Carrying jig for wafer boat

Abstract

The utility model provides a carrying jig for a wafer boat. The carrying jig comprises a bottom plate, a supporting disc, a vertical plate, a transverse plate, at least two clamping walls and at least two handles. The supporting disc is fixed on the bottom plate, and the upper surface of the supporting disc is provided with a first groove used for fixing a base plate of a wafer boat; the vertical plate is connected with the bottom plate; one side of the transverse plate is connected with the vertical plate, the other two sides of the transverse plate are connected with the two clamping walls respectively, the side, away from the vertical plate, of the transverse plate is in a circular arc shape, and a second groove used for fixing a column foot of a wafer boat is formed in the middle of the circular arc shape; one sides of the clamping walls are connected with the vertical plate, the other sides of the clamping walls are connected with the handles through hinges, and the clamping walls correspond to the handles one to one; and one side of the handle is provided with a third groove for fixing a column foot of the wafer boat. And the base plate of the wafer boat is fixed in the first groove on the supporting plate. And the three column feet are fixed by the second grooves in the transverse plate and the third grooves in the handle, so that the wafer boat can be prevented from inclining or vibrating. And the wafer boat can be carried by one person, so that the labor cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal boats, in particular to a transport jig for crystal boats. Background Art

[0002] During the semiconductor manufacturing process, the empty wafer boat needs to be cleaned and maintained, and the wafer boat needs to be moved during the cleaning and maintenance process. The wafer boat is usually made of polycrystalline silicon carbide and is easily damaged. The shape of the jig that currently carries the wafer boat is similar to a right angle. The jig is placed on a trolley. The jig mainly serves as a cushion to prevent the chassis of the wafer boat from being damaged by the trolley. When moving the wafer boat, two people are usually required. One person places the wafer boat on the jig and supports the wafer boat to prevent it from tipping over; the other person pulls the trolley and pulls the wafer boat to the designated location.

[0003] However, the existing method of transporting the wafer boat has the following problems:

[0004] 1. If the road surface is uneven or there are obstacles, it is easy to cause the trolley to vibrate or tilt during driving, which in turn causes the crystal boat to vibrate or tilt. If the column foot of the crystal boat is damaged, the crystal boat will be unusable, which will not only cause economic losses, but also affect the progress of equipment maintenance, causing equipment maintenance to exceed the time limit.

[0005] 2. The crystal boat cannot be fixed on the fixture. It requires two people to cooperate when moving the crystal boat. It cannot be done by one person, which takes up a lot of manpower costs. Utility Model Content

[0006] The utility model provides a transport jig for a crystal boat, so as to solve the above-mentioned technical problems existing in the process of transporting the crystal boat.

[0007] In order to solve the above technical problems, the present invention provides a handling jig for a crystal boat, comprising a base plate, a support plate, a vertical plate, a horizontal plate, at least two clamping walls and at least two handles; the support plate is fixed to the base plate, and the upper surface of the support plate is provided with a first groove for fixing the base plate of the crystal boat; the vertical plate is connected to the base plate; one side of the horizontal plate is connected to the vertical plate, and the other two sides of the horizontal plate are respectively connected to the two clamping walls, and the shape of the side of the horizontal plate away from the vertical plate is an arc shape, and a second groove for fixing the column foot of the crystal boat is provided in the middle of the arc; one side of the clamping wall is connected to the vertical plate, and the other side of the clamping wall is connected to the handle by a hinge, and the clamping wall and the handle correspond one to one; one side of the handle is provided with a third groove for fixing the column foot of the crystal boat.

[0008] Preferably, the support plate is fixed to the base plate via a shock absorber.

[0009] Preferably, the shock absorber is a hydraulic shock absorber.

[0010] Preferably, the number of the transverse plates is two, the number of the clamping walls and the number of the handles are four, the two transverse plates are arranged on the vertical plates at intervals, and each transverse plate is surrounded by the vertical plates and the two clamping walls.

[0011] Preferably, the two transverse plates are arranged in parallel.

[0012] Preferably, the horizontal plate is vertically connected to the vertical plate.

[0013] Preferably, the bottom plate is vertically connected to the vertical plate.

[0014] Preferably, the support plate is cylindrical in shape.

[0015] Preferably, the bottom plate is provided with through holes for fixing.

