Accumulation method helium detection system

Abstract

The utility model provides an accumulation method helium detection system which comprises a conveying track, a sealing jig, an accumulation cavity, a helium filling machine, a helium detection mass spectrometer and a vacuum pump set, a feeding station, a testing station and a discharging station are sequentially arranged on the conveying track, and the accumulation cavity covers the testing station. The sealing jig comprises an upper tool arranged in the accumulation cavity in a lifting mode and a lower tool arranged on the conveying rail in a sliding mode, the upper tool and the lower tool are pressed to form a sealing cavity, and the lower tool is provided with a vacuumizing channel communicated with the sealing cavity and the vacuum pump set. When the vacuum pump set is started, the sealing cavity can be vacuumized through the vacuumizing channel, and in the press fit process of the upper tool and the lower tool, helium in the sealing cavity can be prevented from remaining and diffusing into the accumulation cavity, so that the helium filling and detection effect can be prevented from being affected; and before the upper tool and the lower tool are pressed, the workpiece placed on the lower tool can be tightly sucked through the vacuum pump set, the workpiece is prevented from moving, and therefore the subsequent pressing is prevented from being affected.

Description

Technical Field

[0001] The utility model relates to the technical field of detection equipment, in particular to a helium detection system using an accumulation method. Background Art

[0002] Accumulation-based helium inspection systems use helium as a tracer gas, filling the interior of the workpiece under test. The workpiece is placed in a sealed accumulation chamber. If the workpiece leaks, helium will escape through the leak and accumulate in the chamber. By detecting changes in the helium concentration within the chamber, the leak status of the workpiece can be inferred, thereby determining the airtightness of the workpiece under test. However, current accumulation-based helium inspection systems may leave helium in the test station after testing the airtightness of the previous workpiece. This can result in helium remaining in the sealed chamber of the subsequent workpiece after it is sealed, affecting the effectiveness of helium filling and inspection. Utility Model Content

[0003] In view of the shortcomings of the existing technology, the utility model proposes a helium detection system using an accumulation method, which can avoid affecting the effects of helium filling and detection.

[0004] The technical solution of the present utility model is achieved as follows:

[0005] A cumulative helium inspection system comprises a conveying track, a sealing fixture, an accumulation chamber, a helium filling machine, a helium inspection mass spectrometer and a vacuum pump group. A loading station, a testing station and an unloading station are sequentially arranged on the conveying track. The accumulation chamber covers the testing station. The helium filling machine, the helium inspection mass spectrometer and the vacuum pump group are respectively arranged on one side of the accumulation chamber. The sealing fixture comprises an upper tooling which is lifted and lowered in the accumulation chamber and a lower tooling which is slidably arranged on the conveying track. The upper tooling and the lower tooling are pressed together to form a sealed chamber for placing a workpiece. The lower tooling is provided with a vacuum pumping channel connecting the sealed chamber and the vacuum pump group.

[0006] Preferably, the upper tooling is provided with an inflation channel connecting the sealed cavity and the helium filling machine, the lower tooling is provided with a through hole, the lower end of the through hole is provided with a sealing valve, the lower tooling is provided with a leakage channel connecting the sealed cavity and the accumulation cavity, and the workpiece covers the upper end of the leakage channel.

[0007] Preferably, an air compressor for passing compressed air into the accumulation chamber is provided on one side of the accumulation chamber.

[0008] Preferably, a collecting hood is provided on the top of the accumulation chamber, a fan is provided inside the collecting hood, and the collecting hood is connected to the interior of the accumulation chamber and the helium collection device.

[0009] Preferably, the accumulation chamber includes a frame, a top plate, a bottom plate, side plates and a lifting curtain. The top plate is arranged at the top of the frame, the bottom plate is arranged at the bottom of the frame, side plates are provided on the front and back sides of the frame, and lifting curtains are provided on the side of the frame close to the loading station and the side close to the unloading station.

[0010] Preferably, a cylinder is provided on the top of the accumulation chamber, and the telescopic end of the cylinder passes through the top surface of the accumulation chamber and is connected to the upper tooling.

