Card changing door body structure and wafer testing machine

Abstract

The utility model relates to the technical field of wafer testing equipment, in particular to a card changing door body structure and a wafer testing machine. The card changing door body structure comprises a front door frame used for being connected with the test box body, a front door plate rotationally connected to the front door frame and a second locking assembly. The front door frame is provided with a card changing window, and the front door plate is used for blocking the card changing window. The second locking assembly comprises a locking column and a locking baffle, one of the locking column and the locking baffle is installed on the front door frame, the other one of the locking column and the locking baffle is installed on the front door plate, the locking column can abut against the locking baffle so as to exert acting force for pressing the front door frame on the front door plate to achieve locking, and the locking column can be away from the locking baffle to achieve unlocking. The card replacement door body structure provided by the utility model can be used for replacing the probe card in a wafer low-temperature test, and ensures that the card replacement window is firmly plugged after card replacement, and the sealing performance of the test box body is not easily damaged.

Description

Technical Field

[0001] The present application relates to the technical field of wafer testing equipment, and in particular to a wafer door structure and a wafer testing machine. Background Art

[0002] Probe cards, a key piece of equipment for wafer testing, operate by connecting the probes on the card to the device under test (DUT) to input and output test signals. However, because probe cards are custom components and not universal, wafer testing requires the use of different probe cards for each wafer type.

[0003] For example, during low-temperature wafer testing, the probe card is installed in the test chamber. To facilitate probe card replacement, the test chamber needs to be equipped with a card replacement window, and a door is provided at the card replacement window to seal it and ensure the sealing of the test chamber. During low-temperature testing, dry air needs to be introduced into the test chamber to ensure the dew point temperature and prevent the wafer from frosting or icing in a low-temperature environment. If the door is not firmly sealed against the card replacement window, the sealing of the test chamber will be affected, causing gases from the external environment to penetrate into the test chamber, increasing the internal water vapor content, or causing the dry air to leak, thereby affecting the dew point temperature.

[0004] Therefore, the sealing tightness of the door body relative to the card exchange window is also crucial. Utility Model Content

[0005] Based on this, it is necessary to provide a card replacement door structure that can be used to replace the probe card during low-temperature wafer testing, and ensure that the card replacement window is firmly sealed after the card is replaced, and the sealing of the test box will not be easily damaged.

[0006] A card-changing door structure comprises a front door frame for connecting to a test box and a front door panel rotatably connected to the front door frame, wherein the front door frame is provided with a card-changing window and the front door panel is used to block the card-changing window; the card-changing door structure further comprises:

[0007] The second locking assembly includes a locking column and a locking baffle, one of which is installed on the front door frame, and the other is installed on the front door panel. The locking column can abut against the locking baffle to apply a pressing force to the front door panel toward the front door frame to lock it, and the locking column can be unlocked by moving away from the locking baffle.

[0008] It is understood that when the front door panel rotates relative to the front door frame to close, one of the components mounted on the front door panel also moves relative to the other component mounted on the front door frame, causing the locking post to move to the side of the locking baffle facing away from the opening direction. The locking post then abuts against the locking baffle, applying a compressive force toward the front door frame, locking the front door panel relative to the frame. To open the door, simply pull the front door panel to rotate, which forces the locking post away from the locking baffle, unlocking the door. This configuration is simple to operate, allowing the door to be closed or opened as the front door panel rotates, without the need for additional structural adaptation, reducing the risk of accidental opening, and ensuring secure locking.

[0009] In some embodiments, the card-changing door structure also includes a first locking component arranged at an interval from the second locking component; the first locking component includes a locking pin and a locking socket, one of the locking pin and the locking socket is installed on the front door frame, and the other is installed on the front door panel, and the locking pin can move along its own length direction and be inserted into the locking socket to lock or exit the locking socket to unlock.

[0010] In some embodiments, the front door panel has a rotating side and a closing side that are opposite and spaced apart along a first direction, the first locking assembly is arranged close to the rotating side, and the second locking assembly is arranged close to the closing side; the first direction is arranged at an angle to the thickness direction of the front door panel.