[0016] Preferably, the bottom plate is in the shape of a cuboid.

[0017] The utility model provides a transport jig for a wafer boat. When the wafer boat needs to be transported, the jig is first secured to a trolley, the handle is then opened, and the wafer boat is moved onto the jig. The wafer boat's chassis fits neatly into the first groove on the support plate. After the handle is reset, the three column feet of the wafer boat are secured by the second groove on the horizontal plate and the third groove on the handle. This allows the wafer boat to be fixed in place in all directions, preventing it from tilting or vibrating. This transport jig has the unexpected effect of effectively preventing the wafer boat from tilting or vibrating during transport, and can be transported by one person, saving labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a wafer boat transport jig provided by one embodiment of the present utility model.

[0019] Figure 2 This is a structural schematic diagram of a wafer boat placed on a transport jig provided by one embodiment of the present invention.

[0020] Figure 3 This is a structural schematic diagram of a wafer boat and a transport jig placed on a trolley provided by one embodiment of the present invention.

[0021] [The following are the descriptions of the reference numerals]:

[0022] Base plate-1, support plate-2, vertical plate-3, horizontal plate-4, clamping wall-5, handle-6, shock absorber-7;

[0023] First groove-21;

[0024] Second groove-41

[0025] Third groove - 61;

[0026] Crystal boat-10, column foot-101;

[0027] Trolley - 20. DETAILED DESCRIPTION

[0028] To further clarify the objectives, advantages, and features of the present invention, the following describes in further detail a wafer boat handling jig proposed in the present invention, with reference to the accompanying drawings. It should be noted that the drawings are highly simplified and not to exact scale, and are intended solely to facilitate and clearly illustrate the objectives of the present invention.

[0029] In the description of this utility model, the terms "first," "second," and other qualifiers are added for convenience of description and reference and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, features qualified with qualifiers such as "first," "second," and the like may explicitly or implicitly include one or more of such features.

[0030] like Figure 1-Figure 3 As shown, this embodiment provides a handling fixture for a wafer boat 10, comprising a base plate 1, a support plate 2, a vertical plate 3, a horizontal plate 4, at least two clamping walls 5 and at least two handles 6; the support plate 2 is fixed on the base plate 1, and the upper surface of the support plate 2 is provided with a first groove 21 for fixing the base of the wafer boat 10; the vertical plate 3 is connected to the base plate 1; one side of the horizontal plate 4 is connected to the vertical plate 3, and the other two sides of the horizontal plate 4 are respectively connected to the two clamping walls 5, and the shape of the side of the horizontal plate 4 away from the vertical plate 3 is an arc shape, and the middle of the arc shape is provided with a second groove 41 for fixing the column foot 101 of the wafer boat 10; one side of the clamping wall 5 is connected to the vertical plate 3, and the other side of the clamping wall 5 is connected to the handle 6 through a hinge, and the clamping wall 5 and the handle 6 correspond one to one; one side of the handle 6 is provided with a third groove 61 for fixing the column foot 101 of the wafer boat 10.

[0031] This embodiment provides a transport jig for a wafer boat 10. When the wafer boat 10 needs to be transported, the jig is first secured to the cart 20. The handle 6 is then opened, and the wafer boat 10 is placed onto the jig. The base of the wafer boat 10 fits neatly within the first groove 21 on the support plate 2. Once the handle 6 is returned to its original position, the three legs 101 of the wafer boat 10 are secured by the second groove 41 on the cross plate 4 and the third groove 61 on the handle 6. This allows the wafer boat 10 to be secured in all directions, preventing it from tilting or vibrating. This transport jig offers the unexpected benefit of effectively preventing the wafer boat 10 from tilting or vibrating during transport. Furthermore, a single person can complete the transport of the wafer boat 10, saving labor costs.

[0032] Preferably, Figure 1 and Figure 3 As shown, the support plate 2 is fixed to the bottom plate 1 via a shock absorber 7. The shock absorber 7 can reduce the vibration transmitted from the trolley 20 to the wafer boat 10, thereby preventing the wafer boat 10 from being damaged.

[0033] Preferably, Figure 1 and Figure 3 As shown, the shock absorber 7 is a hydraulic shock absorber. The hydraulic shock absorber can effectively reduce the vibration transmitted from the trolley 20 to the wafer boat 10. In other embodiments, the shock absorber 7 can be a spring shock absorber or other types of shock absorbers.

