Polarized Kelvin crown head probe top column head and probe for chip test

Abstract

The utility model relates to an offset Kelvin crown head probe top column head and a probe for chip testing. The offset Kelvin crown head probe top column head comprises a column body portion and a contact portion. The cylinder part comprises a cut cylinder obtained by cutting the cylinder along a longitudinal plane parallel to the central axis of the cylinder; the contact part is arranged at the top end of the truncated cylinder and comprises two symmetrical detection pins, the vertexes of the detection pins are on the extension surface of the arc-shaped outer wall of the truncated cylinder, and the two detection pins are respectively provided with an outer curved surface, an outer inclined surface and an inner inclined surface which extend from the vertexes; and the two opposite inner inclined surfaces extending from the top points of the two detection feet to the direction of the column body part are gradually drawn close to form a groove. Compared with a traditional round crown head probe head, the offset Kelvin crown head probe top column head and the probe for chip testing, provided by the utility model, realize more accurate measurement when being applied to a standard array test socket or a wafer level probe head, and provide a test solution which is more stable, easy to maintain and long in service life.

Description

Technical Field

[0001] The utility model relates to the field of probes, in particular to a partial Kelvin crown probe top column head and a probe for chip testing. Background Art

[0002] As the semiconductor chip industry's requirements for precision analog, power, and RF testing continue to increase, chip test probes are required to provide more accurate testing to maximize test yield. Kelvin testing is a method that uses high-resolution measurements to determine limited changes in resistance. Kelvin probes can eliminate or significantly reduce the effects of contact resistance through precise electrical contact with current-carrying components or test points, enabling more accurate measurements. This is particularly important when working with low millivolt reference voltages used for high-current testing. Existing circular test probe tips struggle with spacing and accurate alignment during standard array and wafer-level testing.

[0003] Utility model CN220543003U discloses a MEMS probe structure for simulating Kelvin double contact. The probe comprises a left and right probe body, each with identical structure and connected by a probe insulation layer. The left and right probe bodies are mounted on a ceramic circuit board. The left and right probe bodies bend relative to the curved connection between the probe body and the base, making the probe susceptible to physical deformation when subjected to force. While this ensures circuit continuity, physical deformation can affect probe stability and test accuracy during high-precision chip testing.

[0004] Utility model CN219016404U discloses an external spring Kelvin test probe comprising a support column, a telescopic rod vertically sleeved within the support column, the telescopic rod extending and retracting within the support column, a second connection seat at the top end of the telescopic rod, the second connection seat extending and retracting on the support column via the telescopic rod, and a first needle vertically mounted at the top end of the second connection seat. A spring is sleeved externally on the support column, the other end of the spring being elastically connected to the bottom end of the second connection seat, and the telescopic rod is located within the spring. The contact area of the probe structure used in this utility model is limited by the size and design of the probe head, resulting in alignment problems when testing high-precision chips, which can affect test efficiency and the reliability of the results.

[0005] Therefore, how to improve the contact accuracy, mechanical strength and service life of the Kelvin probe top column head and provide a more stable and reliable test effect is an urgent problem to be solved by those skilled in the art. Utility Model Content

[0006] In response to the defects in the above-mentioned prior art, the utility model provides a partial Kelvin crown head probe top column head and a probe for chip testing. The detection foot size, strength and contact accuracy of the partial Kelvin crown head probe top column head are all optimized, and the test effect is stable and the service life is long.

[0007] In a first aspect, the utility model provides a partial Kelvin crown probe top column head, comprising a column portion and a contact portion;

[0008] The cylindrical portion comprises a truncated cylinder obtained by cutting the cylinder along a longitudinal plane parallel to the central axis of the cylinder;

[0009] The contact portion is provided at the top of the truncated cylinder and includes two symmetrical detection feet, the vertices of the detection feet are on the extended surface of the arc-shaped outer wall of the truncated cylinder, and the two detection feet respectively have an outer curved surface, an outer inclined surface and an inner inclined surface extending from the vertices;

[0010] The two opposite inner inclined surfaces extending from the vertices of the two detection feet toward the column portion gradually approach each other to form a groove.

