Piezoelectric displacement device for scanning probe microscope

Abstract

The utility model relates to the technical field of piezoelectric positioning, and discloses a piezoelectric displacement device for a scanning probe microscope, which comprises an adapter plate and a single drawing plate. The adapter plate comprises a main body platform; the single-shaft plate comprises a first single-shaft plate and a second single-shaft plate which are respectively connected with the first surface and the second surface of the adapter plate in an overlapping manner; the first single-shaft plate and the second single-shaft plate are used for driving the main body platform to move in the corresponding preset axial direction. The adapter plate is arranged between the two single-shaft plates, different displacement mechanisms are separated, the different displacement mechanisms do not need to be overlapped, and the complexity of the system is reduced. Moreover, the uniaxial plates are arranged on the two surfaces of the adapter plate, and the displacement mechanism, the driver, the displacement detection device and other devices are exposed on the two sides of the main body platform of the adapter plate, so that the complexity of the system is reduced, the assembly space is increased, the assembly and layout of the devices are more convenient, and the flexibility of the assembly and layout of the devices is improved.

Description

Technical Field

[0001] The present application relates to the field of piezoelectric positioning technology, for example, to a piezoelectric displacement device for a scanning probe microscope. Background Art

[0002] Currently, with the development of precision manufacturing and micro-nanotechnology, the requirements for displacement control accuracy are increasing. Among the many displacement drive technologies, piezoelectric displacement stages have been widely used in the field of precision positioning due to their advantages such as fast response speed and high control accuracy. Traditional piezoelectric displacement stages are mostly single-layer structures. However, single-layer structures have design problems such as large device space occupation and difficult layout, which limits the layout flexibility of the driver and displacement detection device and also restricts the optimization space for the transmission ratio. Moreover, when achieving large displacement strokes, single-layer structures often require larger piezoelectric ceramics or complex lever amplification mechanisms, which not only increases the complexity of the system but also places higher demands on processing accuracy and assembly process. Therefore, how to design a piezoelectric displacement stage with a more reasonable structure, higher transmission ratio, and more flexible assembly has become a current problem that needs to be solved urgently.

[0003] Related technology discloses a macro / micro two-dimensional displacement stage, which adopts a macro / micro two-stage drive. The macro / micro two-dimensional displacement stage is divided into three parts: a macro displacement stage, a micro displacement stage and a drive element. The micro platform adopts a "cross" layout, which theoretically has no stacking and coupling errors, the same stiffness in the X and Y directions, and a simple structure. The displacement of the macro displacement stage in the X and Y directions is always along the upper surface of the substrate. The macro platform can achieve fast and efficient positioning through a micrometer, and precise feeding and error compensation can be achieved by driving the micro platform through a micro-driver, thereby solving the contradiction between large stroke and precise positioning. Since the micro platform adopts a new "cross" structure mode, the stacking error or nesting error inherent in the traditional micro platform is effectively reduced, the overall size of the platform is reduced, the positioning is more precise, and the performance is more stable.

[0004] During the implementation of the embodiments of the present disclosure, it was found that at least the following problems exist in the related art:

[0005] Related technologies form a planar displacement stage by stacking two central platforms with displacement mechanisms in different directions. This separate arrangement of the two central platforms improves the flexibility of device assembly layout to a certain extent. However, in actual applications, both platforms in related technologies are equipped with displacement mechanisms in both the X and Y directions. Stacking the two central platforms complicates the arrangement of the displacement mechanisms, increasing system complexity and reducing the flexibility of the assembly layout of components such as the displacement mechanisms, drivers, and displacement detection devices.

[0006] It should be noted that the information disclosed in the above background technology section is only used to enhance the understanding of the background of this application, and therefore may include information that does not constitute prior art known to ordinary technicians in this field. Utility Model Content

[0007] In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. The summary is not an extensive review, nor is it intended to identify key / critical elements or delineate the scope of protection of these embodiments, but rather serves as a prelude to the detailed description that follows.

