PECVD (plasma enhanced chemical vapor deposition) coating film detection device

Abstract

The utility model discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) coating film detection device which comprises a detection device and a workpiece supporting assembly, the detection device comprises an operation table, the supporting assembly is arranged on the operation table, and a detection device body is arranged on the supporting assembly; the workpiece supporting assembly comprises a rotating disc, the rotating disc is installed on the operation table in a rotating mode, a vacuum cavity is formed in the rotating disc, a plurality of first suction nozzles are installed on the rotating disc and arranged in an annular mode, and a vacuum pipe is installed at the bottom of the rotating disc. The lower end of the vacuum pipe is installed on the operation table in a penetrating mode. According to the utility model, the workpiece supporting assembly is arranged to support the detected workpieces, and the workpiece supporting assembly can support a plurality of workpieces at the same time, so that the detection device can sequentially and synchronously complete detection on the plurality of workpieces, and the switching of the workpieces can be completed through the rotation of the rotating disc; therefore, the workpiece detection efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of coating detection, and in particular relates to a PECVD coating detection device. Background Art

[0002] PECVD is a process in which a gaseous substance undergoes a chemical reaction on the surface of a workpiece, and the reaction products form a solid film layer on the surface of the workpiece. It uses substances containing film-forming elements to deposit single crystal, polycrystalline or amorphous thin films, and is used in industries such as microelectronics and optoelectronics.

[0003] After the workpiece is coated using the PECVD process, it is necessary to perform sampling inspection on the coating condition on the workpiece using a detection device in order to obtain the qualified rate of the workpiece coating.

[0004] When using the existing detection device, the workpiece is placed on the operating table and then inspected by the detection device. Since the surface of the operating table is flat, it is inconvenient to take the workpiece. The workpiece on the operating table needs to be constantly switched during inspection, which makes the inspection efficiency of the workpiece low.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art already known to those skilled in the art. Utility Model Content

[0006] The purpose of the utility model is to provide a PECVD coating detection device, which can solve the problem of low workpiece detection efficiency of existing detection devices.

[0007] In order to achieve the above-mentioned purpose, the technical solution provided by a specific embodiment of the present invention is as follows:

[0008] A PECVD coating detection device, comprising:

[0009] The detection device includes an operating table, a support assembly is installed on the operating table, and a detection device body is installed on the support assembly. The detection device body is used to detect the coating condition of the workpiece, and the support assembly is used to install the detection device body. At the same time, when in use, the detection device body can be driven by the support assembly to move the position so as to achieve position adjustment.

[0010] The workpiece support assembly includes a rotating disk, which is mounted on the operating table in a rotating manner so that the rotating disk can be rotated on the operating table according to the use requirements. A vacuum chamber is provided in the rotating disk, and a plurality of first suction nozzles are installed on the rotating disk. The first suction nozzles are used to support the workpiece. Since negative pressure can be formed in the vacuum chamber, the first suction nozzle adsorbs the workpiece through the negative pressure, ensuring that the first suction nozzle stably supports the workpiece for the detection of the workpiece. The plurality of first suction nozzles are arranged in a ring manner so that the workpiece on the first suction nozzle is placed in a ring manner. The plurality of first suction nozzles can support multiple workpieces at the same time. At the same time, the plurality of workpieces are arranged in a ring manner so that when the rotating disk drives the workpiece to rotate, the plurality of workpieces will move on the same ring, thereby switching the workpieces below the detection device body through the rotation of the rotating disk, so that the detection device body can synchronously complete the detection of multiple workpieces. A vacuum tube is installed at the bottom of the rotating disk, and the lower end of the vacuum tube is installed on the operating table in a penetrating manner, and the lower end of the vacuum tube is placed on the lower side of the operating table. The vacuum tube is used to connect with the negative pressure device, so that negative pressure can be generated in the vacuum chamber under the action of the negative pressure device.

[0011] In one or more embodiments of the present invention, the support assembly includes a first telescopic rod and a second telescopic rod, and the first telescopic rod and the second telescopic rod are connected together.

[0012] In one or more embodiments of the present invention, the first telescopic rod is mounted on an operating table, and the detection device body is mounted on an end of the second telescopic rod away from the first telescopic rod. The first telescopic rod can drive the second telescopic rod to move up and down, thereby driving the detection device body to move up and down, and the second telescopic rod can drive the detection device body to move forward and backward, so that the position of the detection device body can be adjusted under the action of the first telescopic rod and the second telescopic rod, so that the detection device body can better detect the workpiece. A plurality of support legs are fixedly connected to the bottom of the operating table, and the support legs are used to support the operating table.