[0011] Preferably, a control panel is provided on one side of the accumulation chamber.

[0012] Preferably, an airtightness detection device for detecting the airtightness of the workpiece is provided above the lifting device of the loading station.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] (1) The lower fixture of the accumulation method helium detection system is provided with a vacuum channel connecting the sealed cavity and the vacuum pump group. When the vacuum pump group is started, the sealed cavity can be vacuumed through the vacuum channel. During the pressing process of the upper fixture and the lower fixture, the helium in the sealed cavity can be prevented from remaining and diffusing into the accumulation cavity, thereby avoiding affecting the helium filling and detection effects.

[0015] (2) By setting up a vacuum channel, before the upper and lower tooling are pressed together, the vacuum pump group can suck the workpiece placed on the lower tooling to prevent the workpiece from shifting, thereby avoiding affecting the subsequent pressing. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of the first embodiment of the present utility model;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the lower tooling in the first embodiment of the present utility model;

[0018] Figure 3 This is a three-dimensional cross-sectional view of the sealing fixture in Example 1 of the present utility model;

[0019] Figure 4 for Figure 3 Schematic diagram of the enlarged structure at A in the middle;

[0020] Figure 5 This is a schematic diagram of the three-dimensional structure of the second embodiment of the present utility model.

[0021] Figure ID:

[0022] 1- conveyor track; 11- loading station; 12- testing station; 13- unloading station; 2- sealing fixture; 21- upper tooling; 211- inflation channel; 22- lower tooling; 221- vacuum channel; 222- through hole; 223- sealing valve; 224- leakage channel; 23- sealing chamber; 3- accumulation chamber; 31- collection cover; 32- frame; 33- top plate; 34- bottom plate; 35- side plate; 36- lifting curtain; 37- cylinder; 4- helium filling machine; 5- helium detection mass spectrometer; 6- vacuum pump group; 7- air compressor; 8- control panel; 9- airtightness detection device. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the internal parts of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] Example 1

[0026] See also Figures 1 to 4, this embodiment provides a cumulative helium inspection system, including a conveying track 1, a sealing fixture 2, an accumulation chamber 3, a helium filling machine 4, a helium inspection mass spectrometer 5 and a vacuum pump group 6. The conveying track 1 is provided with a loading station 11, a testing station 12 and an unloading station 13 in sequence. The accumulation chamber 3 covers the testing station 12. The helium filling machine 4, the helium inspection mass spectrometer 5 and the vacuum pump group 6 are respectively arranged on one side of the accumulation chamber 3 and are used to detect the concentration of helium in the accumulation chamber 3. The sealing fixture 2 includes an upper tooling 21 that is lifted and lowered in the accumulation chamber 3 and a lower tooling 22 that is slidably arranged on the conveying track 1. The upper tooling 21 and the lower tooling 22 are pressed together to form a sealed chamber 23 for placing a workpiece. The lower tooling 22 is provided with a vacuum pumping channel 221 connecting the sealed chamber 23 and the vacuum pump group 6. Since the lower tooling 22 is provided with a vacuum pumping channel 221 connecting the sealing chamber 23 and the vacuum pump group 6, the vacuum pump group 6 can evacuate the sealing chamber 23 through the vacuum pumping channel 221 when it is started. During the pressing process of the upper tooling 21 and the lower tooling 22, the helium in the sealing chamber 23 can be prevented from remaining and diffusing into the accumulation chamber 3, thereby avoiding affecting the effect of helium filling and detection; moreover, by providing the vacuum pumping channel 221, before the upper tooling 21 and the lower tooling 22 are pressed together, the vacuum pump group 6 can suck the workpiece placed on the lower tooling 22 to prevent the workpiece from shifting, thereby avoiding affecting the subsequent pressing.

