Laser cutting device
By designing the rotary mirror and filling member in the laser cutting device, the rigidity of the mirror is enhanced, the problem of easy damage of the mirror is solved, and the cutting accuracy and efficiency are improved.
Patent Information
- Application Number
- CN202422120970.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2023-09-01
- Filing Date
- 2024-08-30
- Publication Date
- 2025-08-08
- Estimated Expiration
- 2034-08-30
AI Technical Summary
Laser mirrors are susceptible to damage during laser cutting, resulting in a decrease in positioning accuracy and light efficiency. The existing devices lack measures to effectively enhance the rigidity of the mirror.
A laser cutting device is designed, including a rotating mirror and a filling member, to achieve stable rotation of the mirror through a fixing member and a rotation axis, and to coat the mirror surface with an inorganic material to enhance rigidity.
It improves the stability and service life of the reflector, improves the positioning accuracy and light efficiency of laser cutting, and improves the cutting quality.
Smart Images

Figure CN223198286U_ABST
Abstract
Description
[0001] CROSS-REFERENCE TO RELATED APPLICATIONS
[0002] This application is based on and claims the benefit of priority from Korean Patent Application No. 10-2023-0116401 filed in the Korean Intellectual Property Office on September 1, 2023, the disclosure of which is incorporated herein in its entirety by reference. Technical Field
[0003] One or more embodiments relate to a laser cutting apparatus for cutting a portion of an object such as a display panel using a laser and a method of manufacturing a display device using the laser cutting apparatus, and more particularly, to a laser cutting apparatus including a reflective mirror having improved rigidity. Background Art
[0004] Generally speaking, in a display panel, a display element layer for realizing an image is provided on a substrate, and an encapsulation layer for covering and protecting the display element layer is provided on the display element layer. Such a display panel can be processed by cutting and removing a portion of the outer edge of the display panel or by cutting a portion of the display panel to form an opening through the display panel. In this case, to cut the display panel, a laser beam can be refracted or reflected and irradiated toward the display panel. Utility Model Content
[0005] The laser reflector rotates to adjust the laser position and is therefore exposed to continuous torque, and accordingly, there is a risk of damaging or breaking the laser reflector. In addition, the laser reflector reflects the laser and is continuously exposed to the laser, which may cause surface damage to the laser reflector. When the reflector is used to reflect the laser and irradiate the display panel, this leads to a decrease in positioning accuracy, light efficiency, and cutting quality. One or more embodiments provide a laser cutting device including a device for enhancing the rigidity of the reflector and a method for manufacturing a display device using the laser cutting device.
[0006] Additional aspects will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the disclosed embodiments.
[0007] According to one or more embodiments, a laser cutting device includes: a first fixing member, which is rotatable relative to a first rotation axis extending in a first direction; a first reflector, which is fixed to the first fixing member, a portion of the first reflector is clamped by the first fixing member, the first reflector is rotatable together with the first fixing member relative to the first rotation axis, and is configured to reflect laser light; and a first-1 filling member, between the first fixing member and the portion of the first reflector clamped by the first fixing member.
[0008] According to this embodiment, the laser cutting device may further include: a second fixing member, which is rotatable relative to a second rotation axis extending in a second direction perpendicular to the first direction; a second reflector, which is fixed to the second fixing member, a portion of the second reflector is clamped by the second fixing member, the second reflector is rotatable together with the second fixing member relative to the second rotation axis, and is configured to reflect the laser; and a second-1 filling member, between the second fixing member and the portion of the second reflector clamped by the second fixing member.
[0009] According to this embodiment, the laser cutting apparatus may further include a first-2 filling member covering a surface of the first reflecting mirror, the surface sharing an edge with another surface of the first reflecting mirror clamped by the first fixing member.
[0010] According to this embodiment, the laser cutting apparatus may further include a second-2 filling member covering a surface of the second reflecting mirror, the surface sharing an edge with another surface of the second reflecting mirror clamped by the second fixing member.
[0011] According to this embodiment, the first reflector may include a chamfered edge or a curved edge.
[0012] According to this embodiment, the second reflector may be bilaterally asymmetric with respect to the second rotation axis.
[0013] According to this embodiment, the front shape of the second reflector may include an arch shape that is bilaterally symmetrical with respect to the second rotation axis, and may include an arc-shaped edge.
[0014] According to this embodiment, the center of gravity of the second reflector may be spaced apart from the second rotation axis.
[0015] According to this embodiment, the second reflector may include a chamfered edge or a curved edge.
[0016] According to the present embodiment, each of the first reflecting mirror and the second reflecting mirror may include a surface coated with an inorganic material.
[0017] According to one or more embodiments, a method for manufacturing a display device includes: aligning a panel and a laser cutting device; irradiating a laser onto the panel using the laser cutting device; and cutting a portion of the panel through relative movement between the panel and the laser cutting device. The laser cutting device includes: a first fixing member rotatable relative to a first rotation axis extending in a first direction; a first reflector fixed to the first fixing member, a portion of the first reflector being clamped by the first fixing member, the first reflector being rotatable relative to the first rotation axis together with the first fixing member and being configured to reflect the laser; and a first-1 filling member between the first fixing member and the portion of the first reflector clamped by the first fixing member.
[0018] According to this embodiment, the laser cutting device may further include: a second fixing member, which is rotatable relative to a second rotation axis extending in a second direction perpendicular to the first direction; a second reflector, which is fixed to the second fixing member, a portion of the second reflector is clamped by the second fixing member, the second reflector is rotatable together with the second fixing member relative to the second rotation axis, and is configured to reflect the laser; and a second-1 filling member, between the second fixing member and the portion of the second reflector clamped by the second fixing member.
[0019] According to this embodiment, the laser cutting apparatus may further include a first-2 filling member covering a surface of the first reflecting mirror, the surface sharing an edge with another surface of the first reflecting mirror clamped by the first fixing member.
[0020] According to this embodiment, the laser cutting apparatus may further include a second-2 filling member covering a surface of the second reflecting mirror, the surface sharing an edge with another surface of the second reflecting mirror clamped by the second fixing member.
[0021] According to this embodiment, the first reflector may include a chamfered edge or a curved edge.
[0022] According to this embodiment, the second reflector may be bilaterally asymmetric with respect to the second rotation axis.
[0023] According to this embodiment, the front shape of the second reflector may include an arch shape that is bilaterally symmetrical with respect to the second rotation axis, and may include an arc-shaped edge.
[0024] According to this embodiment, the center of gravity of the second reflector may be spaced apart from the second rotation axis.
[0025] According to this embodiment, the second reflector may include a chamfered edge or a curved edge.
[0026] According to the present embodiment, each of the first reflecting mirror and the second reflecting mirror may include a surface coated with an inorganic material. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] The above and other aspects and features of the embodiments of the present disclosure will become more apparent from the following description in conjunction with the accompanying drawings.
[0028] Figure 1 is a schematic perspective view of a laser cutting device according to an embodiment.
[0029] Figure 2 is a schematic perspective view of a region of a laser cutting apparatus according to an embodiment.
[0030] Figure 3A and Figure 3B 1 and 2 are respectively a front view and a side view of a reflector unit according to an embodiment.
[0031] Figure 4 、 Figure 5 and Figure 6 is an enlarged perspective view of a region of a mirror unit according to various embodiments.
[0032] Figure 7 FIG. 4 is a front view of a first reflector according to an embodiment.
[0033] Figure 8 FIG. 4 is a front view of a second reflecting mirror according to an embodiment.
[0034] Figure 9 FIG. 4 is a front view of a second reflecting mirror according to an embodiment.
[0035] Figure 10 FIG. 4 is a front view of a second reflecting mirror according to an embodiment.
[0036] Figure 11A and Figure 11B is a cross-sectional view of a region of a cross section of a reflector according to various embodiments.
[0037] Figure 12A 、 Figure 12B and Figure 12C is a perspective view illustrating a process state of a method for manufacturing a display device according to an embodiment.
[0038] Figure 13A 、 Figure 13B 、 Figure 13C 、 Figure 13D 、 Figure 13E and Figure 13F is a perspective view illustrating a process state of a method for manufacturing a display device according to an embodiment.
[0039] Figure 14 is a schematic plan view of a display device that can be manufactured by a method for manufacturing a display device according to an embodiment.
[0040] Figure 15 is a schematic cross-sectional view of a region of a display device that can be manufactured by a method for manufacturing a display device according to an embodiment. DETAILED DESCRIPTION
[0041] Reference will now be made in detail to the embodiments, examples of which are illustrated in the accompanying drawings, wherein the same reference numerals refer to the same elements throughout the text. In this regard, the current embodiments may have different forms and should not be construed as being limited to the description set forth herein. Accordingly, the embodiments are described below only with reference to the accompanying drawings to explain various aspects of this specification. As used herein, the term "and / or" includes any and all combinations of one or more of the relevant listed items. Throughout this disclosure, the expression "at least one of a, b, and c" means only a, only b, only c, both a and b, both a and c, both b and c, all of a, b, and c, or any variation thereof.
[0042] Because various modifications can be applied and one or more embodiments can be implemented, specific embodiments will be shown in the drawings and described in detail in the detailed description. The effects and features and methods of achieving them will be explained with reference to the embodiments described in detail below with reference to the drawings. However, the embodiments may have different forms and should not be construed as being limited to the description set forth herein.
[0043] Now, the embodiments will be described in detail below with reference to the accompanying drawings. When describing with reference to the accompanying drawings, the same or corresponding elements will be given the same reference numerals, and redundant descriptions of these elements will be omitted.
[0044] It will be understood that although the terms “first” and “second” may be used herein to describe various elements, these elements should not be limited by these terms and these terms are only used to distinguish one element from another.
[0045] In the following embodiments, a singular form includes a plural form unless the context clearly indicates otherwise.
[0046] It will be understood that the terms “comprises,” “comprising,” and “having” as used herein specify the presence of stated features or elements, but do not preclude the presence or addition of one or more other features or elements.
[0047] It will be further understood that when a layer, region or element is referred to as being “on” another layer, region or element, it can be directly or indirectly on the other layer, region or element. That is, for example, intervening layers, regions or elements may be present.
