Improved probe
Through the installation disc, electric slide rail and servo motor-driven transmission rod structure, the problem of manual adjustment of the probe is solved, automatic adjustment and convenient fixation of the probe are realized, and detection accuracy and operation convenience are improved.
Patent Information
- Application Number
- CN202421725583.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-22
- Publication Date
- 2025-08-08
- Estimated Expiration
- 2034-07-22
AI Technical Summary
The existing probes need to be manually adjusted during the detection process, making it difficult to move to the detection position accurately, resulting in data deviation and poor use effect.
The combined structure of the installation disc, electric slide rail, transmission rod and servo motor is adopted. The limit slide and connection rod are driven to move through the electric slide rail. The servo motor drives the transmission rod to adjust the angle and position of the probe. Combined with the design of the limit rod and the installation frame, the probe is easily fixed and disassembled.
The automatic adjustment and fixation of the probe are realized, which improves the accuracy of detection and operation convenience, and reduces the error caused by manual adjustment.
Smart Images

Figure CN223205540U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of probes, and particularly relates to an improved probe. Background Art
[0002] The probe station is a commonly used equipment for electrical performance testing in semiconductor laboratories. It is mainly used in the CP test link after wafer processing and before the packaging process. It is responsible for the transportation and positioning of the wafer, ensuring that a more stable signal is transmitted from the wafer surface to the precision instrument, so that the grains on the wafer can contact the probe in turn and be tested one by one, achieving more accurate data test and measurement.
[0003] In the Chinese patent with the announcement number CN207832851U, an improved probe is mentioned, which belongs to the field of detection technology. It solves the technical problems that the existing probe may cause damage to the detection part during detection. This improved probe includes a needle tube, a telescopic spring and a plunger. The telescopic spring is arranged in the needle tube. The plunger includes an inner telescopic cylinder and a needle column. The inner telescopic cylinder is slidably connected in the needle tube and one end of the inner telescopic cylinder extends out of the needle tube. The telescopic spring abuts against the end of the inner telescopic cylinder located in the needle tube. The inner telescopic cylinder has a telescopic cavity. The cavity mouth of the telescopic cavity is located at the end of the inner telescopic cylinder extending out of the needle tube. The needle column penetrates into the telescopic cavity and is slidably connected to the inner telescopic cylinder. A buffer spring is provided in the telescopic cavity. One end of the buffer spring abuts against the inner telescopic cylinder, and the other end of the buffer spring abuts against the end of the needle column inserted into the telescopic cavity. In the natural state, the elastic force of the buffer spring is less than the elastic force of the telescopic spring. This utility model has the advantage of avoiding damage to the detection part during detection.
[0004] However, the above technical solution protects the probe through a buffer protection structure. Although this device can prevent damage to the probe, the probe needs to be close to the detection device for detection during use. Most probes need to be adjusted manually by the staff, and it is difficult to move the device accurately to the detection position. Manual adjustment of the probe is prone to deviations in the detection data, resulting in poor probe use effect, so the staff needs to improve it. Utility Model Content
[0005] The purpose of the present invention is to provide an improved probe to solve the problems raised in the above background technology.
[0006] To achieve the above objectives, the present invention provides the following technical solutions:
[0007] An improved probe, comprising:
[0008] Installation disk;
[0009] Both sides of the top of the mounting plate are fixedly connected with a lap plate, and the middle parts of the tops of the two lap plates are fixedly connected with a connecting frame;
[0010] Both sides of the inner walls of the two connecting frames are fixedly connected with electric slide rails, one side of the inner walls of the two electric slide rails is slidably connected with a limit slider, one side of the top of the limit slider is fixedly connected with a connecting rod, and the front end of the connecting rod is fixedly connected with a fixed block.
[0011] Preferably, a protective box is fixedly connected to the middle of one side of the fixed block, a servo motor is fixedly connected to one side of the inner wall of the protective box, and a transmission rod is installed at the output end of the servo motor.
[0012] Preferably, the front end of the transmission rod is fixedly connected to a mounting sleeve frame, and a mounting hole is provided through the middle of the inner wall of the mounting sleeve frame.