[0013] In one or more embodiments of the present invention, a plurality of second suction nozzles are also installed on the rotating disk, and the plurality of second suction nozzles are arranged in a ring manner. The plurality of second suction nozzles are used to assist in supporting the workpiece. If the workpiece to be inspected is large, the workpiece can be supported together by the first suction nozzle and the second suction nozzle, so that the device is more practical.

[0014] In one or more embodiments of the present invention, the first suction nozzle and the second suction nozzle are both made of rubber material. Since the first suction nozzle and the second suction nozzle are used to support the workpiece, the use of rubber material can achieve a better adsorption effect on the workpiece while supporting the workpiece without causing damage to the surface of the workpiece.

[0015] In one or more embodiments of the present invention, a sealing plug is installed in the second suction nozzle, and the sealing plug is made of rubber material. When the first suction nozzle can independently support the workpiece, the second suction nozzle is not needed. Therefore, in order to ensure the negative pressure effect in the vacuum chamber, the second suction nozzle needs to be sealed with a sealing plug. The sealing plug can be removed when the second suction nozzle is used. Similarly, if the number of workpieces to be inspected is less than the number of workpieces in the first suction nozzle, the first suction nozzle without the workpiece placed on it also needs to be sealed with a sealing plug.

[0016] In one or more embodiments of the present invention, a bearing is mounted at the bottom of the rotating disk, and the upper end of the vacuum tube is mounted within the bearing. The bearing is a sealed bearing. Since the rotating disk rotates during use, the bearing is provided to ensure that the rotation of the rotating disk does not affect the connection with the vacuum tube. Furthermore, the sealed bearing ensures a stable negative pressure within the vacuum chamber.

[0017] In one or more embodiments of the present invention, an axle is mounted on the operating table, and the bottom of the rotating disk is mounted on the axle. The axle is driven by a stepper motor. The axle drives the rotating disk to rotate, and the stepper motor drives the rotating disk to rotate at a set angle, thereby causing the rotating disk to rotate the workpiece on the first suction nozzle, so that the workpieces are switched sequentially for inspection when the inspection device body inspects the workpieces.

[0018] In one or more embodiments of the present invention, a support ring is fixedly connected to the bottom of the rotating disk, so that the supporting ring can be driven to rotate when the rotating disk rotates, and a rotating groove is provided at the bottom of the support ring.

[0019] In one or more embodiments of the present invention, the operating table is mounted with a plurality of support platforms, each of which is rotatably connected to a ball bearing, the upper end of each ball bearing being mounted in a rotation groove. To ensure the stable rotation of the rotating disk, a plurality of support platforms are provided at the bottom of the rotating disk for support. The ball bearings on the support platforms ensure that the rotating disk is supported without affecting its rotation.

[0020] Compared with the prior art, the present invention supports the workpiece to be inspected by setting a workpiece support assembly. Since the workpiece support assembly can support multiple workpieces at the same time, the inspection device can synchronously complete the inspection of multiple workpieces in sequence. The switching of the workpieces can be completed by rotating the rotating disk, thereby improving the efficiency of workpiece inspection. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is a front view of a PECVD film coating detection device in one embodiment of the present invention;

[0023] Figure 2 This is a three-dimensional diagram of a PECVD film coating detection device in one embodiment of the present invention;

[0024] Figure 3 This is a cross-sectional view of a PECVD film detection device in one embodiment of the present invention;

[0025] Figure 4 This is a cross-sectional view of a PECVD film detection device in one embodiment of the present invention;

[0026] Figure 5 In one embodiment of the present utility model Figure 4 Enlarged view of point A in the middle.

[0027] Description of main reference numerals:

[0028] 1-detection device, 11-operating table, 12-support assembly, 1201-first telescopic rod, 1202-second telescopic rod, 13-detection device body, 14-support leg, 2-workpiece support assembly, 21-rotating disk, 22-vacuum chamber, 23-first suction nozzle, 24-second suction nozzle, 25-sealing plug, 26-vacuum tube, 27-bearing, 28-axle, 29-support ring, 210 rotating groove, 211-support table, 212-ball. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the following will be combined with the drawings of the embodiments of the present invention to clearly and completely describe the technical solutions of the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0030] like Figures 1 to 4 As shown, a PECVD coating detection device in one embodiment of the present invention includes a detection device 1 and a workpiece support assembly 2.

[0031] like Figures 1 to 4 As shown, the detection device 1 includes an operating table 11, a support assembly 12 is installed on the operating table 11, and a detection device body 13 is installed on the support assembly 12. The detection device body 13 is used to detect the coating condition of the workpiece, and the support assembly 12 is used to install the detection device body 13. At the same time, when in use, the support assembly 12 can drive the detection device body 13 to move its position so as to achieve position adjustment.