[0011] In some embodiments, the front door panel includes a vertical section and a horizontal section connected to the vertical section, the side of the vertical section facing away from the horizontal section serves as the rotating side, the first locking assembly is located in the vertical section, and the second locking assembly is located in the horizontal section.

[0012] In some embodiments, the first locking assembly further includes a driving member and a guide block, the driving member is connected to the locking pin, the guide block is configured with a guide hole axially along the length direction of the locking pin, and the locking pin is passed through the guide hole.

[0013] In some embodiments, the driving member is a cylinder provided with a piston rod, and the cylinder is connected to a third sensor for detecting the position of the piston rod; at least two third sensors are provided and are arranged at intervals along the moving direction of the piston rod.

[0014] In some embodiments, the second locking assembly further includes a fixing seat and a support arm; the fixing seat is mounted on the inner side of the front door panel; one end of the support arm is connected to the fixing seat, and the other end extends toward the fixing seat away from the front door panel, and the extended end of the support arm is connected to the locking column.

[0015] In some embodiments, the front door panel has a rotating side and a closing side that are opposite to and spaced apart along a first direction; the second locking assembly is arranged on the closing side, and at least one pair is provided, and the two groups of the second locking assemblies in a pair are opposite to and spaced apart along the second direction, and the second direction, the first direction and the thickness direction of the front door panel are arranged at angles to each other.

[0016] In some embodiments, the front door panel has a rotating side and a closing side that are relatively and spaced apart along a first direction, and the first direction is set at an angle to the thickness direction of the front door panel; the front door frame is provided with a buffer pad, and the buffer pad is located close to the rotating side, and / or the card-changing door body structure further includes a first sensor and a second sensor arranged at intervals, the first sensor is set close to the closing side, and the second sensor is set close to the rotating side.

[0017] The present application also provides a wafer testing machine, including a test box and the above-mentioned card door structure, the test box is configured with an opening, and the card door structure is connected to the opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 This is a first schematic diagram of the front door panel opening relative to the front door frame in the card-changing door structure provided in this application;

[0020] Figure 2 A schematic diagram of the front door panel being closed relative to the front door frame in the card-changing door structure provided in this application;

[0021] Figure 3 This is a schematic diagram of the second locking assembly in the door body structure for changing the card provided in this application when locked;

[0022] Figure 4 A second schematic diagram showing the front door panel opening relative to the front door frame in the card-changing door structure provided in this application;

[0023] Figure 5 A schematic diagram of the front door frame in the card-changing door structure provided in this application;

[0024] Figure 6 This is a partial schematic diagram of the first locking assembly in the door body structure for changing the card provided in this application;

[0025] Figure 7 A schematic diagram of the front door panel in the door body structure for changing the card provided in this application;

[0026] Figure 8 Schematic diagram of the wafer testing machine provided in this application.

[0027] Reference numerals: 100, card-changing door structure; 110, front door frame; 111, card-changing window; 112, buffer pad; 113, buffer bracket; 114, door frame flange; 115, through-hole; 120, front door panel; 121, rotating side; 122, closing side; 123, vertical section; 124, horizontal section; 125, door panel flange; 130, first locking assembly; 131, locking pin; 132, locking socket; 133, driving member; 134. Guide block; 135. Third sensor; 136a. First regulating valve; 136b. Second regulating valve; 137. Piston rod; 138. Assembly bracket; 140. Second locking assembly; 141. Locking column; 142. Locking baffle; 143. Fixed seat; 144. Support arm; 151. First sensor; 152. Second sensor; 161. Hinge; 200. Test box; 210. Opening; 1341. Guide hole. DETAILED DESCRIPTION

[0028] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0029] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0031] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it can mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it can mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. When a first feature is "below," "below," or "below" a second feature, it can mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0032] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0033] See also Figures 1 to 3 As shown, an embodiment of the present application provides a card-changing door structure 100, comprising a front door frame 110 for connecting to a test box 200 and a front door panel 120 rotatably connected to the front door frame 110, wherein the front door frame 110 is configured with a card-changing window 111, and the front door panel 120 is configured to block the card-changing window 111. The card-changing door structure 100 further comprises a second locking assembly 140, comprising a locking post 141 and a locking baffle 142, wherein one of the locking post 141 and the locking baffle 142 is mounted on the front door frame 110, and the other is mounted on the front door panel 120, wherein the locking post 141 can abut against the locking baffle 142 to apply a pressing force to the front door panel 120 toward the front door frame 110 to lock the front door panel, and the locking post 141 can move away from the locking baffle 142 to unlock the front door panel.

