3D ultrasonic sensor probe core

Abstract

The utility model discloses a three-dimensional (3D) ultrasonic sensor probe core, which comprises a shell, a vibrating diaphragm, a piezoelectric element and a plurality of ultrasonic receiving elements, the bottom of the shell is connected with the vibrating diaphragm, the shell is provided with a first through hole and a plurality of second through holes, the number of the second through holes is the same as that of the ultrasonic receiving elements, and the first through hole and the second through holes extend in the height direction of the shell; the piezoelectric element is arranged in the first through hole and is fixed on the vibrating diaphragm; the multiple ultrasonic receiving elements are arranged in the multiple second through holes in a one-to-one correspondence mode and fixed to the vibrating diaphragm or the side wall of the second through hole. The device is simple in structure, easy to manufacture and high in obstacle identification capability.

Description

Technical Field

[0001] The utility model relates to ultrasonic sensor technology. Background Art

[0002] A known 3D ultrasonic sensor probe can be found in Chinese patent application number 201480017488.7, entitled "Sensor Device and Method for Vehicle Surrounding Environment Detection." This 3D ultrasonic sensor probe comprises a piezoelectric element and multiple electret sensor elements, enabling a single-transmit, multiple-receive function. By utilizing the ultrasonic echo signals received by the multiple electret sensor elements, information such as the distance, location, and shape of obstacles can be obtained. This 3D ultrasonic sensor probe can be used to detect the surrounding environment of vehicles and robots.

[0003] Existing 3D ultrasonic sensor probes suffer from shortcomings such as complex structure, difficulty in manufacturing, and high ultrasonic energy loss. In the aforementioned patent application, the multiple electret sensor elements and piezoelectric elements in the 3D ultrasonic sensor probe are arranged on the upper and lower surfaces of the bottom surface (diaphragm) of a can-shaped element, respectively. A cover layer configured as a vibrating diaphragm is also provided above the electret sensor elements. The cover layer and the bottom surface of the can-shaped element are bonded together. The large contact area between the multiple electret sensor elements and the piezoelectric elements and the bottom surface of the can-shaped element reduces the energy of the ultrasonic waves emitted by the bottom surface of the can-shaped element. Summary of the Invention

[0004] The technical problem to be solved by the utility model is to provide a 3D ultrasonic sensor probe core, which has a simple structure, is easy to manufacture, and has a strong ability to identify obstacles.

[0005] An embodiment of the present utility model provides a 3D ultrasonic sensor core probe, including a shell, a vibrating diaphragm, a piezoelectric element and multiple ultrasonic receiving elements; the bottom of the shell is connected to the vibrating diaphragm, the shell is provided with a first through hole and multiple second through holes with the same number as the ultrasonic receiving elements, and the first through hole and the multiple second through holes all extend along the height direction of the shell; the piezoelectric element is provided in the first through hole and fixed on the vibrating diaphragm; the multiple ultrasonic receiving elements are respectively provided in the multiple second through holes in a one-to-one correspondence, and are fixed on the side walls of the vibrating diaphragm or the second through holes.

[0006] Optionally, the vibrating diaphragm is made of metal.

[0007] Optionally, the shell is made of plastic.

[0008] Optionally, a side wall of each second through hole is provided with a step surface, and the ultrasonic receiving element is fixed on the step surface.

[0009] Optionally, each ultrasonic receiving element is a MEMS microphone.

[0010] The utility model has at least the following advantages and features:

[0011] 1. During manufacturing, the 3D ultrasonic sensor probe of the embodiment of the present invention only needs to fix the piezoelectric element on the vibrating diaphragm, fix the multiple ultrasonic receiving elements on the vibrating diaphragm or the side wall of the second through hole, and connect the bottom of the housing to the vibrating diaphragm, which is easy to manufacture and reduces manufacturing costs.

[0012] 2. When the ultrasonic receiving element of this embodiment is fixed to the sidewall of the second through-hole, it has no contact with the vibrating diaphragm, reducing the structural rigidity of the vibrating diaphragm. This reduces ultrasonic energy loss, increases the transmitted ultrasonic energy, and improves the discernibility of the ultrasonic echo signal. Furthermore, the air cavity formed between the ultrasonic receiving element and the vibrating diaphragm reduces the ultrasonic energy interference generated by the piezoelectric element's vibration, further enhancing the 3D ultrasonic sensor's ability to detect obstacles. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 FIG2 shows a schematic top view of a 3D ultrasonic sensor probe core according to a first embodiment of the present utility model.