[0048] For the convenience of description, the size of the elements in the drawings may be exaggerated. For example, because the size (eg, thickness) of the elements in the drawings is arbitrarily illustrated for the convenience of explanation, the following embodiments are not limited thereto.
[0049] When a certain embodiment can be implemented differently, the specific process order can also be performed in a different order than described. For example, two processes described successively can be performed substantially simultaneously, or in a reverse order to the described order.
[0050] In this specification, the expression "A and / or B" means A, B, or A and B. In addition, an expression such as "at least one of A and B" means A, B, or A and B.
[0051] It will be understood that when a layer, region, or element is referred to as being “connected to” another layer, region, or element, it may be “directly connected to” the other layer, region, or element, or may be “indirectly connected to” the other layer, region, or element with one or more intervening layers, regions, or elements present. For example, it will be understood that when a layer, region, or element is referred to as being “electrically connected to” another layer, region, or element, it may be “directly electrically connected to” the other layer, region, or element, and / or may be “indirectly electrically connected to” the other layer, region, or element with one or more intervening layers, regions, or elements present.
[0052] The x-axis, y-axis, and z-axis are not limited to the three axes of the rectangular coordinate system and can be interpreted in a broader sense. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may refer to different directions that are not orthogonal to each other.
[0053] Figure 1 FIG. 4 is a schematic perspective view of a laser cutting device 1 according to an embodiment.
[0054] refer to Figure 1 The laser cutting apparatus 1 may irradiate the fourth light L4 onto the substrate 100 by reflecting the first light L1 incident from the outside at least once.
[0055] The laser cutting device 1 may include a first reflector unit 10 and a second reflector unit 20. The first reflector unit 10 and the second reflector unit 20 may intersect each other perpendicularly, but may not directly contact each other. For example, the first reflector unit 10 may extend entirely in a first direction DR1. The second reflector unit 20 may extend entirely in a second direction DR2 that is perpendicular to the first direction DR1.
[0056] The first rotation axis AX1 may overlap with the first direction DR1 and extend in the first direction DR1. The second rotation axis AX2 may overlap with the second direction DR2 and extend in the second direction DR2. Accordingly, the first rotation axis AX1 and the second rotation axis AX2 may perpendicularly intersect each other but may not directly contact each other.
[0057] The first reflecting mirror unit 10 may include a first reflecting mirror 11 , a first fixing member 12 , a first rotating member 13 , and a first supporting member 14 .
[0058] The first support member 14, the first rotating member 13, the first fixing member 12, and the first reflecting mirror 11 may be sequentially aligned in the first direction DR1. The first rotation axis AX1 may pass through each of the first support member 14, the first rotating member 13, the first fixing member 12, and the first reflecting mirror 11 and extend in the first direction DR1.
[0059] The first reflector 11 may be disposed at one end of the first reflector unit 10 and may form the end of the first reflector unit 10. The first reflector 11 may reflect incident light. For example, the first reflector 11 may reflect first light L1 incident from the outside into second light L2.
[0060] The surface on which the first light L1 is incident and reflected as the second light L2 is referred to as the front surface of the first reflector 11. The direction facing the front surface of the first reflector 11 can be defined as the third direction DR3. In other words, the direction perpendicular to the front surface (or reflective surface) of the first reflector 11 can be understood as the third direction DR3.
[0061] A direction facing one of the side surfaces of the first reflector 11 may be defined as a fifth direction DR5. In other words, a direction perpendicular to one of the side surfaces of the first reflector 11 may be understood as the fifth direction DR5.
[0062] Accordingly, the first direction DR1 , the third direction DR3 , and the fifth direction DR5 are perpendicular to each other and may define an orthogonal coordinate system based on the first reflector 11 .
[0063] The first reflection mirror 11 is rotatable relative to the first rotation axis AX1. The third direction DR3 and the fifth direction DR5 are defined as the directions in which the front surface and the side surface of the first reflection mirror 11 face, respectively, and thus may change along with the first reflection mirror 11 when the first reflection mirror 11 rotates. The first direction DR1 overlaps with the first rotation axis AX1 and thus does not change even when the first reflection mirror 11 rotates.
[0064] The first reflective mirror 11 may be fixed to the first fixing member 12. One end of the first reflective mirror 11, for example, an end adjacent to the first fixing member 12 (or an end in a direction opposite to the first direction DR1), may be clamped by the first fixing member 12. The first fixing member 12 may pick up the first reflective mirror 11 by using elastic force such as a spring, mechanical matching, and / or tightening of a screw.
[0065] The first fixing member 12 may be connected to the first rotating member 13. For example, the first fixing member 12 may be connected to the first rotating member 13 by using a means such as a joint, matching of uneven portions, or tightening of screws.
[0066] The first fixing member 12 may connect the first reflecting mirror 11 and the first rotating member 13 to each other. In other words, the first fixing member 12 may fix the first reflecting mirror 11 to the first rotating member 13.
[0067] The first rotating member 13 can rotate relative to the first rotation axis AX1. For example, the first rotating member 13 can include a driver (not shown) including a motor. The first rotating member 13 can have an overall cylindrical shape extending in a first direction DR1 relative to the first rotation axis AX1.
[0068] The first rotating member 13 may generate a rotational motion to rotate the first fixing member 12 and the first reflecting mirror 11. For example, the first rotating member 13, the first fixing member 12, and the first reflecting mirror 11 may rotate together with respect to the first rotation axis AX1.
[0069] The first support member 14 may be disposed at and may form an end of the first reflector unit 10 opposite to the first reflector 11. The first support member 14 may have an overall cylindrical shape extending in a first direction DR1 relative to the first rotation axis AX1.
[0070] The first rotating member 13 may be connected to the first supporting member 14. In one embodiment, a portion of the first rotating member 13 may extend into the first supporting member 14. In one embodiment, the first rotating member 13 may be connected to a surface of the first supporting member 14 facing the first rotating member 13.
[0071] The first supporting member 14 may support the first rotating member 13, the first fixing member 12, and the first reflecting mirror 11. For example, the first supporting member 14 may couple the first rotating member 13, the first fixing member 12, and the first reflecting mirror 11 to a housing (hereinafter referred to as Figure 2 In this case, the first supporting member 14 includes a bearing structure therein, and thus completely combines the first rotating member 13, the first fixing member 12, and the first reflecting mirror 11 to the housing, and also allows the first rotating member 13 to rotate so that the first reflecting mirror 11 can be rotated.
[0072] As a result, the first reflecting mirror 11 is mounted on the first rotating member 13 via the first fixing member 12, and the first rotating member 13 is rotatably coupled to the housing via the first supporting member 14. Therefore, the first reflecting mirror 11 can rotate relative to the first rotation axis AX1 by the rotational movement of the first rotating member 13.
[0073] The second reflecting mirror unit 20 may include a second reflecting mirror 21 , a second fixing member 22 , a second rotating member 23 , and a second supporting member 24 .
[0074] The second support member 24, the second rotating member 23, the second fixing member 22, and the second reflecting mirror 21 may be sequentially aligned in the second direction DR2. The second rotation axis AX2 may pass through each of the second support member 24, the second rotating member 23, the second fixing member 22, and the second reflecting mirror 21 and extend in the second direction DR2.
[0075] The second reflector 21 may be disposed at one end of the second reflector unit 20 and may form the end of the second reflector unit 20. The second reflector 21 may reflect incident light. For example, the second reflector 21 may reflect the second light L2 into the third light L3.
[0076] The surface on which the second light L2 is incident and reflected as the third light L3 is referred to as the front surface of the second reflector 21. The direction facing the front surface of the second reflector 21 can be defined as the fourth direction DR4. In other words, the direction perpendicular to the front surface (or reflective surface) of the second reflector 21 can be understood as the fourth direction DR4.
[0077] A direction facing one of the side surfaces of the second reflector 21 may be defined as a sixth direction DR6. In other words, a direction perpendicular to one of the side surfaces of the second reflector 21 may be understood as the sixth direction DR6.
[0078] Accordingly, the second direction DR2 , the fourth direction DR4 , and the sixth direction DR6 are perpendicular to each other and may define an orthogonal coordinate system based on the second reflective mirror 21 .
[0079] The second reflecting mirror 21 is rotatable relative to the second rotation axis AX2. The fourth direction DR4 and the sixth direction DR6 are defined as the directions in which the front surface and the side surface of the second reflecting mirror 21 face, respectively, and thus may change along with the second reflecting mirror 21 when the second reflecting mirror 21 rotates. The second direction DR2 overlaps with the second rotation axis AX2 and thus does not change even when the second reflecting mirror 21 rotates.
[0080] The second reflecting mirror 21 may be fixed to the second fixing member 22. One end of the second reflecting mirror 21, for example, an end adjacent to the second fixing member 22 (or an end in a direction opposite to the second direction DR2), may be clamped by the second fixing member 22. The second fixing member 22 may pick up the second reflecting mirror 21 by using elastic force such as a spring, mechanical matching, and / or tightening of a screw.
[0081] The second fixing member 22 may be connected to the second rotating member 23. For example, the second fixing member 22 may be connected to the second rotating member 23 by using a means such as a joint, matching of uneven portions, or tightening of screws.
[0082] The second fixing member 22 may connect the second reflecting mirror 21 and the second rotating member 23 to each other. In other words, the second fixing member 22 may fix the second reflecting mirror 21 to the second rotating member 23.
[0083] The second rotating member 23 can rotate relative to the second rotation axis AX2. For example, the second rotating member 23 may include a driver (not shown) including a motor. The second rotating member 23 may have an overall cylindrical shape extending in the second direction DR2 relative to the second rotation axis AX2.
[0084] The second rotating member 23 may generate a rotational motion to rotate the second fixing member 22 and the second reflecting mirror 21. For example, the second rotating member 23, the second fixing member 22, and the second reflecting mirror 21 may rotate together with respect to the second rotation axis AX2.
[0085] The second support member 24 may be disposed at and may form an end of the second reflector unit 20 opposite to the second reflector 21. The second support member 24 may have an overall cylindrical shape extending in the second direction DR2 relative to the second rotation axis AX2.
[0086] The second rotating member 23 may be connected to the second supporting member 24. In one embodiment, a portion of the second rotating member 23 may extend into the second supporting member 24. In one embodiment, the second rotating member 23 may be connected to a surface of the second supporting member 24 facing the second rotating member 23.