[0034] Preferably, Figure 1 and Figure 2 As shown, there are two transverse plates 4, four clamping walls 5, and four handles 6. Two transverse plates 4 are spaced apart on the vertical plates 3, and each transverse plate 4 is surrounded by the vertical plates 3 and two clamping walls 5. Providing two transverse plates 4 can more effectively secure the column feet 101 of the wafer boat 10 and prevent the wafer boat 10 from tilting.

[0035] Preferably, Figure 1 As shown, the two transverse plates 4 are arranged in parallel, which facilitates the design and manufacture of the transverse plates 4 .

[0036] Preferably, Figure 1 As shown, the horizontal plate 4 is vertically connected to the vertical plate 3, which facilitates the design and manufacture of the horizontal plate 4 and the vertical plate 3.

[0037] Preferably, Figure 1 As shown, the bottom plate 1 is vertically connected to the vertical plate 3 , which facilitates the design and manufacture of the bottom plate 1 and the vertical plate 3 .

[0038] Preferably, Figure 1 and Figure 2 As shown, the support plate 2 is cylindrical in shape, which can prevent the outer surface of the support plate 2 from damaging the wafer boat 10 when the wafer boat 10 is placed on the support plate 2 .

[0039] Preferably, reference Figure 3 As shown, the base plate 1 is provided with through holes for fixing. The through holes and bolts allow the transport jig to be detachably fixed to the trolley 20. In other embodiments, a slot can be provided on the lower surface of the base plate 1 to fix the transport jig to the trolley 20.

[0040] Preferably, Figure 3As shown, the bottom plate 1 is in the shape of a cuboid, so that the bottom surface of the bottom plate 1 can fit with the upper surface of the trolley 20, thereby improving the stability of the fixture.

[0041] In summary, the present invention provides a transport jig for a wafer boat 10. When the wafer boat 10 needs to be transported, the jig is first secured to the trolley 20, the handle 6 is opened, and the wafer boat 10 is then moved onto the jig. The base of the wafer boat 10 is securely positioned within the first groove 21 of the support plate 2. After the handle 6 is repositioned, the three legs 101 of the wafer boat 10 are secured by the second groove 41 on the cross plate 4 and the third groove 61 on the handle 6. This allows the wafer boat 10 to be secured in all directions, preventing it from tilting or vibrating. This transport jig has the unexpected benefit of effectively preventing the wafer boat 10 from tilting or vibrating during transport, and can be transported by one person, saving labor costs.

[0042] The above description is only a description of the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art based on the above disclosure shall fall within the scope of protection of the present invention.

Claims

1. A wafer boat handling jig, characterized in that: The cam is constructed by having a plurality of locking plates and a plurality of locking plates, each of which is adapted to lock the base of the cam. The cam is constructed of multiple pieces, and each of the plurality of locking plates has a plurality of locking plates. The cam is constructed of multiple pieces, and the plurality of locking plates has a plurality of locking plates. The cam is constructed of multiple pieces, and the plurality of locking plates has a plurality of locking plates.

2. A wafer boat handling jig according to claim 1, characterized in that: The support plate is fixed to the base plate via a shock absorber.

3. A wafer boat handling jig according to claim 2, characterized in that: The shock absorber is a hydraulic shock absorber.

4. The wafer boat transport jig according to claim 1, wherein: There are two transverse plates, four clamping walls and four handles, two transverse plates are spaced apart on the vertical plates, and each transverse plate is surrounded by the vertical plates and the two clamping walls.

5. A wafer boat handling jig according to claim 4, characterized in that: The two transverse plates are arranged in parallel.

6. The wafer boat transport jig according to claim 1, wherein: The horizontal plate is vertically connected to the vertical plate.

7. The wafer boat transport jig according to claim 1, wherein: The bottom plate is vertically connected to the vertical plate.

8. The wafer boat transport jig according to claim 1, wherein: The support plate is cylindrical in shape.

9. The wafer boat transport jig according to claim 1, wherein: The bottom plate is provided with through holes for fixing.

10. The wafer boat transport jig according to claim 1, wherein: The bottom plate is in the shape of a cuboid.

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