[0013] Preferably, connection holes are provided on both sides of the surface of the mounting frame, and a limiting rod is inserted into one side of the inner wall of each of the two connection holes, and a probe is inserted into one side of the inner wall of the mounting hole.
[0014] Preferably, limiting holes are provided on both sides of the probe surface, and the inner walls of the limiting holes are sleeved on the surface of the limiting rod.
[0015] Preferably, the top end of the probe is electrically connected to a wire.
[0016] Compared with the prior art, the beneficial effects of the present invention are:
[0017] (1) Through the arrangement of the mounting plate, electric slide rail, transmission rod and mounting sleeve, the electric slide rail drives the limit slider connected to the inner wall to move, the limit slider drives the connecting rod at the top to move, the connecting rod drives the front probe to move, the output end of the servo motor drives the transmission rod to rotate, the transmission rod drives the front mounting sleeve to adjust the angle, and the mounting sleeve drives the probe fixed on the inner wall to adjust the angle, thereby achieving the effect of adjusting the position and angle of the probe and facilitating the operation of the staff.
[0018] (2) By setting up the mounting frame, mounting holes, limiting rods and probes, the probe is plugged into the mounting hole, the limiting rods are inserted from the inside of the connecting hole, and the limiting rods are inserted through the limiting holes on both sides of the probe, thereby fixing the probe and facilitating disassembly, thereby achieving the effect of convenient disassembly and assembly of the probe. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a three-dimensional diagram of the utility model;
[0020] Figure 2 A three-dimensional diagram of the probe of the utility model;
[0021] Figure 3 This is a three-dimensional diagram of the electric slide rail of the utility model;
[0022] Figure 4A three-dimensional diagram of the servo motor of the present utility model;
[0023] In the figure: 1. Mounting plate; 2. Lap plate; 3. Connection frame; 4. Electric slide rail; 5. Limit slider; 6. Connecting rod; 7. Fixed block; 8. Protective box; 9. Servo motor; 10. Transmission rod; 11. Mounting frame; 12. Mounting hole; 13. Limit rod; 14. Probe; 15. Wires. DETAILED DESCRIPTION
[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0025] Example 1:
[0026] See also Figures 1 to 4 As shown, an improved probe comprises:
[0027] Installation disk 1;
[0028] Both sides of the top of the mounting plate 1 are fixedly connected with a lap plate 2, and the middle of the top of the two lap plates 2 is fixedly connected with a connecting frame 3;
[0029] Both sides of the inner walls of the two connecting frames 3 are fixedly connected with electric slide rails 4, and one side of the inner walls of the two electric slide rails 4 is slidably connected to the limit slider 5. One side of the top of the limit slider 5 is fixedly connected with a connecting rod 6. The electric slide rail 4 drives the limit slider 5 slidably connected to the inner wall to move, and the limit slider 5 drives the top connecting rod 6 to move, and the front probe 14 is driven to move by the connecting rod 6. The front end of the connecting rod 6 is fixedly connected with a fixed block 7, and the middle part of one side of the fixed block 7 is fixedly connected with a protective box 8. One side of the inner wall of the protective box 8 is fixedly connected with a servo motor 9, and the output end of the servo motor 9 is installed with a transmission rod 10. The front end of the transmission rod 10 is fixedly connected with a mounting frame 11. The output end of the servo motor 9 drives the transmission rod 10 to rotate, and the transmission rod 10 drives the front mounting frame 11 to adjust the angle, and the mounting frame 11 is used to drive the probe 14 fixed on the inner wall to adjust the angle.
[0030] A mounting hole 12 is provided through the middle of the inner wall of the mounting sleeve 11, and connecting holes are provided on both sides of the surface of the mounting sleeve 11. A limiting rod 13 is inserted on one side of the inner wall of the two connecting holes, and a probe 14 is inserted on one side of the inner wall of the mounting hole 12. Limiting holes are provided on both sides of the surface of the probe 14, and the inner wall of the limiting hole is sleeved on the surface of the limiting rod 13. The probe 14 is inserted through the mounting hole 12, and the limiting rods 13 are inserted through the connecting holes on both sides of the mounting sleeve 11. The limiting rod 13 is inserted from the inside of the connecting hole and inserted through the limiting holes on both sides of the probe 14, thereby fixing the probe 14 and facilitating disassembly. The top of the probe 14 is electrically connected to the wire 15.