[0087] The second supporting member 24 may support the second rotating member 23, the second fixing member 22, and the second reflecting mirror 21. For example, the second supporting member 24 may couple the second rotating member 23, the second fixing member 22, and the second reflecting mirror 21 to the housing (hereinafter referred to as Figure 2 In this case, the second supporting member 24 includes a bearing structure therein, and thus completely combines the second rotating member 23, the second fixing member 22, and the second reflecting mirror 21 to the housing, and also allows the second rotating member 23 to rotate, so that the second reflecting mirror 21 can be rotated.
[0088] As a result, the second reflecting mirror 21 is mounted on the second rotating member 23 via the second fixing member 22, and the second rotating member 23 is rotatably coupled to the housing via the second supporting member 24. Therefore, the second reflecting mirror 21 can rotate relative to the second rotation axis AX2 by the rotational movement of the second rotating member 23.
[0089] The first light L1 may be light incident from the outside. For example, the first light L1 may be laser light incident from an external light source. The first light L1 may be reflected by the first reflector 11 to become the second light L2, the travel path of the second light L2 being different from the travel path of the first light L1. The incident angle and the reflection angle of the first light L1 may be equal to each other. For example, with respect to the first reflector 11, the angle (or incident angle) between the travel direction of the first light L1, which is the incident light, and the third direction DR3 may be equal to the angle (or reflection angle) between the travel direction of the second light L2, which is the reflected light, and the third direction DR3.
[0090] The second light L2 may be light reflected from the first reflector 11. The second light L2 may be reflected by the second reflector 21 to become third light L3, the travel path of the third light L3 being different from the travel path of the second light L2. The incident angle and the reflection angle of the second light L2 may be equal to each other. For example, with respect to the second reflector 21, the angle (or incident angle) between the travel direction of the second light L2, which is incident light, and the fourth direction DR4 may be equal to the angle (or reflection angle) between the travel direction of the third light L3, which is reflected light, and the fourth direction DR4.
[0091] The third light L3 reflected from the second reflecting mirror 21 may travel to the lens part 30. Alternatively, the lens part 30 may be adjusted to be placed in a travel path of the third light L3.
[0092] Regarding the lens portion 30, the third light L3, which is the incident light, may pass through the lens portion 30 and become the fourth light L4, which is the emitted light. The path of the fourth light L4 may be refracted by the lens portion 30, and the fourth light L4 may be focused to one point. The laser cutting device 1 may cut the substrate 100 by forming a point (i.e., a focus) at which the fourth light L4 is focused on an object (e.g., the substrate 100). The first to fourth lights L1, L2, L3, and L4 are sometimes referred to as first to fourth laser lights L1, L2, L3, and L4, and are generally a portion of the laser light that enters the laser cutting device 1 as the first laser light L1 and exits as the fourth laser light L4.
[0093] The lens portion 30 may include a lens that can focus the third light L3 into one point. For example, the lens portion 30 may include an F-θ lens. Figure 1 , the third light L3 is shown to travel at a right angle relative to the surface of the lens portion 30. However, in an embodiment, the third light L3 may travel at a different angle (eg, 45°) relative to the surface of the lens portion 30.
[0094] The basic principle of using laser cutting is to use a lens to focus the laser into one point and irradiate the laser to an object to cut the object. In the case of an ordinary lens, when light is incident from various angles, there may be a curvature in the image surface of the focus on the spherical surface. Accordingly, when the object (e.g., substrate 100) processed using the laser cutting device 1 is a planar object, the focus is on the spherical surface when an ordinary lens is used. Therefore, when the incident light is incident at a certain angle (e.g., 45°), the laser is not accurately focused on the object (e.g., substrate 100), which may deteriorate the cutting quality. To compensate for this, the F-θ lens corrects the focus so that no matter how the angle between the incident light and the lens is, the focus is on the plane. Accordingly, because the laser cutting device 1 includes a lens portion 30 including an F-θ lens, the fourth light L4 can be focused on the substrate 100, which is a planar object, regardless of the incident path of the third light L3. Therefore, the laser cutting device 1 can effectively cut the substrate 100, which is a planar object.
[0095] When the position where the fourth light L4 is focused moves, the substrate 100 may be cut along a corresponding path.
[0096] Various methods can be used to move the position at which the fourth light L4 is focused on the substrate 100. In one embodiment, the first reflector 11 and the second reflector 21 are rotated to adjust the travel paths of the second to fourth lights L2, L3, and L4, so that the position at which the fourth light L4 is focused on the substrate 100 can be moved. In one embodiment, when the directions facing the first reflector 11 and the second reflector 21 (or the third direction DR3 and the fourth direction DR4) are fixed, the incident path of the first light L1 can be adjusted. In addition, in one embodiment, when the positions of the first reflector 11 and the second reflector 21, the directions facing the first reflector 11 and the second reflector 21, and the travel paths of the first to fourth lights L1, L2, L3, and L4 are fixed, the position at which the fourth light L4 is focused on the substrate 100 can be moved by moving the substrate 100.
[0097] The first reflector unit 10 and the second reflector unit 20 may be arranged in a housing. The schematic shape of the housing is represented by Figure 1 The dotted line II is shown and will be referred to below Figure 2 Detailed description.
[0098] Figure 2 is a schematic perspective view of a region of a laser cutting apparatus according to an embodiment.
[0099] refer to Figure 2 , parts of the first reflector unit 10 and the second reflector unit 20 may be accommodated in the housing 40 . Alternatively, parts of the first reflector unit 10 and the second reflector unit 20 may be built into the housing 40 .
[0100] In one embodiment, the first reflector 11 (see Figure 1 ), the first fixing member 12 (see Figure 1 ) and the first rotating member 13 (see Figure 1 ) can be built into the housing 40. The second reflector 21 of the second reflector unit 20 (see Figure 1 ), the second fixing member 22 (see Figure 1 ) and the second rotating member 23 (see Figure 1 ) may be built in the housing 40. The first support member 14 of the first reflector unit 10 may protrude out of the housing 40. The second support member 24 of the second reflector unit 20 may protrude out of the housing 40.
[0101] The first support member 14 may be fixed to one surface of the housing 40. For example, the first support member 14 may be fixed to the first surface 41 of the housing 40. The first support member 14 may be fixed to the first surface 41 by using a joint, matching of uneven portions, or tightening of screws.
[0102] The second support member 24 may be fixed to one surface of the housing 40. For example, the second support member 24 may be fixed to the second surface 42 of the housing 40. The second support member 24 may be fixed to the second surface 42 by using a joint, matching of uneven portions, or tightening of screws.
[0103] The first surface 41 and the second surface 42 of the housing 40 may share an edge with each other. For example, when the housing 40 has a substantially rectangular parallelepiped shape, the first surface 41 may be the upper surface of the housing 40 and the second surface 42 may be the side surface of the housing 40.
[0104] The first support member 14 is fixed to the first surface 41 of the housing 40 and includes a bearing structure, etc., so that the first rotating member 13 (see Figure 1 ) is fixed to the housing 40 and can rotate relative to the first rotation axis AX1 at the same time. The second support member 24 is fixed to the second surface 42 of the housing 40 and includes a bearing structure, etc., so that the second rotating member 23 (see Figure 1 ) is fixed to the housing 40 and can rotate relative to the second rotation axis AX2 at the same time.
[0105] The cylindrical portion 43 may be arranged on one surface of the housing 40. For example, when the housing 40 has a substantially rectangular parallelepiped shape, the cylindrical portion 43 may be arranged on a surface opposite to the first surface 41. The cylindrical portion 43 may be formed separately and coupled to the housing 40, or may be integrally formed with the housing 40 as a single body.
[0106] The lens portion 30 may be built into the cylindrical portion 43. In one embodiment, a separate cylindrical cap may also be coupled to the cylindrical portion 43 after the lens portion 30 may be fixed within the cylindrical portion 43. In one embodiment, the lens portion 30 may be integrated with the cylindrical cap and coupled to the cylindrical portion 43.
[0107] Figure 3A and Figure 3B 1 and 2 are respectively a front view and a side view of a reflector unit according to an embodiment.
[0108] Figure 3A 2 is a front view of the first reflector unit 10 in the third direction DR3 and the second reflector unit 20 in the fourth direction DR4. Figure 3B 2 is a side view of the first reflector unit 10 in the fifth direction DR5 and the second reflector unit 20 in the sixth direction DR6.
[0109] refer to Figure 3A and Figure 3B The first reflector unit 10 may include a first reflector 11 , a first fixing member 12 , a first rotating member 13 , and a first supporting member 14 , which are sequentially arranged.
[0110] The first reflector 11 may have a substantially octagonal shape, the width of which becomes wider in the first direction DR1 and then narrower. Figure 3A , the first reflector 11 is shown to have a substantially octagonal shape, but one or more embodiments are not necessarily limited thereto.
[0111] The first reflector 11 may include elemental silicon (Si). For example, the first reflector 11 may include silicon oxide (SiO x In one embodiment, the first reflector 11 may comprise fused silica.
[0112] The surface of the first reflector 11 may be coated with an inorganic material to reflect light in a specific wavelength band. In one embodiment, the surface of the first reflector 11 may be coated with hafnium oxide (HfO x ) or silicon oxide (SiO x The coating may have a thickness of about 50 μm or less. In this case, the first reflector 11 may reflect most ultraviolet rays having a wavelength of about 330 nanometers (nm) to about 365 nm, for example, about 98% or more. The coating may include multiple layers and may maximize reflection of incident light while minimizing damage to the first reflector 11.
[0113] One end of the first reflecting mirror 11 may be clamped by the first fixing member 12. For example, an end portion of the first reflecting mirror 11 in a direction opposite to the first direction DR1 may be clamped by the first fixing member 12.
[0114] At the end portion of the first reflector 11 clamped by the first fixing member 12, the width (or length in the fifth direction DR5) of the first reflector 11 may be less than or equal to the width (or length in the fifth direction DR5) of the first fixing member 12. Figure 3A As shown in , the first reflector 11 may include an edge extending in one direction between the first direction DR1 and the fifth direction DR5. In some embodiments, at an end portion of the first reflector 11 clamped by the first fixing member 12, the first reflector 11 may include a side surface (or a surface in the fifth direction DR5) that protrudes more than a side surface (or a surface in the fifth direction DR5) of the first fixing member 12.
