Frame module for use in mask assembly for depositing thin film of flat panel display device

Abstract

The utility model relates to a frame module used in a mask assembly for depositing a thin film of a flat panel display device. More specifically, the present invention relates to a CNT fiber stretching device which is stretched from a very thin CNT fiber having a nano-sized diameter, excellent mechanical rigidity and tensile force, and excellent chemical stability, electrical conductivity, and thermal expansibility, and which is disposed in the form of a strip on the upper part of a frame which fixes and supports a plurality of unit masks. The mask assembly and the frame module for depositing a thin film of a flat panel display device can suppress sagging due to gravity of a substrate and deformation of a plurality of unit masks in a thin film deposition process.

Description

Technical Field

[0001] The utility model relates to a mask assembly and a frame module for depositing thin films for flat panel display devices, and more particularly to a mask assembly and a frame module for depositing thin films for flat panel display devices, wherein very thin CNT fibers having a nanometer diameter, excellent mechanical rigidity and tensile strength, and very good chemical stability, conductivity and thermal expansion are stretched and arranged in a strip form on the upper part of a frame that fixes and supports a plurality of unit masks, thereby suppressing sagging due to the gravity of the substrate and deformation of the plurality of unit masks during the thin film deposition process. Background Art

[0002] Recently, flat panel displays that overcome the shortcomings of cathode ray tubes and achieve lightweight and compact size have attracted much attention. Representative examples of such flat panel displays include organic light emitting displays (OLEDs), liquid crystal displays (LCDs), and plasma display panels (PDPs).

[0003] In order to manufacture a flat panel display device, especially an organic light emitting display device, it is necessary to form electrodes and a light emitting layer having specific patterns, and a deposition method using a mask assembly can be applied as a formation method thereof.

[0004] A known mask assembly consists of a frame with holes and a strip-shaped unit mask secured to the frame at both ends while tension is applied along its length. The unit mask can have multiple patterned holes, allowing for the manufacture of multiple organic light-emitting display devices on a substrate. Each patterned hole corresponds to a display device and is formed to the same shape as the electrode or light-emitting layer to be formed in the display device.

[0005] The aforementioned mask assembly is fixed in the deposition equipment, and the substrate is placed above the multiple unit masks. In this state, when the electrode material or light-emitting layer material evaporates from the deposition source located below the mask assembly, the material passes through the patterned hole portion and is deposited on the substrate in the same shape as the patterned hole portion.

[0006] However, in the aforementioned mask assembly, since the substrate is positioned directly on the unit masks with their central portions suspended above the apertures of the frame, the multiple unit masks are compressed by the weight of the substrate during deposition. Specifically, the central portion of the substrate sags downward due to its own weight, and this sag can cause the unit masks to deform due to stress.

[0007] The deformation of the unit mask increases as the size of the substrate increases, and leads to a decrease in deposition accuracy, thereby acting as a factor causing deposition defects.

[0008] To prevent this, metal support rods are placed on the upper portion of the frame to suppress the sagging of the substrate and the deformation of the unit fine metal mask (FMM) during the deposition process. Invar material is used as the metal support rods.

[0009] When the metal support rod is made of Invar material, in order to cope with high-resolution deposition, the part with the hole pattern needs to be made thinner. Therefore, the possibility of this part being damaged by the impact generated when the mask contacts the substrate during the deposition process or the impact transmitted by the cleaning liquid when the mask is cleaned after the deposition process is still high. Utility Model Content

[0010] Technical problems to be solved

[0011] The present invention is proposed to solve these problems. The purpose of the present invention is to provide a mask assembly for depositing a thin film of a flat panel display device, a CNT fiber support line stretching and bonding method thereof, and a frame module that are more preferred in the following aspects, that is, the support rods can be made of other materials with superior mechanical properties than the Invar material and used, so that the support rods stretched with a stronger force can be attached to the frame and used, thereby suppressing the sagging caused by the gravity of the substrate and the deformation of the fine metal mask during the deposition process.

[0012] The purpose of the present invention is to provide a mask assembly for depositing a thin film of a flat panel display device, a CNT fiber support wire stretching and bonding method thereof, and a frame module, which can be used to make support rods with materials having excellent mechanical properties and used for making mask assemblies.

[0013] The purpose of the present utility model is to provide a mask assembly for depositing thin films of flat panel display devices, a CNT fiber support line stretching and bonding method thereof, and a frame module, which can arrange support rods between holes or between units composed of several holes, thereby reducing the space between units, so that more units can be produced on the mask, and thus a larger number of flat panel display devices can be produced through a single deposition process.

[0014] The purpose of the present invention is to provide a mask assembly for depositing a thin film of a flat panel display device, a CNT fiber support line stretching and bonding method thereof, and a frame module, which can provide sufficient supporting force although the support rod is in the form of a sufficiently thin support line band to support the space between units in which the holes of the mask are collectively present, as well as the space between the holes or the space between the units.

[0015] Workaround

[0016] According to one aspect of the present invention, a mask assembly for depositing a thin film for a flat panel display device includes: a frame having an open portion; a strip-shaped unit mask having a plurality of patterned hole portions for deposition and fixed in parallel to the frame in a state where a tensile force is applied along the length direction; and at least two CNT fiber support lines, positioned across the open portion between the frame and the unit mask, and configured in such a manner that the CNT fibers are stretched into a strip form and stretched and bonded to the frame to fix and support the unit mask.

[0017] According to another aspect of the present invention, a frame module used in a mask assembly for depositing a thin film of a flat panel display device includes: a first-level frame, which is composed of first supporting parts arranged opposite to each other in the length direction of a unit mask and second supporting parts arranged opposite to each other in the width direction of the unit mask; a second-level frame, which forms a step with the first-level frame and is composed of a third supporting part parallel to the first supporting part and a fourth supporting part parallel to the second supporting part; and at least two CNT fiber supporting lines, which are configured in such a way that the CNT fibers are stretched by the second-level frame and thus combined into a combining groove formed in the first supporting part or the second supporting part of the first-level frame to support the partition walls between multiple pattern hole parts for deposition of the unit mask or the partition walls between units formed by the aggregation of at least two of the pattern hole parts.