[0011] Furthermore, the volume of the truncated cylinder is greater than or equal to 1 / 2 of the volume of the cylinder. Preferably, it is greater than 1 / 2. That is, the truncated cylinder is a cylinder cut along the longitudinal direction of the central axis of the cylinder along any non-circular chord. The larger volume portion corresponding to the major arc and the smaller volume portion corresponding to the minor arc can be installed in the sleeve as a clamping end for fixing the truncated cylinder.

[0012] Preferably, the vertices of the two detection feet are symmetrically arranged within the same semicircular arc, and the line connecting the two vertices does not pass through the central axis of the cylinder. That is, the vertices of the two detection feet are located on the same semi-cylindrical side of the cylinder, and the plane passing through the central axis and perpendicular to the longitudinal plane is the symmetry plane.

[0013] Traditional circular crown-shaped probes have random contact points during testing due to their circular structure, making it difficult to maintain stable alignment. Furthermore, the contact points are dispersed and the contact area is limited, which easily leads to high contact resistance.

[0014] The top column of the Kelvin eccentric crown head probe of the utility model forms an eccentric structure of the main body by cutting the longitudinal plane, which better adapts to the test substrate. By designing two symmetrical detection feet and grooves between the detection feet at the contact part, and making the grooves gradually approach each other, the contact position can be accurately locked, the error is reduced, and the test accuracy is improved. At the same time, a larger effective contact area is provided, the contact resistance is reduced, and the test results are more accurate.

[0015] Furthermore, the outer curved surface is formed by the extension of the curved outer wall of the truncated cylinder, and the outer bevel is formed by an oblique cross-section passing through the two apexes of the detection foot and oriented toward the central axis of the cylinder. This oblique cross-section reduces the overall size of the detection foot, making the tip of the detection foot sharper and improving testing accuracy. While this cutting method places higher demands on the cutting process, it does result in a smaller, more pointed detection foot.

[0016] Preferably, each of the two detection pins further includes a second outer inclined surface extending from its vertex. The second outer inclined surface is formed by a second oblique cross-section passing through the two detection pin vertices and facing the curved outer wall of the truncated cylinder. The second oblique cross-section has a different inclination direction from the oblique cross-section forming the outer inclined surface, i.e., the second oblique cross-section is located between the inner oblique surface and the outer curved surface, further reducing the overall volume of the detection pin.

[0017] Furthermore, the included angle α between the oblique cross section and the central axis of the cylinder is 30-60°.

[0018] Furthermore, on a longitudinal plane passing through the vertices of the two detection feet, an angle β between the lowest point of the groove and a line connecting the two vertices of the detection feet is in the range of 45°-90°.

[0019] On the longitudinal plane passing through the two detection foot vertices, the 45°-90° angle between the lowest point of the groove and the detection foot vertices ensures that the probe can maintain a good contact area when in contact, thereby enhancing the stability of the probe contact part during contact detection with the object to be tested.

[0020] Furthermore, the groove has a symmetrical structure, and its symmetry plane passes through the central axis of the cylinder.

[0021] Furthermore, the spacing between the vertices of the two detection pins is equal to the length of the projection of the groove on a transverse plane perpendicular to the central axis of the cylinder. The bottom of the groove is formed by the inner inclined surfaces of the two detection pins gradually approaching each other, preferably forming a groove bottom line, and more preferably, the groove bottom line is within the transverse plane perpendicular to the central axis of the cylinder. If necessary, the groove bottom line can be cut to be outside the transverse plane, that is, the groove bottom line forms an angle other than 90° with the central axis of the cylinder. Even if the groove bottom line is tilted upward, downward, or coplanar with the transverse plane, its length projected on the transverse plane is preferably set within a certain range, defining the longest transverse distance from the longitudinal plane to the curved outer wall of the truncated cylinder. This distance needs to match the spacing between the detection pin vertices to ensure that the detection pin has a suitable three-dimensional structure and strength. Thus, starting from the longitudinal plane of the truncated cylinder, the horizontal width of the groove gradually increases, reaching a maximum value at the line connecting the two detection pin vertices.

[0022] Furthermore, the eccentric Kelvin crown probe head also includes a connecting portion, which shares a common central axis with the cylindrical body and has the same diameter. The bottom end of the truncated cylinder is eccentrically disposed on the top surface of the connecting portion. The body and the connecting portion are further eccentrically disposed to better accommodate the test substrate.