[0115] The first fixing member 12 may include a first portion 12-1 that directly holds the first reflector 11 and a second portion 12-2 that is connected to the first rotating member 13. The first portion 12-1 and the second portion 12-2 may be formed separately and then coupled to each other, or may be integrally formed as a single body. In one embodiment, the second portion 12-2 may be omitted, and the first portion 12-1 may be directly disposed on the first rotating member 13.
[0116] When viewed from the fifth direction DR5 , the first portion 12 - 1 may include a groove in which a portion of the first reflector 11 may be disposed, and the first portion 12 - 1 may include a tapered side surface.
[0117] The second portion 12-2 may have a generally cylindrical shape with an axis extending along the first direction DR1 as its central axis. The width of the lower end of the first portion 12-1 (or its length in the fifth direction DR5) may be greater than the diameter of the second portion 12-2. The thickness of the lower end of the first portion 12-1 (or its length in the third direction DR3) may be greater than the thickness of the second portion 12-2. Accordingly, the first portion 12-1 may protrude further than the second portion 12-2 in both the fifth direction DR5 and the third direction DR3.
[0118] The second portion 12-2 can be connected to the first rotating member 13. The second portion 12-2 can be connected to the first rotating member 13 by using a joint, coupling of uneven portions, tightening with screws, or adhesion. In one embodiment, the first rotating member 13 may include a groove that can be engaged with the second portion 12-2. The second portion 12-2 may have a shape that can be engaged with the groove of the first rotating member 13 and may extend and be fixed in the groove.
[0119] Similar to the second portion 12-2 of the first fixing member 12, the first rotating member 13 may have a generally cylindrical shape with an axis extending along the first direction DR1 as its central axis, and may include a driver (not shown) including a motor. One end of the first rotating member 13 (e.g., the end in the direction opposite to the first direction DR1) may be connected to the first support member 14. In one embodiment, the first support member 14 may include a groove that can engage with one end of the first rotating member 13. The first rotating member 13 may have a shape that can engage with the groove of the first support member 14 and may extend and be fixed to the first support member 14.
[0120] Reference above Figure 3A and Figure 3B The described features are similarly applicable to the second reflecting mirror unit 20 , the second reflecting mirror 21 , the second fixing member 22 , the first and second parts 22 - 1 and 22 - 2 of the second fixing member 22 , the second rotating member 23 , and the second supporting member 24 .
[0121] Figures 4 to 6 is an enlarged perspective view of a region of a mirror unit according to various embodiments.
[0122] Figure 4 for Figure 3A A perspective view of one of the various enlarged examples of area A of the embodiment shown in FIG.
[0123] refer to Figure 4 The first fixing member 12 may include a first groove 12 -G, and the first groove 12 -G may accommodate a portion of the first reflecting mirror 11 .
[0124] A portion of the first reflector 11 may be disposed in the first groove 12-G. In this case, a lower surface (or a surface in a direction opposite to the first direction DR1) of the first reflector 11 may be in direct contact with an upper surface (or a surface in the first direction DR1) of the first fixing member 12 in which the first groove 12-G is formed.
[0125] The length of the lower surface of the first reflector 11 (or the surface in the direction opposite to the first direction DR1) in the fifth direction DR5 may be smaller than the length of the first groove 12-G in the fifth direction DR5. Accordingly, a portion of the upper surface of the first fixing member 12 (or the surface in the first direction DR1) where the first groove 12-G is formed may not be covered by the first reflector 11.
[0126] The length of the first reflector 11 in the third direction DR3 may be smaller than the length of the first groove 12 -G in the third direction DR3 . Accordingly, an empty space may be generated between the first reflector 11 and an inner wall of the first fixing member 12 facing the first groove 12 -G.
[0127] The first-1 filling member 15 may be arranged to fill the empty space. The first-1 filling member 15 may be between the inner wall of the first fixing member 12 and the first reflector 11. The first-1 filling member 15 may be arranged on both sides of the first reflector 11. For example, a portion of the first-1 filling member 15 may be between the inner wall of the first fixing member 12 and the surface of the first reflector 11 in the third direction DR3. Another portion of the first-1 filling member 15 may be between the inner wall of the first fixing member 12 and the surface of the first reflector 11 in the direction opposite to the third direction DR3.
[0128] The first-1 filling member 15 may be formed by placing resin and then curing the resin. For example, the first-1 filling member 15 may be formed by injecting epoxy resin into the space between the first reflecting mirror 11 and the inner wall of the first fixing member 12 and then curing the epoxy resin.
[0129] Accordingly, the boundary of the first-1 filling member 15 and the edge of the first reflecting mirror 11 may not necessarily match each other. Figure 4 , the length of the first-1 filling member 15 in the fifth direction DR5 is shown to be equal to the length of the first reflector 11 in the fifth direction DR5. However, in one embodiment, the length of the first-1 filling member 15 in the fifth direction DR5 may be greater than the length of the first reflector 11 in the fifth direction DR5. Accordingly, a portion of the first-1 filling member 15 may also protrude beyond the edge of the first reflector 11 in the fifth direction DR5 and / or a direction opposite to the fifth direction DR5.
[0130] The first-1 filling member 15 fills the space between the first reflector 11 and the inner wall of the first fixing member 12, allowing the first reflector 11 to be more securely fixed to the first fixing member 12. The first-1 filling member 15 can absorb some of the shock and vibration that may be applied to the first reflector 11 due to the torque generated when the first reflector 11 and the first fixing member 12 rotate. The first-1 filling member 15 can also prevent the first reflector 11 from colliding with the inner wall of the first fixing member 12 when the first reflector 11 rotates. Accordingly, the first-1 filling member 15 can improve the overall rigidity of the first reflector 11.
[0131] The above reference Figure 4 The described features may be similarly applied to the second reflecting mirror 21 , the second fixing member 22 , the second groove 22 -G of the second fixing member 22 , and the second-1 filling member 25 .
[0132] Figure 5 for Figure 3A A perspective view of one of the various enlarged examples of area A of the embodiment shown in FIG.
[0133] refer to Figure 5 , a length of a lower surface (or a surface in a direction opposite to the first direction DR1) of the first reflector 11 in the fifth direction DR5 may be equal to a length of the first groove 12-G in the fifth direction DR5.
[0134] Accordingly, a portion of the first reflector 11 may protrude beyond the side surface of the first groove 12-G. For example, a portion of the first reflector 11 may protrude in the fifth direction DR5 and / or a direction opposite to the fifth direction DR5 beyond the surface of the first groove 12-G in the fifth direction DR5 and / or a direction opposite to the fifth direction DR5.
[0135] Similar to Figure 4 In the case shown in FIG. 1 , the first filling member 15 may fill the space between the first reflecting mirror 11 and the inner wall of the first fixing member 12 .
[0136] The boundaries of the first-1 filling member 15 and the boundaries of the first groove 12-G may not necessarily match each other. Figure 5 , the length of the first-1 filling member 15 in the fifth direction DR5 is shown to be equal to the length of the first groove 12-G in the fifth direction DR5. However, in one embodiment, the length of the first-1 filling member 15 in the fifth direction DR5 may be greater than the length of the first groove 12-G in the fifth direction DR5. Accordingly, a portion of the first-1 filling member 15 may protrude beyond the boundary of the first groove 12-G in the fifth direction DR5 and / or a direction opposite to the fifth direction DR5.
[0137] Reference above Figure 5 The described features may be similarly applied to the second reflecting mirror 21 , the second fixing member 22 , the second groove 22 -G of the second fixing member 22 , and the second-1 filling member 25 .
[0138] Figure 6 for Figure 3A A perspective view of one of the various enlarged examples of area A of the embodiment shown in FIG.
[0139] refer to Figure 6 , the first-2 filling member 16 may be further arranged in Figure 4 In the embodiment shown in , the first-2 filling member 16 may be arranged to fill a space of the first groove 12 -G, which space remains after a portion of the first reflecting mirror 11 and the first-1 filling member 15 are arranged.
[0140] The first-2 filling member 16 may cover each of the surface of the first-1 filling member 15 and a portion of the surface of the first reflector 11 in the fifth direction DR5. Alternatively, the first-2 filling member 16 may cover each of the surface of the first-1 filling member 15 and a portion of the surface of the first reflector 11 in a direction opposite to the fifth direction DR5. In some embodiments, the surface of the first reflector 11 covered by the first-2 filling member 16 shares an edge with another surface of the first reflector 11 clamped by the first fixing member 12.
[0141] Like the first-1 filling member 15, the first-2 filling member 16 can be formed by placing a resin and then curing the resin. For example, the first-2 filling member 16 can be formed by placing the first reflector 11 and the first-1 filling member 15 in the first groove 12-G, injecting epoxy resin into the remaining space, and then curing the epoxy resin.
[0142] The first-1 filling member 15 and the first-2 filling member 16 may be formed sequentially. For example, after forming the first-1 filling member 15 by injecting epoxy resin and then curing the epoxy resin, the first-2 filling member 16 may be formed by injecting epoxy resin and then curing the epoxy resin again.
[0143] The boundaries of the first-2 filling member 16 and the boundaries of the first groove 12-G may not necessarily match each other. Figure 6 , the surface of the first-2 filling member 16 in the direction opposite to the fifth direction DR5 and the surface of the first groove 12-G in the direction opposite to the fifth direction DR5 are shown to match each other, but one or more embodiments are not limited thereto. In one embodiment, the first-2 filling member 16 may protrude in the direction opposite to the fifth direction DR5 beyond the surface of the first groove 12-G in the direction opposite to the fifth direction DR5. The first-2 filling member 16 may also protrude in the fifth direction DR5 beyond the surface of the first groove 12-G in the fifth direction DR5.
[0144] The first-2 filling member 16 may further enhance the rigidity of the first reflector 11 by filling a portion of the first groove 12-G not filled with the first-1 filling member 15. For example, the first-2 filling member 16 may prevent movement and absorb vibration that may occur in the fifth direction DR5 when the first reflector 11 rotates.
[0145] Reference above Figure 6 The described features may be similarly applied to the second reflecting mirror 21 , the second fixing member 22 , the second groove 22 -G of the second fixing member 22 , the second-1 filling member 25 , and the second-2 filling member 26 .