[0008] The embodiments of the present disclosure provide a piezoelectric displacement device for a scanning probe microscope to reduce the complexity of the system structure, thereby improving the assembly flexibility of a driver and a displacement detection device.

[0009] In some embodiments, a piezoelectric displacement device for a scanning probe microscope includes: an adapter plate, including a main platform; a uniaxial plate, including a first uniaxial plate and a second uniaxial plate, which are respectively overlapped and connected to the first surface and the second surface of the adapter plate; wherein the first uniaxial plate and the second uniaxial plate are respectively used to drive the main platform to displace along the corresponding preset axial direction.

[0010] Optionally, the uniaxial plate includes: at least one displacement component, the displacement component includes a support component and a transmission component; the transmission component is respectively connected to the support component and the central platform, and is enclosed with the support component to form a accommodating cavity for placing the piezoelectric block; wherein, when voltage is applied to the piezoelectric block, the piezoelectric block will deform in an axial direction perpendicular to the preset axial direction, thereby pushing the support component to displace, and transmitting the displacement to the central platform through the transmission component.

[0011] Optionally, the support assembly includes: a first support arm; a second support arm connected to the first support arm through a transmission assembly; wherein the first support arm and the second support arm are symmetrically arranged about a preset axis.

[0012] Optionally, the transmission assembly includes: a transmission arm; a first boss, connected to the central platform, and connected to the first support arm and the second support arm at one end close to the central platform through the transmission arm; a second boss, connected to the first outer frame, and connected to the first support arm and the second support arm at one end close to the first outer frame through the transmission arm.

[0013] Optionally, the angle between the force arm of the transmission arm and the parallel line of the long arm of the transmission arm is greater than zero.

[0014] Optionally, the angle between the moment arm of the transmission arm and the perpendicular axis of the preset axis is greater than zero.

[0015] Optionally, the single-axis plate further includes: a first outer frame; a central platform, which is superimposed and connected to the main body platform; wherein, both ends of the central platform in a preset axial direction are connected to the first outer frame via a displacement component.

[0016] Optionally, the preset axial direction of the first uniaxial plate is different from the preset axial direction of the second uniaxial plate.

[0017] Optionally, the first surface and the second surface are two opposite surfaces of the adapter plate.

[0018] Optionally, the adapter plate includes: a second outer frame, hinged to the main platform.

[0019] The piezoelectric displacement device for a scanning probe microscope provided by the embodiments of the present disclosure can achieve the following technical effects:

[0020] The piezoelectric displacement device comprises an adapter plate, and a first uniaxial plate and a second uniaxial plate, which are superimposed and connected to the first and second surfaces of the adapter plate, respectively. By placing the adapter plate between the two uniaxial plates, the different displacement mechanisms are separated, eliminating the need for superimposition of the different displacement mechanisms and reducing system complexity. Furthermore, by placing the uniaxial plates on both sides of the adapter plate, components such as the displacement mechanism, driver, and displacement detection device are exposed on both sides of the adapter plate's main platform. This reduces system complexity while increasing assembly space, facilitating component assembly and layout, and enhancing flexibility in device assembly and layout.

[0021] The above general description and the following description are exemplary and explanatory only and are not intended to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] One or more embodiments are exemplarily described by corresponding drawings. These exemplary descriptions and drawings do not limit the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements. The drawings do not constitute a scale limitation. In addition,

[0023] Figure 1 is a schematic diagram of a superimposed connection between a single-axis plate and an adapter plate provided by an embodiment of the present disclosure;

[0024] Figure 2 is a schematic structural diagram of an adapter board provided in an embodiment of the present disclosure;

[0025] Figure 3 is a schematic structural diagram of a single-axis plate provided in an embodiment of the present disclosure;

[0026] Figure 4 It is a connection diagram of a transmission arm provided in an embodiment of the present disclosure.