[0018] In addition, the frame module used in the mask assembly for depositing a thin film of a flat panel display device may include: a first clamper and a second clamper, which grasp and stretch the two ends of the CNT fiber support line with respect to the first support part or the second support part of the first-level frame; and a welding part, which is used to weld the two ends of the CNT fiber support line to the side surface of the first support part or the second support part of the first-level frame.

[0019] According to another aspect of the present invention, a CNT fiber support wire stretching and bonding method for a mask assembly for depositing a thin film of a flat panel display device includes: for a frame module composed of a first-level frame and a second-level frame forming a step with the first-level frame, arranging the CNT fiber support wire in parallel in the X direction or Y direction of the first-level frame; for a pair of first support portions arranged opposite to each other across an open portion of the first-level frame, grasping both ends of the CNT fiber support wire with a first clamp and a second clamp and applying a stretching force; positioning the CNT fiber support wire on the pair of first support portions, and inserting the CNT fiber support wire into the second-level frame. formed in the coupling grooves on the pair of first support parts; causing one of the first clamper and the second clamper that grasp the two ends of the CNT fiber support wire to move downward along the side surface of the first-level frame; causing the other of the first clamper and the second clamper to move downward along the other side surface of the first-level frame, so that the two ends of the CNT fiber support wire move downward relative to the two side surfaces of the first-level frame; using welding components to weld the two ends of the CNT fiber support wire to the two side surfaces of the first-level frame; and separating the first clamper and the second clamper from the two ends of the CNT fiber support wire.

[0020] Arranging the CNT fiber support lines in parallel in the X direction or Y direction of the first-level frame includes: arranging the CNT fiber support lines in parallel relative to the partition walls between multiple pattern hole portions for deposition of the unit mask or the partition walls between units formed by gathering at least two of the pattern hole portions, and inserting the CNT fiber support lines into the coupling grooves includes: connecting and inserting a longer CNT fiber from the first coupling groove of the coupling grooves to the last coupling groove in a zigzag manner, and only welding and fixing the starting position of the first coupling groove and the ending position of the last coupling groove with welding parts.

[0021] Beneficial effects

[0022] According to one embodiment of the present invention, in a mask assembly, a CNT fiber support wire stretching and bonding method therefor, and a frame module for depositing thin films for flat panel displays, when a substrate is placed above multiple unit masks during deposition, the CNT fiber support wires support the multiple unit masks and the substrate in a stretched strip form below. This suppresses sagging caused by the weight of the substrate and the resulting deformation of the unit masks during deposition. Consequently, deposition quality can be improved by achieving precise deposition.

[0023] According to one embodiment of the present invention, in a mask assembly for depositing a thin film of a flat panel display device, its CNT fiber support wire stretching and bonding method, and a frame module, a unit mask can be manufactured and used by applying the CNT fiber support wire stretching and bonding method and by applying CNT fiber support wires with excellent mechanical properties to the frame module.

[0024] According to one embodiment of the present invention, in a mask assembly for depositing a thin film of a flat panel display device, a CNT fiber support wire stretching and bonding method thereof, and a frame module, the CNT fiber support wire is used as a support rod in the form of a strip. Since the CNT fiber support wire is thin enough, it can support the space between the holes rather than the space between the units in which the holes of the unit mask collectively exist. Therefore, it can support the entire surface during the deposition process, thereby suppressing the sagging caused by the gravity of the substrate and the deformation of the unit mask. Therefore, the sagging amount caused by the gravity of the substrate and the deformation of the unit mask can be reduced during the deposition process, thereby helping to improve the accuracy of the deposition process and increase the output rate.

[0025] According to one embodiment of the present invention, in a mask assembly for depositing a thin film of a flat panel display device, a CNT fiber support wire stretching and bonding method thereof, and a frame module, CNT fiber support wires are used as support rods in the form of strips instead of the existing Invar material. Since the CNT fiber support wires have better mechanical properties than the existing Invar material, they can be attached to the frame with a higher tensile force.

[0026] According to one embodiment of the present invention, in a mask assembly for depositing a thin film of a flat panel display device, a CNT fiber support line stretching and bonding method thereof, and a frame module, the degree to which sagging due to the gravity of the substrate and deformation of the unit mask are suppressed during the deposition process is greater than when the existing Invar material is used. Therefore, the amount of sagging due to the gravity of the substrate and deformation of the unit mask can be reduced during the deposition process, thereby helping to improve the accuracy of the deposition process and increase the yield.

[0027] According to one embodiment of the present invention, in a mask assembly for depositing a thin film of a flat panel display device, a CNT fiber support wire stretching and bonding method thereof, and a frame module, a thinner CNT fiber support wire can be used to support the space between holes instead of supporting the space between units of a unit mask, or a thinner CNT fiber support wire can be used to support the space between units, so that a larger number of units can be configured on the unit mask than the number of units on an existing unit mask, thereby increasing the number of products that can be produced through a single deposition process, that is, improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1a is an exploded perspective view of a conventional mask assembly for depositing thin films of flat panel display devices;

[0029] Figure 1b is shown as Figure 1a A table of physical properties of Invar material used for support rods of mask assemblies for depositing thin films;

[0030] Figures 2a to 2f The figures respectively show a manufacturing process of CNT nanotubes, a new material used as support rods of a mask assembly for depositing thin films of flat panel display devices according to an embodiment of the present invention, an SEM image of CNT nanotubes, a graph showing strain and tensile stress of twisted CNT fibers and untwisted CNT fibers, a graph showing array height and strength, a picture showing a CNT fiber spinning process, and a graph showing the mechanical properties of various CNT fibers;

[0031] Figure 3 is an exploded perspective view of a mask assembly for depositing a thin film of a flat panel display device according to an embodiment of one aspect of the present invention;

[0032] Figure 4 is a cross-sectional view taken along line AA' Figure 3 A combined stereogram of