[0146] Figure 7FIG. 4 is a front view of the first reflecting mirror 11 according to an embodiment.
[0147] Understandable, Figure 7 The front view of FIG. 1 shows the first reflector 11 viewed from the third direction DR3 .
[0148] refer to Figure 7 When viewed from the third direction DR3, the first reflector 11 may have a substantially octagonal shape and may include first to eighth surfaces 11-1, 11-2, 11-3, 11-4, 11-5, 11-6, 11-7, and 11-8. In this case, one of the plurality of surfaces of the first reflector 11 may be different from another of the plurality of surfaces. In some embodiments, the first reflector 11 may include a chamfered edge or a curved edge.
[0149] The first reflector 11 may have a three-dimensional shape, and the surface in the three-dimensional view corresponds to the edge in the front view. Figure 7 , each surface of the first reflector 11 is shown as a straight line, that is, an edge. However, for ease of description, these surfaces are referred to as first to eighth surfaces 11-1, 11-2, 11-3, 11-4, 11-5, 11-6, 11-7, and 11-8, and will be described in detail.
[0150] The first surface 11-1 and the fifth surface 11-5 of the first reflector 11 may extend in the fifth direction DR5. The first surface 11-1 may be located in the first direction DR1 compared to the fifth surface 11-5. The length of the first surface 11-1 in the fifth direction DR5 may be greater than the length of the fifth surface 11-5 in the fifth direction DR5.
[0151] The fifth surface 11-5 can be connected to the first fixing member 12 (see Figure 1 )touch.
[0152] The third surface 11-3 and the seventh surface 11-7 of the first reflector 11 may extend in the first direction DR1. The seventh surface 11-7 may be located in the fifth direction DR5 compared to the third surface 11-3. The length of the third surface 11-3 in the first direction DR1 and the length of the seventh surface 11-7 in the first direction DR1 may be equal to each other.
[0153] The lengths of the third surface 11-3 and the seventh surface 11-7 in the first direction DR1 may be shorter than the lengths of the first surface 11-1 and the fifth surface 11-5 in the fifth direction DR5. For example, the lengths may decrease in the order of the first surface 11-1, the fifth surface 11-5, and the third surface 11-3 (or the seventh surface 11-7).
[0154] The second surface 11-2 of the first reflector 11 may extend to connect the first surface 11-1 and the third surface 11-3. The length of the second surface 11-2 in the fifth direction DR5 may be defined as a second-1 length 11-2a. The length of the second surface 11-2 in the first direction DR1 may be defined as a second-2 length 11-2b. The second-1 length 11-2a may be greater than the second-2 length 11-2b. Accordingly, a second angle 11-2θ formed by the second surface 11-2 and a direction opposite to the fifth direction DR5 may be less than 45°.
[0155] The fourth surface 11-4 of the first reflector 11 may extend to connect the third surface 11-3 and the fifth surface 11-5. The length of the fourth surface 11-4 in the fifth direction DR5 may be defined as a fourth-1 length 11-4a. The length of the fourth surface 11-4 in the first direction DR1 may be defined as a fourth-2 length 11-4b. The fourth-1 length 11-4a may be greater than or equal to the fourth-2 length 11-4b. Accordingly, a fourth angle 11-4θ formed by the fourth surface 11-4 and a direction opposite to the fifth direction DR5 may be less than or equal to 45°.
[0156] The sixth surface 11-6 of the first reflector 11 may extend to connect the fifth surface 11-5 and the seventh surface 11-7. The length of the sixth surface 11-6 in the fifth direction DR5 may be defined as a sixth-1 length 11-6a. The length of the sixth surface 11-6 in the first direction DR1 may be defined as a sixth-2 length 11-6b. The sixth-1 length 11-6a may be greater than or equal to the sixth-2 length 11-6b. Accordingly, a sixth angle 11-6θ formed by the sixth surface 11-6 and the fifth direction DR5 may be less than or equal to 45°.
[0157] The eighth surface 11-8 of the first reflector 11 may extend to connect the seventh surface 11-7 and the first surface 11-1. The length of the eighth surface 11-8 in the fifth direction DR5 may be defined as an eighth-1 length 11-8a. The length of the eighth surface 11-8 in the first direction DR1 may be defined as an eighth-2 length 11-8b. The eighth-1 length 11-8a may be greater than the eighth-2 length 11-8b. Accordingly, an eighth angle 11-8θ formed by the eighth surface 11-8 and the fifth direction DR5 may be less than 45°.
[0158] The second-1 length 11-2a may be equal to the eighth-1 length 11-8a. The second-2 length 11-2b may be equal to the eighth-2 length 11-8b. The second angle 11-2θ may be equal to the eighth angle 11-8θ.
[0159] The fourth-1 length 11-4a may be equal to the sixth-1 length 11-6a. The fourth-2 length 11-4b may be equal to the sixth-2 length 11-6b. The fourth angle 11-4θ may be equal to the sixth angle 11-6θ.
[0160] The second-1 length 11-2a and the eighth-1 length 11-8a may be smaller than the fourth-1 length 11-4a and the sixth-1 length 11-6a. For example, the length may decrease in the order of the fourth-1 length 11-4a (or the sixth-1 length 11-6a), the first surface 11-1, the second-1 length 11-2a (or the eighth-1 length 11-8a), and the fifth surface 11-5.
[0161] The second-2 length 11-2b and the eighth-2 length 11-8b may be smaller than the fourth-2 length 11-4b and the sixth-2 length 11-6b. For example, the length may decrease in the order of the fourth-2 length 11-4b (or the sixth-2 length 11-6b), the third surface 11-3 (or the seventh surface 11-7), and the second-2 length 11-2b (or the eighth-2 length 11-8b).
[0162] The second angle 11-2θ and the eighth angle 11-8θ may be smaller than the fourth angle 11-4θ and the sixth angle 11-6θ.
[0163] The separation distance between the first surface 11-1 and the fifth surface 11-5 may be defined as the height H1 of the first reflector 11. The separation distance between the third surface 11-3 and the seventh surface 11-7 may be defined as the width W1 of the first reflector 11. The width W1 of the first reflector 11 may be greater than the height H1 of the first reflector 11.
[0164] The first rotation axis AX1 may vertically pass through the center of the first surface 11 - 1. In other words, the first rotation axis AX1 may vertically bisect the first surface 11 - 1.
[0165] The first rotation axis AX1 may vertically pass through the center of the fifth surface 11 - 5. In other words, the first rotation axis AX1 may vertically bisect the fifth surface 11 - 5.
[0166] The third surface 11-3 and the seventh surface 11-7 may be spaced apart from the first rotation axis AX1 by the same distance. In other words, the width W1 of the first reflector 11 may be bisected by the first rotation axis AX1.
[0167] The first reflector 11 may be symmetrical with respect to a plane passing through the first rotation axis AX1 and parallel to the third direction DR3. Furthermore, the first reflector 11 may be symmetrical with respect to a plane passing through the first rotation axis AX1 and parallel to the fifth direction DR5. Accordingly, the center of gravity COM1 of the first reflector 11 may be on the first rotation axis AX1.
[0168] The shape of the first reflecting mirror 11 described above can reduce shock or vibration applied to the first reflecting mirror 11 when the first reflecting mirror 11 rotates with respect to the first rotation axis AX1 .
[0169] Figures 8 to 10 is a front view of the second reflecting mirror 21 according to various embodiments.
[0170] Understandable, Figures 8 to 10 The front view of FIG. 2 shows the second reflector 21 viewed from the fourth direction DR4.
[0171] The second reflector 21 may have a three-dimensional shape, and the surface in the three-dimensional view corresponds to the edge in the front view. Figures 8 to 10 , each surface of the second reflecting mirror 21 is shown as a line, ie, an edge. However, for ease of description, these surfaces are referred to as first to eighth surfaces 21-1, 21-2, 21-3, 21-4, 21-5, 21-6, 21-7, and 21-8, and will be described in detail.
[0172] Figure 8 FIG. 2 is a front view of the second reflecting mirror 21 according to an embodiment.
[0173] refer to Figure 8 , the second reflector 21 may have a substantially octagonal shape and may include first to eighth surfaces 21-1, 21-2, 21-3, 21-4, 21-5, 21-6, 21-7, and 21-8. In this case, one of the plurality of surfaces of the second reflector 21 may be different from another of the plurality of surfaces.
[0174] The first surface 21-1 and the fifth surface 21-5 of the second reflector 21 may extend in the sixth direction DR6. The first surface 21-1 may be located in the second direction DR2 compared to the fifth surface 21-5. The length of the first surface 21-1 in the sixth direction DR6 may be greater than the length of the fifth surface 21-5 in the sixth direction DR6.
[0175] The fifth surface 21-5 can be connected to the second fixing member 22 (see Figure 1 )touch.
[0176] The third surface 21-3 and the seventh surface 21-7 of the second reflector 21 may extend in the second direction DR2. Compared with the third surface 21-3, the seventh surface 21-7 may be located in the sixth direction DR6. The length of the third surface 21-3 in the second direction DR2 may be greater than the length of the seventh surface 21-7 in the second direction DR2.
[0177] The length of each of the third surface 21-3 and the seventh surface 21-7 in the second direction DR2 may be greater than the length of each of the first surface 21-1 and the fifth surface 21-5 in the sixth direction DR6. For example, the length may decrease in the order of the third surface 21-3, the seventh surface 21-7, the first surface 21-1, and the fifth surface 21-5.
[0178] The second surface 21-2 of the second reflector 21 may extend to connect the first surface 21-1 and the third surface 21-3. The length of the second surface 21-2 in the sixth direction DR6 may be defined as a second-1 length 21-2a. The length of the second surface 21-2 in the second direction DR2 may be defined as a second-2 length 21-2b. The second-1 length 21-2a may be smaller than the second-2 length 21-2b. Accordingly, a second angle 21-2θ formed by the second surface 21-2 and a direction opposite to the sixth direction DR6 may be greater than 45°.
[0179] The fourth surface 21-4 of the second reflector 21 may extend to connect the third surface 21-3 and the fifth surface 21-5. The length of the fourth surface 21-4 in the sixth direction DR6 may be defined as a fourth-1 length 21-4a. The length of the fourth surface 21-4 in the second direction DR2 may be defined as a fourth-2 length 21-4b. The fourth-1 length 21-4a may be smaller than the fourth-2 length 21-4b. Accordingly, a fourth angle 21-4θ formed by the fourth surface 21-4 and a direction opposite to the sixth direction DR6 may be greater than 45°.