[0027] For details, see Figures 2 to 4 The upper tooling 21 is provided with an inflation channel 211 connecting the sealed chamber 23 and the helium filling machine 4. The helium filling machine 4 fills helium into the sealed chamber 23 through the inflation channel 211. A through hole 222 is penetrated by the lower tooling 22. A sealing valve 223 is provided at the lower end of the through hole 222. The sealing valve 223 can open or close the through hole 222, thereby realizing the connection or disconnection between the sealed chamber 23 and the accumulation chamber 3. A leakage channel 224 connecting the sealed chamber 23 and the accumulation chamber 3 is provided on the lower tooling 22. The workpiece covers the upper end of the leakage channel 224. When the workpiece is placed in the sealed chamber 23, the workpiece covers the leakage channel 224. After helium is flushed into the sealed chamber 23, the leaked helium passes through the workpiece and enters the accumulation chamber 3 from the leakage channel 224.

[0028] Preferably, see Figure 1 An air compressor 7 is installed on one side of the accumulation chamber 3. This compressor is used to pump compressed air into the accumulation chamber 3, thereby blowing out any residual helium within. Currently, in accumulation-based helium detection systems, a fan is typically used to blow away any residual helium, which takes a long time and affects work efficiency. By installing an air compressor 7, any residual helium can be quickly blown away, improving work efficiency.

[0029] Preferably, see Figure 1A collection hood 31 is provided at the top of the accumulation chamber 3. A fan (not shown) is housed within the collection hood 31. A connecting pipe connects the interior of the accumulation chamber 3 to the helium collection device, allowing the fan to exhaust the helium within the accumulation chamber 3. In this embodiment, the helium collection device is the gas collection chamber of the helium filling machine 4. The recovered helium can be reused for helium testing, reducing helium consumption and, therefore, testing costs.

[0030] Preferably, see Figure 1 The accumulation chamber 3 includes a frame 32, a top plate 33, a bottom plate 34, a side plate 35 and a lifting curtain 36. The top plate 33 is set at the top of the frame 32, the bottom plate 34 is set at the bottom of the frame 32, and the side plates 35 are set on the front and back sides of the frame 32. The side of the frame 32 close to the loading station 11 and the side close to the unloading station 13 are both provided with a lifting curtain 36. Before the lower tooling 22 enters the test station 12, the lifting curtain 36 on the side close to the loading station 11 is opened, and the lower tooling 22 enters the testing station 12, and the lifting curtain 36 near the unloading station 13 is kept closed; after the lower tooling 22 enters the accumulation chamber 3, the lifting curtain 36 near the loading station 11 is closed, and the lifting curtain 36 near the unloading station 13 is kept closed to seal the accumulation chamber 3; after the helium test is completed, the lifting curtain 36 near the unloading station 13 is opened, and the lower tooling 22 enters the unloading station 13, and the lifting curtain 36 near the loading station 11 is kept closed.

[0031] Preferably, see Figure 1 A cylinder 37 is provided at the top of the accumulation chamber 3. The telescopic end of the cylinder 37 passes through the top surface of the accumulation chamber 3 and is connected to the upper tooling 21. The cylinder 37 is used to drive the upper tooling 21 to rise and fall.

[0032] Preferably, see Figure 1 A control panel 8 is provided on one side of the accumulation chamber 3, and the control panel 8 is used to control the operation of the accumulation method helium detection system.

[0033] Working process: First, the operator places the workpiece on the lower fixture 22 of the loading station 11 and starts the vacuum pump group 6. The vacuum pump group 6 sucks the workpiece placed on the lower fixture 22 through the vacuum channel 221, and then transfers the lower fixture 22 with the workpiece to the testing station 12 through the conveying track 1; then, the lifting curtain 36 of the accumulation chamber 3 is closed to seal the accumulation chamber 3, and then the upper fixture 21 is driven by the cylinder 37 to press the upper fixture 2 and the lower fixture 22 together. During the pressing process of the upper fixture 2 and the lower fixture 22, the residual helium in the accumulation chamber 3 is blown out by the air compressor 7; then, the vacuum pump group 6 is turned off, and the sealing valve 223 is opened to seal the chamber. 23 is changed to normal pressure state; then, the sealing valve 223 is closed, and the helium filling machine 4 is started. The helium enters the sealing chamber 23 through the charging channel 211, so that the air pressure of the sealing chamber 23 reaches 2.5~2.0kPa, and the gas passes through the workpiece and enters the accumulation chamber 3 along the leakage channel 224. The helium detection mass spectrometer judges the airtightness of the workpiece according to the change of the helium concentration in the accumulation chamber 3, and outputs the helium detection result; then, the fan is turned on to discharge the helium in the accumulation chamber 3, and then the upper tooling 21 is driven to rise by the cylinder 37; finally, the lifting curtain 36 near the side of the unloading station 13 is opened, and the lower tooling 22 with the workpiece is transferred to the unloading station 13 for unloading.