[0034] When the front door panel 120 rotates relative to the front door frame 110 to close, one of the components mounted on the front door panel 120 also moves relative to the other component mounted on the front door frame 110, causing the locking post 141 to move to the side of the locking baffle 142 that faces away from the opening direction. The locking post 141 then abuts against the locking baffle 142, applying a force to the front door panel 120 toward the front door frame 110, locking the front door panel 120 relative to the front door frame 110. To open the door, simply pull the front door panel 120 to rotate, forcing the locking post 141 away from the locking baffle 142 to unlock the door. This configuration is simple to operate and allows for closing or opening as the front door panel 120 rotates, eliminating the need for adapting to other structures. This reduces the risk of accidental opening and ensures secure securement.

[0035] Specifically, the locking post 141 is mounted on the inner side of the front door panel 120 (i.e., the side facing the interior of the test box 200), and the locking baffle 142 is mounted on the edge of the front door frame 110 and partially extends toward the card exchange window 111. When the front door panel 120 is closed, the locking post 141 abuts against the side of the locking baffle 142 facing away from the opening direction, so that the locking baffle 142 applies a force toward the interior of the test box 200 to the locking post 141. The locking post 141 pulls the front door panel 120 against the front door frame 110, thereby locking the front door panel 120 relative to the front door frame 110 and ensuring a secure seal.

[0036] Of course, the locking post 141 and the locking baffle 142 can also be located outside the front door panel 120 and the front door frame 110. In this case, to prevent the locking baffle 142 from interfering with the rotation of the front door panel 120, the locking baffle 142 can be rotatably connected relative to the front door frame 110 and provided with an elastic member to ensure that the locking baffle 142 always has a tendency to rotate toward the card exchange window 111. When the front door panel 120 rotates to close, the locking baffle 142 is forced to rotate to a position outside the card exchange window 111. When the front door panel 120 is pressed against the front door frame 110, the locking baffle 142 rotates to abut against the locking post 141 to achieve locking.

[0037] In other embodiments, the locking post 141 may be mounted on the front door frame 110, and the locking baffle 142 may be mounted on the front door panel 120 with a gap provided between the front door panel 120, so that the locking post 141 can extend into the gap and abut against the side of the locking baffle 142 facing the opening direction to lock the door. In this case, the locking post 141 applies a force toward the interior of the test box 200 to the locking baffle 142, thereby pressing the front door panel 120 against the front door frame 110 through the locking baffle 142 to achieve locking.

[0038] It should be noted that the above-mentioned opening direction refers to the direction in which the front door panel 120 rotates relative to the front door frame 110 to open the card exchange window 111, and the closing direction refers to the direction in which the front door panel 120 rotates to open the card exchange window 111. For example, if the front door panel 120 rotates clockwise to open and counterclockwise to close, the opening direction is clockwise and the closing direction is counterclockwise.

[0039] like Figure 3 As shown, the second locking assembly 140 further includes a fixing base 143 and a support arm 144. The fixing base 143 is mounted on the inner side of the front door panel 120. One end of the support arm 144 is connected to the fixing base 143, and the other end extends toward the fixing base 143 in a direction away from the front door panel 120. The extended end of the support arm 144 is connected to the locking post 141. The inner side of the front door panel 120 is the side facing the interior of the test box 200. It can be understood that the fixing base 143 and the support arm 144 cooperate to ensure the assembly of the locking post 141.