[0180] The sixth surface 21-6 of the second reflector 21 may extend to connect the fifth surface 21-5 and the seventh surface 21-7. The length of the sixth surface 21-6 in the sixth direction DR6 may be defined as a sixth-1 length 21-6a. The length of the sixth surface 21-6 in the second direction DR2 may be defined as a sixth-2 length 21-6b. The sixth-1 length 21-6a may be smaller than the sixth-2 length 21-6b. Accordingly, a sixth angle 21-6θ formed by the sixth surface 21-6 and the sixth direction DR6 may be greater than 45°.
[0181] The eighth surface 21-8 of the second reflector 21 may extend to connect the seventh surface 21-7 and the first surface 21-1. The length of the eighth surface 21-8 in the sixth direction DR6 may be defined as an eighth-1 length 21-8a. The length of the eighth surface 21-8 in the second direction DR2 may be defined as an eighth-2 length 21-8b. The eighth-1 length 21-8a may be smaller than the eighth-2 length 21-8b. Accordingly, an eighth angle 21-8θ formed by the eighth surface 21-8 and the sixth direction DR6 may be greater than 45°.
[0182] The separation distance between the first surface 21-1 and the fifth surface 21-5 may be defined as the height H2 of the second reflector 21. The separation distance between the third surface 21-3 and the seventh surface 21-7 may be defined as the width W2 of the second reflector 21. The width W2 of the second reflector 21 may be smaller than the height H2 of the second reflector 21.
[0183] The third surface 21-3 and the seventh surface 21-7 may be spaced apart from the second rotation axis AX2 by the same distance. In other words, the width W2 of the second reflective mirror 21 may be bisected by the second rotation axis AX2.
[0184] The second reflector 21 may be asymmetric with respect to a plane passing through the second rotation axis AX2 and parallel to the fourth direction DR4. That is, the second reflector 21 may be bilaterally asymmetric with respect to the second rotation axis AX2. The second reflector 21 may be symmetric with respect to a plane passing through the second rotation axis AX2 and parallel to the sixth direction DR6. Accordingly, the center of gravity COM2 of the second reflector 21 may be spaced apart from the second rotation axis AX2.
[0185] The shape of the second reflecting mirror 21 described above can reduce shock or vibration applied to the second reflecting mirror 21 when the second reflecting mirror 21 rotates with respect to the second rotation axis AX2 .
[0186] Figure 9 FIG. 2 is a front view of the second reflecting mirror 21 according to an embodiment.
[0187] refer to Figure 9 The first surface 21-1 and the fifth surface 21-5 of the second reflector 21 may extend in the sixth direction DR6. The first surface 21-1 may be located in the second direction DR2 compared to the fifth surface 21-5. The length of the first surface 21-1 in the sixth direction DR6 may be smaller than the length of the fifth surface 21-5 in the sixth direction DR6.
[0188] The fifth surface 21-5 can be connected to the second fixing member 22 (see Figure 1 )touch.
[0189] The third surface 21-3 and the seventh surface 21-7 of the second reflector 21 may extend in the second direction DR2. Compared with the third surface 21-3, the seventh surface 21-7 may be located in the sixth direction DR6. The length of the third surface 21-3 in the second direction DR2 may be equal to the length of the seventh surface 21-7 in the second direction DR2.
[0190] The lengths of the third surface 21-3 and the seventh surface 21-7 in the second direction DR2 may be greater than the lengths of the first surface 21-1 and the fifth surface 21-5 in the sixth direction DR6. For example, the lengths may decrease in the order of the third surface 21-3 (or the seventh surface 21-7), the fifth surface 21-5, and the first surface 21-1.
[0191] The second surface 21-2 of the second reflector 21 may extend to connect the first surface 21-1 and the third surface 21-3. The length of the second surface 21-2 in the sixth direction DR6 may be defined as a second-1 length 21-2a. The length of the second surface 21-2 in the second direction DR2 may be defined as a second-2 length 21-2b. The second-1 length 21-2a may be smaller than the second-2 length 21-2b. Accordingly, a second angle 21-2θ formed by the second surface 21-2 and a direction opposite to the sixth direction DR6 may be greater than 45°.
[0192] The fourth surface 21-4 of the second reflector 21 may extend to connect the third surface 21-3 and the fifth surface 21-5. The length of the fourth surface 21-4 in the sixth direction DR6 may be defined as a fourth-1 length 21-4a. The length of the fourth surface 21-4 in the second direction DR2 may be defined as a fourth-2 length 21-4b. The fourth-1 length 21-4a may be smaller than the fourth-2 length 21-4b. Accordingly, a fourth angle 21-4θ formed by the fourth surface 21-4 and a direction opposite to the sixth direction DR6 may be greater than 45°.
[0193] The sixth surface 21-6 of the second reflector 21 may extend to connect the fifth surface 21-5 and the seventh surface 21-7. The length of the sixth surface 21-6 in the sixth direction DR6 may be defined as a sixth-1 length 21-6a. The length of the sixth surface 21-6 in the second direction DR2 may be defined as a sixth-2 length 21-6b. The sixth-1 length 21-6a may be smaller than the sixth-2 length 21-6b. Accordingly, a sixth angle 21-6θ formed by the sixth surface 21-6 and the sixth direction DR6 may be greater than 45°.
[0194] The eighth surface 21-8 of the second reflector 21 may extend to connect the seventh surface 21-7 and the first surface 21-1. The length of the eighth surface 21-8 in the sixth direction DR6 may be defined as an eighth-1 length 21-8a. The length of the eighth surface 21-8 in the second direction DR2 may be defined as an eighth-2 length 21-8b. The eighth-1 length 21-8a may be smaller than the eighth-2 length 21-8b. Accordingly, an eighth angle 21-8θ formed by the eighth surface 21-8 and the sixth direction DR6 may be greater than 45°.
[0195] The second-1 length 21-2a may be equal to the eighth-1 length 21-8a. The second-2 length 21-2b may be equal to the eighth-2 length 21-8b. The second angle 21-2θ may be equal to the eighth angle 21-8θ.
[0196] The fourth-1 length 21-4a may be equal to the sixth-1 length 21-6a. The fourth-2 length 21-4b may be equal to the sixth-2 length 21-6b. The fourth angle 21-4θ may be equal to the sixth angle 21-6θ.
[0197] The second-1 length 21-2a and the eighth-1 length 21-8a may be greater than the fourth-1 length 21-4a and the sixth-1 length 21-6a. For example, the length may decrease in the order of the second-1 length 21-2a (or the eighth-1 length 21-8a), the fourth-1 length 21-4a (or the sixth-1 length 21-6a), the fifth surface 21-5, and the first surface 21-1.
[0198] The second-2 length 21-2b and the eighth-2 length 21-8b may be smaller than the fourth-2 length 21-4b and the sixth-2 length 21-6b. For example, the length may decrease in the order of the third surface 21-3 (or the seventh surface 21-7), the fourth-2 length 21-4b (or the sixth-2 length 21-6b), and the second-2 length 21-2b (or the eighth-2 length 21-8b).
[0199] The second angle 21-2θ and the eighth angle 21-8θ may be smaller than the fourth angle 21-4θ and the sixth angle 21-6θ.
[0200] The separation distance between the first surface 21-1 and the fifth surface 21-5 may be defined as the height H3 of the second reflector 21. The separation distance between the third surface 21-3 and the seventh surface 21-7 may be defined as the width W3 of the second reflector 21. The width W3 of the second reflector 21 may be smaller than the height H3 of the second reflector 21.
[0201] The second rotation axis AX2 may vertically pass through the center of the first surface 21 - 1. In other words, the second rotation axis AX2 may vertically bisect the first surface 21 - 1.
[0202] The second rotation axis AX2 may vertically pass through the center of the fifth surface 21 - 5. In other words, the second rotation axis AX2 may vertically bisect the fifth surface 21 - 5.
[0203] The third surface 21-3 and the seventh surface 21-7 may be spaced apart from the second rotation axis AX2 by the same distance. A width W3 of the second reflective mirror 21 may be bisected by the second rotation axis AX2.
[0204] The second reflector 21 may be symmetrical with respect to a plane passing through the second rotation axis AX2 and parallel to the fourth direction DR4. Furthermore, the second reflector 21 may be symmetrical with respect to a plane passing through the second rotation axis AX2 and parallel to the sixth direction DR6. Accordingly, the center of gravity COM3 of the second reflector 21 may be on the second rotation axis AX2.
[0205] The shape of the second reflecting mirror 21 described above can reduce shock or vibration applied to the second reflecting mirror 21 when the second reflecting mirror 21 rotates with respect to the second rotation axis AX2 .
[0206] Figure 10 FIG. 2 is a front view of the second reflecting mirror 21 according to an embodiment.
[0207] refer to Figure 10 , the fifth surface 21-5 of the second reflector 21 may extend in the sixth direction DR6. The fifth surface 21-5 may be aligned with the second fixing member 22 (see Figure 1 )touch.
[0208] The third surface 21-3 and the seventh surface 21-7 of the second reflector 21 may extend in the second direction DR2. Compared with the third surface 21-3, the seventh surface 21-7 may be located in the sixth direction DR6. The length of the third surface 21-3 in the second direction DR2 may be equal to the length of the seventh surface 21-7 in the second direction DR2.
[0209] The lengths of the third surface 21 - 3 and the seventh surface 21 - 7 in the second direction DR2 may be smaller than the length of the fifth surface 21 - 5 in the sixth direction DR6 .
[0210] The first surface 21-1 of the second reflector 21 may extend to connect the third surface 21-3 and the seventh surface 21-7. The first surface 21-1 may include a curved surface. For example, when viewed from the fourth direction DR4, the first surface 21-1 may have an arched shape that is symmetrical (e.g., bilaterally symmetrical) with respect to the second rotation axis AX2.
[0211] Both ends of each of the third surface 21 - 3 and the seventh surface 21 - 7 may be arc-shaped.
