Efficient laser transfer printing device

Abstract

The utility model discloses an efficient laser transfer printing device. The device comprises a laser device, and a light beam emitted by the laser device is a Gaussian light beam; the laser beam expander is used for amplifying a light beam emitted by the laser; the diffractive optical element is used for shaping the amplified light beam; the laser scanning mirror is composed of a two-dimensional galvanometer and a field lens; and the transfer printing template is positioned at the working position of the field lens on the laser scanning mirror. According to the utility model, the laser processing wavelength is short wave, and smaller light spots can be obtained, so that the width of the transferred electrode is narrower, and raw materials are saved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser transfer, in particular to a high-efficiency laser transfer device. Background Art

[0002] Laser transfer technology has a broad market presence in the field of electronic device manufacturing. Transfer technology involves removing the device to be transferred from a transfer substrate to another substrate (such as a silicon wafer) to achieve the manufacturing of electronic devices.

[0003] Existing laser transfer technologies mostly use near-infrared wavelengths. Compared to short-wave visible light, lasers have a greater diffraction limit and a larger spot size after focusing. Therefore, laser energy is wasted when processing narrower metal grid lines. Existing laser transfer templates do not consider the utilization rate of the laser, so some laser energy is wasted due to reflection on the transfer template. Utility Model Content

[0004] The purpose of the present invention is to provide a high-efficiency laser transfer device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a high-efficiency laser transfer device, comprising:

[0006] A laser, wherein the light beam emitted by the laser is a Gaussian beam;

[0007] a laser beam expander, which amplifies the light beam emitted by the laser;

[0008] a diffractive optical element, wherein the diffractive optical element shapes the amplified light beam;

[0009] A laser scanning mirror, which is composed of a two-dimensional galvanometer mirror and a field mirror;

[0010] The transfer template is located at the working position of the field mirror on the laser scanning mirror.

[0011] By adopting the above technical solution, the light beam emitted by the laser is amplified and shaped into a rectangular flat-top beam through a laser beam expander and a diffraction optical element. The rectangular flat-top beam is then processed on the transfer template through a laser scanning mirror, so that the metal slurry on the transfer template is transferred to the battery cell to form the electrode of the battery cell, thereby realizing laser transfer.

[0012] Preferably, the wavelength of the light beam emitted by the laser is 400nm-600nm, the pulse width is 1ns-continuous, the average power is 10W-200W, the repetition frequency is 50kHz-2MHz, and the beam diameter is 0.5mm-10mm.

[0013] By adopting the above technical solution, a short wavelength is used in laser processing, which can obtain a smaller light spot. Therefore, the width of the transferred electrode can be narrower, thereby saving raw materials.

[0014] Preferably, the magnification of the laser beam expander is 1-5 times, and the diameter of the light spot after magnification by the laser beam expander is 0.5mm-20mm.

[0015] By adopting the above technical solution, the laser beam expander can amplify the light beam emitted by the laser and expand the diameter of the light spot.

[0016] Preferably, the diffractive optical element shapes the light beam into a rectangular flat-top beam, and the size of the shaped light beam at the focus is 10um*100um-50u*2mm.

[0017] By adopting the above technical solution, the rectangular flat-top beam scanning processing range can overlap with the transfer area as much as possible, thereby improving the utilization rate of the laser and enhancing the processing efficiency.

[0018] Preferably, the scanning range of the two-dimensional galvanometer on the laser scanning mirror is ±25°-±45°, and the focal length of the field lens is 150mm-1000mm.

[0019] Preferably, the transfer template includes an amplifying lens, a glass matrix is installed at the bottom of the amplifying lens, a plurality of grooves are arranged at equal intervals at the bottom of the glass matrix, a reflective film is installed at the bottom of the glass matrix, the groove width is 10um-100um, and the depth is 5um-200um, and the transfer template is filled with metal slurry through the grooves.