[0014] Figure 2 FIG2 shows a schematic cross-sectional view of a 3D ultrasonic sensor probe core according to a first embodiment of the present utility model.

[0015] Figure 3 FIG2 shows a schematic cross-sectional view of a 3D ultrasonic sensor probe core according to a second embodiment of the present invention. DETAILED DESCRIPTION

[0016] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0017] Figure 1 and Figure 2 The structure of the 3D ultrasonic sensor probe core according to the first embodiment of the present invention is shown. Figure 1 and Figure 2 The 3D ultrasonic sensor probe according to the first embodiment of the present invention includes a housing 1 , a vibration diaphragm 2 , a piezoelectric element 3 and a plurality of ultrasonic receiving elements 4 .

[0018] The bottom of the housing 1 is connected to the vibrating diaphragm 2. The housing 1 is provided with a first through-hole 13 and a plurality of second through-holes 14, the same number as the ultrasonic receiving elements 4. Both the first through-hole 13 and the plurality of second through-holes 14 extend along the height of the housing 1. The piezoelectric element 3 is disposed in the first through-hole 13, and the plurality of ultrasonic receiving elements 4 are disposed in a one-to-one correspondence in the plurality of second through-holes 14. Both the piezoelectric element 3 and the plurality of ultrasonic receiving elements 4 are fixed to the vibrating diaphragm 2.

[0019] In this embodiment, the bottom surface of the shell 1, the piezoelectric element 3 and the plurality of ultrasonic receiving elements 4 are respectively bonded to the vibrating diaphragm 2. The piezoelectric element 3 is arranged at the center of the vibrating diaphragm 2, and the plurality of ultrasonic receiving elements 4 are evenly arranged around the periphery of the piezoelectric element 3. In the example shown in the figure, there are three ultrasonic receiving elements 4, and each two adjacent ultrasonic receiving elements 4 are spaced 60° apart. In other embodiments, the number of ultrasonic receiving elements 4 can also be two, four, etc. During manufacturing, it is only necessary to first glue the piezoelectric element 3 and the plurality of ultrasonic receiving elements 4 to the vibrating diaphragm 2, and then glue the shell 1 and the vibrating diaphragm 2 together. The entire manufacturing process is very simple.

[0020] Optionally, the vibrating diaphragm 2 is made of metal, such as aluminum, and the housing 1 is made of plastic. Plastic has a large free-form space, and the first through hole 13, the second through hole 14, and the step surface 12 to be described below can be formed by injection molding or other methods, thereby further simplifying the manufacturing process and reducing manufacturing costs.

[0021] In this embodiment, the piezoelectric element 3 is a piezoelectric ceramic sheet, such as a PZT piezoelectric ceramic sheet, and each ultrasonic receiving element 4 is a MEMS microphone (MEMS is the abbreviation of Micro Electro Mechanical Systems, which means micro-electronic mechanical system in Chinese), but is not limited thereto.

[0022] Figure 3 A cross-sectional schematic diagram of a 3D ultrasonic sensor probe according to the second embodiment of the present invention is shown. The main difference between the second embodiment and the first embodiment is that the sidewall of each second through hole 14 is provided with a step surface 12, and the ultrasonic receiving element 4 is fixed on the step surface 12, forming an air cavity 15 between the ultrasonic receiving element 4 and the vibrating diaphragm 2. Optionally, the ultrasonic receiving element 4 is bonded to the step surface 12, but is not limited to this. During manufacturing, the piezoelectric element 3 is glued to the vibrating diaphragm 2, and multiple ultrasonic receiving elements 4 are glued to the step surface 12, and then the housing 1 and the vibrating diaphragm 2 are glued together. The manufacturing process is also very simple.

[0023] Compared with the first embodiment, in the second embodiment, since the vibrating diaphragm 2 is not in contact with the ultrasonic receiving element 4, a decoupling effect is achieved, and thus the rigidity of the vibrating diaphragm 2 is reduced, so that the vibrating diaphragm 2 can generate most modes on a plane and reduce the influence of the respective structural surface waves. This structure makes it easier for the piezoelectric element 3 to drive the vibrating diaphragm 2 to deform, and the ultrasonic energy emitted is stronger. At the same time, the vibrating diaphragm 2 is also more susceptible to the impact of the ultrasonic echo F and is excited to vibrate, thereby reducing the energy loss of the ultrasonic wave and improving the recognition of the ultrasonic echo signal. After vibration, the vibrating diaphragm 2 transmits the ultrasonic wave to the ultrasonic receiving element 4 through the air cavity 15. The air cavity 15 can reduce the ultrasonic energy interference generated by the vibration of the piezoelectric element 3, which helps to further enhance the 3D ultrasonic sensor's ability to identify obstacles.