[0033] Figure 5 is based on Figure 3 A combined perspective view of a variant embodiment of the present invention;

[0034] Figure 6a is a combined perspective view of a frame module according to a first embodiment of another aspect of the present invention, with cross-sectional views taken along lines AA' and BB';

[0035] Figure 6b is based on Figure 6a A combined perspective view of a frame module of a variant embodiment;

[0036] Figure 7a is a combined perspective view of a frame module according to a second embodiment of another aspect of the present invention, with cross-sectional views taken along lines AA' and BB';

[0037] Figure 7b is based on Figure 7a A combined perspective view of a frame module of a variant embodiment;

[0038] Figure 8a is a combined perspective view of a frame module according to a third embodiment of another aspect of the present invention, with cross-sectional views taken along lines AA' and BB';

[0039] Figure 8b is based on Figure 8a A combined perspective view of a frame module of a variant embodiment;

[0040] Figure 9a is a combined perspective view of a frame module of a first embodiment according to yet another aspect of the present invention, with cross-sectional views taken along lines AA' and BB';

[0041] Figure 9b is based on Figure 9a A combined perspective view of a frame module of a variant embodiment of the present invention; and

[0042] Figure 10 This is a flow chart illustrating a method for stretching and bonding a CNT fiber support line of a mask assembly for depositing a thin film of a flat panel display device according to another aspect of the present invention.

[0043] Description of Reference Signs

[0044] 100: Mask assembly

[0045] 110: CNT fiber support line

[0046] 111, 113: First clamper, second clamper

[0047] 115, 115': Welded parts

[0048] 117: Laser welding machine

[0049] 200A, 200B, 200C, 200D: Frame modules

[0050] 120: Framework

[0051] 121: First level framework

[0052] 123: Second level framework

[0053] 122, 126: first supporting part, third supporting part

[0054] 124, 128: second supporting part, fourth supporting part

[0055] 122a, 122d: coupling groove

[0056] 122b, 122c: Combination protrusions

[0057] 140: Unit mask

[0058] 141: Pattern hole Specific embodiments

[0059] Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. The present invention can be implemented in various forms and is not limited to the embodiments described herein.

[0060] Furthermore, in various embodiments, components having the same configuration are representatively described using the same reference numerals as in the prior embodiment, while in other embodiments, only configurations different from the prior embodiment are described.

[0061] In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are given the same reference numerals throughout the specification.

[0062] In addition, the size and thickness of each component shown in the drawings are arbitrarily shown for the convenience of explanation, and therefore the present invention is not necessarily limited to what is shown in the drawings.

[0063] In the figures, the thickness of each layer and region is exaggerated for clarity. Furthermore, in the figures, the thickness of some layers and regions is exaggerated for ease of illustration. When a layer, film, region, plate, or other portion is referred to as being "on" or "upper" another portion, this includes not only the case where the portion is "directly above" the other portion, but also the case where another portion exists between them. Conversely, when a portion is referred to as being "directly above" another portion, this means that no other portion exists between them.

[0064] First, refer to Figure 1a and Figure 1b An exploded perspective view of a conventional mask assembly for depositing thin films of flat panel display devices will be described.

[0065] Figure 1a is an exploded perspective view of a conventional mask assembly for depositing thin films of flat panel display devices, and Figure 1b is shown as Figure 1a Table of the physical properties of the Invar material used for support rods of mask assemblies for thin film deposition.

[0066] Reference Figure 1a According to an embodiment of the present invention, a mask assembly 1 for depositing a thin film of a flat panel display device includes: a frame 20 having an opening portion 21, a strip-shaped unit mask 40 having a plurality of patterned hole portions 41 for deposition and fixed parallel to the frame 20 in a state where a tensile force is applied along the length direction (y-axis direction), and a support rod 10 positioned between the frame 20 and the unit mask 40 and crossing the opening portion 21.

[0067] The frame 20 fixes and supports both ends of the unit mask 40 and exposes the pattern holes 41 provided in the unit mask 40 through the opening 21. Since a compressive force acts on the frame 20 along the length of the unit mask 40 due to the tensile force applied to the unit mask 40, the frame 20 is formed of a relatively rigid metal material to prevent deformation due to the compressive force.

[0068] The frame 20 includes a pair of first support portions 22 that face each other in the width direction (x-axis direction in the figure) of the unit mask 40 across the opening 21, and a pair of second support portions 24 that face each other in the length direction (y-axis direction in the figure) of the unit mask 40 across the opening 21. Both ends of the unit mask 40 are fixed to the second support portions 24 by welding or other means.

[0069] The first supporting portion 22 and the second supporting portion 24 may be formed to have the same length or different lengths.

[0070] In the structure in which the sheet mask is divided into strip-shaped unit masks 40 and fixed to the frame 20 as described above, unit masks 40 with excellent pattern accuracy can be selected and used, thereby reducing shape errors in the pattern hole portion 41. Furthermore, deformation of the unit mask 40 and distortion of the pattern hole portion 41 due to thermal expansion that may occur during the deposition process can be suppressed, and since a uniform tensile force is applied along the length of the unit mask 40, the concentration of deformation on specific portions of the unit mask 40 can be minimized.

[0071] The support rod 10 is formed of a relatively rigid material (for example, Invar, which is the same metal as the frame 20 ) to prevent deformation due to differences in thermal expansion characteristics.

[0072] like Figure 1b As shown, Invar alloy is an iron-nickel (Fe-Ni) alloy composed of 36wt% to 39wt% nickel (Ni), less than 0.5wt% manganese (Mn), less than 0.2wt% carbon (C) and the balance iron (Fe), and has a thermal expansion coefficient of 3.2 to 7.2 above 260°C, an elastic modulus of 140GPA to 150GPA, a tensile strength of 517MPa, an elongation of 30%, and a specific gravity of 8.05 to 8.12.