[0023] Furthermore, the Kelvin crown probe top column is an integrated structure. In this utility model, the column portion, contact portion, and optional connection portion of the probe top column are integrated into a single design, increasing overall strength and stability and simplifying the manufacturing process. Compared with existing probe combination structures that use dual probes for Kelvin testing, this significantly improves structural stability, avoids loosening or structural weaknesses during use, and ensures that accuracy and stability are maintained even after long-term use.

[0024] In a second aspect, the utility model further provides a chip testing probe, comprising the aforementioned partial Kelvin crown probe top column head.

[0025] The utility model has at least the following beneficial effects:

[0026] (1) The probe head of the utility model adopts a Kelvin crown probe top column head, introduces an eccentric structure of a truncated cylinder and a symmetrical detection foot design. The vertex of each detection foot is located on the extended surface of the arc outer wall and the oblique cross section of the cylinder. Combined with the groove design with gradually approaching inner oblique surfaces, the volume of the detection foot is effectively reduced. On the basis of the lower detection foot height, a sharper detection foot top structure is obtained, providing more accurate contact point positioning and alignment accuracy for chip testing.

[0027] (2) The Kelvin crown probe design of this utility model pays more attention to the optimization of contact resistance. Through its unique groove and bevel structure, it can significantly reduce the contact resistance between the probe and the chip, providing a more stable test effect, especially in the test of handling high current.

[0028] (3) The probe top column head of the utility model adopts an integrated structure, combined with a dedicated processing technology and cutting tools, which can maintain stable mechanical strength and precision during long-term use and is not easily deformed by external forces. This gives the probe a longer service life and more robust testing performance. Through optimized design and production processes, the probe top column head of the utility model can achieve continuous and stable mass production, meet the demand for probe quantity in industrial applications, and maintain consistent quality and performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A front view of the top column head of the partial Kelvin crown probe provided by the present invention;

[0030] Figure 2 A side view of the top column of the partial Kelvin crown probe provided by the present invention;

[0031] Figure 3 This is a top view of the top column head of the partial Kelvin crown head probe provided by the utility model.

[0032] Explanation of the reference numerals: 1-column portion, 2-contact portion, 21-external curved surface, 211-apex of the detection foot, 22-external inclined surface, 23-inner inclined surface, 24-groove, 3-connecting portion. DETAILED DESCRIPTION

[0033] To better understand the above technical solution, the following will be described in detail with reference to the accompanying drawings and specific implementation methods. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0034] The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The singular forms "a", "the" and "the" used in the embodiments of the present invention and the appended claims are also intended to include plural forms, unless the context clearly indicates otherwise, and "a plurality" generally includes at least two.

[0035] It should also be noted that the terms "include," "comprises," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a product or device comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such product or device. In the absence of further limitations, an element defined by the phrase "comprises a..." does not exclude the presence of other identical elements in the product or device comprising the element.

[0036] The terms "longitudinal plane" and "transverse plane" used in the embodiments of the present invention are defined relative to the central axis of the cylinder, wherein the longitudinal plane represents the surface parallel to the central axis of the cylinder, and the transverse plane represents all surfaces perpendicular to the central axis of the cylinder.

[0037] The following is a further detailed description of the partial Kelvin crown probe provided by the present invention in conjunction with the accompanying drawings. Figure 1-3 As shown, a partial Kelvin crown head probe comprises: a column portion 1 and a contact portion 2 provided at the top of the column portion 1, and an optional connecting portion 3. The top column head of the partial Kelvin crown head probe is preferably an integrated structure, wherein:

[0038] (1) The cylindrical portion 1 comprises a truncated cylinder obtained by cutting the cylinder along a longitudinal plane parallel to the central axis of the cylinder; the volume of the truncated cylinder is greater than or equal to 1 / 2 of the volume of the cylinder, and preferably the truncated cylinder is a large volume portion with a volume greater than 1 / 2 of the volume of the cylinder.

