Device for enabling BSG water film to be more uniform

Abstract

The utility model provides a device for enabling a BSG water film to be more uniform, which relates to the technical field of wet etching and comprises a water film covering mechanism, a sealing plate mechanism is arranged on the side face of the water film covering mechanism, a conveying mechanism is arranged at the bottom of the sealing plate mechanism, the water film covering mechanism comprises a water spraying machine, and a water spraying head is arranged at the bottom of the water spraying machine. The water spraying machine and the water spraying head are matched to convey water to the position of the atomization spraying head to be evenly atomized and sprayed out, it can be ensured that the treated surface is completely covered with a water film on the aspect of covering integrity, almost no missing area exists, the thickness consistency of the water film is excellent, and the water spraying effect is good. The atomized and sprayed liquid can form a water film with uniform thickness, so that the over-etching phenomenon cannot be caused in the preparation process of the battery piece, the yield and efficiency of the battery piece are improved, the utilization efficiency of the liquid can be improved through uniform water film distribution, the liquid can uniformly cover the target surface, and unnecessary waste and loss are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wet etching, in particular to a device for making a BSG water film more uniform. Background Art

[0002] Wet etching is a key process step in Topcon cell manufacturing. To meet production capacity, chain-type machines are used for BSG and PSG removal.

[0003] The existing water film has incomplete coverage, which may cause the water film surface to be over-engraved, thereby greatly affecting the electrical performance parameters of the battery cell and affecting the appearance of the battery cell. Utility Model Content

[0004] The purpose of this utility model is to solve the problem in the prior art that the water film has incomplete coverage, which may cause the water film surface to be over-engraved, thereby greatly affecting the electrical performance parameters of the battery cell and affecting the appearance of the battery cell. A device is proposed to make the BSG water film more uniform.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a device for making the BSG water film more uniform, comprising a water film covering mechanism, a sealing plate mechanism is provided on the side of the water film covering mechanism, a conveying mechanism is provided on the bottom of the sealing plate mechanism, the water film covering mechanism comprises a water sprayer, a water spray head is provided at the bottom of the water sprayer, a plurality of atomizing nozzles are distributed in a clockwise direction around the bottom of the water spray head, a valve is installed on the side of the water sprayer, one end of the valve is connected to a connector, one end of the connector is threadedly connected to a sealing cover, an inner ring is provided on the inner side of the sealing cover, the inner side of the inner ring is threadedly connected to a filter box, and the side of the sealing cover is fixedly connected to a water receiving head.

[0006] Preferably, the conveying mechanism includes a conveying frame, a plurality of conveying rollers are evenly distributed on the inner side of the conveying frame, a transmission gear is installed at one end of the conveying roller, and a silicon wafer is arranged on the top of the conveying roller.

[0007] Preferably, a driving motor is provided at one end of a single conveying roller, and a transmission belt is meshed and wound around the outer wall of the transmission gear.

[0008] Preferably, a plurality of first limit blocks and second limit blocks are symmetrically distributed on one side of the conveyor frame, the first limit blocks are arranged above the second limit blocks, and the first limit blocks and the second limit blocks are both distributed on the outside of the transmission belt.

[0009] Preferably, a sealing ring is provided on the outer wall of the water receiving head, and the water receiving head is communicated with the interior of the connecting head.

[0010] Preferably, side brackets are symmetrically fixedly installed on both sides of the water sprayer, and a side support plate is fixedly installed on one end of the side bracket.

[0011] Preferably, a plurality of filter holes are evenly opened through the outer wall of the filter box, and the filter box passes through the inner side of the valve.

[0012] Preferably, a sealing ring is fixedly mounted on the inner side of the sealing cover, and the sealing ring is connected to one end of the inner side of the filter box.

[0013] Preferably, the sealing mechanism includes a partition plate, and side support blocks are symmetrically provided on the bottom of both sides of the partition plate, and the side support blocks are both installed on the top of the conveying frame.

[0014] Preferably, a mounting bracket is provided on the top of the driving motor, one end of the mounting bracket is fixedly mounted on one side of the conveying frame, a bottom support bracket is fixedly mounted on the bottom of the conveying frame, and fixing holes are provided through both ends of the bottom of the bottom support bracket.