[0073] However, when made of Invar alloy, the portion of the strip-shaped unit mask 40 in which the pattern hole portion 41 exists needs to be made thinner in order to achieve high-resolution deposition. The problem is that the portion is more likely to be damaged due to the impact generated when the unit mask 40 and the substrate contact each other during the deposition process or the impact transmitted by the cleaning liquid when the unit mask 40 is cleaned after the deposition process.

[0074] Furthermore, when made of Invar alloy, there is a problem in that processing efficiency decreases due to the increased weight of the mask assembly, and the weight load of the mask frame assembly transfer device located in the chamber of the deposition device increases, resulting in a possible decrease in productivity.

[0075] In this regard, reference will be made to Figures 2a to 2f It is explained that the support rod is made of CNT fiber, which has better mechanical properties than Invar alloy material, and is made into a strip shape like a thinner support wire. The support rod is stretched with a stronger force to attach it to the frame for use, thereby suppressing the sagging caused by the gravity of the substrate and the deformation of the unit mask during the deposition process.

[0076] Figures 2a to 2f They respectively show the manufacturing process of CNT nanotubes, a new material used as support lines of a mask assembly for depositing a thin film of a flat panel display device according to an embodiment of the present invention, an SEM image of CNT nanotubes, graphs of strain and tensile stress of twisted CNT fibers and untwisted CNT fibers, a graph showing array height and strength, a picture showing the CNT fiber weaving process, and a graph showing the mechanical properties of various CNT fibers.

[0077] like Figure 2a As shown, it can be seen that CNT (i.e., carbon nanotube) is a nanomaterial with a hollow cylindrical shape formed by a two-dimensional hexagonal lattice of carbon atoms curled or bonded in one direction. (a) A dry ribbon is deposited on a glass substrate (the black arrow indicates the main axis of the ribbon and corresponds to the direction of the initial fluid velocity) and (b) grows into a CNT fiber. (c) The knots or buckles formed in the CNT fiber show high flexibility and resistance to torsion.

[0078] like Figure 2b As shown, it can be seen from the SEM image that when the CNT fiber is spun, the structure formed in the draw-twist process has a diameter of 0.25nm to 25nm, that is, it has a very small diameter, and an aspect ratio of 100,000,000:1 or more, that is, the length can be made almost infinite relative to the diameter.

[0079] like Figure 2cAs shown, it can be seen that the stretched-twisted small-diameter CNT fibers form a 650um array, the untwisted CNT fibers are damaged under a deformation of more than 2%, and the twisted CNT fibers show tensile stress even at a strain of almost more than 6% compared to the untwisted CNT fibers.

[0080] In addition, if Figure 2d As shown, observing the relationship between the height and strength of the CNT fiber array, it can be seen that as the array height increases along the black line, the strength also increases. The dots represent oxygen-supported growth data representing poor CNT alignment, the squares represent general growth, and the triangles represent good CNT alignment and represent hydrogen-supported growth data, indicating that the strength depends on the array morphology.

[0081] like Figure 2e As shown, it can be seen that CNT fibers can be spun.

[0082] like Figure 2f As shown, it can be seen that the diameter of CNT fiber is 5μm-12μm, and it has a tensile stress of 800MPa to 1000MPa and an elastic modulus of 50GPa to 100GPa. Due to the bonding strength between the nanostructure and atoms, CNT fiber has amazing mechanical strength and tensile stress, and its chemical stability, electrical conductivity and thermal conductivity are also excellent.

[0083] <Example>

[0084] Will refer to Figures 3 to 5 A mask assembly for depositing a thin film of a flat panel display device according to an embodiment of one aspect of the present invention and its modified embodiments is described.

[0085] Figure 3 is an exploded perspective view of a mask assembly for depositing a thin film of a flat panel display device according to an embodiment of one aspect of the present invention. Figure 4 is a cross-sectional view taken along line AA' Figure 3 A combined stereogram of Figure 5 is based on Figure 3 A combined stereogram of a variant embodiment of .

[0086] like Figure 3As shown, a mask assembly 100 for depositing a thin film of a flat panel display device according to an embodiment of one aspect of the present invention includes: a frame 120 having an open portion 120a similar to the existing mask assembly 1, a strip-shaped unit mask 140 having a plurality of patterned holes 141 for deposition and fixed parallel to the frame 120 in a state where a tensile force is applied along the length direction (y-axis direction), and a strip-shaped CNT fiber support line 110, wherein the CNT fiber support line 110 is positioned between the frame 120 and the unit mask 140, crossing the open portion 120a, and is stretched as shown in FIG. Figures 2a to 2f The unit mask 140 is fixed and supported by CNT fibers having a diameter of 0.25 nm to 25 nm, excellent mechanical rigidity and tensile strength, and very good chemical stability, conductivity and thermal expansion.

[0087] The frame 120 secures and supports both ends of the unit mask 140 and exposes the patterned holes 141 provided in the unit mask 140 through the opening 120a, similar to the prior art. The frame 120 can be made of a relatively rigid metal material (e.g., Invar) to prevent deformation due to compression.

[0088] In a mask assembly 100 for depositing a thin film for a flat panel display device according to an embodiment of one aspect of the present invention, the frame 120 may include a first-stage frame 121 and a second-stage frame 123. The first-stage frame 121 includes a pair of first supporting portions 122 opposite to each other in the width direction of the unit mask 140 (the x-axis direction in the figure) separated by an opening 120a, and a pair of second supporting portions 124 opposite to each other along the length direction of the unit mask 140 (the y-axis direction in the figure). The second-stage frame 123 forms a step with the first-stage frame 121 and provides a space for grasping the two ends of the CNT fiber support line 110 and stretching the two ends along the width direction of the unit mask 140 to fix them.

[0089] Similar to the above-described first stage frame 121 , the second stage frame 123 may include a pair of third supports 126 opposing each other in the width direction of the unit mask 140 and a pair of fourth supports 128 opposing each other along the length direction of the unit mask 140 .

