Crystal growing device

Abstract

The utility model relates to a crystal growing device which comprises a cylinder body, a supporting seat is arranged at the bottom of the cylinder body, a placing table used for placing a crucible is vertically connected to the supporting seat in a sliding mode, a plurality of heat insulation assemblies are vertically arranged in the cylinder body at intervals, a heating assembly is arranged in the cylinder body below the heat insulation assemblies, and the heating assembly is used for heating the crucible. The heating assembly is circumferentially arranged in the axis direction of the barrel, the heating area of the crucible located below the heat insulation assembly can be changed through adjustable arrangement of the vertical position of the placement table, so that the interior of the crucible is adjusted to have a proper experimental temperature, crystal growth is facilitated, and the device is suitable for industrial production and has very high practicability.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and in particular relates to a crystal growth device. Background Art

[0002] The existing Chinese patent database discloses a patent entitled "Crystal Growth Device," application number CN202322799243.3, filed on October 18, 2023. The patent relates to a crystal growth device and relates to the field of crystal growth technology. The crystal growth device comprises a furnace body, a support assembly, a lifting drive mechanism, and a flow stabilizer. The furnace body forms a furnace chamber, within which a heating assembly is located. The support assembly comprises a stage and a support shaft. The stage is located within the furnace chamber and is used to hold a crucible. One end of the support shaft is connected to the bottom of the stage. The lifting drive mechanism is used to raise and lower the furnace body relative to the support assembly. The flow stabilizer is located within the furnace chamber and spaced above the stage. It can be raised and lowered relative to the furnace body with the stage. When the stage is lowered, the flow stabilizer descends with it, reducing the space above the crucible and air flow. This results in a more stable temperature field and improves the quality of crystal growth. Furthermore, the flow stabilizer reduces energy consumption in the crystal growth device.

[0003] The existing temperature control method requires controlling each section of the heater to be at an appropriate temperature so that the raw material can vaporize and rise, and then crystallize at the target position. The existing temperature control method is relatively cumbersome and difficult to control. Therefore, this article aims to propose a crystal growth device. By adjusting the vertical position of the crucible and changing the size of the heated area, the inside of the crucible can be kept at a suitable experimental temperature. At the same time, the setting of the manually adjustable partition assembly is used to make the device have two adjustable modes, which is more practical. Utility Model Content

[0004] The technical problem to be solved by the present invention is how to adjust the interior of the crucible to have a suitable experimental temperature to facilitate the growth of crystals. In order to improve the shortcomings thereof, the present invention provides a crystal growing device.

[0005] To achieve the above-mentioned purpose, the present invention is realized through the following technical solutions:

[0006] A crystal growth device includes a cylinder, a support seat is provided at the bottom of the cylinder, a placement table for placing a crucible is vertically slidably connected to the support seat, a plurality of insulation components are vertically spaced apart in the cylinder, a heating component is provided in the cylinder below the insulation component, and the heating component is arranged circumferentially along the axis direction of the cylinder.

[0007] As a preferred solution, the thermal insulation assembly includes a plurality of fixed partitions fixed on the inner wall of the cylinder, a useful sliding cavity is opened between adjacent fixed partitions, a movable partition is slidably connected in the sliding cavity, the movable partition passes through the side of the cylinder and is inserted into the sliding cavity, a plurality of fixed partitions and the movable partition cooperate to form a circular ring structure, which abuts against the outer peripheral surface of the crucible, and thermal insulation pads are provided on the free end surfaces of the fixed partitions and the movable partitions.

[0008] As a preferred solution, a vertical screw is provided in the support seat, a screw nut is connected to the screw, a vertical rod extends from the bottom of the placement table, the free end of the vertical rod passes through the support seat and is connected to the screw nut, and the free end of the screw passes through the bottom of the cylinder and is connected to a driving device.

[0009] As a preferred solution, the placement platform is arranged in a U-shape, and the two ear plate sections of the placement platform are arranged to fit the bottom outer peripheral surface of the crucible.

[0010] As a preferred solution, the heating component is a graphite heater.

[0011] Compared with the prior art, the beneficial effect of the present invention is that by adjusting the vertical position of the placement table, the heating area of the crucible located below the insulation component can be changed, thereby adjusting the interior of the crucible to have a suitable experimental temperature, which is convenient for crystal growth. The coordinated setting of the fixed partitions and the movable partitions in several insulation components makes it convenient for the operator to manually adjust the heating area of the crucible, adding a new adjustment method. The device is suitable for industrial production and has strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural diagram of the present utility model.

[0013] Figure 2 This is a schematic structural diagram of the thermal insulation component in the present invention.

[0014] In the figure: 1 cylinder, 2 support base, 3 placement table, 4 insulation assembly, 401 fixed partition, 402 movable partition, 403 insulation pad, 5 heating assembly, 6 lead screw, 7 lead screw nut, 8 vertical rod, 9 crucible, 901 raw material area, 902 crystal growth area. DETAILED DESCRIPTION

[0015] The technical solution of the present application is further described below with reference to the accompanying drawings and embodiments.