[0015] Compared with the prior art, the advantages and positive effects of the present invention are:

[0016] 1. In the present invention, the water is transported to the position of the atomizing nozzle by the cooperation of the water sprayer and the water spray head, and the water is evenly atomized and sprayed. In terms of coverage integrity, it can ensure that the treated surface is completely covered by the water film, and there is almost no missed area. The thickness consistency of the water film is excellent. The atomized liquid can form a water film with uniform thickness, avoiding the situation of local excessive thickness or excessive thinness, and increasing the coverage area of the water film, thereby ensuring more uniformity, so that the battery cell will not cause over-engraving during the preparation process, thereby improving the battery cell yield and efficiency. The uniform water film distribution helps to improve the liquid Utilization efficiency, the liquid can be evenly covered on the target surface, reducing unnecessary waste and loss. The use of a spray nozzle saves more water than normal dripping, reduces water consumption, and thus reduces costs. The filter box is connected to the inner ring on the inside of the sealing cover, and cooperates with the sealing ring to achieve a sealed connection, which is beneficial for filtering fine particles through the filter holes distributed on the filter box when water enters the water inlet, and is beneficial for filtering water before the water film is formed. The tiny particles and impurities in the water are removed by a high-precision filter, thereby improving water quality and reducing the impact of impurities on the nozzle and the water film.

[0017] 2. In the present invention, the conveying rack facilitates the evenly distributed installation of the conveying rollers, and at the same time cooperates with the driving motor to drive a single conveying roller to rotate, thereby driving the transmission gear to rotate synchronously. The transmission gear and the transmission belt are engaged and connected to realize the synchronous rotation of multiple transmission gears, which is conducive to controlling the conveying rollers to realize the function of rotating conveying, facilitates the continuous conveying of silicon wafers during the water film covering operation, and helps to improve the efficiency of the operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the three-dimensional structure of a device for making the BSG water film more uniform proposed by the utility model;

[0019] Figure 2 This is a schematic structural diagram from another angle of a device for making the BSG water film more uniform proposed by the utility model;

[0020] Figure 3 This is a partial structural diagram of a device for making the BSG water film more uniform proposed by the utility model;

[0021] Figure 4 This is a schematic diagram of the structure of a device for making the BSG water film more uniform from another angle proposed by the present invention;

[0022] Figure 5 For this utility model Figure 4 A in the figure is an enlarged structural diagram.

[0023] Legend: 1. Water film covering mechanism; 101. Water sprayer; 102. Water spray head; 103. Atomizing nozzle; 104. Valve; 105. Connector; 106. Sealing cover; 107. Water connection head; 108. Sealing ring; 109. Side bracket; 110. Filter box; 111. Filter hole; 112. Sealing ring; 113. Inner ring; 2. Sealing plate mechanism; 201. Partition plate; 202. Side support block; 3. Conveying mechanism; 301. Conveying frame; 302. Conveying roller; 303. Transmission gear; 304. Driving motor; 305. Mounting frame; 306. Transmission belt; 307. First limit block; 308. Second limit block; 309. Bottom support frame; 310. Fixing hole; 311. Silicon wafer. DETAILED DESCRIPTION

[0024] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features therein can be combined with each other without conflict.

[0025] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0026] Example 1: Figure 1-Figure 5As shown, the utility model provides a technical solution: a device for making the BSG water film more uniform, comprising a water film covering mechanism 1, a sealing plate mechanism 2 is provided on the side of the water film covering mechanism 1, a conveying mechanism 3 is provided at the bottom of the sealing plate mechanism 2, the water film covering mechanism 1 comprises a water sprayer 101, a water sprayer head 102 is provided at the bottom of the water sprayer 101, a plurality of atomizing nozzles 103 are distributed in a circle along the clockwise direction on the bottom of the water sprayer head 102, a valve 104 is installed on the side of the water sprayer 101, one end of the valve 104 is connected to a connector 105, one end of the connector 105 is threadedly connected to a sealing cover 106, an inner ring 113 is provided on the inner side of the sealing cover 106, and a filter box 110 is threadedly connected to the inner side of the inner ring 113. The side of the sealing cover 106 is fixedly connected to a water receiving head 107, and a sealing ring 108 is provided on the outer wall of the water receiving head 107. The water receiving head 107 is connected to the interior of the connecting head 105. Side brackets 109 are symmetrically fixedly installed on both sides of the water sprayer 101, and a side support plate is fixedly installed on one end of the side bracket 109. A plurality of filter holes 111 are evenly penetrated through the outer wall of the filter box 110. The filter box 110 passes through the inner side of the valve 104. A sealing ring 112 is fixedly installed on the inner side of the sealing cover 106, and the sealing ring 112 is connected to one end of the inner side of the filter box 110. The sealing plate mechanism 2 includes a partition plate 201, and side support blocks 202 are symmetrically provided on the bottom of both sides of the partition plate 201. The side support blocks 202 are all installed on the top of the conveying frame 301.