[0027] Reference numerals:

[0028] 10: Adapter plate; 11: Main platform; 12: Second outer frame; 13: Hinge; 14: Screw hole;

[0029] 20: Single-axis plate; 21: First support arm; 22: Second support arm; 23: First transmission arm; 24: Second transmission arm; 25: Third transmission arm; 26: Fourth transmission arm; 27: First boss; 28: Second boss; 29: First outer frame; 30: Center platform; 31: Accommodating cavity; 32: First single-axis plate; 33: Second single-axis plate; 34: First end face; 35: Second end face. DETAILED DESCRIPTION

[0030] In order to be able to understand the features and technical content of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure is described in detail below in conjunction with the accompanying drawings. The accompanying drawings are for reference only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the sake of convenience of explanation, a full understanding of the disclosed embodiments is provided through multiple details. However, one or more embodiments can still be implemented without these details. In other cases, to simplify the drawings, well-known structures and devices can be simplified for display.

[0031] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0032] Combine Figures 1 to 3 As shown, an embodiment of the present disclosure provides a piezoelectric displacement device for a scanning probe microscope, comprising an adapter plate 10 and a uniaxial plate 20. The adapter plate 10 includes a main platform 11; the uniaxial plate 20 includes a first uniaxial plate 32 and a second uniaxial plate 33, which are respectively superimposed and connected to the first and second surfaces of the adapter plate 10. The first uniaxial plate 32 and the second uniaxial plate 33 are respectively used to drive the main platform 11 to move along corresponding preset axial directions.

[0033] The first surface and the second surface can be two opposing surfaces, two adjacent surfaces, or two surfaces that are neither adjacent nor opposing. The preset axial direction includes the positive direction and the negative direction of the preset axis. The preset axial direction can be any axial direction, for example, the preset axial direction includes the X-axis direction and the Y-axis direction. In actual applications, the preset axial direction corresponding to the first uniaxial plate 32 and the preset axial direction corresponding to the second uniaxial plate 33 can be the same or different. For example, the preset axial direction of the first uniaxial plate 32 can be the X-axis direction, and the preset axial direction of the second uniaxial plate 33 can also be the X-axis direction; the preset axial direction of the first uniaxial plate 32 can be the X-axis direction, and the preset axial direction of the second uniaxial plate 33 can also be the Y-axis direction; the preset axial direction of the first uniaxial plate 32 can be the Y-axis direction, and the preset axial direction of the second uniaxial plate 33 can also be the Y-axis direction, etc.

[0034] The piezoelectric displacement device provided in the embodiments of the present disclosure comprises an adapter plate 10, and a first uniaxial plate 32 and a second uniaxial plate 33, which are superimposed and connected to the first and second surfaces of the adapter plate 10, respectively. By placing the adapter plate 10 between the two uniaxial plates 20, the different displacement mechanisms are separated, eliminating the need for superimposing the different displacement mechanisms and reducing system complexity. Furthermore, by placing the uniaxial plates 20 on both sides of the adapter plate 10, components such as the displacement mechanism, driver, and displacement detection device are exposed on both sides of the adapter plate's main platform, facilitating component assembly and maintenance. This increases the flexibility of the component assembly layout and reduces component maintenance costs.

[0035] Optionally, the uniaxial plate 20 includes at least one displacement assembly. The displacement assembly includes a support assembly and a transmission assembly. The transmission assembly is connected to the support assembly and the central platform 30, respectively, and together with the support assembly, forms a housing 31 for the piezoelectric block. When a voltage is applied to the piezoelectric block, the piezoelectric block deforms in an axial direction perpendicular to a predetermined axis, thereby displacing the support assembly. This displacement is then transmitted to the central platform 30 via the transmission assembly.