[0040] Specifically, the fixing base 143 is used to connect to the front door panel 120 to ensure that the second locking assembly 140 is securely mounted to the front door panel 120. The fixing base 143 can be directly screwed to the front door panel 120; alternatively, a U-shaped bracket can be provided on the inner side of the front door panel 120, and the fixing base 143 can be inserted into the bracket and screwed in. Any method can be used as long as it can provide stable and reliable fixation. The support arm 144 is provided to raise the locking column 141 relative to the front door panel 120 so that a gap is left between the abutting end of the locking column 141 (i.e., one end abutting against the locking baffle 142) and the front door panel 120, so that the locking baffle 142 is located in the gap and abuts against the locking column 141; and the support arm 144 is used to support the locking column 141, to ensure that the force of the locking baffle 142 acting on the locking column 141 is along the axial direction of the locking column 141, and the force is transmitted to the front door panel 120 through the support arm 144 and the fixing seat 143, thereby generating a pulling force on the front door panel 120 toward the inside of the test box 200, to ensure that the front door panel 120 is pressed against the front door frame 110.

[0041] The extended end of support arm 144 is provided with a platform, i.e., support arm 144 is L-shaped. Locking post 141 is fixed to the platform to ensure that locking post 141 can withstand the force of locking baffle 142 along its own axis. Support arm 144 can extend along the axis of locking post 141 relative to fixing seat 143; alternatively, when the axial direction of locking post 141 and the thickness direction of fixing seat 143 are the same, the extension direction of support arm 144 relative to fixing seat 143 forms an angle with the axial direction of locking post 141.

[0042] like Figure 1 As shown, in an optional embodiment, the front door panel 120 has a rotating side 121 and a closing side 122 that are arranged opposite to each other and spaced apart along a first direction, and a second locking assembly 140 is provided on the closing side 122, and at least one pair is provided, and the two groups of second locking assemblies 140 in a pair are arranged opposite to each other and spaced apart along the second direction. The second direction, the first direction, and the thickness direction of the front door panel 120 are arranged at an angle in pairs. Wherein, taking the first direction as the Z-axis direction (i.e., the vertical direction), the second direction can be the X-axis direction, and the thickness direction of the front door panel 120 can be the Y-axis direction. Therefore, such a setting is equivalent to providing corresponding fastening points on both sides of the card changing window 111 along the X-axis direction, forming multi-point fixation and improving the fastening effect.

[0043] Among them, the rotating side 121 is the side of the front door panel 120 that is rotatably connected to the front door frame 110 using the hinge 161, and the closed side 122 is the outer side of the front door panel 120 with the axis of the rotating shaft at the rotating side 121 as the center and the width of the front door panel 120 as the radius.

[0044] See also Figure 1 、 Figure 4 、 Figure 5 and Figure 6 Exemplarily, the door structure 100 further includes a first locking assembly 130 spaced apart from a second locking assembly 140. The first locking assembly 130 also locks and unlocks the front door panel 120 relative to the front door frame 110. Therefore, by cooperating with the first locking assembly 130 and the second locking assembly 140, multiple locking points are provided between the front door frame 110 and the front door panel 120, improving the sealing tightness of the front door panel 120 and minimizing the leakage of dry gas entering the test chamber 200 that could affect the dew point temperature, thereby improving test safety.

[0045] The first locking assembly 130 includes a locking pin 131 and a locking socket 132, one of which is installed on the front door frame 110, and the other is installed on the front door panel 120. The locking pin 131 can move back and forth along its own length and be inserted into the locking socket 132 to lock or exit the locking socket 132 to unlock.

[0046] Specifically, the locking pin 131 can be movably mounted on the front door frame 110, and the locking receptacle 132 can be provided on the front door panel 120. For example, a door panel flange 125 can be provided at the edge of the front door panel 120, with a hole extending through the thickness of the door panel flange 125 to serve as the locking receptacle 132. Simultaneously, a door panel flange 114 can also be provided at the edge of the front door frame 110, with a through-hole 115 extending through the thickness of the door panel flange 114. The locking pin 131 is inserted into the through-hole 115 to prevent interference between the locking pin 131 and the door panel flange 114. In this case, the locking pin 131 is located on the side of the front door frame 110 facing the test chamber 200.

[0047] Of course, the locking pin 131 can also be installed on the side of the front door frame 110 facing away from the test box 200. In this case, a semicircular arc strip can be provided on the side of the front door panel 120 facing away from the test box 200, with both ends of the arc strip fixed to the front door panel 120, forming the locking hole 132 between the arc strip and the front door panel 120. Alternatively, a circular ring can be provided on the side of the front door panel 120 facing away from the test box 200, with the inner ring of the circular ring serving as the locking hole 132. Any method is sufficient as long as the locking pin 131 and the locking hole 132 can be locked and unlocked when plugged in.