[0039] (2) The contact portion 2 includes two symmetrical detection feet, wherein the vertices 211 of the detection feet are on the extended surface of the arc-shaped outer wall of the truncated cylinder. The two detection foot vertices 211 are symmetrically arranged in the same semicircular arc, and the line connecting the two vertices does not pass through the central axis of the cylinder, that is, the two detection foot vertices 211 are located on the same semi-cylinder side of the cylinder, and the surface passing through the central axis and perpendicular to the longitudinal plane is the symmetry surface.

[0040] The two detection pins each have an outer curved surface 21, an outer bevel 22, and an inner bevel 23 extending from their vertices, as well as an optional second outer bevel located between the inner and outer curved surfaces. The two opposing inner bevels 23 extending from the two detection pin vertices 211 toward the cylindrical portion 1 gradually converge to form a groove 24. The groove 24 has a symmetrical structure, with its plane of symmetry passing through the central axis of the cylinder. The spacing between the two detection pin vertices 211 is equal to the length of the groove 24 projected onto a transverse plane perpendicular to the central axis of the cylinder. In a longitudinal plane passing through the two detection pin vertices, the angle β between the lowest point of the groove and the line connecting the two detection pin vertices is between 45° and 90°.

[0041] The outer curved surface 21 is formed by the extension of the arc-shaped outer wall of the truncated cylinder;

[0042] The outer inclined surface 22 is formed by an oblique section passing through the two detection foot vertices 211 and facing the central axis of the cylinder, and the angle α between the oblique section and the central axis of the cylinder is 30-60°;

[0043] An optional second outer inclined surface is formed by a second inclined section passing through the two detection foot vertices 211 and facing the arc-shaped outer wall of the truncated cylinder, wherein the second inclined section has a different inclination direction from the inclined section forming the outer inclined surface;

[0044] (3) Optional connecting portion 3: The connecting portion 3 and the cylindrical body of the column portion 1 share the same central axis and have the same diameter, and the bottom end of the truncated cylinder is eccentrically arranged on the top surface of the connecting portion 3.

[0045] In order to more clearly describe the structure of a partial Kelvin crown probe disclosed in the present invention, its processing method will be explained:

[0046] Take the column part 1, contact part 2 and connection part 3 as an example:

[0047] (1) The cylindrical portion 1, the contact portion 2, and the connecting portion 3 are initially an integrated cylindrical body. A cutting chord with a length less than the diameter is selected on the end face of the cylindrical body. The chord is cut along a longitudinal plane parallel to the central axis of the cylindrical body (i.e., perpendicular to the end face) to a position where 1 / 30 to 1 / 10 of the volume remains. From this position, the small volume portion corresponding to the inferior arc is removed along a transverse plane to obtain a truncated cylinder corresponding to the superior arc. The cylindrical portion between the aforementioned transverse plane and the bottom of the cylindrical portion 1 forms the connecting portion 3.

[0048] (2) The truncated cylinder is divided into a contact portion 2 and a cylindrical portion 1 with a certain proportion by a plane parallel to the end face of the cylinder. The plane is the connecting surface between the cylindrical portion 1 and the contact portion 2. The height of the contact portion 1 accounts for approximately 10%-30% of the total height of the truncated cylinder.

[0049] (3) Two symmetrical points are taken on the arc-shaped outer wall of the end face of the truncated cylinder. The two points are symmetrically arranged within the same semicircular arc, and the line connecting the two points does not pass through the central axis of the cylinder. That is, the two points are located on the same semi-cylindrical side of the cylinder, and the plane passing through the central axis and perpendicular to the longitudinal plane is the symmetry plane. The two points are the vertices of the two detection feet of the contact part 2;

[0050] The truncated cylinder is cut obliquely toward the central axis using an oblique section passing through the vertices of the two detection feet to obtain outer oblique surfaces passing through the vertices, wherein the angle α between the oblique section and the central axis of the cylinder is 30-60°;

[0051] Optionally, the truncated cylinder is cut with a second oblique section passing through the two vertices of the detection foot and facing the curved outer wall of the truncated cylinder, forming a second outer oblique surface passing through each of the vertices. This second oblique section has a different inclination than the oblique section forming the outer oblique surface and is located between the inner oblique surface and the outer curved surface, further reducing the overall volume of the detection foot.