[0212] For example, the third surface 21-3 may include edges 21-3E at both ends thereof. The edge 21-3E where the third surface 21-3 intersects the first surface 21-1 may be arc-shaped. The edge 21-3E where the third surface 21-3 intersects the fourth surface 21-4 may be arc-shaped.
[0213] The seventh surface 21-7 may include edges 21-7E at both ends thereof. The edge 21-7E where the seventh surface 21-7 intersects with the first surface 21-1 may be arc-shaped. The edge 21-7E where the seventh surface 21-7 intersects with the sixth surface 21-6 may be arc-shaped.
[0214] The fourth surface 21-4 of the second reflector 21 may extend to connect the third surface 21-3 and the fifth surface 21-5. The length of the fourth surface 21-4 in the sixth direction DR6 may be defined as a fourth-1 length 21-4a. The length of the fourth surface 21-4 in the second direction DR2 may be defined as a fourth-2 length 21-4b. The fourth-1 length 21-4a may be smaller than the fourth-2 length 21-4b. Accordingly, a fourth angle 21-4θ formed by the fourth surface 21-4 and a direction opposite to the sixth direction DR6 may be greater than 45°.
[0215] The sixth surface 21-6 of the second reflector 21 may extend to connect the fifth surface 21-5 and the seventh surface 21-7. The length of the sixth surface 21-6 in the sixth direction DR6 may be defined as a sixth-1 length 21-6a. The length of the sixth surface 21-6 in the second direction DR2 may be defined as a sixth-2 length 21-6b. The sixth-1 length 21-6a may be smaller than the sixth-2 length 21-6b. Accordingly, a sixth angle 21-6θ formed by the sixth surface 21-6 and the sixth direction DR6 may be greater than 45°.
[0216] The fourth-1 length 21-4a may be equal to the sixth-1 length 21-6a. The fourth-2 length 21-4b may be equal to the sixth-2 length 21-6b. The fourth angle 21-4θ may be equal to the sixth angle 21-6θ.
[0217] A vertical distance between the fifth surface 21-5 and a point of the first surface 21-1 farthest from the fifth surface 21-5 may be defined as a height H4 of the second reflector 21. A separation distance between the third surface 21-3 and the seventh surface 21-7 may be defined as a width W4 of the second reflector 21. The width W4 of the second reflector 21 may be smaller than the height H4 of the second reflector 21.
[0218] The second rotation axis AX2 may vertically pass through the center of the fifth surface 21 - 5. In other words, the second rotation axis AX2 may vertically bisect the fifth surface 21 - 5.
[0219] The third surface 21-3 and the seventh surface 21-7 may be spaced apart from the second rotation axis AX2 by the same distance.A width W4 of the second reflective mirror 21 may be bisected by the second rotation axis AX2.
[0220] The second reflector 21 may be symmetrical with respect to a plane passing through the second rotation axis AX2 and parallel to the fourth direction DR4. Furthermore, the second reflector 21 may be symmetrical with respect to a plane passing through the second rotation axis AX2 and parallel to the sixth direction DR6. Accordingly, the center of gravity COM4 of the second reflector 21 may be on the second rotation axis AX2.
[0221] The shape of the second reflecting mirror 21 described above can reduce shock or vibration applied to the second reflecting mirror 21 when the second reflecting mirror 21 rotates with respect to the second rotation axis AX2 .
[0222] Figure 11A and Figure 11B is a cross-sectional view of a region of a cross section of a reflector according to various embodiments.
[0223] refer to Figure 11A , the second reflector 21 may include a chamfered edge.
[0224] The length of the second reflective mirror 21 in the fourth direction DR4 may be defined as a thickness T1 of the second reflective mirror 21 .
[0225] Each edge of the second reflector 21 may be chamfered at 45°, and a dimension ch of the chamfer in the sixth direction DR6 may be 12% or less of the thickness T1 of the second reflector 21. In one embodiment, a ratio of the dimension ch of the chamfer to the thickness T1 of the second reflector 21 may be 1:10.
[0226] refer to Figure 11B , the second reflector 21 may include an arc-shaped edge.
[0227] The length of the second reflective mirror 21 in the fourth direction DR4 may be defined as a thickness T2 of the second reflective mirror 21 .
[0228] The radius r of the arc of each edge of the second reflector 21 may be 12% or less of the thickness T2 of the second reflector 21. In one embodiment, the ratio of the radius r of the arc to the thickness T2 of the second reflector 21 may be 1:10.
[0229] Figure 11A or Figure 11B The chamfered or curved structure shown in FIG. 2 may prevent cracks from occurring in the second reflecting mirror 21 and enhance the rigidity of the second reflecting mirror 21 .
[0230] The aforementioned chamfered and arc-shaped structures can be similarly applied to the first reflecting mirror 11 except for the second reflecting mirror 21 (see FIG. Figure 1 ).
[0231] 12A to 12C is a perspective view illustrating a process state of a method for manufacturing a display device according to an embodiment.
[0232] 12A to 12C 1 is a perspective view illustrating a process of cutting a substrate 100 by using a laser cutting apparatus 1 according to an embodiment.
[0233] refer to Figure 12A , the laser cutting device 1 may include a controller 50 connected to each of the first reflector unit 10 and the second reflector unit 20 .
[0234] The angles of the first and second reflecting mirrors 11 and 21 may be adjusted by rotating the first and second reflecting mirror units 10 and 20 using the controller 50 .
[0235] The first light L1 incident toward the first reflecting mirror 11 may be reflected by the first reflecting mirror 11 to become the second light L2. The second light L2 may be incident on the second reflecting mirror 21 and reflected by the second reflecting mirror 21 to become the third light L3. The third light L3 may be incident on the lens portion 30 and refracted to become the fourth light L4 that is concentrated into one point (e.g., a focal point).
[0236] An object of the cutting process (eg, substrate 100) may be disposed below the laser cutting apparatus 1. For example, the substrate 100 may be disposed below the laser cutting apparatus 1 such that one end of the substrate 100 is adjacent to the focus of the fourth light L4.
[0237] refer to Figure 12B , a movable substrate 100.
[0238] A map showing a path for cutting the substrate 100 may be loaded in the controller 50. The substrate 100 may move along the path on the map.
[0239] As the substrate 100 moves, the fourth light L4 irradiated to a corresponding position may remove a portion of the substrate 100 , and accordingly, the substrate 100 may be cut.
[0240] refer to Figure 12C , the substrate 100 may be moved so that a portion of the substrate 100 is completely removed in one direction by the fourth light L4.
[0241] When a portion of the substrate 100 is completely removed in one direction, the substrate 100 may be divided into two portions, for example, a first substrate 100 - 1 and a second substrate 100 - 2 .
[0242] exist Figure 12B and Figure 12C, the laser cutting device 1 is shown as moving and cutting the substrate 100 when it is fixed, but one or more embodiments are not limited thereto. In one embodiment, when the position of the substrate 100 is fixed, the laser cutting device 1 can move and cut the substrate 100. In one embodiment, when the positions of the substrate 100 and the laser cutting device 1 are fixed, the first reflector 11 and the second reflector 21 can rotate to move the position of the focus of the fourth light L4, thereby cutting the substrate 100.
[0243] exist 12A to 12C In the description, the object of the cutting process has been described as the substrate 100, but one or more embodiments are not limited thereto. In one embodiment, the object of the cutting process may be a portion of the display panel where multiple layers are formed on the substrate 100.
[0244] 13A to 13F is a perspective view illustrating a process state of a method for manufacturing a display device according to an embodiment.
[0245] 13A to 13F 1 is a perspective view illustrating a process of forming an opening in a substrate 100 by using a laser cutting apparatus 1 according to an embodiment.
[0246] refer to Figure 13A , the focus of the fourth light L4 may be formed on the substrate 100. This is because an opening will be formed in the central portion of the substrate 100 in this process.
[0247] refer to 13B to 13F By moving the substrate 100 along the pre-input shape of the opening, a portion of the substrate 100 may be cut using the fourth light L4. However, one or more embodiments are not necessarily limited to 13B to 13F The opening shape or cutting sequence shown in .
[0248] exist 13B to 13F , the laser cutting device 1 is shown as moving and cutting the substrate 100 when it is fixed, but one or more embodiments are not limited thereto. In one embodiment, when the position of the substrate 100 is fixed, the laser cutting device 1 can move and cut the substrate 100. In one embodiment, when the positions of the substrate 100 and the laser cutting device 1 are fixed, the first reflector 11 and the second reflector 21 can rotate to move the position of the focus of the fourth light L4, thereby cutting the substrate 100.
[0249] refer to Figure 13F , the opening 100-OP can be formed by removing the portion of the substrate 100 remaining after cutting. The portion of the substrate 100 removed to form the opening 100-OP can be physically removed, or can be removed using the laser cutting device 1. In one embodiment, when performing 13B to 13EAfter the cutting process, the portion of the substrate 100 remaining in the opening 100-OP is completely removed by repeatedly irradiating the fourth light L4, thereby forming the opening 100-OP. In this case, the shape of the opening 100-OP is not limited to Figure 13F , and the opening 100 -OP may have a circular, elliptical, or polygonal shape, or an atypical shape with an irregular shape.
[0250] exist 13A to 13F In the description, the object of the cutting process has been described as the substrate 100, but one or more embodiments are not limited thereto. In one embodiment, the object of the cutting process may be a portion of the display panel where multiple layers are formed on the substrate 100.
[0251] Figure 14 is a schematic plan view of a display device 2 that can be manufactured by a method for manufacturing a display device according to an embodiment.
[0252] refer to Figure 14 The display device 2 may include a substrate 100, which includes a display area DA and a non-display area NDA. Subpixels including display elements such as light-emitting diodes are arranged in the display area DA to provide a specific image. The non-display area NDA is an area that does not provide an image and may surround the display area DA. A scan driver and a data driver that provide electrical signals to be applied to the subpixels in the display area DA, as well as power lines that provide power such as a driving voltage and a common voltage, may be arranged in the non-display area NDA.
[0253] exist Figure 14 In the embodiment, the length of the display device 2 in the ±x direction is smaller than the length of the display device 2 in the ±y direction, but one or more embodiments are not limited thereto. In one embodiment, the shape of the display device 2 can be modified in various ways. The length in the ±x direction can be greater than the length in the ±y direction.