[0032] like Figure 2 and Figure 3 As shown, the support assembly 12 includes a first telescopic rod 1201 and a second telescopic rod 1202 , and the first telescopic rod 1201 and the second telescopic rod 1202 are connected together.

[0033] like Figure 2 and Figure 3 As shown, a first telescopic rod 1201 is mounted on the operating table 11, and the detection device body 13 is mounted on the end of the second telescopic rod 1202 away from the first telescopic rod 1201. The first telescopic rod 1201 can drive the second telescopic rod 1202 to move up and down, thereby driving the detection device body 13 to move up and down, and the second telescopic rod 1202 can drive the detection device body 13 to move forward and backward. Therefore, under the action of the first telescopic rod 1201 and the second telescopic rod 1202, the position of the detection device body 13 can be adjusted so that the detection device body 13 can better detect the workpiece. A plurality of support legs 14 are fixedly connected to the bottom of the operating table 11, and the support legs 14 are used to support the operating table 11.

[0034] like Figures 1 to 4As shown, the workpiece support assembly 2 includes a rotating disk 21, which is mounted on the operating table 11 in a rotating manner so that the rotating disk 21 can be rotated on the operating table 11 according to the use requirements. A vacuum chamber 22 is provided in the rotating disk 21, and a plurality of first suction nozzles 23 are installed on the rotating disk 21. The first suction nozzles 23 are used to support the workpiece. Since a negative pressure can be formed in the vacuum chamber 22, the first suction nozzles 23 adsorb the workpiece through the negative pressure, ensuring that the first suction nozzles 23 stably support the workpiece for the inspection of the workpiece. The plurality of first suction nozzles 23 are arranged in a ring-shaped manner so that the workpiece on the first suction nozzle 23 is placed in a ring-shaped manner. The plurality of first suction nozzles 23 can support multiple workpieces at the same time. At the same time, the plurality of workpieces are arranged in a ring-shaped manner so that when the rotating disk 21 drives the workpiece to rotate, the plurality of workpieces will move on the same ring, thereby switching the workpieces under the detection device body 13 through the rotation of the rotating disk 21, so that the detection device body 13 can complete the inspection of multiple workpieces synchronously. A vacuum tube 26 is installed at the bottom of the rotating disk 21. The lower end of the vacuum tube 26 is installed on the operating table 11 in a penetrating manner, and the lower end of the vacuum tube 26 is placed on the lower side of the operating table 11. The vacuum tube 26 is used to connect to the negative pressure device, so that negative pressure can be generated in the vacuum chamber 22 under the action of the negative pressure device.

[0035] like Figures 2 to 4 As shown, a plurality of second suction nozzles 24 are also installed on the rotating disk 21. The plurality of second suction nozzles 24 are arranged in a ring manner. The plurality of second suction nozzles 24 are used to assist in supporting the workpiece. If the workpiece to be inspected is large, the first suction nozzle 23 and the second suction nozzle 24 can be used to jointly support the workpiece, so that the device is more practical.

[0036] Preferably, the first suction nozzle 23 and the second suction nozzle 24 are both made of rubber material. Since the first suction nozzle 23 and the second suction nozzle 24 are used to support the workpiece, the use of rubber material can achieve a better adsorption effect on the workpiece while supporting the workpiece without causing damage to the surface of the workpiece.

[0037] like Figures 2 to 4 As shown, a sealing plug 25 is installed in the second suction nozzle 24, and the sealing plug 25 is made of rubber material. When the first suction nozzle 23 can independently support the workpiece, the second suction nozzle 24 is no longer needed. Therefore, in order to ensure the negative pressure effect in the vacuum chamber 22, the second suction nozzle 24 needs to be sealed with the sealing plug 25. When the second suction nozzle 24 is in use, the sealing plug 25 can be removed. Similarly, if the number of workpieces to be inspected is less than the number of first suction nozzles 23, the first suction nozzle 23 without a workpiece placed in it also needs to be sealed with the sealing plug 25.

[0038] like Figure 3 and Figure 4As shown, a bearing 27 is mounted at the bottom of the rotating disk 21, and the upper end of the vacuum tube 26 is mounted within the bearing 27. Bearing 27 is a sealed bearing. Since the rotating disk 21 rotates during use, bearing 27 is provided to ensure that its rotation does not affect its connection with the vacuum tube 26. Furthermore, bearing 27 is sealed to ensure a stable negative pressure within the vacuum chamber 22. Furthermore, to facilitate the switching of the negative pressure, a negative pressure on / off valve is installed on the vacuum tube 26. This valve allows for easy control of the negative pressure, thereby facilitating the securing and removal of workpieces.