[0090] The first supporting portion 122 and the second supporting portion 124 as well as the third supporting portion 126 and the fourth supporting portion 128 may be formed with the same length or with different lengths, and between the first supporting portion 122 and the third supporting portion 126 and between the second supporting portion 124 and the fourth supporting portion 128, a stepped step may be formed on the outside, and an inclined portion 125 that converges upward toward the open portion 120a may be formed on the inside.

[0091] The strip-shaped unit mask 140 is fixed to the frame 120 by welding or the like while being subjected to a uniform tensile force along its length, similar to the conventional embodiment.

[0092] like Figure 3 As shown, the CNT fiber support line 110 is in the form of a strip and is made of CNT fiber having better mechanical properties than the Invar material, and is fixed to the first-level frame 121 by being stretched with a stronger force using the second-level frame 123. Therefore, the sagging caused by the gravity of the substrate and the deformation of the unit mask can be suppressed during the deposition process.

[0093] like Figure 4 As shown, in a mask assembly 100 for depositing a thin film of a flat panel display device according to an embodiment of one aspect of the present invention, a pattern hole portion 141 provided on a unit mask 140 can correspond to one display device, and each pattern hole portion 141 can be formed into the same shape as an electrode or a light-emitting layer to be formed in the display device.

[0094] As described above, the mask assembly 100 has a plurality of patterned hole portions 141 along the length direction and the width direction of the unit mask 140 , so that a plurality of display devices can be simultaneously manufactured on a substrate using one mask assembly 100 .

[0095] The CNT fiber support wire 110 is thin enough to support the partition walls 143 between the plurality of patterned holes 141 one by one from below.

[0096] Since the CNT fiber support wire 110 is thin, the space between units formed by the plurality of patterned holes 141 can be reduced, so that more units can be produced on the unit mask 140, thereby increasing the number of products that can be produced through a single deposition process.

[0097] Although the CNT fiber support wire 110 is positioned below the plurality of unit masks 140 and across the opening 120 a of the frame 120 , it firmly supports the center portion of the unit mask 140 suspended above the opening 120 a due to its mechanical strength.

[0098] To this end, both ends of the CNT fiber support wire 110 are fixed to the first support portion 122 by a stretching method described below with reference to another embodiment and modified embodiments, thereby being arranged to be orthogonal to the plurality of unit masks 140 .

[0099] pass Figures 2a to 2fIt can be seen that the above-mentioned CNT fiber support wire 110 is arranged in a strip array form with a circular cross-section, and can have a predetermined strength even against deformation, and has a preferred tensile stress and elastic modulus.

[0100] Even though the CNT fiber support wire 110 is arranged to support the partition walls 143 between the pattern holes 141 along the length direction of the unit mask 140 (y-axis direction in the figure), the partition walls 143 are nanometer-sized in diameter and thus do not block the pattern holes 141 during the deposition process.

[0101] like Figure 5 As shown, except that the above-mentioned CNT fiber support line 110 is arranged along the length direction of the unit mask 140 (the y-axis direction in the figure) to support the partition wall 143 between the units formed by the aggregation of at least two pattern hole portions 141, the mask assembly for depositing a thin film for a flat panel display device according to a variant embodiment of an embodiment of one aspect of the present invention is basically the same as or similar to the mask assembly for depositing a thin film for a flat panel display device according to an embodiment of one aspect of the present invention.

[0102] Since the CNT fiber support wire 110 is not only thin but also has amazing mechanical strength, even if the CNT fiber support wire 110 is stretched and fixed at predetermined intervals along the length direction of the unit mask 140 for the partition wall 143 between the units formed by gathering at least two pattern holes 141, it can firmly support the central part of the unit mask 140. Moreover, since its weight is greatly reduced compared with the Invar alloy material and is almost not a problem, it will not affect the weight load of the mask frame assembly conveying equipment located in the chamber of the deposition equipment, thereby improving productivity.

[0103] Will refer to Figure 6a and Figure 6b A frame module for thin film deposition and a method for manufacturing the same according to a first embodiment and its modified embodiments, which utilize CNT fiber support wires having excellent mechanical properties, are described.

[0104] Figure 6a is a combined perspective view of a frame module according to a first embodiment of another aspect of the present invention, with cross-sectional views taken along lines AA' and BB', and Figure 6b Is along Figure 6a A perspective view of a frame module according to a modified embodiment, showing a cross-sectional view taken along line BB'.

[0105] Reference Figure 6aAs can be seen from the A-A' section, in the frame modules 200A and 200B according to the first embodiment, at the second-stage frame 123 below the first-stage frame 121, the two ends of the above-mentioned CNT fiber support wire 110 are grasped by the first clamper 111 and the second clamper 113 and a tensile force is applied so that the two ends of the above-mentioned CNT fiber support wire 110 can be stretched and fixed to a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121.

[0106] The CNT fiber support wire 110 , with both ends stretched by the first clamper 111 and the second clamper 113 , may be positioned on the pair of first support portions 122 , respectively, and inserted into the coupling grooves 122 a formed on the pair of first support portions 122 .

[0107] As can be seen from the BB′ cross section, the coupling grooves 122 a are recessed relative to the upper surface of the first supporting portion 122 , and coupling protrusions 122 b are formed between the coupling grooves 122 a .

[0108] Of course, depending on circumstances, the coupling grooves 122 a may also be arranged opposite to each other on a pair of second supporting portions 124 , but the following description will be based on the first supporting portion 122 .

[0109] The coupling grooves 122 a may be formed by recessing the surfaces of the pair of first supporting parts 122 (ie, the first-stage frames 121 ) using a laser to form a pattern.

[0110] As a modified example, on the first supporting portion 122 or the second supporting portion 124 of the first-stage frame 121 , the coupling protrusions 122 c may be patterned at intervals of coupling grooves 122 d corresponding to the diameter of the CNT fiber supporting wire 110 .

[0111] Considering that the above-mentioned frame modules 200A and 200B are made of Invar alloy material, which is a material with relatively high rigidity, it is difficult to form the above-mentioned coupling groove 122a or coupling protrusion 122c on the first support part 122 or the second support part 124 of the first-level frame 121 through precision processing, a predetermined coupling groove 122a pattern or coupling protrusion 122c pattern can be formed separately relative to the Invar sheet and welded to the first-level frame 121.