[0036] In the embodiment of the present disclosure, the uniaxial plate 20 may be provided with one or more displacement components for driving the main platform 11 to move along a preset axial direction. Specifically, when there are multiple displacement components, the multiple displacement components may be evenly arranged in the preset axial direction of the uniaxial plate 20, so as to cooperatively drive the main platform 11 to move along the preset axial direction through multiple displacement components, thereby more accurately controlling the displacement of the piezoelectric displacement device in the preset axial direction. In addition, the accommodating cavity 31 formed by the transmission component and the support component may be of any shape. For example, the accommodating cavity 31 may be rectangular or hexagonal. Specifically, the accommodating cavity 31 is symmetrical about the preset axial direction. The piezoelectric block may be made of any piezoelectric material, and may be specifically configured according to requirements. The piezoelectric material includes piezoelectric ceramics, quartz, lithium niobate, lead tantalate, lead zirconate titanate, barium titanate, polymer piezoelectric materials and / or piezoelectric single crystals.

[0037] In some embodiments, in addition to providing one or more displacement components for driving the main platform 11 to move along a preset axial direction, the single-axis plate 20 may also provide one or more displacement components for driving the main platform 11 to move along a non-preset axial direction. The non-preset axial direction includes any direction that the main platform 11 may deviate from during the displacement process, for example, an axial direction perpendicular to the preset axial direction, a direction with an angle of 45° to the preset axial direction, and / or a direction with an angle of other angles to the preset axial direction. In this way, when only one single-axis plate 20 drives the main platform 11 to move, and the main platform 11 deviates from the corresponding preset axial displacement, the main platform 11 can be driven back to the preset axial direction by one or more displacement components for driving the main platform 11 to move along a non-preset axial direction, so as to reduce the displacement error caused by the uneven weight distribution of the main platform 11.

[0038] In this way, the displacement assembly can be one or more, and multiple displacement assemblies can be configured as needed to provide a larger force and displacement range, or a more complex motion mode can be achieved through the synergistic action of multiple displacement assemblies. In addition, the connection between the transmission assembly and the support assembly forms a accommodating cavity 31, and the piezoelectric block is confined to a specific space, so that the deformation of the piezoelectric block when voltage is applied is more concentrated and controllable. This can reduce the displacement deviation caused by deformation and the loss of force during the transmission process, ensuring the accuracy of the displacement output and the efficiency of force transmission from the piezoelectric block to the central platform 30. In addition, the support assembly and the transmission assembly are compactly arranged together to save space, making the entire displacement device more compact, freeing up more space for the assembly of other devices, and making the device assembly layout more free.

[0039] Optionally, the support assembly includes a first support arm 21 and a second support arm 22. The second support arm 22 is connected to the first support arm 21 via a transmission assembly; wherein the first support arm 21 and the second support arm 22 are symmetrically arranged about a preset axis.

[0040] In this way, the first support arm 21 and the second support arm 22 symmetrically arranged about the preset axis provide a more stable structure, which helps to maintain the balance of the entire displacement assembly, reduce the tilt or offset caused by asymmetric loads or moments, and thus ensure the consistency of the displacement along the preset axis.

[0041] Optionally, the transmission assembly includes a transmission arm, a first boss 27, and a second boss 28. The first boss 27 is connected to the central platform 30 and is connected to the first support arm 21 and the second support arm 22 at their ends near the central platform 30 via the transmission arm; the second boss 28 is connected to the first outer frame 29 and is connected to the first support arm 21 and the second support arm 22 at their ends near the first outer frame 29 via the transmission arm.

[0042] In the embodiment of the present disclosure, the transmission arm includes a first transmission arm 23, a second transmission arm 24, a third transmission arm 25 and a fourth transmission arm 26. The first boss 27 is connected to the end of the first support arm 21 close to the center platform 30 through the first transmission arm 23, and is connected to the end of the second support arm 22 close to the center platform 30 through the second transmission arm 24. In this way, when the piezoelectric block deforms and applies a force to the first support arm 21 and the second support arm 22, the first support arm 21 and the second support arm 22 will be displaced under the push of the force, and the motion and force will be transmitted to the center platform 30 through the first boss 27 through the first transmission arm 23 and the second transmission arm 24. The second boss 28 is connected to the end of the first support arm 21 close to the first outer frame 29 through the third transmission arm 25, and is connected to the end of the second support arm 22 close to the first outer frame 29 through the fourth transmission arm 26. The transmission arm is hinged to the first support arm 21, the second support arm 22, the first boss 27 and the second boss 28 respectively, and the first boss 27 and the second boss 28 are hinged to the central platform 30 and the first outer frame 29 respectively, thereby realizing the transmission of movement and force.