[0048] Alternatively, the locking pin 131 is mounted on the front door panel 120, and the locking socket 132 is disposed on the door frame flange 114 of the front door frame 110. The specific configuration is substantially similar to that described above, and therefore will not be described in detail.

[0049] like Figures 4 to 6As shown, the first locking assembly 130 further includes a driver 133 and a guide block 134. The driver 133 is connected to the locking pin 131, and the guide block 134 is constructed with a guide hole 1341 axially along the length of the locking pin 131. The locking pin 131 is inserted into the guide hole 1341. It is understood that the driver 133 is configured to drive the locking pin 131 to move along its own axis, which can be electrically controlled, making operation more convenient. In addition, the guide block 134 is configured to guide the movement of the locking pin 131, reducing the interference of the locking pin 131 with the door frame flange 114 and the door panel flange 125, and improving the smoothness of the insertion. The driver 133 can also be a motion mechanism that realizes linear motion, such as a linear module, a cylinder, an electric push rod, etc.

[0050] like Figure 6 As shown, in some specific embodiments, the driving member 133 is a cylinder having a piston rod 137. The cylinder includes a cylinder body, a piston slidably connected to the cylinder body, and a piston rod 137 connected to the piston. The piston rod 137 is connected to the locking pin 131 at one end thereof, which is away from the piston and extends out of the cylinder body. In actual use, the cylinder is connected to a third sensor 135 for detecting the position of the piston rod 137. At least two third sensors 135 are provided and spaced apart along the moving direction of the piston rod 137 (i.e., the axial direction of the piston rod 137). For example, one third sensor 135 near one end of the locking pin 131 is used to detect the extended position of the piston rod 137 to ensure that the locking pin 131 is extended and plugged into the locking socket 132 for locking. At the same time, another third sensor 135 is used to detect the retracted position of the piston rod 137 to ensure that the locking pin 131 accurately exits the locking socket 132 for unlocking. Therefore, such a setting facilitates precise control of the movement stroke of the piston rod 137 and achieves precise control of the locking pin 131 in the locked and unlocked positions.

[0051] Among them, the cylinder body is constructed with a cavity for assembling the piston and the piston rod 137 and two spaced interfaces connected to the cavity, and a regulating valve (respectively, the first regulating valve 136a and the second regulating valve 136b) is installed at each interface. The piston can divide the cavity into a first sub-cavity and a second sub-cavity arranged axially along the piston rod 137. The first regulating valve 136a is connected to the first sub-cavity, and the second regulating valve 136b is connected to the second sub-cavity. The first regulating valve 136a and the second regulating valve 136b are both used to regulate the air flow in their respective corresponding sub-cavities to achieve the axial movement of the piston along the piston rod 137. The first regulating valve 136a and the second regulating valve 136b are both solenoid valves. When the first regulating valve 136a and the second regulating valve 136b are both powered off, they can be automatically closed and the piston rod 137 also stops moving.

[0052] In actual use, an assembly bracket 138 is installed on the side of the front door frame 110 facing the test box 200 to support the driving member 133 and the guide block 134. The assembly bracket 138 can be made of triangular steel and provided with ribs to improve structural strength.

[0053] There may also be at least one pair of first locking components 130 , and the two groups of first locking components 130 in a pair are respectively disposed on both sides of the card replacement window 111 along the X-axis direction.

[0054] See also Figure 1 、 Figure 2 、 Figure 4 、 Figure 5 and Figure 7 As shown, optionally, the first locking assembly 130 is disposed near the rotating side 121, and the second locking assembly 140 is disposed near the closing side 122. With this arrangement, when the front door panel 120 rotates and closes relative to the front door frame 110, the locking post 141 abuts against the side of the locking baffle 142 facing away from the opening direction as the front door panel 120 rotates, performing a primary tightening operation. This then drives the locking pin 131 to move and insert into the locking receptacle 132 for a secondary tightening operation. This double tightening operation improves the securement of the front door panel 120 relative to the front door frame 110. Furthermore, the first locking assembly 130 and the second locking assembly 140 are disposed respectively near the rotating side 121 and the closing side 122 of the front door panel 120, achieving multi-point fixation and enhancing the tightening effect. In actual use, a sealing ring is provided at the edge of the card changing window 111 of the front door frame 110 , and the door panel flange 125 of the front door panel 120 can be pressed against the sealing ring to achieve sealing.