[0027] In this embodiment, the connection of valve 104, connector 105, sealing cover 106 and water receiving head 107 facilitates the connection and transportation of liquid. The water sprayer 101 cooperates with the water spray head 102 to transport water to the position of the atomizing nozzle 103 for uniform atomization and spraying. In terms of coverage integrity, it can ensure that the treated surface is completely covered by the water film, and there is almost no missed area. The thickness consistency of the water film is excellent. The atomized liquid can form a water film with uniform thickness, avoiding the situation where the local thickness is too thick or too thin, and increasing the coverage area of the water film, thereby ensuring more uniformity, so that the battery cell will not cause over-engraving during the preparation process, thereby improving the yield and efficiency of the battery cell. The uniform water film distribution helps to improve the utilization efficiency of the liquid. The liquid can evenly cover the target surface, reducing unnecessary waste and loss. The use of a spray nozzle saves more water than a normal drip nozzle, reduces water consumption, and thus reduces costs. The sealing ring 108 is arranged on the outside of the water inlet 107, which is beneficial to improving the stability of the water pipe connection. The filter box 110 is connected to the inner ring 113 on the inner side of the sealing cover 106, and cooperates with the sealing ring 112 to achieve a sealed connection, which is beneficial to filtering fine particles through the filter holes 111 distributed on the filter box 110 when water enters the water inlet 107, and is beneficial to filtering water before the water film is formed. The tiny particles and impurities in the water are removed by a high-precision filter, thereby improving the water quality and reducing the influence of impurities on the nozzle and the water film. The partition plate 201 cooperates with the side support block 202 to provide shielding while ensuring stable support, and cooperates with the side bracket 109 to provide stable support for the water film covering mechanism 1.

[0028] Example 2: Figure 1-Figure 5 As shown, the conveying mechanism 3 includes a conveying frame 301, and multiple conveying rollers 302 are evenly distributed on the inner side of the conveying frame 301. A transmission gear 303 is installed at one end of the conveying roller 302. A silicon wafer 311 is set on the top of the conveying roller 302. A driving motor 304 is set at one end of a single conveying roller 302. The outer wall of the transmission gear 303 is meshed and wound with a transmission belt 306. A plurality of first limit blocks 307 and second limit blocks 308 are symmetrically distributed on one side of the conveying frame 301. The first limit block 307 is arranged above the second limit block 308. The first limit block 307 and the second limit block 308 are both distributed on the outside of the transmission belt 306. A mounting frame 305 is set on the top of the driving motor 304. One end of the mounting frame 305 is fixedly installed on one side of the conveying frame 301. A bottom support frame 309 is fixedly installed at the bottom of the conveying frame 301. Fixing holes 310 are opened at both ends of the bottom of the bottom support frame 309.

[0029] In this embodiment, the conveying frame 301 facilitates the evenly distributed installation of the conveying rollers 302, and at the same time cooperates with the drive motor 304 to drive the single conveying roller 302 to rotate, thereby driving the transmission gear 303 to rotate synchronously. The transmission gear 303 is engaged with the transmission belt 306 to realize the synchronous rotation of multiple transmission gears 303, which is beneficial to controlling the conveying roller 302 to realize the function of rotation and conveying, and facilitates the continuous conveying of silicon wafers 311 during the water film covering operation, which is beneficial to improving the efficiency of the operation. The first limit block 307 and the second limit block 308 are pressed on the outside of the transmission belt 306, which is beneficial to provide a limiting effect on the transmission belt 306, ensuring that the inner side of the transmission belt 306 is pressed against the outer wall of the transmission gear 303, and the bottom support frame 309 cooperates with the fixing hole 310 to provide stable support for the conveying frame 301, ensuring overall stable use.