[0112] In this case, the coupling groove 122 a or the coupling groove 122 d may be easily processed, and when the coupling groove 122 a or the coupling protrusion 122 c is damaged during a deposition process, it may be replaced.

[0113] On the other hand, the first clamper 111 and the second clamper 113 can grasp a plurality of CNT fiber support wires 110 at a time, so that the plurality of CNT fiber support wires 110 are spaced apart and positioned correspondingly to the coupling protrusion 122b or the coupling protrusion 122c, and the plurality of CNT fiber support wires 110 are set in the coupling groove 122a or the coupling groove 122d.

[0114] The first clamper 111 and the second clamper 113 may have a receiving hole for receiving a plurality of CNT fiber supporting wires 110 and clamping portions 111 a and 111 b , respectively. The receiving hole may receive a plurality of CNT fiber supporting wires 110 , and the clamping portions 111 a and 111 b may be formed to have a spacing corresponding to the partition wall 143 between the receiving holes.

[0115] The width of the coupling groove 122a may be made to have the required spacing for easy coupling with the CNT fiber support wire 110, may be made to correspond to the diameter of the CNT fiber support wire 110, and may be formed to be larger than the diameter of the CNT fiber support wire 110 so that the CNT fiber support wire 110 can be more easily coupled.

[0116] The depth of the coupling groove 122 a is preferably set to be equal to or greater than the diameter of the CNT fiber supporting wire 110 so that the CNT fiber supporting wire 110 is not exposed from the coupling groove 122 a .

[0117] This is because if the depth of the coupling groove 122a is equal to or smaller than the diameter of the CNT fiber support wire 110, the CNT fiber support wire 110 may affect the unit mask 140 in contact therewith due to its superior strength and elasticity.

[0118] In the structure described above, where CNT fiber support wire 110 is inserted into coupling groove 122a of first support portion 122, when multiple unit masks 140 are secured above frame 120, the unit masks 140 do not rise in the area where CNT fiber support wire 110 is located, but remain parallel along their lengths. Therefore, during deposition, when a substrate is placed on multiple unit masks 140, the adhesion between the unit masks 140 and the substrate is improved, further enhancing deposition accuracy.

[0119] like Figure 6bAs shown, in the frame modules 200A and 200B of the modified example of the first embodiment according to another aspect of the present invention, the above-mentioned coupling groove 122a can be formed into an inverted trapezoidal shape having an upper portion larger than the diameter of the CNT fiber support wire 110, so that after the CNT fiber support wire 110 is accommodated inside the above-mentioned coupling groove 122a so that the CNT fiber support wire 110 is fixed to the first support part 122, the outer diameter of the CNT fiber support wire 110 is not exposed above the upper surface of the first support part 122.

[0120] In addition, during the deposition process, when the substrate is placed onto a plurality of unit masks 140, the above-mentioned coupling groove 122a can be formed into a trapezoidal shape having an upper portion equal to or greater than the diameter of the CNT fiber support wire 110 and a lower portion formed to be larger than the upper portion, so as to improve the fit between the unit mask 140 and the substrate, thereby further improving the deposition accuracy.

[0121] Of course, when the cross section of the coupling groove 122 a has a vertical rectangular shape, it is preferably formed to be equal to or larger than the diameter of the CNT fiber supporting wire 110 .

[0122] Will refer to Figure 7a and Figure 7b A frame module for depositing a thin film and a method for manufacturing the same according to a second embodiment and its modified embodiments, which utilize CNT fiber support wires having excellent mechanical properties, will be described.

[0123] Figure 7a is a combined perspective view of a frame module according to a second embodiment of another aspect of the present invention, with cross-sectional views taken along lines AA' and BB', and Figure 7b is based on Figure 7a A combined three-dimensional diagram of a frame module of a variant embodiment.

[0124] like Figure 7a As shown, as can be seen from the A-A' section, in the frame modules 200A and 200B according to the second embodiment, for a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121, the first clamper 111 can grasp one end of the above-mentioned CNT fiber support wire 110 to put it in a stretched state, and the second clamper 113 can move downward along the side surface 121a of the first-stage frame 121 while grasping the other end of the above-mentioned CNT fiber support wire 110 to put it in a stretched state, thereby increasing the stretching force.

[0125] At this time, the second stage frame 123 may provide a space in which the first gripper 111 and the second gripper 113 may operate.

[0126] Similar to the frame modules 200A and 200B according to the first embodiment, in the frame modules 200A and 200B according to the second embodiment, the CNT fiber support wire 110 whose two ends are stretched by the above-mentioned first clamper 111 and the above-mentioned second clamper 113 can be respectively inserted into the coupling groove 122a formed indented relative to the above-mentioned pair of first support parts 122, or can be inserted into the coupling groove 122a formed on the first support part 122 by the coupling protrusion 122b formed protruding relative to the pair of first support parts 122.

[0127] like Figure 7b As shown, as can be seen from the A-A' section, in the frame modules 200A and 200B according to the variant embodiment of the second embodiment, for a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121, the first clamper 111 and the second clamper 113 can move the two ends of the above-mentioned CNT fiber support wire 110 downward along the two side surfaces 121a and 121b of the first-stage frame 121 while stretching and grasping the two ends of the above-mentioned CNT fiber support wire 110, thereby further increasing the tensile force.

[0128] The CNT fiber supporting wire 110 may be positioned by the first clamper 111 and the second clamper 113 , and may be inserted into the coupling grooves 122 a formed on the pair of first supporting parts 122 .

[0129] Will refer to Figure 8a and Figure 8b A frame module for depositing a thin film and a method for manufacturing the same according to a third embodiment and its modified embodiments, which utilize CNT fiber support wires having excellent mechanical properties, will be described.

[0130] Figure 8a is a combined perspective view of a frame module according to a third embodiment of another aspect of the present invention, with cross-sectional views taken along lines AA' and BB', and Figure 8b is based on Figure 8a A combined three-dimensional diagram of a frame module of a variant embodiment.