[0024] exist Figure 3 In the example, the ultrasonic receiving element 4 is fixed on the upward step surface 12. In order to enable the ultrasonic receiving element 4 to receive more ultrasonic signals, the side of the air cavity 15 below the ultrasonic receiving element 4 is provided with a downward step surface. In other embodiments, the ultrasonic receiving element 4 can also be directly fixed on the downward step surface (similar to Figure 3 On the step surface 16).

[0025] In a specific application, a 3D ultrasonic sensor core according to the first or second embodiment of the present invention is assembled with a housing and other components to form a 3D ultrasonic sensor. The housing houses a PCBA circuit board, which is electrically connected to the piezoelectric element and multiple MEMS microphones. The operation of a 3D ultrasonic sensor using the 3D ultrasonic sensor core according to the first or second embodiment of the present invention is generally as follows.

[0026] The PCBA circuit board (not shown) drives the piezoelectric element 3, which converts electrical energy into mechanical energy, causing the vibrating diaphragm 2 to deform and emit ultrasonic waves. After encountering an obstacle, the ultrasonic wave is reflected back to the 3D ultrasonic sensor. Multiple MEMS microphones convert the received ultrasonic echo signals into electrical signals and transmit them to the industrial computer. The industrial computer uses triangulation positioning based on these multiple signals to calculate the distance, size, and direction of the obstacle, thereby obtaining more detailed obstacle information. If needed, the piezoelectric element 3 can be configured to generate an ultrasonic transmission signal while also receiving an ultrasonic reflection signal. In this case, the piezoelectric element 3 can also transmit an electrical signal corresponding to the ultrasonic echo signal to the industrial computer.

[0027] This 3D ultrasonic sensor can be used to detect the surrounding environment of vehicles and robots. A piezoelectric element generates ultrasonic signals, while multiple ultrasonic receiving elements receive the reflected ultrasonic signals. This single-transmitter, multiple-receiver approach facilitates detection of the surrounding environment and improves obstacle recognition.

[0028] Obviously, those skilled in the art may make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention is intended to include such modifications and variations.

Claims

1. A 3D ultrasonic sensor probe, comprising a housing, a vibrating diaphragm, a piezoelectric element, and a plurality of ultrasonic receiving elements, characterized in that: The bottom of the housing is connected to the vibrating diaphragm, and the housing is provided with a first through hole and a plurality of second through holes, the number of which is the same as the number of the ultrasonic receiving elements, and the first through hole and the plurality of second through holes extend along the height direction of the housing; The piezoelectric element is arranged in the first through hole and fixed on the vibration diaphragm; the multiple ultrasonic receiving elements are respectively arranged in the multiple second through holes in a one-to-one correspondence and fixed on the vibration diaphragm or the side walls of the second through holes.

2. The 3D ultrasonic sensor core probe according to claim 1, characterized in that: The material of the vibration diaphragm is metal.

3. The 3D ultrasonic sensor core probe according to claim 1 or 2, characterized in that: The shell is made of plastic.

4. The 3D ultrasonic sensor core probe according to claim 1, characterized in that: A side wall of each second through hole is provided with a step surface, and the ultrasonic receiving element is fixed on the step surface.

5. The 3D ultrasonic sensor core probe according to claim 4, characterized in that: The ultrasonic receiving element is bonded to the step surface.

6. The 3D ultrasonic sensor core probe according to claim 1, characterized in that: Each of the ultrasonic receiving elements is a MEMS microphone.

7. The 3D ultrasonic sensor core probe according to claim 1, characterized in that: The piezoelectric element is bonded to the vibration diaphragm.

8. The 3D ultrasonic sensor core probe according to claim 1, characterized in that: The piezoelectric element is a piezoelectric ceramic piece.

9. The 3D ultrasonic sensor core probe according to claim 1, characterized in that: The piezoelectric element is arranged at the center of the vibration diaphragm, and the plurality of ultrasonic wave receiving elements are uniformly arranged around the periphery of the piezoelectric element.

10. The 3D ultrasonic sensor core probe according to claim 1, characterized in that: The bottom surface of the shell is bonded to the vibration diaphragm.

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