[0016] like Figure 1-2The figure shows a crystal growth device, which includes a cylinder 1, a support base 2 is provided at the bottom of the cylinder 1, and a placement table 3 for placing a crucible 9 is vertically slidably connected to the support base 2. A plurality of thermal insulation components 4 are vertically spaced apart in the cylinder 1. A heating component 5 is provided in the cylinder 1 below the thermal insulation component 4. The heating component 5 is arranged circumferentially along the axis of the cylinder 1. The thermal insulation component 4 includes a plurality of fixed partitions 401 fixed to the inner wall of the cylinder 1. A useful sliding cavity is defined between adjacent fixed partitions 401. A movable partition 402 is slidably connected in the sliding cavity. The movable partition 402 passes through the side of the cylinder 1 and is inserted into the sliding cavity. The plurality of fixed partitions 401 and the movable partition 402 cooperate to form a circular ring-shaped structure that contacts the outer peripheral surface of the crucible 9. Thermal insulation pads 403 are provided on the free end surfaces of the fixed partitions 401 and the movable partitions 402. A vertical lead screw 6 is installed within the support base 2, connected to a lead screw nut 7. A vertical rod 8 extends from the bottom of the platform 3. The free end of the rod 8 passes through the support base 2 and connects to the lead screw nut 7. The free end of the lead screw 6 passes through the bottom of the cylinder 1 and connects to a drive device. The platform 3 is U-shaped, with its two tabs fitting against the bottom outer surface of the crucible 9. The heating assembly 5 is a graphite heater.

[0017] During operation, the operator places the crucible 9 containing the raw materials on the placement table 3, and at the same time is located in the heating area where the heating component 5 is located. At the same time, the upper end of the crucible 9 is the crystal growth area 902, which is located above the bottommost thermal insulation component 4, that is, to ensure that the thermal insulation component 4 is provided on the outside of the crucible 9 between the crystal growth area 902 and the raw material area 901. By controlling the operation of the driving device, the lead screw 6 is driven to rotate, and the lead screw 6 drives the lead screw nut 7 to move in the vertical direction. Through the vertical rod 8, the placement table 3 and the lead screw nut 7 move synchronously. When the placement table 3 moves downward, the portion of the crucible 9 located below the thermal insulation component 4 as a whole increases, and the heat is increased. Therefore, the temperature of the crystal growth area 902 at the top of the crucible 9 rises. Conversely, when the placement table 3 moves upward, the portion of the crucible 9 located below the thermal insulation component 4 as a whole decreases, and the heat is reduced. Therefore, the temperature of the crystal growth area 902 at the top of the crucible 9 decreases.

[0018] When adjustment is performed inside the heat insulation component 4, when the movable partition 402 in the bottom heat insulation component 4 is slid outward and pulled out, the heat radiated by the heating component 5 flows upward through the sliding cavity, thereby increasing the overall heated area of the crucible 9. Every time the movable partition 402 in a layer of the heat insulation component 4 is pulled out, the overall heated area of the crucible 9 will continue to increase, so the temperature of the crystal growth zone 902 at the top of the crucible 9 rises. Anyway, when the movable partition 402 is plugged into the original position, the overall heated area of the crucible 9 will decrease, so the temperature of the crystal growth zone 902 at the top of the crucible 9 will drop. The above two methods can simply and efficiently select the heating method of the crystal growth device.

[0019] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solutions disclosed in the present invention, technicians in this field can make some substitutions and deformations of some technical features therein according to the disclosed technical content without creative labor, and these substitutions and deformations are all within the protection scope of the present invention.

Claims

1. A crystal growth device, characterized in that: The invention comprises a cylinder (1), a support base (2) is provided at the bottom of the cylinder (1), a placement table (3) for placing a crucible (9) is vertically slidably connected to the support base (2), a plurality of heat insulation components (4) are vertically spaced apart in the cylinder (1), a heating component (5) is provided in the cylinder (1) below the heat insulation component (4), and the heating component (5) is arranged circumferentially along the axis direction of the cylinder (1).

2. A crystal growth device according to claim 1, characterized in that: The heat insulation assembly (4) includes a plurality of fixed partitions (401) fixed on the inner wall of the cylinder (1), a useful sliding cavity is opened between adjacent fixed partitions (401), a movable partition (402) is slidably connected in the sliding cavity, the movable partition (402) passes through the side of the cylinder (1) and is inserted into the sliding cavity, the plurality of fixed partitions (401) and the movable partition (402) cooperate to form a circular ring structure, which abuts against the outer peripheral surface of the crucible (9), and heat insulation pads (403) are provided on the free end surfaces of the fixed partition (401) and the movable partition (402).

3. A crystal growth device according to claim 2, characterized in that: A vertical screw (6) is provided in the support seat (2), and a screw nut (7) is connected to the screw (6). A vertical rod (8) extends from the bottom of the placement table (3), and the free end of the vertical rod (8) passes through the support seat (2) and is connected to the screw nut (7). The free end of the screw (6) passes through the bottom of the cylinder (1) and is connected to a driving device.

4. A crystal growth device according to claim 3, characterized in that: The placement platform (3) is arranged in a U-shape, and the two ear plate sections of the placement platform (3) are arranged to fit the bottom outer peripheral surface of the crucible (9).

5. A crystal growth device according to any one of claims 1 to 4, characterized in that: The heating component (5) is a graphite heater.

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