[0043] In this way, when the piezoelectric block is deformed under the action of the electric field, the force generated at its two ends will be transmitted through the symmetrical first support arm 21 and the second support arm 22, and the symmetrically arranged first support arm 21 and the second support arm 22 can respond to the change in force in the same way when the piezoelectric block is deformed. The balanced load distribution reduces the structural deformation or displacement deviation caused by uneven force transmission, thereby reducing the bending or twisting of the transmission arm when subjected to force. Therefore, the first support arm 21 and the second support arm 22 are symmetrically arranged about the preset axis, and are connected to the central platform 30 through the transmission arm and the first boss 27, which helps to achieve uniform force transmission and improve the stability and accuracy of displacement. In addition, by connecting the first support arm 21 and the second support arm 22 to the first outer frame 29 through the second boss 28, the structural stability of the entire transmission assembly can be enhanced, thereby improving the load capacity of the entire piezoelectric displacement platform.

[0044] Optionally, the angle between the force arm of the transmission arm and the parallel line of the long arm of the transmission arm is greater than zero.

[0045] In the embodiment of the present disclosure, all the transmission arms mentioned above include a first end face 34 and a second end face 35. The force arm of the transmission arm refers to the vertical distance from the point of force application to the center of rotation. Taking the first transmission arm 23 as an example, combined with Figure 4As shown, the first connection position between the first end face 34 of the first transmission arm 23 and the first support arm 21 is located on the side of the first end face 34 away from the center platform 30, and the second connection position between the second end face 35 and the first boss 27 is located on the side of the second end face 35 close to the center platform 30. The first transmission arm rotates with the first connection position as the fulcrum, and the second connection position is the point of action of the output force of the first transmission arm 23. The force is output to the first boss 27 through the second connection position, thereby pulling the center platform 30. The line connecting the first connection position and the second connection position is the force arm of the first transmission arm 23. The angle between the force arm of the transmission arm and the parallel line of the long arm of the transmission arm is an angle α greater than zero. Among them, the angle α can be set according to specific needs. For example, the angle α can be adjusted by adjusting the first connection position and the second connection position.

[0046] In this way, when the line connecting the two end faces of the transmission arm forms an angle α with a line parallel to the long arm of the transmission arm, a lever system is effectively formed. This lever system can increase the length of the transmission arm's moment arm, thereby achieving a greater output force or displacement without increasing the input force, thereby improving the transmission ratio. By increasing the transmission ratio, the need for deformation of the piezoelectric block can be reduced, thereby extending the life of the piezoelectric block and reducing performance degradation caused by excessive deformation. Furthermore, in a limited space, increasing the transmission ratio by adjusting the angle rather than the length can make the design more compact.

[0047] Optionally, the angle between the moment arm of the transmission arm and the perpendicular axis of the preset axis is greater than zero.

[0048] Thus, when the piezoelectric block deforms and applies a force to the first support arm 21 and the second support arm 22, the first support arm 21 and the second support arm 22 will be displaced outward under the force. At this time, the first transmission arm 23 will rotate away from the center platform 30 with the first connection position as the fulcrum, driving the first boss to move away from the center platform 30, thereby pulling the center platform 30 downward. Therefore, the angle between the transmission arm's moment arm and the axis perpendicular to the preset axis is greater than zero, thereby achieving displacement of the center platform 30 in the preset axis.

[0049] Optionally, the uniaxial plate 20 further includes a first outer frame 29 and a central platform 30. The central platform 30 is superimposed and connected to the main platform 11; wherein, both ends of the central platform 30 in a preset axial direction are connected to the first outer frame 29 via displacement components.