[0055] Please continue reading Figure 1 、 Figure 2 、 Figure 4 、 Figure 5 and Figure 7As shown, further, the front door frame 110 is provided with a buffer pad 112, and the buffer pad 112 is located near the rotating side 121. The setting of the buffer pad 112 can be used for the rotating side 121 of the front door panel 120 to abut against each other, so as to reduce the collision and wear between the front door panel 120 and the front door frame 110 when the front door panel 120 is opened. In actual use, two connecting protrusions (not shown in the figure) are convexly provided on the rotating side 121 of the front door panel 120 for connecting to the hinge 161, and the front door frame 110 is provided with a groove at a position corresponding to the card changing window 111 to accommodate the connecting protrusions. When the front door panel 120 is opened, the end of the connecting protrusion may be attached to the groove wall of the groove, which will cause wear and tear during long-term use. Therefore, a buffer pad 112 is provided within the groove. The buffer pad 112 is located along the path of the connecting protrusion as it rotates with the front door panel 120. This prevents the end of the connecting protrusion from directly contacting the groove wall, reducing wear. Furthermore, the buffer pad 112 limits the rotation angle of the front door panel 120, preventing it from opening too far and colliding with other structures. A buffer bracket 113 is mounted within the groove, to which the buffer pad 112 can be bonded.

[0056] In an optional embodiment, the front door panel 120 includes a vertical section 123 and a horizontal section 124 connected to the vertical section 123. The side of the vertical section 123 facing away from the horizontal section 124 serves as the rotating side 121. The first locking assembly 130 is located in the vertical section 123, and the second locking assembly 140 is located in the horizontal section 124. In this case, the thickness direction of the aforementioned front door panel 120 specifically refers to the thickness direction of the vertical section 123, that is, the Y-axis direction. In other words, the front door panel 120 is arranged in an inverted L-shape, including a long side (that is, the vertical section 123) and a short side (that is, the horizontal section 124). The shape of the card changing window 111 is adapted to the shape of the front door panel 120. Such a setting increases the range of the card changing window 111, facilitates the card changing operation, and reduces the risk of collision due to the card changing window being too small. When the second locking assembly 140 is located in the horizontal section 124 and the front door panel 120 is closed, the locking column 141, in cooperation with the locking stopper 142, applies a downward pulling force to the front door panel 120, causing the horizontal section 124 to press against the corresponding area on the front door frame 110. Simultaneously, the first locking assembly 130 constrains the vertical section 123 of the front door panel 120, forcing the vertical section 123 to press against the corresponding area on the front door frame 110. This improves fastening reliability.

[0057] like Figure 1 、 Figure 4 and Figure 5As shown, in actual use, the door structure 100 further includes a first sensor 151 and a second sensor 152 arranged at intervals. The first sensor 151 is located near the closing side 122, and the second sensor 152 is located near the rotating side 121. The first sensor 151 is used to detect the closed state of the front door panel 120 relative to the front door frame 110, and the second sensor 152 is used to detect the closed state of the front door panel 120 relative to the front door frame 110. This facilitates the operator to promptly determine the state of the front door panel 120 and perform subsequent operations, thereby improving safety. The first sensor 151 and the second sensor 152 can both be photoelectric sensors or contact sensors, as long as they can detect the open and closed state of the front door panel 120 relative to the front door frame 110.

[0058] like Figure 8 As shown, another embodiment of the present application provides a wafer testing machine, including a test box 200 and the above-mentioned card changing door structure 100, the test box 200 is constructed with an opening 210, and the card changing door structure 100 is connected to the opening 210. The test box 200 is surrounded by a test cavity for low-temperature testing of wafers, and the probe card is installed in the test box 200. When it is necessary to change the card, the front door panel 120 is opened to take out the probe card and replace it with a new probe card. Sealing strips are installed at the edge of the front door frame 110 and the edge of the opening 210 of the test box 200 to ensure the sealing of the connection.