[0131] As can be seen from the A-A' cross section, in the frame modules 200A and 200B according to the variant embodiment of the third embodiment, for a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121, the first clamper 111 and the second clamper 113 can move the two ends of the CNT fiber support wire 110 downward along the side surfaces 121a and 121b of the first-stage frame 121 while the two ends of the CNT fiber support wire 110 are stretched and grasped, and the two ends of the CNT fiber support wire 110 can be welded and fixed along the side surfaces 121a and 121b of the first-stage frame 121 by the welding component 115 using a laser welding machine 117 while the first clamper 111 and the second clamper 113 maintain tension at the third support portion 126 of the second-stage frame 123.

[0132] Since the CNT fiber support wire 110 has excellent mechanical properties and is thin, it can be more firmly attached along both side surfaces 121 a and 121 b of the first-stage frame 121 .

[0133] Since the CNT fiber support wire 110 and the frame 120 are made of different types of materials, they are welded using a welding component 115 and a laser welding machine 117, but various other welding methods can be used, and a clamp can be provided to grasp the welding component 115 and transfer it to the welding location.

[0134] like Figure 8b As shown, as can be seen from the A-A' cross section, in the frame modules 200A and 200B according to the variant embodiment of the third embodiment, for a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121, in a state in which the two ends of the above-mentioned CNT fiber support line 110 are stretched by the first clamper 111 and the second clamper 113 and are bent downwardly and fixed relative to the second-stage frame 123, when the welding of the two ends of the above-mentioned CNT fiber support line 110 is completed by the welding component 115, the first clamper 111 and the second clamper 113 can be separated from the two ends of the above-mentioned CNT fiber support line 110.

[0135] Will refer to Figure 9a and Figure 9b A frame module for thin film deposition and a method for manufacturing the same according to a fourth embodiment and its modified embodiments, which utilize CNT fiber support wires having excellent mechanical properties, will be described.

[0136] Figure 9a is a combined perspective view of a frame module according to a fourth embodiment of another aspect of the present invention, with cross-sectional views taken along lines AA' and BB', and Figure 9b2 are views showing modified embodiments thereof.

[0137] like Figure 9a As shown, as can be seen from the A-A' section, in the frame module 200C according to the fourth embodiment, only two welding parts 115 can be set for the two side surfaces 121a and 121b of a pair of first supporting parts 122 arranged opposite to each other across the open part 120a of the first-level frame 121, thereby reducing the use of expensive welding parts 115, and only the above-mentioned two welding parts 115 can be welded with the laser welding machine 117, so that the welding operation efficiency can be improved.

[0138] To this end, in the frame modules 200A and 200B according to the fourth embodiment, the two ends of the CNT fiber support line 110 can be stretched by the above-mentioned first clamper 111 and the above-mentioned second clamper 113, determine the starting position on the above-mentioned pair of first support parts 122 and insert from the front end of the first pair of coupling grooves 122a formed on the above-mentioned pair of first support parts 122, and then insert from the end of the first pair of coupling grooves 122a along the end of the first pair of coupling protrusions 122b into the end of the adjacent second pair of coupling grooves 122a while being surrounded and stretched, that is, arranged continuously in a zigzag manner, so as to be inserted into the last pair of coupling grooves 122a. In this state, the starting position and the end position can be welded by welding parts.

[0139] like Figure 9b As shown, as can be seen from the A-A' section, in the frame module 200D according to the variant embodiment of the fourth embodiment, a plurality of welding parts 115 can be provided for the two side surfaces 121a, 121b of a pair of first supporting parts 122 arranged opposite to each other across the open part 120a of the first-level frame 121.

[0140] The above-mentioned multiple welding components 115 can be spaced apart from each other, and the welding components 115 can be arranged for the two ends of the CNT fiber support line 110 arranged corresponding to the mask pattern hole portion 141 or the unit and the two side surfaces 121a and 121b of the first-level frame 121, and can be spaced apart and welded using a laser welding machine 117.

[0141] The welding member 115 may be formed of the same material as the first stage frame 121 , and may be manufactured as a continuous strip-shaped sheet-type welding member 115 ′ and spot-welded at at least two locations.

[0142] To this end, in the frame modules 200A, 200B according to the variant embodiment of the fourth embodiment, the CNT fiber support wire 110 can be cut into multiple pieces taking into account the length of the above-mentioned frame modules 200A, 200B in the X direction or Y direction, the length of the side surfaces 121a, 121b of the first-level frame 121, and the length of the two ends that can be clamped by the above-mentioned first clamper 111 and the above-mentioned second clamper 113.

[0143] The first clamp 111 and the second clamp 113 may further include male and female parts 111c and 111d formed with male and female threads (see Figure 6b ), and the tensile force at both ends of the CNT fiber support line 110 can be finely adjusted by moving the male and female parts 111c, 111d along the threads 111ca, 111da.

[0144] Will refer to Figure 10 A method for stretching and bonding a CNT fiber support line of a mask assembly for depositing a thin film of a flat panel display device according to another aspect of the present invention is described in detail.

[0145] Figure 10 This is a flow chart illustrating a method for stretching and bonding a CNT fiber support line of a mask assembly for depositing a thin film of a flat panel display device according to another aspect of the present invention.

[0146] Reference Figure 10 In another aspect of the present invention, in a method for stretching and bonding a CNT fiber support line of a mask assembly for depositing a thin film of a flat panel display device, the CNT fiber support line 110 is cut into a plurality of pieces, taking into account the length of the frame modules 200A and 200B in the X direction or the Y direction, the length of the side surfaces 121a and 121b of the first-level frame 121, and the length of the two ends that can be clamped by the first clamper 111 and the second clamper 113, and the CNT fiber support lines 110 are arranged in parallel in the X direction or the Y direction of the frame modules 200A and 200B (S10).