[0050] In the disclosed embodiment, the central platform 30 is directly connected to the first outer frame 29 at both ends of an axial direction perpendicular to the predetermined axis. The central platform 30 of the uniaxial plate 20 is superimposed and connected to the main platform 11. A displacement assembly can drive the central platform 30, thereby causing the main platform 11 to move. The uniaxial plate 20 includes at least two displacement assemblies, one located at each end of the central platform 30 along the predetermined axis. The distance between the displacement assemblies and the central platform 30 is adjustable. For example, the displacement assemblies can be connected to the central platform 30 and the first outer frame 29 via telescopic arms, or connected to the central platform 30 via screws and nuts. In practical applications, the two displacement assemblies can be symmetrically positioned about the central platform 30 to reduce errors caused by displacement of the central platform 30 along the predetermined axis. Alternatively, when the load on the main platform 11 changes, the distance between the two displacement assemblies and the central platform 30 can be adjusted to accommodate changes in the load on the main platform 11, achieving ideal equivalent replacement. The ideal situation refers to a uniform load on the main platform 11 and symmetrical positioning of the two displacement assemblies about the central platform 30.

[0051] In some embodiments, the central platform 30 is directly hinged to the first outer frame 29 at both ends perpendicular to the predetermined axis. Elastic elements, such as springs or bellows, can be used at the hinged locations to allow the central platform 30 to slightly move perpendicular to the predetermined axis. A displacement assembly is hinged to the first outer frame 29 and the central platform 30, thereby enabling displacement of the central platform 30 in multiple axial directions.

[0052] In this way, the first outer frame 29 provides a solid peripheral support, and the center platform 30 is connected to the first outer frame 29 at both ends of the predetermined axial direction via displacement assemblies. The connection of the displacement assemblies at both ends of the center platform 30 to the first outer frame 29 enhances the overall rigidity and stability of the single-axis plate 20. By positioning the displacement assemblies on both sides of the center platform 30 in the predetermined axial direction, the force generated by the displacement assemblies in the predetermined axial direction can be transmitted to the center platform 30, causing the center platform 30 to displace in the predetermined axial direction, and in turn, driving the displacement of the main platform 11, which is superimposed and connected to the center platform 30.

[0053] Optionally, the preset axial direction of the first uniaxial plate 32 and the preset axial direction of the second uniaxial plate 33 are different.

[0054] In this way, the first uniaxial plate 32 and the second uniaxial plate 33 achieve displacement along different axes, and each uniaxial plate 20 can be independently controlled, providing the piezoelectric displacement device with multi-axial displacement capability, increasing the flexibility and application range of the piezoelectric displacement device.

[0055] Optionally, the first surface and the second surface are two opposite surfaces of the adapter plate 10 .

[0056] In the embodiment of the present disclosure, the first surface and the second surface are respectively the top and bottom of the adapter plate 10. In other embodiments, the first surface and the second surface can also be respectively the front and back of the adapter plate 10 or the left and right surfaces of the adapter plate 10.

[0057] Thus, by arranging the uniaxial plates 20 on two opposing surfaces of the adapter plate 10, the first uniaxial plate 32 and the second uniaxial plate 33 are symmetrical about the center of the adapter plate 10. The weight and load of the first uniaxial plate 32 and the second uniaxial plate 33 are evenly distributed on both sides of the adapter plate 10, reducing eccentricity caused by uneven weight distribution, thereby helping to achieve uniform weight and load distribution and reducing torque and vibration caused by eccentricity.

[0058] Optionally, the adapter plate 10 includes a second outer frame 12 . The second outer frame 12 is hinged to the main platform 11 .

[0059] In the embodiment of the present disclosure, the main platform 11 is connected to the second outer frame 12 on both sides of the preset axial direction corresponding to the first uniaxial plate 32 and on both sides of the preset axial direction corresponding to the second uniaxial plate 33 through symmetrically arranged hinges 13. In addition, screw holes 14 symmetrically distributed about different preset axial directions are provided on the main platform 11 and the second outer frame 12 of the adapter plate 10. The adapter plate 10 is connected to the corresponding screw holes 14 on the first uniaxial plate 32 and the second uniaxial plate 33 through the above-mentioned screw holes 14 by bolts. The bolts can be of any type and can be configured according to needs. For example, M1.2, M1.6 and / or M2 bolts can be used to connect the adapter plate 10 and the uniaxial plate 20.