[0030] The working principle of this embodiment is as follows: when in use, the motor 304 is first driven to drive the single conveying roller 302 to rotate, and then the transmission gear 303 is driven to rotate synchronously. The transmission gear 303 is meshed with the transmission belt 306 to realize the synchronous rotation of multiple transmission gears 303, which is conducive to controlling the conveying roller 302 to realize the function of rotation and conveying, and facilitates the continuous conveying of silicon wafers 311 during the water film covering operation. The first limit block 307 and the second limit block 308 are pressed on the outside of the transmission belt 306, which is conducive to providing a limiting effect on the transmission belt 306. The filter box 110 is connected to the inner side of the sealing cover 106. The ring 113 is installed and cooperates with the sealing ring 112 to achieve a sealed connection, which is beneficial for filtering fine particles through the filter holes 111 distributed on the filter box 110 when water enters the water receiving head 107, and is beneficial for filtering water before the water film is formed. The small particles and impurities in the water are removed by a high-precision filter. The valve 104, the connecting head 105, the sealing cover 106 and the water receiving head 107 are connected to facilitate the connection and transportation of the liquid. The water sprayer 101 and the water spray head 102 cooperate to transport the water to the position of the atomizing nozzle 103 for uniform atomization and spraying, and in terms of coverage integrity, it can ensure that the treated surface is completely covered by the water film.

[0031] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any other form. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes for application in other fields. However, any simple modification, equivalent change and modification of the above embodiment made according to the technical essence of the present invention without departing from the content of the technical solution of the present invention shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A device for making BSG water film more uniform, comprising a water film covering mechanism (1), characterized in that: A sealing plate mechanism (2) is provided on the side of the water film covering mechanism (1), and a conveying mechanism (3) is provided on the bottom of the sealing plate mechanism (2). The water film covering mechanism (1) comprises a water sprayer (101), a water spray head (102) is provided on the bottom of the water spray head (102), and a plurality of atomizing nozzles (103) are distributed in a clockwise direction around the bottom of the water spray head (102). A valve (104) is installed on the side of the water sprayer (101), one end of the valve (104) is connected to a connector (105), one end of the connector (105) is threadedly connected to a sealing cover (106), an inner ring (113) is provided on the inner side of the sealing cover (106), the inner side of the inner ring (113) is threadedly connected to a filter box (110), and a water receiving head (107) is fixedly connected to the side of the sealing cover (106).

2. The device for making the BSG water film more uniform according to claim 1, characterized in that: The conveying mechanism (3) comprises a conveying frame (301), a plurality of conveying rollers (302) are evenly distributed on the inner side of the conveying frame (301), a transmission gear (303) is installed at one end of the conveying roller (302), and a silicon wafer (311) is arranged on the top of the conveying roller (302).

3. The device for making the BSG water film more uniform according to claim 2, characterized in that: A driving motor (304) is provided at one end of a single conveying roller (302), and a transmission belt (306) is meshed and wound around the outer wall of the transmission gear (303).

4. The device for making the BSG water film more uniform according to claim 2, characterized in that: A plurality of first limiting blocks (307) and second limiting blocks (308) are symmetrically distributed on one side of the conveying frame (301), wherein the first limiting blocks (307) are arranged above the second limiting blocks (308), and the first limiting blocks (307) and the second limiting blocks (308) are both distributed on the outside of the transmission belt (306).

5. The device for making the BSG water film more uniform according to claim 1, characterized in that: A sealing ring (108) is provided on the outer wall of the water receiving head (107), and the water receiving head (107) is communicated with the interior of the connecting head (105).

6. The device for making the BSG water film more uniform according to claim 1, characterized in that: Side brackets (109) are symmetrically fixedly mounted on both sides of the water jet machine (101), and a side support plate is fixedly mounted on one end of the side bracket (109).

7. The device for making the BSG water film more uniform according to claim 1, characterized in that: A plurality of filter holes (111) are evenly penetrated through the outer wall of the filter box (110), and the filter box (110) penetrates the inner side of the valve (104).

8. The device for making the BSG water film more uniform according to claim 1, characterized in that: A sealing ring (112) is fixedly mounted on the inner side of the sealing cover (106), and the sealing ring (112) is connected to one end of the inner side of the filter box (110).

9. The device for making the BSG water film more uniform according to claim 2, characterized in that: The plate sealing mechanism (2) comprises a partition plate (201), and side support blocks (202) are symmetrically provided at the bottoms of both sides of the partition plate (201), and the side support blocks (202) are both mounted on the top of the conveying frame (301).

10. The device for making the BSG water film more uniform according to claim 3, characterized in that: A mounting frame (305) is provided on the top of the driving motor (304), one end of the mounting frame (305) is fixedly mounted on one side of the conveying frame (301), a bottom support frame (309) is fixedly mounted on the bottom of the conveying frame (301), and fixing holes (310) are provided through both ends of the bottom of the bottom support frame (309).

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