[0254] The display device 2 can be applied to various products such as mobile phones, smartphones, tablet personal computers (PCs), mobile communication terminals, electronic organizers, e-books, portable multimedia players (PMPs), navigation devices, ultra-mobile personal computers (UMPCs), televisions, laptop computers, monitors, billboards, and Internet of Things (IoT) devices. Furthermore, the display device 2 according to one embodiment can be applied to wearable devices such as smart watches, watch phones, glasses-type displays, and head-mounted displays (HMDs). The display device 2 according to one embodiment can also be applied to a center information display (CID) arranged on an instrument panel of a car, a dashboard or center instrument panel of a car, a room mirror display that replaces a car's side mirrors, and a display screen arranged on the back of a front seat to serve as an entertainment device for rear-seat passengers.
[0255] Figure 15 is a schematic cross-sectional view of a region of a display device that can be manufactured by a method for manufacturing a display device according to an embodiment.
[0256] refer to Figure 15 The substrate 100 may include light emitting diodes (LEDs) corresponding to the sub-pixels arranged in the display area. The light emitting diodes (LEDs) may be electrically connected to the thin film transistors (TFTs).
[0257] The thin film transistor TFT may include an active layer A, a gate electrode G overlapping a region of the active layer A, and a source electrode S and a drain electrode D connected to the active layer A. The gate electrode G may include one or more metals selected from the group consisting of aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and copper (Cu), and may have a single-layer or multi-layer structure including the foregoing materials.
[0258] A buffer layer 101 that prevents impurities from penetrating may be between the active layer A and the substrate 100. A gate insulating layer 103 may be between the active layer A and the gate electrode G. An interlayer insulating layer 105 may be provided on the gate electrode G. Each of the buffer layer 101, the gate insulating layer 103, and the interlayer insulating layer 105 may include an inorganic insulating material such as silicon oxide (SiO x ), silicon nitride (SiN x ), silicon oxynitride (SiO x N y ), aluminum oxide (AlO x ), aluminum nitride (AlN x ), titanium oxide (TiO x ) or titanium nitride (TiN x ).
[0259] The source electrode S and the drain electrode D may be disposed on the interlayer insulating layer 105 and may be connected to the active layer A through contact holes formed in the interlayer insulating layer 105 and the gate insulating layer 103. The source electrode S and the drain electrode D may include one or more materials of Al, Pt, Pd, Ag, Mg, Au, Ni, Nd, Ir, Cr, Li, Ca, Mo, Ti, W, and Cu, and may include a single layer or a multilayer.
[0260] The first organic insulating layer 107 may be disposed on the thin film transistor TFT. The first organic insulating layer 107 may include an organic insulating material such as acrylic resin, benzocyclobutene (BCB), polyimide (PI), or hexamethyldisiloxane (HMDSO).
[0261] A contact metal CM may be provided on the first organic insulating layer 107. The contact metal CM may include Al, Cu, and / or Ti, and may include a single layer or multiple layers including the aforementioned materials. The contact metal CM may be electrically connected to the drain electrode D through a contact hole formed in the first organic insulating layer 107. In some embodiments, the contact hole formed in the first organic insulating layer 107 may be formed using a laser cutting apparatus according to one embodiment.
[0262] The second organic insulating layer 109 may be between the contact metal CM and the sub-pixel electrode 210. The second organic insulating layer 109 may include an organic insulating material such as acrylic resin, BCB, PI, or HMDSO. Figure 15 The described embodiment shows that the thin film transistor TFT and the sub-pixel electrode 210 are electrically connected to each other via the contact metal CM. However, in one embodiment, the contact metal CM may be omitted, and one organic insulating layer may be provided between the thin film transistor TFT and the sub-pixel electrode 210. Alternatively, three or more organic insulating layers may be provided between the thin film transistor TFT and the sub-pixel electrode 210, and the thin film transistor TFT and the sub-pixel electrode 210 may be electrically connected to each other via a plurality of contact metals.
[0263] The sub-pixel electrode 210 may be disposed on the second organic insulating layer 109. The sub-pixel electrode 210 may be formed as a transparent or translucent electrode, or may be formed as a reflective electrode. When the sub-pixel electrode 210 is formed as a transparent or translucent electrode, the sub-pixel electrode 210 may include, for example, indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3), indium gallium oxide (IGO), or aluminum zinc oxide (AlZO). When the sub-pixel electrode 210 is formed as a reflective electrode, a reflective layer containing Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, or any compound thereof may be formed, and a layer containing ITO, IZO, ZnO, or In2O3 may be formed on the reflective layer. In one embodiment, the sub-pixel electrode 210 may have a structure in which an ITO layer, an Ag layer, and an ITO layer are stacked in sequence. However, one or more embodiments are not limited thereto, and various modifications may be made. The sub-pixel electrode 210 may include various materials and may have a single-layer or multi-layer structure. The sub-pixel electrode 210 may be electrically connected to the contact metal CM via a contact hole formed in the second organic insulating layer 109. In some embodiments, the contact hole formed in the second organic insulating layer 109 may be formed using a laser cutting device according to one embodiment.
[0264] The sub-pixel defining layer 111 may cover the edge region (or edge) of the sub-pixel electrode 210. The sub-pixel defining layer 111 may include an opening 111OP that exposes a portion of the sub-pixel electrode 210. The opening 111OP of the sub-pixel defining layer 111 may correspond to an area from which light from the light-emitting diode (LED) is emitted, and may define an emission region of the light-emitting diode (LED) or a sub-pixel. In some embodiments, the opening 111OP of the sub-pixel defining layer 111 may be formed using a laser cutting device according to one embodiment.
[0265] The intermediate layer 220 may be disposed on the sub-pixel electrode 210. The intermediate layer 220 may include an emission layer (EML) containing a low molecular weight material or a polymer material. The intermediate layer 220 may have a structure in which a hole injection layer (HIL), a hole transport layer (HTL), an EML, an electron transport layer (ETL), and / or an electron injection layer (EIL) are stacked in a single or composite structure.
[0266] The counter electrode 230 may be provided on the intermediate layer 220. The counter electrode 230 may be formed as a transparent or translucent electrode. When the counter electrode 230 is formed as a transparent or translucent electrode, the counter electrode 230 may include one or more materials selected from Ag, Al, Mg, Li, Ca, Cu, lithium fluoride (LiF) / Ca, LiF / Al, MgAg, and CaAg, and may be formed into a thin film having a thickness of several to several tens of nm. The composition and material of the counter electrode 230 are not limited thereto and may be variously modified.
[0267] The encapsulation layer 300 may be provided on the counter electrode 230. The encapsulation layer 300 may include at least one inorganic encapsulation layer and at least one organic encapsulation layer. For example, the encapsulation layer 300 may include a first inorganic encapsulation layer 310, a second inorganic encapsulation layer 330, and an organic encapsulation layer 320 therebetween. The first inorganic encapsulation layer 310 and the second inorganic encapsulation layer 330 may each include an inorganic insulating material such as SiO x 、SiN x or SiO x N y , and the organic encapsulation layer 320 may include at least one organic insulating material selected from polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polycarbonate (PC), PI, polyethylene sulfonate (PES), polyoxymethylene (POM), polyarylate (PAR), and HMDSO.
[0268] As described above, the present disclosure has been described with reference to one or more embodiments shown in the accompanying drawings, but this disclosure should be considered in a descriptive sense only. Those skilled in the art will understand that various modifications and equivalent embodiments can be made therefrom. Therefore, the true technical protection scope of the present disclosure should be defined by the technical spirit of the appended claims.
[0269] According to one or more embodiments described above, a laser cutting device including a reflector having enhanced rigidity can be realized. In addition, according to one or more embodiments, surface damage caused by incident laser light can be reduced by coating the surface of the reflector.
[0270] It should be understood that the embodiments described herein should be considered in a descriptive sense only and not for purposes of limitation. The description of features or aspects in each embodiment should generally be considered to be applicable to other similar features or aspects in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope defined by the appended claims.
Claims
1. A laser cutting device, characterized in that: The laser cutting device comprises: a first fixing member rotatable about a first rotation axis extending in a first direction; a first reflecting mirror fixed to the first fixing member, a portion of the first reflecting mirror being held by the first fixing member, the first reflecting mirror being rotatable together with the first fixing member relative to the first rotation axis, and being configured to reflect laser light; and A first-1 filling member is provided between the first fixing member and the portion of the first reflecting mirror held by the first fixing member.
2. The laser cutting device according to claim 1, characterized in that: The laser cutting device further comprises: a second fixing member rotatable about a second rotation axis extending in a second direction perpendicular to the first direction; a second reflecting mirror fixed to the second fixing member, a portion of the second reflecting mirror being held by the second fixing member, the second reflecting mirror being rotatable together with the second fixing member relative to the second rotation axis, and being configured to reflect the laser light; and The second-1 filling member is between the second fixing member and the portion of the second reflecting mirror held by the second fixing member.
3. The laser cutting device according to claim 1, characterized in that: The laser cutting apparatus further includes a first-2 filling member covering a surface of the first reflecting mirror, the surface sharing an edge with another surface of the first reflecting mirror clamped by the first fixing member.
4. The laser cutting device according to claim 2, characterized in that: The laser cutting apparatus further includes a second-2 filling member covering a surface of the second reflecting mirror, the surface sharing an edge with another surface of the second reflecting mirror clamped by the second fixing member.
5. The laser cutting device according to claim 1, characterized in that: The first reflector includes a chamfered edge or a curved edge.
6. The laser cutting device according to claim 2, characterized in that: The second reflector is bilaterally asymmetric with respect to the second rotation axis.
7. The laser cutting device according to claim 2, characterized in that: A center of gravity of the second reflector is spaced apart from the second rotation axis.
8. The laser cutting device according to claim 2, characterized in that: A front shape of the second reflector includes an arch shape that is bilaterally symmetrical with respect to the second rotation axis and includes an arc-shaped edge.
9. The laser cutting device according to claim 2, characterized in that: The second reflector includes a chamfered edge or a curved edge.
10. The laser cutting device according to claim 2, characterized in that: Each of the first reflecting mirror and the second reflecting mirror includes a surface coated with an inorganic material.
Citation Information
Patent Citations
Vehicle lidar system and object classification method thereof
KR1020230116401A