[0059] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0060] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. A card-changing door structure, comprising a front door frame (110) for connecting to a test box (200) and a front door plate (120) rotatably connected to the front door frame (110), wherein the front door frame (110) is provided with a card-changing window (111), and the front door plate (120) is used to block the card-changing window (111); characterized in that: The door body structure (100) for changing the card further includes: A second locking assembly (140) includes a locking column (141) and a locking baffle (142), one of which is mounted on the front door frame (110), and the other of which is mounted on the front door panel (120), the locking column (141) can abut against the locking baffle (142) to apply a pressing force to the front door panel (120) toward the front door frame (110) to lock the front door panel, and the locking column (141) can move away from the locking baffle (142) to unlock.

2. The door body structure for changing the card according to claim 1, characterized in that: The card-changing door structure further comprises a first locking assembly (130) spaced apart from the second locking assembly (140); The first locking assembly (130) includes a locking pin (131) and a locking socket (132), one of which is mounted on the front door frame (110), and the other is mounted on the front door panel (120), and the locking pin (131) can move along its own length direction and be inserted into the locking socket (132) to lock or exit the locking socket (132) to unlock.

3. The door body structure for changing the card according to claim 2, characterized in that: The front door panel (120) has a rotating side (121) and a closing side (122) that are opposite and spaced apart along a first direction; the first locking assembly (130) is arranged close to the rotating side (121), and the second locking assembly (140) is arranged close to the closing side (122); the first direction is arranged at an angle to the thickness direction of the front door panel (120).

4. The door body structure for changing the card according to claim 3, characterized in that: The front door panel (120) includes a vertical section (123) and a horizontal section (124) connected to the vertical section (123), the side of the vertical section (123) facing away from the horizontal section (124) serves as the rotating side (121), the first locking assembly (130) is located in the vertical section (123), and the second locking assembly (140) is located in the horizontal section (124).

5. The door body structure for changing the card according to claim 2, characterized in that: The first locking assembly (130) further includes a driving member (133) and a guide block (134), wherein the driving member (133) is connected to the locking pin (131), and the guide block (134) is configured with a guide hole (1341) axially along the length direction of the locking pin (131), and the locking pin (131) is inserted into the guide hole (1341).

6. The door body structure for changing the card according to claim 5, characterized in that: The driving member (133) is a cylinder provided with a piston rod, and the cylinder is connected to a third sensor (135) for detecting the position of the piston rod; at least two third sensors (135) are provided and are spaced apart along the moving direction of the piston rod.

7. The door body structure for changing the card according to claim 1, characterized in that: The second locking assembly (140) further includes a fixing seat (143) and a support arm (144); The fixing seat (143) is installed on the inner side of the front door panel (120); one end of the support arm (144) is connected to the fixing seat (143), and the other end extends toward the fixing seat (143) away from the front door panel (120), and the extended end of the support arm (144) is connected to the locking column (141).

8. The card door structure according to claim 1 or 2, characterized in that: The front door panel (120) has a rotating side (121) and a closing side (122) that are arranged opposite to each other and spaced apart in a first direction; The second locking assembly (140) is arranged on the closed side (122), and at least one pair is provided, and two groups of the second locking assemblies (140) in one pair are arranged opposite to each other and spaced apart along the second direction; The second direction, the first direction and the thickness direction of the front door panel (120) are arranged at an angle to each other.

9. The door body structure for changing a card according to claim 1, characterized in that: The front door panel (120) has a rotating side (121) and a closing side (122) that are arranged opposite to each other and spaced apart along a first direction, wherein the first direction is arranged at an angle to a thickness direction of the front door panel (120); The front door frame (110) is provided with a buffer pad (112), and the buffer pad (112) is located near the rotating side (121); and / or the door body structure (100) further includes a first sensor (151) and a second sensor (152) arranged at intervals, wherein the first sensor (151) is provided near the closing side (122), and the second sensor (152) is provided near the rotating side (121).

10. A wafer testing machine, characterized in that: The wafer testing machine includes: A test box (200) is constructed with an opening (210); and The card-changing door structure according to any one of claims 1 to 9 is connected to the opening (210) of the test box (200).

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