[0020] By adopting the above technical solution, the top of the transfer template is the back of the template, the bottom of the transfer template is the front of the template, the transfer template is made of transparent glass material, the back of the template is a smooth plane, the anti-reflection film corresponds to the laser wavelength, so that the laser transmittance is increased, and there is a groove on the front of the template. The groove width is 10um-100um and the depth is 5um-200um. The laser wavelength absorption material is plated in the groove so that most of the laser energy is absorbed by the groove, thereby increasing energy utilization efficiency. The front of the template between the grooves is plated with a reflective film so that the laser contacting the grooves is reflected to prevent the slurry from diffusing beyond the position of the groove after contacting the laser. The groove is filled with metal slurry. During processing, the battery cell is affixed to the front of the transfer template, and the laser is incident from the back of the template. The template is placed on the working position of the field mirror. The laser energy is absorbed by the metal slurry to generate heat, so that the metal slurry in the groove is transferred to the battery cell to form the electrode of the battery cell, thereby realizing laser transfer.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] This high-efficiency laser transfer device coats a reflective film on the front of the laser transfer template to better control the laser transfer area and make the processed area more precise.

[0023] This high-efficiency laser transfer device uses beam shaping technology. The processed laser is a rectangular flat-top beam, and the scanning processing range can overlap with the transfer area as much as possible, which improves the utilization rate of the laser and enhances the processing efficiency.

[0024] In this high-efficiency laser transfer device, the back of the laser transfer template is coated with a transmissive film, and the grooves are coated with a light-absorbing material, so that most of the laser light is absorbed by the transfer material and converted into heat, reducing the waste of laser energy and improving laser utilization efficiency.

[0025] This high-efficiency laser transfer device uses a short laser processing wavelength to obtain a smaller light spot, so the width of the transferred electrode can be narrower, thereby saving raw materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a view of the laser transfer device of the present invention;

[0027] Figure 2 This is a schematic diagram of the transfer template structure of the utility model.

[0028] In the figure: 1. Laser; 2. Laser beam expander; 3. Diffraction optical element; 4. Laser scanning mirror; 5. Transfer template; 50. Amplification lens; 51. Glass matrix; 52. Reflection film; 53. Groove; 6. Solar cell. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] See also Figure 1-2 The present invention provides an embodiment of a high-efficiency laser transfer device, comprising:

[0031] Laser 1, the beam emitted by laser 1 is a Gaussian beam;

[0032] Laser beam expander 2, which amplifies the light beam emitted by laser 1;

[0033] a diffractive optical element 3, which shapes the amplified light beam;

[0034] Laser scanning mirror 4, laser scanning mirror 4 is composed of a two-dimensional galvanometer mirror and a field mirror;

[0035] The transfer template 5 is located at the working position of the upper field mirror of the laser scanning mirror 4.

[0036] In this embodiment, the wavelength of the light beam emitted by the laser 1 is 400nm-600nm, the pulse width is 1ns-continuous, the average power is 10W-200W, the repetition frequency is 50kHz-2MHz, and the beam diameter is 0.5mm-10mm. The laser processing wavelength uses a short wave to obtain a smaller light spot, so the width of the transferred electrode can be made narrower, thereby saving raw materials.

[0037] In this embodiment, the magnification of the laser beam expander 2 is 1-5 times, and the diameter of the light spot after magnification by the laser beam expander 2 is 0.5mm-20mm. The laser beam expander 2 can amplify the light beam emitted by the laser 1 and expand the diameter of the light spot.

[0038] In this embodiment, the diffraction optical element 3 shapes the light beam into a rectangular flat-top beam. The size of the shaped light beam at the focus is 10um*100um-50u*2mm. The scanning processing range of the rectangular flat-top beam can overlap with the transfer area as much as possible, thereby improving the utilization rate of the laser and enhancing the processing efficiency.

[0039] In this embodiment, the scanning range of the two-dimensional galvanometer on the laser scanning mirror 4 is ±25°-±45°, and the focal length of the field lens is 150mm-1000mm.

