Electronic shelf for wafer conveying box

Abstract

The utility model discloses a wafer transfer box electronic goods shelf, including the shelf board, stand column, infrared sensor, antenna induction area, RFID card reader and LED display screen, the shelf board is provided with a plurality of layers and is distributed at interval from top to bottom, the four corners of the shelf board are supported and fixed through stand column, the upper surface of the shelf board is concavely provided with the long-strip-shaped storage groove, and the shelf board is provided with the infrared sensor, the antenna induction area, the RFID card reader and the LED display screen. A storage cavity is formed in the storage groove through a plurality of partition plates distributed at equal intervals, an infrared sensor and an antenna sensing area are arranged at the bottom of any storage cavity, and a transversely-distributed mounting plate is further fixedly arranged on the portion, above the back of any layer plate, of the stand column. The mounting plate is correspondingly provided with an RFID card reader at any storage cavity, and the front side of any shelf board is correspondingly provided with an LED display screen at the storage cavity. According to the utility model, the warehousing efficiency in a plant and the production logistics efficiency are effectively improved, unmanned and intelligent management is realized, and seamless circulation of operation data between a production line and a warehousing line is realized.

Description

Technical Field

[0001] The utility model relates to an electronic shelf for a wafer conveying box. Background Art

[0002] A wafer pod is a container used in semiconductor manufacturing to protect, transport, and store 4-, 6-, 8-, and 12-inch wafers. It is an important carrier container for the automated conveying system within a wafer fab.

[0003] At present, wafer transfer boxes are usually placed by workers and then recorded, which requires a lot of manual intervention. In the later stage, it is impossible to ensure the rapid and accurate search of wafer transfer boxes. The space utilization rate of semiconductor fabs is low and there is a lack of planning, which affects the overall work efficiency. Utility Model Content

[0004] The main technical problem solved by the utility model is to provide an electronic shelf for wafer transfer boxes, which effectively improves the storage efficiency and production logistics efficiency within the factory, realizes unmanned and intelligent management, and seamlessly transfers operational data between the production line and the storage line.

[0005] In order to solve the above technical problems, a technical solution adopted by the present invention is: to provide an electronic shelf for a wafer conveyor box, including shelves, columns, infrared sensors, antenna sensing areas, RFID card readers and LED display screens. The shelves are provided with multiple layers and are spaced apart from top to bottom. The four corners of the shelves are supported and fixed by columns. The upper surface of the shelves is concavely provided with a long strip of storage grooves. A storage cavity is formed in the storage groove by a plurality of equally spaced partitions. An infrared sensor and an antenna sensing area are respectively provided at the bottom of any of the storage cavities. A laterally distributed mounting plate is also fixed on the column above the back of any of the shelves. An RFID card reader is respectively provided on the mounting plate at any storage cavity, and an LED display is respectively provided on the front side of any of the shelves at the storage cavity.

[0006] In a preferred embodiment of the present invention, a foot is provided at the bottom of any of the columns.

[0007] In a preferred embodiment of the present invention, the pillar is provided with a bottom plate below the bottom layer, and electrostatic universal wheels are respectively provided around the bottom of the bottom plate.

[0008] In a preferred embodiment of the present invention, any of the layer plates is provided with array-distributed heat dissipation holes at the bottom of the storage cavity.

[0009] In a preferred embodiment of the present invention, a laterally distributed blocking bar is fixedly provided on the column above the side of any of the layer boards.

[0010] In a preferred embodiment of the present invention, the storage slots of the layer board are distributed obliquely downward from front to back.

[0011] In a preferred embodiment of the present invention, the RFID card reader is a low-frequency RFID TAG.

[0012] The beneficial effects of the present invention are as follows: the electronic shelf for wafer transfer boxes provided by the present invention effectively improves the storage efficiency and production logistics efficiency within the factory, realizes unmanned and intelligent management, and achieves seamless flow of operational data between the production line and the storage line. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work. Among them:

[0014] Figure 1 It is a three-dimensional diagram of a preferred embodiment of a wafer transfer box electronic shelf of the present invention. DETAILED DESCRIPTION

[0015] The following is a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0016] See also Figure 1 As shown, the embodiment of the utility model includes:

[0017] A wafer transfer box electronic shelf comprises a layer plate 1, a column 2, an infrared sensor, an antenna sensing area, an RFID card reader 3 and an LED display screen 4.