[0034] Example 2

[0035] See also Figure 5 This embodiment provides a cumulative helium inspection system. Unlike the first embodiment, in this embodiment, an airtightness inspection device 9 for inspecting the airtightness of workpieces is installed above the loading station 11. While one workpiece is undergoing helium inspection at the test station 12, another workpiece is undergoing airtightness inspection at the loading station 11. This can preliminarily screen out products that fail to meet the airtightness standards, thereby improving work efficiency. Products that fail to meet the airtightness standards will be removed from the loading station 11 and will not enter the test station 12. This helps to discover airtightness problems in workpieces at the earliest stage, which is more efficient. Products that pass the inspection at the loading station 11 will enter the test station 12 for secondary inspection, thereby improving the accuracy of the inspection. The airtightness inspection device 9 can use existing airtightness inspection equipment.

[0036] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A helium detection system using an accumulation method, characterized in that: It includes a conveying track, a sealing fixture, an accumulation chamber, a helium filling machine, a helium inspection mass spectrometer and a vacuum pump group. The conveying track is sequentially provided with a loading station, a testing station and an unloading station. The accumulation chamber covers the testing station. The helium filling machine, the helium inspection mass spectrometer and the vacuum pump group are respectively arranged on one side of the accumulation chamber. The sealing fixture includes an upper tooling set in the accumulation chamber for lifting and lowering and a lower tooling set on the conveying track for sliding. The upper tooling and the lower tooling are pressed together to form a sealed cavity for placing a workpiece. The lower tooling is provided with a vacuum pumping channel connecting the sealed cavity and the vacuum pump group.

2. The accumulation method helium detection system according to claim 1, characterized in that: The upper tooling is provided with an inflation channel connecting the sealed cavity and the helium filling machine, the lower tooling is penetrated by a through hole, the lower end of the through hole is provided with a sealing valve, the lower tooling is provided with a leakage channel connecting the sealed cavity and the accumulation cavity, and the workpiece covers the upper port of the leakage channel.

3. The accumulation method helium detection system according to claim 1, characterized in that: An air compressor for passing compressed air into the accumulation chamber is provided on one side of the accumulation chamber.

4. The accumulation method helium detection system according to claim 1, characterized in that: A collecting cover is provided on the top of the accumulation chamber, a fan is provided in the collection cover, and the collection cover is connected to the interior of the accumulation chamber and the helium collection device.

5. The accumulation method helium detection system according to claim 1, characterized in that: The accumulation chamber includes a frame, a top plate, a bottom plate, side plates and a lifting curtain. The top plate is arranged on the top of the frame, the bottom plate is arranged on the bottom of the frame, the side plates are arranged on the front and back sides of the frame, and the lifting curtain is arranged on the side of the frame close to the loading station and the side close to the unloading station.

6. The accumulation method helium detection system according to claim 1, characterized in that: A cylinder is provided on the top of the accumulation chamber, and a telescopic end of the cylinder passes through the top surface of the accumulation chamber and is connected with the upper tooling.

7. The accumulation method helium detection system according to claim 1, characterized in that: A control panel is provided on one side of the accumulation chamber.

8. The accumulation method helium detection system according to claim 1, characterized in that: An airtightness detection device for detecting the airtightness of the workpiece is provided above the lifting portion of the loading station.

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