[0147] Next, at the second-stage frame 123 below the first-stage frame 121, the two ends of the CNT fiber support wire 110 are grasped by the first clamper 111 and the second clamper 113 and a tensile force is applied so that the two ends of the CNT fiber support wire 110 can be stretched and fixed to a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121 (S20).

[0148] The CNT fiber support wire 110, whose two ends are stretched by the first clamper 111 and the second clamper 113, is positioned on the pair of first support parts 122, respectively, and inserted into the coupling grooves 122a formed on the pair of first support parts 122 (S30).

[0149] For a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121, the first clamper 111 can grasp one end of the CNT fiber support line 110 to put it in a stretched state, and the second clamper 113 can move downward along the side surface 121a of the first-stage frame 121 while grasping the other end of the CNT fiber support line 110 to put it in a stretched state, thereby increasing the stretching force (S40).

[0150] For a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121, the first clamper 111 and the second clamper 113 can stretch and grasp the two ends of the CNT fiber support line 110 so that the two ends of the CNT fiber support line 110 move downward along the two side surfaces 121a and 121b of the first-stage frame 121 and are stretched (S50).

[0151] For a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121, the first clamper 111 and the second clamper 113 can move the two ends of the CNT fiber support line 110 downward along the two side surfaces 121a and 121b of the first-stage frame 121 while the two ends of the CNT fiber support line 110 are stretched and grasped, and while the first clamper 111 and the second clamper 113 maintain tension at the third support portion 126 of the second-stage frame 123, the two ends of the CNT fiber support line 110 can be welded and fixed along the two side surfaces 121a and 121b of the first-stage frame 121 by using the welding component 115 through the laser welding machine 117 (S60).

[0152] With respect to a pair of first support portions 122 arranged opposite to each other across the open portion 120a of the first-stage frame 121, when both ends of the CNT fiber support line 110 are stretched by the first clamper 111 and the second clamper 113 and bent downwardly and fixed relative to the second-stage frame 123, when the welding of both ends of the CNT fiber support line 110 is completed using the welding component 115, the first clamper 111 and the second clamper 113 can be separated from both ends of the CNT fiber support line 110 (S70).

Claims

1. A frame module used in a mask assembly for depositing a thin film of a flat panel display device, characterized in that: include: A first-stage frame is composed of first supporting portions arranged opposite to each other in a length direction of the unit mask and second supporting portions arranged opposite to each other in a width direction of the unit mask; a second-stage frame, forming a step with the first-stage frame and consisting of a third supporting portion parallel to the first supporting portion and a fourth supporting portion parallel to the second supporting portion; as well as At least two CNT fiber support lines are configured in such a manner that the CNT fibers are stretched using the second-level frame and thereby coupled to a coupling groove formed in the first supporting portion or the second supporting portion of the first-level frame to support the partition walls between the multiple pattern hole portions for deposition of the unit mask or the partition walls between units formed by aggregation of at least two of the pattern hole portions.

2. The frame module for use in a mask assembly for depositing a thin film of a flat panel display device according to claim 1, wherein: Also includes: A first clamper and a second clamper, for grasping and stretching both ends of the CNT fiber support wire with respect to the first support portion or the second support portion of the first-stage frame; as well as A welding component is used to weld both ends of the CNT fiber support wire to the side surface of the first support portion or the second support portion of the first-stage frame.

3. The frame module used in a mask assembly for depositing a thin film of a flat panel display device according to claim 2, wherein: The first clamper and the second clamper include a plurality of CNT fiber support wire clamping parts so that the CNT fiber support wire can be positioned relative to the plurality of coupling grooves and inserted and coupled into the plurality of coupling grooves. The CNT fiber support wire clamping parts include a threaded fine adjustment mechanism capable of finely adjusting the length of both ends of the CNT fiber support wire.

4. The frame module used in a mask assembly for depositing a thin film of a flat panel display device according to claim 2, wherein: The coupling groove is recessed relative to the first supporting portion or the second supporting portion of the first-level frame, or is formed between coupling protrusions formed on the first supporting portion or the second supporting portion, or is formed in a manner that couples the coupling groove piece to the first supporting portion or the second supporting portion.

5. The frame module used in a mask assembly for depositing a thin film of a flat panel display device according to claim 4, wherein: The distance between the coupling grooves is made to be a predetermined interval, the width of the coupling groove is made to be equal to or greater than the diameter of the CNT fiber support wire, and the depth of the coupling groove is made to be equal to or greater than the diameter of the CNT fiber support wire.

6. The frame module used in a mask assembly for depositing a thin film of a flat panel display device according to claim 4, wherein: The cross-sectional shape of the coupling groove is formed into a rectangular shape, an inverted trapezoidal shape with a larger upper portion, or a trapezoidal shape.

7. The frame module used in a mask assembly for depositing a thin film of a flat panel display device according to claim 2, wherein: One of the first clamper and the second clamper grasps one end of the CNT fiber support wire, and the other of the first clamper and the second clamper moves the other end of the CNT fiber support wire downward along the side surface of the first-stage frame and welds and fixes both ends of the CNT fiber support wire with the welding part.

8. The frame module used in a mask assembly for depositing a thin film of a flat panel display device according to claim 2, wherein: While the two ends of the CNT fiber support wire are grasped and stretched by the first clamper and the second clamper, the two ends of the CNT fiber support wire are moved downward along the side surface of the first-level frame, and the two ends of the CNT fiber support wire are welded and fixed by the welding part.

9. The frame module used in a mask assembly for depositing a thin film of a flat panel display device according to claim 2, wherein: The CNT fiber support wire is connected in a zigzag manner from the first coupling groove to the last coupling groove of the first-level frame, and only the starting position of the first coupling groove and the ending position of the last coupling groove of the first-level frame are welded and fixed by the welding part.

10. The frame module used in a mask assembly for depositing a thin film of a flat panel display device according to claim 2, wherein: For the first and last coupling grooves of the first-level frame, the CNT fiber support wire is welded and fixed using the welding component, respectively, wherein the welding component is sheet-shaped, and through the welding component, one end of the CNT fiber support wire is spot welded to the side surface of the first-level frame.

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