[0052] (4) Starting from the vertices of the two detection feet, the area between the two detection feet is cut to form two opposite inner bevels extending from the vertices of the two detection feet toward the cylindrical portion. The two inner bevels gradually approach each other to form a groove. The intersection of the two inner bevels is the bottom line of the groove. The groove has a symmetrical structure, and its symmetry plane passes through the central axis of the cylinder. On the longitudinal plane passing through the vertices of the two detection feet, the angle β between the lowest point of the groove and the line connecting the two vertices of the detection feet is between 45° and 90°, and the distance between the two vertices of the detection feet is equal to the length of the projection of the groove on the transverse plane perpendicular to the central axis of the cylinder.

[0053] Optionally, the second outer bevel and the arc-shaped outer wall of the truncated cylinder form an arc-shaped boundary line, and the intersection point of the groove bottom line and the second outer bevel is higher than the lowest point of the arc-shaped boundary line, that is, the intersection point is within the area of the second outer bevel.

[0054] The above cutting can obtain the column part 1, contact part 2 and connecting part 3 of the integrated structure. The non-integrated structure only needs to be cut separately and then assembled, which will not be described in detail here.

[0055] Example

[0056] The chip testing probe of this embodiment includes a partial Kelvin crown probe top column head, wherein the probe top column head specifically includes the following structure:

[0057] (1) The cylindrical portion 1 comprises a truncated cylinder obtained by cutting the cylinder along a longitudinal plane parallel to the central axis of the cylinder, wherein the truncated cylinder is selected to have a large volume greater than 1 / 2 of the volume of the cylinder, see Figure 1 and Figure 3 .

[0058] (2) The contact portion 2 includes two symmetrical detection feet, wherein the vertices 211 of the detection feet are on the extended surface of the arc-shaped outer wall of the truncated cylinder. The two detection foot vertices 211 are symmetrically arranged in the same semicircular arc, and the line connecting the two vertices does not pass through the central axis of the cylinder, that is, the two detection foot vertices 211 are located on the same semi-cylindrical side of the cylinder, and the surface passing through the central axis and perpendicular to the longitudinal plane is the symmetry surface; and the two detection feet respectively have an outer curved surface 21, an outer inclined surface 22, and an inner inclined surface 23 extending from the vertices;

[0059] The outer curved surface 21 is formed by the extension of the arc-shaped outer wall of the truncated cylinder. The outer inclined surface 22 is formed by an oblique section passing through the two detection foot vertices 211 and facing the central axis of the cylinder. The angle α between the oblique section and the central axis of the cylinder is 45°.

[0060] The two opposing inner inclined surfaces 23 extending from the two detection foot vertices 211 toward the cylindrical portion 1 gradually converge to form a groove 24. The groove 24 has a symmetrical structure, with its symmetry plane passing through the central axis of the cylinder. The distance between the two detection foot vertices 211 is equal to the length of the groove 24 projected on a transverse plane perpendicular to the central axis of the cylinder. In the longitudinal plane passing through the two detection foot vertices, the angle β between the lowest point of the groove and the line connecting the two detection foot vertices is 60°.

[0061] (3) Connecting portion 3: The connecting portion 3 and the cylindrical body of the cylindrical body 1 share the same central axis and have the same diameter. The bottom end of the truncated cylinder is eccentrically arranged on the top surface of the connecting portion 3.

[0062] The column portion 1, the contact portion 2 and the connecting portion 3 of the partial Kelvin crown probe top column head in this embodiment are an integrated structure formed by precision cutting. The following is a specific cutting and processing method for the probe top column head:

[0063] (1) The cylindrical portion 1, the contact portion 2, and the connecting portion 3 are initially an integrated cylindrical body. A cutting chord with a length less than the diameter is selected on the end face of the cylindrical body. A cut is made from the cutting chord to a position where 1 / 20 of the remaining volume is left along a longitudinal plane parallel to the central axis of the cylindrical body (i.e., perpendicular to the end face). From this position, a small volume portion corresponding to the inferior arc is removed along a transverse plane to obtain a truncated cylinder corresponding to the superior arc. The cylindrical portion between the aforementioned transverse plane and the bottom of the cylindrical portion 1 forms the connecting portion 3.