[0018] The layer plate 1 is provided with multiple layers and is spaced apart from top to bottom. The four corners of the layer plate 1 are supported and fixed by pillars 2 to ensure sufficient space for placing the wafer transfer box 11.

[0019] A foot 5 is provided at the bottom of any of the uprights 2 for supporting the entire shelf.

[0020] The pillars 2 are provided with a bottom plate 14 below the bottom layer 1. Electrostatic universal wheels 6 are provided around the bottom of the bottom plate 14 to facilitate the movement of the entire shelf. After moving into place, the shelf is supported and fixed by the feet 5.

[0021] The upper surface of the layer plate 1 is concavely provided with a long strip-shaped storage groove 7, and the storage groove 7 of the layer plate 1 is tilted downward from front to back. When the wafer transfer box 11 is placed in the storage groove 7, due to the inclined structure design, the wafer transfer box 11 can be uniformly moved to the rear end and placed flush, neat and beautiful.

[0022] The storage slot 7 is formed by a plurality of equally spaced partitions 8 to form a storage cavity 9 for independently placing each wafer pod 11. Each of the shelf plates 1 is provided with an array of heat dissipation holes 10 at the bottom of the storage cavity 9 to provide ventilation and heat dissipation for the currently placed wafer pod 11.

[0023] An infrared sensor (not shown in the accompanying drawings) and an antenna sensing area (not shown in the accompanying drawings) are respectively provided at the bottom of any of the storage cavities 9. A laterally distributed mounting plate 12 is also fixedly provided on the column 2 above the back of any of the shelf boards 1. The mounting plate 12 is respectively provided with an RFID card reader 3 at any of the storage cavities 9. The infrared sensor, the antenna sensing area and the RFID card reader 3 cooperate with each other for sensing and reading.

[0024] The RFID card reader 3 is a low-frequency RFID tag with low electromagnetic radiation, strong anti-interference and strong penetration. The low-frequency RFID tag has point-to-point reading characteristics, accurately distinguishes different storage locations, and rejects adjacent interference. The low-frequency RFID tag does not require power supply and has a lifespan of more than 10 years. It has a built-in hardware watchdog and intelligent fault diagnosis, and will never crash.

[0025] A laterally distributed blocking bar 13 is fixedly provided on the upright column 2 above the side of any of the layer plates 1 to prevent the wafer transfer box 11 from falling from the side, thereby improving the safety of use.

[0026] The front side of any of the layer plates 1 is provided with an LED display screen 4 corresponding to the storage cavity 9 , for displaying parameter information related to the wafer transfer box 11 at the current position.

[0027] In summary, the electronic shelf for wafer transfer boxes proposed in this invention effectively improves the warehousing efficiency and production logistics efficiency within the factory, realizes unmanned and intelligent management, and ensures seamless flow of operational data between the production line and the storage line.

[0028] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A wafer transfer box electronic shelf, characterized in that: It includes shelves, columns, infrared sensors, antenna sensing areas, RFID card readers and LED display screens. The shelves are provided with multiple layers and are spaced apart from top to bottom. The four corners of the shelves are supported and fixed by columns. The upper surface of the shelves is concavely provided with long strip storage slots. The storage slots are formed by multiple equally spaced partitions to form storage cavities. The bottom of any storage cavity is respectively provided with an infrared sensor and an antenna sensing area. A laterally distributed mounting plate is also fixed on the column above the back of any shelf. The mounting plate is respectively provided with an RFID card reader at any storage cavity, and an LED display is respectively provided at the front side of any shelf at the storage cavity.

2. The wafer transport box electronic shelf according to claim 1, characterized in that: The bottom of any one of the columns is provided with a foot.

3. The wafer transport box electronic shelf according to claim 1, characterized in that: The upright column is provided with a bottom plate below the layer plate of the bottom layer, and electrostatic universal wheels are respectively provided around the bottom of the bottom plate.

4. The wafer transport box electronic shelf according to claim 1, characterized in that: Any of the layer plates is provided with array-distributed heat dissipation holes at the bottom of the storage cavity.

5. The wafer transport box electronic shelf according to claim 1, characterized in that: A laterally distributed blocking bar is fixedly provided on the upright column above the side of any of the layer boards.

6. The wafer transport box electronic shelf according to claim 1, characterized in that: The storage slots of the layer plate are distributed obliquely downward from front to back.

7. The wafer transport box electronic shelf according to claim 1, characterized in that: The RFID card reader is a low-frequency RFID TAG.

Images