[0039] like Figure 3 and Figure 4 As shown, the operating table 11 is mounted with an axle 28, and the bottom of the rotating disk 21 is mounted on the axle 28. The axle 28 is driven by a stepper motor. The axle 28 drives the rotating disk 21 to rotate, and the stepper motor also drives the rotating disk 21 to rotate at a set angle. This causes the rotating disk 21 to rotate the workpiece on the first suction nozzle 23, allowing the inspection device body 13 to switch workpieces for inspection in sequence.

[0040] like Figure 4 and Figure 5 As shown, a support ring 29 is fixedly connected to the bottom of the rotating disk 21 , so that when the rotating disk 21 rotates, the support ring 29 can be driven to rotate. A rotation groove 210 is provided at the bottom of the support ring 29 .

[0041] like Figure 4 and Figure 5 As shown, a plurality of support platforms 211 are mounted on the operating table 11, and a plurality of ball bearings 212 are rotatably connected to the support platforms 211. The upper ends of the ball bearings 212 are mounted in the rotating grooves 210. In order to ensure the stable rotation of the rotating disk 21, a plurality of support platforms 211 are provided at the bottom of the rotating disk 21 for support. At the same time, the ball bearings 212 on the support platforms 211 support the rotating disk 21 without affecting its rotation.

[0042] During use, the vacuum tube 26 is connected to the negative pressure device, and negative pressure is generated in the vacuum chamber 22 through the vacuum tube 26, so that there is negative pressure in the first suction nozzle 23, and then the workpiece to be inspected is placed on the first suction nozzle 23 in turn. Under the action of the negative pressure, the first suction nozzle 23 fixes the workpiece stably, and the detection device body 13 is adjusted by the support assembly 12, so that the detection device body 13 is convenient for inspecting the workpiece. When the detection device body 13 completes the inspection of the workpiece directly below, the rotating disk 21 is driven to rotate by the wheel shaft 28, so that the uninspected workpiece is rotated to the bottom of the detection device body 13, so that the detection device body 13 continues to inspect the workpiece. After the inspection is completed, the next workpiece is inspected by rotating the rotating disk 21, so that the inspection of multiple workpieces can be completed synchronously; after the inspection is completed, the negative pressure switch valve is closed so that the first suction nozzle 23 no longer adsorbs the workpiece, so that the workpiece that has been inspected can be removed.

[0043] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0044] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A PECVD coating detection device, characterized in that: include: The detection device comprises an operating table, a support assembly is mounted on the operating table, and a detection device body is mounted on the support assembly; The workpiece support assembly includes a rotating disk, which is mounted on the operating table in a rotating manner. A vacuum chamber is provided in the rotating disk. A plurality of first suction nozzles are installed on the rotating disk, and the plurality of first suction nozzles are arranged in a ring manner. A vacuum tube is installed at the bottom of the rotating disk, and the lower end of the vacuum tube is mounted on the operating table in a penetrating manner, and the lower end of the vacuum tube is placed on the lower side of the operating table.

2. A PECVD coating detection device according to claim 1, characterized in that: The support assembly includes a first telescopic rod and a second telescopic rod, and the first telescopic rod and the second telescopic rod are connected together.

3. A PECVD coating detection device according to claim 2, characterized in that: The first telescopic rod is installed on the operating table, the detection device body is installed on an end of the second telescopic rod away from the first telescopic rod, and a plurality of supporting legs are fixedly connected to the bottom of the operating table.

4. A PECVD coating detection device according to claim 1, characterized in that: A plurality of second suction nozzles are also mounted on the rotating disk, and the plurality of second suction nozzles are arranged in a ring-shaped manner.

5. A PECVD coating detection device according to claim 4, characterized in that: The first suction nozzle and the second suction nozzle are both made of rubber material.

6. A PECVD coating detection device according to claim 5, characterized in that: A sealing plug is installed in the second suction nozzle, and the sealing plug is made of rubber material.

7. The PECVD film detection device according to claim 1, characterized in that: A bearing is installed at the bottom of the rotating disk, and the upper end of the vacuum tube is installed in the bearing, and the bearing is a sealed bearing.

8. The PECVD coating detection device according to claim 1, characterized in that: A wheel axle is installed on the operating table, the bottom of the rotating disk is installed on the wheel axle, and the wheel axle is driven to rotate by a stepping motor.

9. The PECVD film detection device according to claim 1, characterized in that: A support ring is fixedly connected to the bottom of the rotating disk, and a rotating groove is formed at the bottom of the support ring.

10. The PECVD film detection device according to claim 9, characterized in that: A plurality of support platforms are installed on the operating table, and balls are rotatably connected to the plurality of support platforms, and the upper ends of the balls are installed in the rotating grooves.

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