[0064] (2) A virtual plane parallel to the end face of the cylinder is used to separate the contact portion 2 from the cylindrical portion 1, so that the height of the contact portion 1 accounts for 20% of the total height of the truncated cylinder. The plane is the connecting surface between the cylindrical portion 1 and the contact portion 2;

[0065] (3) On the same semicircular arc of the curved outer wall of the end face of the truncated cylinder, with the plane passing through the central axis and perpendicular to the longitudinal plane as the symmetry plane, two symmetrical points are selected, and the line connecting the two points does not pass through the central axis of the cylinder. The two points are the vertices of the two detection feet of the contact part 2;

[0066] The truncated cylinder is cut obliquely toward the central axis using an oblique section passing through the vertices of the two detection feet to obtain outer oblique surfaces passing through the vertices, wherein the angle α between the oblique section and the central axis of the cylinder is 45°;

[0067] (4) Taking the vertices of the two detection feet as the starting point, the area between the two detection feet is cut to form two opposite inner bevels extending from the vertices of the two detection feet toward the cylindrical portion. The two inner bevels gradually approach each other to form a groove. The intersection of the two inner bevels is the bottom line of the groove. The groove has a symmetrical structure, and its symmetry plane passes through the central axis of the cylinder. On the longitudinal plane passing through the vertices of the two detection feet, the angle β between the lowest point of the groove and the line connecting the two vertices of the detection feet is 60°, and the distance between the two vertices of the detection feet is equal to the length of the projection of the groove on the transverse plane perpendicular to the central axis of the cylinder.

[0068] Although preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they understand the basic inventive concepts. Therefore, the scope of protection of the present invention is intended to include the preferred embodiments and all changes and modifications that fall within the scope of the present invention. Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention.

Claims

1. A partial Kelvin crown probe top column head, characterized in that: including a column portion and a contact portion; The cylindrical portion comprises a truncated cylinder obtained by cutting the cylinder along a longitudinal plane parallel to the central axis of the cylinder; The contact portion is arranged at the top of the truncated cylinder and includes two symmetrical detection feet, the apex of the detection feet is on the extended surface of the arc-shaped outer wall of the truncated cylinder, and the two detection feet respectively have an outer curved surface, an outer inclined surface and an inner inclined surface extending from the apex. The two opposite inner inclined surfaces extending from the vertices of the two detection feet toward the column portion gradually approach each other to form a groove.

2. The Kelvin crown probe top column head according to claim 1, characterized in that: The volume of the truncated cylinder is greater than or equal to 1 / 2 of the volume of the cylinder.

3. The Kelvin crown probe top column head as claimed in claim 2, characterized in that: The outer curved surface is formed by the extension surface of the arc-shaped outer wall of the truncated cylinder, and the outer inclined surface is formed by the inclined section passing through the two detection foot vertices and facing the central axis of the cylinder.

4. The Kelvin crown probe top column head as claimed in claim 3, characterized in that: The included angle α between the oblique cross section and the central axis of the cylinder is 30-60°.

5. The Kelvin crown probe top column head as claimed in claim 1, characterized in that: On a longitudinal plane passing through the vertices of the two detection feet, an angle β between the lowest point of the groove and a line connecting the vertices of the two detection feet is between 45° and 90°.

6. The Kelvin crown probe top column head as claimed in claim 5, characterized in that: The groove has a symmetrical structure, and its symmetry plane passes through the central axis of the cylinder.

7. The Kelvin crown probe top column head as claimed in claim 6, characterized in that: The distance between the vertices of the two detection feet is equal to the length of the projection of the groove on the transverse plane perpendicular to the central axis of the cylinder.

8. The Kelvin crown probe top column head as claimed in claim 1, characterized in that: The eccentric Kelvin crown probe top column head also includes a connecting portion, which has a common central axis and the same diameter as the cylindrical body of the column part, and the bottom end of the truncated cylinder is eccentrically arranged on the top surface of the connecting portion.

9. The partial Kelvin crown probe top column head according to any one of claims 1 to 8, characterized in that: The top column head of the partial Kelvin crown head probe is an integrated structure.

10. A probe for chip testing, characterized in that: The invention comprises the top column head of the partial Kelvin crown probe as described in any one of claims 1 to 9.

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