[0040] In this embodiment, the transfer template 5 includes an amplifying lens 50, a glass matrix 51 is installed at the bottom of the amplifying lens 50, and a plurality of grooves 53 are arranged at equal intervals at the bottom of the glass matrix 51. A reflective film 52 is installed at the bottom of the glass matrix 51. The width of the grooves 53 is 10um-100um and the depth is 5um-200um. The top of the transfer template 5 is the back of the template, and the bottom of the transfer template 5 is the front of the template. The transfer template 5 is made of transparent glass material, and the back of the template is a smooth plane. The antireflection film 50 corresponds to the laser wavelength to increase the laser transmittance. The front of the template has grooves 53, and the width of the grooves 53 is 10um-100um and the depth is 5um-200um. The transfer template 5 is filled with metal slurry through the groove 53, and the laser wavelength absorption material is plated in the groove 53 so that most of the laser energy is absorbed by the groove 53, thereby increasing the energy utilization efficiency. The front of the template between the grooves 53 is plated with a reflective film 52 so that the laser contacting the grooves 53 is reflected, thereby preventing the slurry from diffusing beyond the position of the groove 53 after contacting the laser. The groove 53 is filled with metal slurry. During processing, the front of the transfer template 5 is pasted with a battery cell, and the laser is incident from the back of the template. The template is placed on the working position of the field mirror. The laser energy is absorbed by the metal slurry and generates heat, which transfers the metal slurry in the groove to the battery cell 6 to form the electrode of the battery cell 6, thereby realizing laser transfer.

[0041] Working principle: The light beam emitted by the laser 1 is amplified and shaped into a rectangular flat-top beam by the laser beam expander 2 and the diffraction optical element 3. The rectangular flat-top beam is then processed on the transfer template 5 through the laser scanning mirror 4, so that the metal slurry on the transfer template 5 is transferred to the battery cell 6 to form the electrode of the battery cell 6, thereby realizing laser transfer.

[0042] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or scope of the present invention. Therefore, the embodiments of the present invention are illustrative and non-restrictive. The scope of the present invention is defined by the appended claims, not the foregoing description, and it is intended that all variations within the meaning and scope of equivalents of the claims be encompassed within the present invention. Any reference numerals in the claims should not be construed as limiting the claim to which they relate.

Claims

1. A high-efficiency laser transfer device, characterized in that: include: A laser (1), wherein the light beam emitted by the laser (1) is a Gaussian beam; A laser beam expander (2), wherein the laser beam expander (2) amplifies the light beam emitted by the laser (1); a diffractive optical element (3), wherein the diffractive optical element (3) shapes the amplified light beam; A laser scanning mirror (4), the laser scanning mirror (4) consisting of a two-dimensional galvanometer mirror and a field mirror; A transfer template (5), wherein the transfer template (5) is located at a working position of the upper field mirror of the laser scanning mirror (4).

2. The high-efficiency laser transfer device according to claim 1, characterized in that: The laser (1) emits a light beam with a wavelength of 400nm-600nm, a pulse width of 1ns-continuous, an average power of 10W-200W, a repetition frequency of 50kHz-2MHz, and a light beam diameter of 0.5mm-10mm.

3. The high-efficiency laser transfer device according to claim 1, characterized in that: The laser beam expander (2) has a magnification of 1-5 times, and the diameter of the light spot after magnification by the laser beam expander (2) is 0.5 mm-20 mm.

4. The high-efficiency laser transfer device according to claim 1, characterized in that: The diffraction optical element (3) shapes the light beam into a rectangular flat-top beam, and the size of the shaped light beam at the focus is 10um*100um-50u*2mm.

5. The high-efficiency laser transfer device according to claim 1, characterized in that: The scanning range of the two-dimensional galvanometer on the laser scanning mirror (4) is ±25°-±45°, and the focal length of the field mirror is 150mm-1000mm.

6. The high-efficiency laser transfer device according to claim 1, characterized in that: The transfer template (5) includes an amplifying lens (50), a glass matrix (51) is installed at the bottom of the amplifying lens (50), a plurality of grooves (53) are arranged at equal intervals at the bottom of the glass matrix (51), a reflective film (52) is installed at the bottom of the glass matrix (51), the grooves (53) have a width of 10 μm-100 μm and a depth of 5 μm-200 μm, and the transfer template (5) is filled with metal slurry through the grooves (53).

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