[0060] In this way, the connection between the second outer frame 12 and the main platform 11 not only provides support for the main platform 11, but also enables relative rotation and displacement between the adapter plate 10 and the main platform 11 through a hinged connection, thereby enabling displacement of the main platform 11 in different preset axial directions. In addition, by symmetrically arranging the hinges 13 along different preset axial directions, the coupling error of the main platform 11 along different preset axial directions can be reduced, thereby reducing the mutual dependence or influence between different parts of the system and improving the accuracy of displacement control.

[0061] In some embodiments, the uniaxial plate 20 of the disclosed embodiments can be fabricated from stainless steel, and at least one hinge on the uniaxial plate 20 can be fabricated using a wire-cut electro-spark process. The hinge can be circular and 1mm in diameter. This utilizes the high strength and corrosion resistance of stainless steel to improve the mechanical properties and durability of the uniaxial plate 20. The flexible hinge fabricated using the wire-cut electro-spark process achieves high-precision dimensional control, ensuring hinge reliability. Furthermore, the 1mm-diameter circular hinge design optimizes the kinematic performance of the uniaxial plate 20, ensuring smoother movement.

[0062] The above description and the accompanying drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Unless expressly required, individual components and functions are optional, and the order of operations may vary. Portions and features of some embodiments may be included in or replace portions and features of other embodiments. The embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A piezoelectric displacement device for a scanning probe microscope, characterized in that: include: The adapter plate includes a main body platform; The uniaxial plate comprises a first uniaxial plate and a second uniaxial plate respectively connected to the first surface and the second surface of the adapter plate; wherein the first uniaxial plate and the second uniaxial plate are respectively used to drive the main platform to move along the corresponding preset axial direction.

2. The device according to claim 1, characterized in that Single axis plates include: At least one displacement assembly, the displacement assembly including a support assembly and a transmission assembly; the transmission assembly is connected to the support assembly and the central platform respectively, and encloses the support assembly to form a receiving cavity for placing the piezoelectric block; When voltage is applied to the piezoelectric block, the piezoelectric block will deform in an axial direction perpendicular to the preset axial direction, thereby pushing the support component to move and transmitting the displacement to the central platform through the transmission component.

3. The device according to claim 2, characterized in that The support components include: a first support arm; a second support arm connected to the first support arm via a transmission assembly; The first support arm and the second support arm are symmetrically arranged about a preset axis.

4. The device according to claim 3, characterized in that The transmission components include: Transmission arm; The first boss is connected to the central platform and is connected to one end of the first support arm and the second support arm close to the central platform through a transmission arm; The second boss is connected to the first outer frame and is respectively connected to one end of the first support arm and the second support arm close to the first outer frame through a transmission arm.

5. The device according to claim 4, characterized in that The angle between the force arm of the transmission arm and the parallel line of the long arm of the transmission arm is greater than zero.

6. The device according to claim 4, characterized in that The angle between the force arm of the transmission arm and the vertical axis of the preset axis is greater than zero.

7. The device according to claim 2, characterized in that The single axis plate also includes: first outer frame; The central platform is superimposed and connected with the main body platform; wherein, both ends of the central platform in a preset axial direction are connected with the first outer frame through a displacement component.

8. The device according to any one of claims 1 to 7, characterized in that The preset axial direction of the first uniaxial plate is different from the preset axial direction of the second uniaxial plate.

9. The device according to any one of claims 1 to 7, characterized in that The first surface and the second surface are two opposite surfaces of the adapter plate.

10. The device according to any one of claims 1 to 7, characterized in that The adapter plate includes: The second outer frame is hinged to the main platform.

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