame is 142*194mm, and the thickness of the upper elastic layer and the lower elastic layer in the uncompressed state is 3mm.

3. The non-replaceable ceramic substrate exposure limiting fixture according to claim 1, characterized in that: The positioning inner frame is rectangular, and four groups of arc grooves are symmetrically opened at the four corners of the positioning inner frame.

4. The non-replaceable ceramic substrate exposure limiting fixture according to claim 1, characterized in that: Rectangular notches are provided in the middle of the two opposite long sides of the positioning inner frame, and the corners of the rectangular notches are processed to be arc-shaped corners protruding outward. The transition corners between the rectangular notch and the positioning inner frame are also processed to be arc-shaped corners, and the arc angle of the arc-shaped corners is 90°.

5. The non-replaceable ceramic substrate exposure limiting fixture according to claim 1, characterized in that: Four groups of positioning holes are symmetrically opened at the four corners of the positioning frame, and four groups of openings are opened above and below the upper elastic layer corresponding to the four groups of positioning holes. The positioning holes and the openings are limited and fixed by external positioning pins.

6. The non-replaceable ceramic substrate exposure limiting fixture according to claim 5, characterized in that: The inner diameter of the opening is larger than the inner diameter of the positioning hole.

7. The non-replaceable ceramic substrate exposure limiting fixture according to claim 1, characterized in that: Positioning protrusions are provided above and below the grid connections in the positioning frame, and the thickness of the positioning protrusions is 0.3 mm.

8. The non-replaceable ceramic substrate exposure limiting fixture according to claim 4, characterized in that: The middle parts of the two opposite short sides of the positioning inner frame are provided with limiting protrusions, and the two opposite long sides of the positioning inner frame are also symmetrically provided with two groups of limiting protrusions on both sides of the rectangular notch, and the length of the limiting protrusions is 1mm.

9. The non-replaceable ceramic substrate exposure limiting fixture according to claim 1, characterized in that: When the elastic plate is compressed by 0.5 mm, the inner side of the positioning inner frame is deformed by 0.3 mm.

10. The non-replaceable ceramic substrate exposure limiting fixture according to claim 1, characterized in that: The upper elastic layer and the lower elastic layer are both made of high-elasticity foam rubber materials.

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