[0031] The length and width of the probe 14 are improved from 287 μm*287 μm to 391 μm*455 μm.
[0032] Working principle: The staff connects the electric slide rail 4 to the power supply, and the electric slide rail 4 drives the limit slider 5 connected to the inner wall sliding to move, and the limit slider 5 drives the top connecting rod 6 to move, and drives the front probe 14 to move through the connecting rod 6. The staff connects the servo motor 9 to the power supply, and the output end of the servo motor 9 drives the transmission rod 10 to rotate, and the transmission rod 10 drives the front mounting frame 11 to adjust the angle, and the mounting frame 11 is used to drive the probe 14 fixed on the inner wall to adjust the angle. When in use, a mounting hole 12 is opened in the middle of the inner wall of the mounting frame 11, and the probe 14 is inserted through the mounting hole 12, and the limit rods 13 are inserted through the connecting holes on both sides of the mounting frame 11. The limit rod 13 is inserted from the inside of the connecting hole and the limit rod 13 is inserted through the limit holes on both sides of the probe 14, thereby fixing the probe 14 and facilitating disassembly.
[0033] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.
[0034] All standard parts used in this utility model can be purchased commercially, and special-shaped parts can be customized according to the description in the specification and drawings. The specific connection methods of each part adopt conventional means such as bolts, rivets, welding, etc. that are mature in the existing technology. The machinery, parts and equipment all adopt conventional models in the existing technology. In addition, the circuit connections adopt conventional connection methods in the existing technology and will not be described in detail here. Any matters not described in detail in this specification belong to the existing technology known to professional and technical personnel in this field.
[0035] In the description of this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. "Multiple" means two or more, unless otherwise specifically defined.
[0036] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.
[0037] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.
[0038] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction.
[0039] In the drawings of the embodiments disclosed in the present invention, only the structures related to the embodiments disclosed in the present invention are involved. Other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present invention can be combined with each other.
[0040] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. An improved probe, characterized in that: include: Installation disk (1); Both sides of the top of the installation plate (1) are fixedly connected with a lap plate (2), and the middle parts of the tops of the two lap plates (2) are fixedly connected with a connection frame (3); Both sides of the inner walls of the two connecting frames (3) are fixedly connected to electric slide rails (4), one side of the inner walls of the two electric slide rails (4) is slidably connected to a limit slider (5), one side of the top of the limit slider (5) is fixedly connected to a connecting rod (6), and the front end of the connecting rod (6) is fixedly connected to a fixed block (7).
2. An improved probe according to claim 1, characterized in that: A protective box (8) is fixedly connected to the middle of one side of the fixed block (7), a servo motor (9) is fixedly connected to one side of the inner wall of the protective box (8), and a transmission rod (10) is installed at the output end of the servo motor (9).
3. An improved probe according to claim 2, characterized in that: The front end of the transmission rod (10) is fixedly connected to a mounting sleeve (11), and a mounting hole (12) is provided through the middle of the inner wall of the mounting sleeve (11).
4. An improved probe according to claim 3, characterized in that: Connection holes are provided on both sides of the surface of the installation sleeve frame (11), and a limiting rod (13) is inserted into one side of the inner wall of each of the two connection holes, and a probe (14) is inserted into one side of the inner wall of the installation hole (12).
5. An improved probe according to claim 4, characterized in that: Limiting holes are provided on both sides of the surface of the probe (14), and the inner walls of the limiting holes are sleeved on the surface of the limiting rod (13).
6. The improved probe according to claim 4, characterized in that: The top end of the probe (14) is electrically connected to a wire (15).
Citation Information
Patent Citations
Improved generation probe
CN207832851U